200800764 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種傳動滾軸校準系統及方法，尤其 是關於一種用於液晶顯示器製程中的大尺寸玻璃基板 運送時，所使用的大長度傳動滾軸的軸心直線度校準 系統；及關於一種應用於前述系統之校準方法。 Φ 【先前技術】 • 液晶顯示器產業隨著製程技術的快速發展，不斷 ^ 向大尺寸玻璃投入研發，例如7.5代的玻璃基板尺寸為 1950mmx2250mm，在液晶玻璃的製程中，運送玻璃基 板的傳動滾轴則需使用大長度傳動滾軸，例如長度為 25⑽mm以上。例如美國專利公告號6，110,282中揭示， 半導體晶圓及液晶顯示器玻璃基板的鍍膜或光阻製程 中，以傳動滚抽作為載運的工具。而該傳動滾軸製作 完成後，依產業使用需求利用無心研磨機或外圓研磨 _ 機研磨該傳動滾轴的外圓，使其得到高精密度的圓筒 型傳動滾軸，例如中華民國專利公告號317788中揭 示，將直圓筒工件利用磨削砂輪旋轉磨削工件的直 徑，進行高精度加工，而得到高精密的圓筒型傳動滾 轴0 然而當傳動滾軸長度高達2500mm以上，每一傳 動滾軸在轉動時產生的徑向位移偏擺量需小於1〇微米 以下，否則被運送的玻璃基板則會因相鄰傳動滚轴轉 動時的徑向位移偏擺量的幅度過大而造成玻璃基板因 5 200800764 受擠壓而破裂，當傳動滾軸因長度增長而重量增加， 則轉動時所產生的徑向位移偏擺量將大幅提高。隨著 ^動滾軸長度增加，製作完成後的傳動滾軸的軸心直 線度偏差越大，由於軸心直線度的初始偏差量，即使 經由热心研磨機磨削加工後，傳動滾軸轉動時的徑向 位移偏擺量仍不易達到10微米以下。 【發明内容】 本發明之目的在提供一種傳動滾軸校準系統，用 ^校準傳動_的軸心直線度，使其#傳動滾軸轉動 時，其徑向位移的偏擺量符合產業需求。 壯達到上述目的之傳動滾軸校準系統，包括：支撐 衣，，其用於支撐一傳動滾軸；位移感測裝置，其用 於里測該傳動滾軸徑向位移的偏擺量；施力裝置，其 =以於，位移感測裝置所量測之該傳動滾軸之徑向ς 牙夕偏I里的方向處施於一反向力，·及外徑研磨裝置， 其用於研磨該傳動滾轴的外徑。 ^較佳地，前述支撐裝置、該位移感測裝置及該施 置配置於該傳動滚軸的徑向方向，該支撐裝置與 該位移感測裝置相對於該傳動滾軸對向配置，該位^ 感濟I裝置與該施力裝置相對於該傳動滾軸同向配置， 且該外徑研磨襞置配置於該傳動滾軸軸向方向上。 較佳地，前述支撐裝置包括至少兩個支撐元件， 其用以支撐並固定該傳動滾軸。 較佳地，前述支撐元件具有滾輪，其用於使該傳 6 200800764 動滾軸於其上可轉動。 置 較佳地，前述位移感測裝置為接觸式位移感測裝 裝置 較佳地，前述位移感測裝置為非接觸式位移感測 〇 本發明之另一目的在提供一種傳動滾軸校準方 法，用f提供傳動滾軸周期性校準，增加該傳動滾軸 ，使用可中，降低生產線上高頻率更換傳動滾軸的成 本。 達到上述目的之傳動滾軸校準方法，包含：（ 轉2傳動滾轴；⑴待該傳動滾軸產生一徑向位移偏 擺置後’使該傳動滾軸呈靜止狀態；⑴量測該傳動滾 軸之控向位移偏擺量；（d)施力於該傳動滾軸產生徑 =偏擺量之ΐ;及（e)量測該施力處之傳動滾軸 之徑向位移偏擺量。 之步rf地’前述（a)步驟至（e)步驟為—重覆實施 較佳地，於重覆實施前述（a)步驟至（e)步驟後， 進-步包含-研磨步驟，用以研磨域實施前a 步驟至（e)步驟後符合規格之該傳動滾軸。 專動滾軸上可選擇複數個預定位置 處，重復貫施丽述（a)步驟至步驟。 前述傳動滾軸校準系統與方法之立允 心傳動滾軸或實心傳動滾軸。 、彳、 、、、工 本發明功效在於以傳動滾轴校準系統及方法校準 7 200800764 傳動滾轴的軸心直線度，使其當傳動滾軸於生產線上 轉動時，其徑向位移的偏擺量符合產業需求，且置於 傳動滾轴上的被傳送製品不會因為相鄰傳動滾軸徑向 位移的偏擺量過大而導致破壞。傳動滾軸經長時間使 用後，仍可依本發明之傳動滾軸校準系統及方法提供 傳動滾軸周期性校準，增加該傳動滾軸的使用壽命， 降低生產線上高頻率更換傳動滾軸的成本。 本發明之前述目的或特徵，將依據後附圖式加以 詳細說明，惟需明瞭的是，後附圖式及所舉之例，祇 是做為說明而非在限制或縮限本發明。 【實施方式】 如第一圖所示，本發明實施例所使用的傳動滾軸 為空心傳動滚轴，本發明之傳動滾軸校準系統1包括： 支撐裝置100，其用於支撐一傳動滾軸5 ;位移感測裝 置200，其用於量測該傳動滾軸5徑向位移的偏擺量； 施力裝置400,其用以於該位移感測裝置所量測之該傳 動滾轴5之控向位移偏擺量的方向處施於^一反向力； 及外徑研磨裝置600,其用於研磨該傳動滾軸5的外徑。 其中第一圖中之該支撐裝置100、該位移感測裝置 200及該施力裝置400配置於該傳動滾軸5的徑向方 向，該支撐裝置100與該位移感測裝置200相對於該 傳動滾軸5對向配置，該位移感測裝置200與該施力 裝置4⑽相對於該傳動滾轴5同向配置，且該外徑研 磨裝置600配置於該傳動滾軸5轴向方向上。 8 200800764 首先’將製作完成的傳動褒輪5置 的第一支樓元件110及第二切元件12〇上，支撐傳 動滾轴5並固定於其上，如第一同沉—_ ^ 不〜圖所不。第一支撐元 件110具有第一滚輪111及第'、奋认m… π〜滾輪112，第二支撐元 件120具有第一滚輪121及第—♦认^ 木〜滾輪122,可使支撐於 其上的傳動滾軸5於該滾輪（in 、 、112、121、122)上隸 動。其中，前述該支撐元件110及支撐元件200800764 IX. INSTRUCTIONS OF THE INVENTION: TECHNICAL FIELD The present invention relates to a transmission roller calibration system and method, and more particularly to a large length transmission for use in transporting large-sized glass substrates for use in a liquid crystal display process. A shaft straightness calibration system for a roller; and a calibration method applied to the aforementioned system. Φ [Prior Art] • With the rapid development of process technology, the liquid crystal display industry has been investing in large-size glass. For example, the 7.5-generation glass substrate has a size of 1950mmx2250mm. In the process of liquid crystal glass, the transmission roller for transporting glass substrates A large length drive roller is required, for example, a length of 25 (10) mm or more. For example, in U.S. Patent No. 6,110,282, in the coating or photoresist process of semiconductor wafers and liquid crystal display glass substrates, drive rolling is used as a carrier tool. After the production of the transmission roller is completed, the outer circumference of the transmission roller is ground by a centerless grinding machine or an external grinding machine according to industrial use requirements, so that a high-precision cylindrical transmission roller is obtained, for example, the patent of the Republic of China. According to the announcement No. 317788, the diameter of the workpiece is rotated by a grinding wheel using a grinding wheel to perform high-precision machining, and a high-precision cylindrical transmission roller is obtained. However, when the length of the transmission roller is as high as 2500 mm or more, The radial displacement yaw generated by a transmission roller during rotation should be less than 1 〇 micron, otherwise the glass substrate to be transported will be caused by the excessive amount of radial displacement yaw when the adjacent drive roller rotates. The glass substrate is broken due to the extrusion of 5 200800764. When the weight of the transmission roller increases due to the length, the amount of radial displacement yaw generated during rotation will be greatly increased. As the length of the moving roller increases, the deviation of the axial straightness of the transmission roller after the completion of the production is larger, and the initial deviation of the axial straightness is even after the grinding of the driving roller after the grinding by the thermal grinder The radial displacement yaw amount is still not easy to reach below 10 microns. SUMMARY OF THE INVENTION It is an object of the present invention to provide a transmission roller calibration system that aligns the axial straightness of the transmission _ so that when the # drive roller rotates, the yaw amount of the radial displacement conforms to the industrial demand. The transmission roller calibration system for achieving the above purpose comprises: a support garment for supporting a transmission roller; and a displacement sensing device for measuring a yaw amount of the radial displacement of the transmission roller; a device for applying a reverse force in a direction in which the radial direction of the drive roller of the drive roller is measured, and an outer diameter grinding device for grinding the The outer diameter of the drive roller. Preferably, the supporting device, the displacement sensing device and the applying portion are disposed in a radial direction of the driving roller, and the supporting device and the displacement sensing device are oppositely disposed with respect to the driving roller, the position ^ The susceptor I device and the urging device are disposed in the same direction with respect to the transmission roller, and the OD grinding device is disposed in the axial direction of the transmission roller. Preferably, the aforementioned supporting device comprises at least two supporting members for supporting and fixing the transmission roller. Preferably, the aforementioned support member has a roller for rotating the transmission roller 200810764 thereon. Preferably, the displacement sensing device is a contact displacement sensing device. Preferably, the displacement sensing device is a non-contact displacement sensing. Another object of the present invention is to provide a driving roller calibration method. Use f to provide periodic calibration of the drive roller, increase the drive roller, and use it to reduce the cost of replacing the drive roller at high frequency on the production line. The driving roller calibration method for achieving the above purpose comprises: (turning 2 transmission roller; (1) after the transmission roller generates a radial displacement biasing to make the transmission roller be in a stationary state; (1) measuring the transmission roller The steering yaw amount of the shaft is controlled; (d) the force is applied to the transmission roller to generate a diameter=the yaw amount; and (e) the radial displacement yaw amount of the transmission roller at the urging force is measured. Step (a) to (e) are repeated - preferably, after repeatedly performing the above steps (a) to (e), the step-by-step-grinding step is used for grinding The transmission roller of the specification conforms to the specification after step a to step (e) of the field. The specific roller can be selected at a plurality of predetermined positions, and the steps (a) to the steps are repeated. The transmission roller calibration system and method The function of the invention is to drive the roller or solid drive roller. The function of the invention is to calibrate the shaft straightness of the transmission roller with the transmission roller calibration system and method. When the production line rotates, the yaw amount of its radial displacement meets the needs of the industry. And the conveyed product placed on the transmission roller will not be damaged due to the excessive yaw amount of the radial displacement of the adjacent transmission roller. After the transmission roller is used for a long time, the transmission roller according to the invention can still be used. The calibration system and method provide periodic calibration of the drive roller, increase the service life of the drive roller, and reduce the cost of replacing the drive roller with high frequency on the production line. The foregoing objects or features of the present invention will be described in detail based on the following figures. It should be understood that the following drawings and examples are merely illustrative and not limiting or limiting the invention. [Embodiment] As shown in the first figure, the transmission used in the embodiment of the present invention The roller is a hollow drive roller, and the drive roller calibration system 1 of the present invention comprises: a support device 100 for supporting a drive roller 5; and a displacement sensing device 200 for measuring the drive roller 5 diameter The yaw amount of the displacement; the urging device 400 is configured to apply a reverse force to the direction of the steering displacement yaw of the transmission roller 5 measured by the displacement sensing device; A diameter grinding device 600 for The outer diameter of the drive roller 5 is milled. The support device 100, the displacement sensing device 200 and the force applying device 400 in the first figure are disposed in a radial direction of the drive roller 5, and the support device 100 and the support device 100 The displacement sensing device 200 is disposed opposite to the transmission roller 5, the displacement sensing device 200 and the urging device 4 (10) are disposed in the same direction with respect to the transmission roller 5, and the outer diameter grinding device 600 is disposed on the transmission roller The shaft 5 is axially oriented. 8 200800764 Firstly, the first branch member 110 and the second cutting element 12 disposed on the completed drive wheel 5 are supported, and the drive roller 5 is supported and fixed thereto, as in the first The same support element 110 has a first roller 111 and a 'th, m" m π ~ roller 112, the second support element 120 has a first roller 121 and the first ♦ The wood-roller 122 allows the drive roller 5 supported thereon to be slid on the rollers (in, 112, 121, 122). Wherein the support member 110 and the support member
支樓裝置100上的滑軌150及滑執⑽上移動（參考第 一圖）。 該位移5測裝置可為接觸錢移感測裝置 21〇(蒼考第二圖），例如LVDT(Linear v〇咏The slide rail 150 and the slide (10) on the branch unit 100 are moved (refer to the first figure). The displacement 5 measuring device can be a contact money sensing device 21〇 (the second picture of Cang Kao), such as LVDT (Linear v〇咏)
Dlfferential Transducer)位移傳感器，或非接觸式位移感 測裝置220(參考第四®)，例如雷射位料或光纖式位 移計。該傳動滚軸5在支撐元件（n〇、12〇)上的滾輪 (m、H2、121、122)上轉動，而產生—徑向位移偏^ 量’該接觸式位移感測裝置210或非接觸式位移感測 裝置220，可量測傳動滚軸5徑向位移的偏擺量。 位移感測裝置200可配置於該傳動滾軸5 一預定 位置上，同時施力裝置400亦配置於該傳動滾軸5另 一預定位置上，相鄰於位移感測裝置2〇〇，參考第五 圖。其中位移感測裝置2 0 〇，在本實施例中為接觸式位 移感測裝置210 ’該接觸式位移感測裝置210的探針接 觸傳動滾軸5後進行歸零。當該傳動滾軸5開始轉動， 至該傳動滾轴產生一徑向位移偏擺量後靜止，量測傳 動滾轴5控向位移的偏擺量§ 1 (參考第六圖）；此時，將 200800764Dlfferential Transducer) or non-contact displacement sensing device 220 (refer to the fourth®), such as a laser or fiber optic shift meter. The drive roller 5 rotates on the rollers (m, H2, 121, 122) on the supporting members (n, 12, 12) to generate a radial displacement bias 'the contact displacement sensing device 210 or non- The contact displacement sensing device 220 can measure the yaw amount of the radial displacement of the transmission roller 5. The displacement sensing device 200 can be disposed at a predetermined position of the transmission roller 5, and the force applying device 400 is also disposed at another predetermined position of the transmission roller 5, adjacent to the displacement sensing device 2, reference Five maps. The displacement sensing device 20 〇, in the present embodiment, is the contact displacement sensing device 210 ′. The probe of the contact displacement sensing device 210 contacts the transmission roller 5 and then returns to zero. When the transmission roller 5 starts to rotate, until the transmission roller generates a radial displacement yaw amount and then rests, the yaw amount of the control roller 5 is controlled to be § 1 (refer to the sixth figure); Will 200800764
所量測之該傳動滾 一反向力，反向偏 杈一徑向位移偏擺量δ2(表考第 裝置働，依傳動滾軸5的相 再量測該傳動滾軸5的該 考第七圖），之後鬆開該施力 的材料彈性回復至初始位置 的該徑向位移偏擺量δΐ是否The measured drive roller has a reverse force, and the reverse bias is a radial displacement yaw amount δ2 (the meter test device 働, the measurement of the drive roller 5 according to the phase of the drive roller 5) Figure 7), after the elastic force of the material applied to release the applied force returns to the initial position, the radial displacement yaw amount δΐ
中’上述該位移感測裝置200於傳動滾轴5的 ^里疋位置’與该施力裂置_於傳動滾轴5的預定 位置可為同-位置’或為相鄰之位置點。 忒外徑研磨裝置6〇〇以研磨輪(61〇、62〇)研磨傳動 滾軸5的外徑(參考第八圖)，完成傳動滾軸 5的研磨加 工後’置於支撐元件（110、120)上轉動，以該接觸式位 移感測裝置21G於該預定位置處量測傳動滾軸5徑向 位私的偏擺ιδί’，記錄該徑向位移的偏擺量δ1，，完成 傳動滾軸5校準程序。 如第九圖所示，本發明之傳動滾軸5校準方法包 ^ · (S1)在支撐元件（no、12〇)上轉動傳動滾軸5 ; (S2) 該傳動滾軸5產生一徑向位移偏擺量51後靜止；（S3) 位移感測裝置200量測該傳動滾軸5的該徑向位移偏 擺量δΐ ; (S4)施力裝置400往該徑向位移偏擺量&反 向轭力，（S5)位移感測裝置200量測該傳動滾軸5的 該徑向位移偏擺量δΐ是否符合規格；若未符合規格， 則重復施作步驟(S1)至（S5)，若符合規格，則（S6)研磨 10 200800764 該傳動滾軸5的外徑，完成傳動滾轴5校準程序。 由於傳動滚軸5若為大長度的傳動滾轴5，僅量測 一預定位置點的徑向位移的偏擺量δΐ是不足的，因此 可依傳動滾軸的長度選擇複數個預定位置處（例如位置 51至57)，參考第十圖，以該位移感測裝置200量測傳 動滾軸徑向位移的偏擺量δΐ，且該施力裝置400於該 複數個預定位置處(位置51至57)，逐一往該位移感測 裝置量測到傳動滾軸5的徑向位移偏擺量δΐ至δ7的方 向反向施力，如此重複施作步驟(S1)至（S5)，當各徑向 位移的偏擺量δΐ至δ7均小於10微米以下，符合液晶 顯示產業對傳動滾軸的需求規格時，再以該外徑研磨 裝置600研磨傳動滾軸5的外徑。 該外徑研磨裝置600完成傳動滾轴5的研磨加工 後，置於支撐單元（110、120)上轉動，以該位移感測裝 置200於該預定位置處量測傳動滾軸5徑向位移的偏 擺量δΓ至δ7’，記錄該徑向位移的偏擺量δΓ至δ7’，可 完成該傳動滾軸的校準報告供使用者參考。 本發明另一實施例的傳動滾軸為實心傳動滾軸， 其傳動滾軸校準系統及方法均與前述相同。 在詳細說明本發明的較佳實施例之後，熟悉該項 技術人士可清楚的瞭解，在不脫離下述申請專利範圍 的與精神下進行各種變化與改變，且本發明亦不受限 於說明書中所舉實施例的實施方式。 200800764 【圖式簡單說明】 第一圖係顯示本發明傳動滾軸校準系統之立體 圖， 第二圖係顯示本發明傳動滾轴校準系統之支撐元 件的立體圖； 第三圖係顯示本發明實施例之接觸式位移感測裝 置之不意圖， 第四圖係顯示本發明實施例之非接觸式位移感測 裝置之示意圖； 第五圖為實施例中，接觸式位移感測裝置於傳動 滾轴一預定位置上配置的之示意圖； 第六圖為實施例中接觸式位移感測裝置量測傳動 滾轴徑向位移的之示意圖； 第七圖為實施例中施力裝置往傳動滾轴的徑向位 移偏擺量的方向反向施力的之示意圖； 第八圖為實施例中外徑研磨裝置的之示意圖； 第九圖為根據本發明具體實施例的傳動滾轴校準 方法的流程圖；及 第十圖為實施例中傳動滾轴複數個預定位置點進 行校準方法之示意圖。 【主要元件符號說明】 1 傳動滾轴校準系統 100 支撐裝置 110 支撐元件 111 滾輪. 12 200800764 112 滾輪 120 支撐元件 121 滾輪 122 滾輪 150 滑執 160 滑執 200 位移感測裝置 210 接觸式位移感測裝置 220 非接觸式位移感測裝置 400 施力裝置 5 傳動滾轴 600 外徑研磨裝置 610 研磨輪 620 研磨輪The position of the above-described displacement sensing device 200 at the drive roller 5 and the predetermined position of the force transmission split 5 may be the same position or adjacent position.忒The outer diameter grinding device 6 研磨 grinds the outer diameter of the transmission roller 5 with the grinding wheel (61 〇, 62 〇) (refer to the eighth figure), after the grinding process of the transmission roller 5 is completed, and the support member is placed (110, 120) rotating upward, measuring the radial deflection of the transmission roller 5 at the predetermined position by the contact displacement sensing device 21G, recording the yaw amount δ1 of the radial displacement, and completing the transmission roller Axis 5 calibration procedure. As shown in the ninth figure, the drive roller 5 calibration method of the present invention includes (S1) rotating the drive roller 5 on the support member (no, 12 〇); (S2) the drive roller 5 generates a radial direction The displacement yaw amount 51 is stationary; (S3) the displacement sensing device 200 measures the radial displacement yaw amount δ 该 of the transmission roller 5; (S4) the urging device 400 applies the radial displacement yaw amount & The reverse yoke force, (S5) the displacement sensing device 200 measures whether the radial displacement yaw amount δΐ of the transmission roller 5 conforms to the specification; if the specification is not met, the application steps (S1) to (S5) are repeated. If it meets the specifications, (S6) Grinding 10 200800764 The outer diameter of the drive roller 5 completes the drive roller 5 calibration procedure. Since the transmission roller 5 is a large-length transmission roller 5, only the yaw amount δΐ of measuring the radial displacement of a predetermined position point is insufficient, so that a plurality of predetermined positions can be selected according to the length of the transmission roller ( For example, the positions 51 to 57), with reference to the tenth figure, the displacement amount δΐ of the radial displacement of the transmission roller is measured by the displacement sensing device 200, and the force applying device 400 is at the plurality of predetermined positions (positions 51 to 57). ), the displacement sensing device measures the direction of the radial displacement yaw amount δ ΐ to δ 7 of the transmission roller 5, and repeats the application steps (S1) to (S5), respectively. When the yaw amount δ ΐ to δ 7 of the displacement is less than 10 μm or less, and the liquid crystal display industry meets the requirements for the transmission roller, the outer diameter of the drive roller 5 is polished by the outer diameter grinding device 600. After the grinding process of the transmission roller 5 is completed, the outer diameter grinding device 600 is rotated on the supporting unit (110, 120), and the displacement sensing device 200 measures the radial displacement of the transmission roller 5 at the predetermined position. The yaw amount δ Γ to δ 7 ′, the yaw amount δ Γ to δ 7 ′ of the radial displacement is recorded, and the calibration report of the transmission roller can be completed for the user's reference. The drive roller of another embodiment of the present invention is a solid drive roller, and the drive roller calibration system and method are the same as described above. Various changes and modifications can be made without departing from the spirit and scope of the invention, and the invention is not limited by the description. Embodiments of the illustrated embodiments. 200800764 [Simplified illustration of the drawings] The first figure shows a perspective view of the drive roller calibration system of the present invention, and the second figure shows a perspective view of the support components of the drive roller calibration system of the present invention. The third figure shows the embodiment of the present invention. The fourth embodiment shows a schematic diagram of the non-contact displacement sensing device of the embodiment of the present invention; the fifth figure shows that the contact displacement sensing device is predetermined for the transmission roller. The schematic diagram of the positional arrangement; the sixth figure is a schematic diagram of measuring the radial displacement of the transmission roller by the contact displacement sensing device in the embodiment; the seventh figure is the radial displacement of the force applying device to the transmission roller in the embodiment FIG. 8 is a schematic diagram of an outer diameter grinding device in an embodiment; FIG. 9 is a flow chart of a driving roller calibration method according to an embodiment of the present invention; The figure shows a schematic diagram of a method for calibrating a plurality of predetermined position points of the drive roller in the embodiment. [Main component symbol description] 1 Drive roller calibration system 100 Support device 110 Support member 111 Roller. 12 200800764 112 Roller 120 Support member 121 Roller 122 Roller 150 Slipper 160 Slipper 200 Displacement sensing device 210 Contact displacement sensing device 220 non-contact displacement sensing device 400 urging device 5 transmission roller 600 outer diameter grinding device 610 grinding wheel 620 grinding wheel
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