TW200745878A - Time weighted moving average filter - Google Patents

Time weighted moving average filter

Info

Publication number
TW200745878A
TW200745878A TW096111190A TW96111190A TW200745878A TW 200745878 A TW200745878 A TW 200745878A TW 096111190 A TW096111190 A TW 096111190A TW 96111190 A TW96111190 A TW 96111190A TW 200745878 A TW200745878 A TW 200745878A
Authority
TW
Taiwan
Prior art keywords
state
state observation
observation
moving average
operable
Prior art date
Application number
TW096111190A
Other languages
English (en)
Other versions
TWI420323B (zh
Inventor
Richard P Good
Kevin A Chamness
Uwe Schulze
Original Assignee
Advanced Micro Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Micro Devices Inc filed Critical Advanced Micro Devices Inc
Publication of TW200745878A publication Critical patent/TW200745878A/zh
Application granted granted Critical
Publication of TWI420323B publication Critical patent/TWI420323B/zh

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
    • G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/04—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/04—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators
    • G05B13/048—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators using a predictor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32053—Adjust work parameter as function of other cell
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37532—Synchronized data acquisition
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45031—Manufacturing semiconductor wafers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
TW096111190A 2006-04-06 2007-03-30 時間加權移動平均濾波器 TWI420323B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/278,840 US7542880B2 (en) 2006-04-06 2006-04-06 Time weighted moving average filter

Publications (2)

Publication Number Publication Date
TW200745878A true TW200745878A (en) 2007-12-16
TWI420323B TWI420323B (zh) 2013-12-21

Family

ID=38268867

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096111190A TWI420323B (zh) 2006-04-06 2007-03-30 時間加權移動平均濾波器

Country Status (8)

Country Link
US (1) US7542880B2 (zh)
JP (1) JP2009532897A (zh)
KR (1) KR20090030252A (zh)
CN (1) CN101438217B (zh)
DE (1) DE112007000868T5 (zh)
GB (1) GB2449831B (zh)
TW (1) TWI420323B (zh)
WO (1) WO2007130194A1 (zh)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7534725B2 (en) * 2007-03-21 2009-05-19 Taiwan Semiconductor Manufacturing Company Advanced process control for semiconductor processing
DE102008021556B4 (de) * 2008-04-30 2019-06-06 Advanced Micro Devices, Inc. Verfahren und System für zweistufige Vorhersage einer Qualitätsverteilung von Halbleiterbauelementen
US8108060B2 (en) * 2009-05-13 2012-01-31 Taiwan Semiconductor Manufacturing Company, Ltd. System and method for implementing a wafer acceptance test (“WAT”) advanced process control (“APC”) with novel sampling policy and architecture
US8180471B2 (en) * 2009-05-27 2012-05-15 Globalfoundries Inc. Tuning a process controller based on a dynamic sampling rate
JP5279627B2 (ja) * 2009-06-18 2013-09-04 東京エレクトロン株式会社 基板処理方法及び記憶媒体
US9177219B2 (en) * 2010-07-09 2015-11-03 Asml Netherlands B.V. Method of calibrating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product
JP5192018B2 (ja) * 2010-09-17 2013-05-08 株式会社東芝 製造プロセスの監視システムおよび製造プロセスの監視方法
US9110465B1 (en) * 2011-05-04 2015-08-18 Western Digital (Fremont), Llc Methods for providing asymmetric run to run control of process parameters
JP5426608B2 (ja) * 2011-05-31 2014-02-26 東京瓦斯株式会社 異常検出装置および異常検出方法
US9213322B1 (en) 2012-08-16 2015-12-15 Western Digital (Fremont), Llc Methods for providing run to run process control using a dynamic tuner
US11477220B2 (en) * 2019-05-13 2022-10-18 Feedzai—Consultadoria e Inovação Tecnológica, S.A. Adaptive threshold estimation for streaming data

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3805032A (en) * 1972-03-09 1974-04-16 Leeds & Northrup Co Method for minimizing the effects of process disturbances on state estimators
US5060132A (en) * 1989-06-13 1991-10-22 Elsag International B.V. Method of modeling and control for delignification of pulping
US5091872A (en) * 1989-06-23 1992-02-25 At&T Bell Laboratories Apparatus and method for performing spike analysis in a logic simulator
US5915274A (en) * 1996-06-21 1999-06-22 Hunter Engineering Company Method of correcting imbalance on a motor vehicle wheel
US6161054A (en) * 1997-09-22 2000-12-12 On-Line Technologies, Inc. Cell control method and apparatus
JPH11186132A (ja) * 1997-12-19 1999-07-09 Sony Corp 半導体装置の製造工程のフィードバック方法
US6473084B1 (en) * 1999-09-08 2002-10-29 C4Cast.Com, Inc. Prediction input
US6553114B1 (en) * 1999-12-06 2003-04-22 Avaya Technology Corp. System for automatically predicting call center agent work time in a multi-skilled agent environment
US6502063B1 (en) * 1999-12-09 2002-12-31 Telefonaktiebolaget Lm Ericsson (Publ) Method and apparatus for recursive filtering of parallel intermittent streams of unequally reliable time discrete data
US6460002B1 (en) 2000-02-09 2002-10-01 Advanced Micro Devices, Inc. Method and apparatus for data stackification for run-to-run control
US6622059B1 (en) * 2000-04-13 2003-09-16 Advanced Micro Devices, Inc. Automated process monitoring and analysis system for semiconductor processing
GB0015229D0 (en) * 2000-06-21 2000-08-16 Nokia Networks Oy Bandwidth estimation
US6317686B1 (en) * 2000-07-21 2001-11-13 Bin Ran Method of providing travel time
US6718587B2 (en) * 2001-07-03 2004-04-13 General Electric Company Method for estimating and adjusting time remaining in an appliance
KR100939329B1 (ko) * 2002-01-10 2010-01-28 어드밴스드 마이크로 디바이시즈, 인코포레이티드 에이전트 기반 제어 아키텍쳐
US7065131B2 (en) * 2002-01-31 2006-06-20 Intel Corporation Processor and method for weight detection in a closed loop diversity mode WCDMA system
WO2003072305A1 (en) * 2002-02-26 2003-09-04 Advanced Micro Devices, Inc. Method and system for controlling the chemical mechanical polishing of substrates by calculating an overpolishing time and/or a polishing time of a final polishing step
WO2004019396A1 (ja) * 2002-08-13 2004-03-04 Tokyo Electron Limited プラズマ処理方法及びプラズマ処理装置
US7130368B1 (en) * 2002-09-19 2006-10-31 Nortel Network Limited Clock recovery using a direct smoothing process
IL154992A0 (en) * 2003-03-19 2003-10-31 Yaron Mayer System and method for automatic selection of a good buy in price-comparison sites when the user buys more than one product at the same time
JP4066864B2 (ja) * 2003-03-28 2008-03-26 アイシン精機株式会社 車両重量推定装置
US7158851B2 (en) 2003-06-30 2007-01-02 Tokyo Electron Limited Feedforward, feedback wafer to wafer control method for an etch process
US7356377B2 (en) * 2004-01-29 2008-04-08 Applied Materials, Inc. System, method, and medium for monitoring performance of an advanced process control system
US7085677B1 (en) * 2004-04-19 2006-08-01 Amazon Technologies, Inc. Automatically identifying incongruous item packages
US8515567B2 (en) * 2005-12-21 2013-08-20 Globalfoundries Inc. Enhanced state estimation based upon information credibility

Also Published As

Publication number Publication date
JP2009532897A (ja) 2009-09-10
GB2449831B (en) 2011-05-04
GB2449831A (en) 2008-12-03
KR20090030252A (ko) 2009-03-24
US20070239285A1 (en) 2007-10-11
DE112007000868T5 (de) 2009-02-26
CN101438217A (zh) 2009-05-20
GB0818402D0 (en) 2008-11-12
TWI420323B (zh) 2013-12-21
US7542880B2 (en) 2009-06-02
WO2007130194A1 (en) 2007-11-15
CN101438217B (zh) 2012-02-22

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