TW200745571A - Mini-prober for TFT-LCD testing - Google Patents

Mini-prober for TFT-LCD testing

Info

Publication number
TW200745571A
TW200745571A TW096116709A TW96116709A TW200745571A TW 200745571 A TW200745571 A TW 200745571A TW 096116709 A TW096116709 A TW 096116709A TW 96116709 A TW96116709 A TW 96116709A TW 200745571 A TW200745571 A TW 200745571A
Authority
TW
Taiwan
Prior art keywords
prober
large area
displays
tft
mini
Prior art date
Application number
TW096116709A
Other languages
Chinese (zh)
Other versions
TWI338145B (en
Inventor
Benjamin M Johnston
Sriram Krishnaswami
Hung T Nguyen
Matthias Brunner
Yung Liu
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of TW200745571A publication Critical patent/TW200745571A/en
Application granted granted Critical
Publication of TWI338145B publication Critical patent/TWI338145B/en

Links

Classifications

    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Liquid Crystal (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)

Abstract

An apparatus and method for testing large area substrates is described. The large area substrates include patterns of displays and contact points electrically coupled to the displays. The apparatus includes a prober assembly that is movable relative to the large area substrate and may be configured to test various patterns of displays and contact points. The prober assembly is also configured to test fractional sections of the large area substrate. The apparatus also includes a test chamber configured to store at least two prober assemblies within an interior volume.
TW96116709A 2006-05-31 2007-05-10 Prober assembly for testing a large area substrate and test system thereof TWI338145B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US80359706P 2006-05-31 2006-05-31

Publications (2)

Publication Number Publication Date
TW200745571A true TW200745571A (en) 2007-12-16
TWI338145B TWI338145B (en) 2011-03-01

Family

ID=38802177

Family Applications (1)

Application Number Title Priority Date Filing Date
TW96116709A TWI338145B (en) 2006-05-31 2007-05-10 Prober assembly for testing a large area substrate and test system thereof

Country Status (5)

Country Link
JP (1) JP2009539112A (en)
KR (1) KR101023890B1 (en)
CN (1) CN101454677B (en)
TW (1) TWI338145B (en)
WO (1) WO2007143326A2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI421513B (en) * 2009-10-27 2014-01-01 Top Eng Co Ltd Array substrate inspection apparatus and method
TWI424177B (en) * 2009-05-01 2014-01-21 Nihon Micronics Kk Test device for flat plate-like specimen
TWI468709B (en) * 2013-01-25 2015-01-11 Hon Tech Inc Electronic components operating device and its application of detection equipment
TWI746740B (en) * 2016-12-20 2021-11-21 美商Fei公司 Methods and apparatuses for integrated circuit (ic) examination

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008038184A1 (en) * 2008-08-19 2010-02-25 Suss Microtec Test Systems Gmbh Method and device for the temporary electrical contacting of a solar cell
CN101943744A (en) * 2009-07-06 2011-01-12 应用材料股份有限公司 Dry high-potential tester and solar simulation tool
CN101995672B (en) * 2009-08-28 2012-07-18 北京京东方光电科技有限公司 Photoelectric integrated testing system and photoelectric testing method
KR101115874B1 (en) * 2009-12-31 2012-02-22 주식회사 탑 엔지니어링 Apparatus for testing array
TWI741829B (en) * 2020-10-13 2021-10-01 承洺股份有限公司 Automatic touch panel testing mechanism
CN114839802B (en) * 2022-05-25 2023-11-03 广东江粉高科技产业园有限公司 PAD signal testing device for testing small-damage efficient LCD

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5416592A (en) * 1992-03-23 1995-05-16 Tokyo Electron Kabushiki Kaisha Probe apparatus for measuring electrical characteristics of objects
JPH11174108A (en) * 1997-12-12 1999-07-02 Dainippon Printing Co Ltd Inspecting apparatus for electrode wiring
JPH11304884A (en) * 1998-04-24 1999-11-05 Micronics Japan Co Ltd Prober for large-sized circuit board
JP2001318116A (en) * 2000-05-11 2001-11-16 Micronics Japan Co Ltd Inspection apparatus for display panel board
DE10253717B4 (en) * 2002-11-18 2011-05-19 Applied Materials Gmbh Device for contacting for the test of at least one test object, test system and method for testing test objects
US6765203B1 (en) * 2003-01-31 2004-07-20 Shimadzu Corporation Pallet assembly for substrate inspection device and substrate inspection device
US7043848B2 (en) * 2003-11-26 2006-05-16 The Micromanipulator Company Method and apparatus for maintaining accurate positioning between a probe and a DUT
US7319335B2 (en) * 2004-02-12 2008-01-15 Applied Materials, Inc. Configurable prober for TFT LCD array testing
US7355418B2 (en) * 2004-02-12 2008-04-08 Applied Materials, Inc. Configurable prober for TFT LCD array test
JP2006051133A (en) * 2004-08-10 2006-02-23 Nippon Dental Support:Kk Mouth muscle pressure measuring apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI424177B (en) * 2009-05-01 2014-01-21 Nihon Micronics Kk Test device for flat plate-like specimen
TWI421513B (en) * 2009-10-27 2014-01-01 Top Eng Co Ltd Array substrate inspection apparatus and method
TWI468709B (en) * 2013-01-25 2015-01-11 Hon Tech Inc Electronic components operating device and its application of detection equipment
TWI746740B (en) * 2016-12-20 2021-11-21 美商Fei公司 Methods and apparatuses for integrated circuit (ic) examination

Also Published As

Publication number Publication date
WO2007143326A2 (en) 2007-12-13
TWI338145B (en) 2011-03-01
CN101454677A (en) 2009-06-10
CN101454677B (en) 2012-05-09
WO2007143326A3 (en) 2008-04-03
KR20090018674A (en) 2009-02-20
KR101023890B1 (en) 2011-03-22
JP2009539112A (en) 2009-11-12

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