TW200728934A - Device manufacturing method and computer-readable medium - Google Patents
Device manufacturing method and computer-readable mediumInfo
- Publication number
- TW200728934A TW200728934A TW095145896A TW95145896A TW200728934A TW 200728934 A TW200728934 A TW 200728934A TW 095145896 A TW095145896 A TW 095145896A TW 95145896 A TW95145896 A TW 95145896A TW 200728934 A TW200728934 A TW 200728934A
- Authority
- TW
- Taiwan
- Prior art keywords
- computer
- readable medium
- device manufacturing
- exposure
- features
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
- G03F7/70466—Multiple exposures, e.g. combination of fine and coarse exposures, double patterning or multiple exposures for printing a single feature
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
- G03F7/70558—Dose control, i.e. achievement of a desired dose
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70605—Workpiece metrology
- G03F7/70616—Monitoring the printed patterns
- G03F7/70625—Dimensions, e.g. line width, critical dimension [CD], profile, sidewall angle or edge roughness
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Immunology (AREA)
- Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Pathology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Materials For Photolithography (AREA)
- Manufacture Or Reproduction Of Printing Formes (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/312,650 US7547495B2 (en) | 2005-12-21 | 2005-12-21 | Device manufacturing method and computer program product |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200728934A true TW200728934A (en) | 2007-08-01 |
Family
ID=37745947
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095145896A TW200728934A (en) | 2005-12-21 | 2006-12-08 | Device manufacturing method and computer-readable medium |
Country Status (7)
Country | Link |
---|---|
US (1) | US7547495B2 (zh) |
EP (1) | EP1801657A1 (zh) |
JP (1) | JP4567658B2 (zh) |
KR (1) | KR100832078B1 (zh) |
CN (1) | CN1987658A (zh) |
SG (1) | SG133551A1 (zh) |
TW (1) | TW200728934A (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7917244B2 (en) * | 2007-03-14 | 2011-03-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method and system for reducing critical dimension side-to-side tilting error |
US7869022B2 (en) * | 2007-07-18 | 2011-01-11 | Asml Netherlands B.V. | Inspection method and apparatus lithographic apparatus, lithographic processing cell, device manufacturing method and distance measuring system |
JP5192795B2 (ja) * | 2007-12-06 | 2013-05-08 | 株式会社日立ハイテクノロジーズ | 電子ビーム測定装置 |
US8612045B2 (en) * | 2008-12-24 | 2013-12-17 | Asml Holding N.V. | Optimization method and a lithographic cell |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05136033A (ja) * | 1991-11-13 | 1993-06-01 | Hitachi Ltd | パターン形成方法及びその装置 |
JPH05243115A (ja) * | 1992-01-22 | 1993-09-21 | Nec Corp | 半導体装置の製造方法 |
US5308741A (en) * | 1992-07-31 | 1994-05-03 | Motorola, Inc. | Lithographic method using double exposure techniques, mask position shifting and light phase shifting |
JPH11307449A (ja) * | 1998-02-20 | 1999-11-05 | Canon Inc | 露光装置及びデバイスの製造方法 |
JP2001060546A (ja) | 1999-08-20 | 2001-03-06 | Nikon Corp | 露光方法及び露光装置 |
US6451508B1 (en) * | 2000-04-28 | 2002-09-17 | International Business Machines Corporation | Plural interleaved exposure process for increased feature aspect ratio in dense arrays |
US6625512B1 (en) | 2000-07-25 | 2003-09-23 | Advanced Micro Devices, Inc. | Method and apparatus for performing final critical dimension control |
US6589713B1 (en) | 2001-01-29 | 2003-07-08 | Advanced Micro Devices, Inc. | Process for reducing the pitch of contact holes, vias, and trench structures in integrated circuits |
US6479200B1 (en) | 2001-04-19 | 2002-11-12 | Advanced Micro Devices, Inc. | Method of controlling stepper process parameters based upon scatterometric measurements of DICD features |
EP1385052B1 (en) * | 2002-07-26 | 2006-05-31 | ASML MaskTools B.V. | Orientation dependent shielding for use with dipole illumination techniques |
US6912438B2 (en) | 2002-10-21 | 2005-06-28 | Advanced Micro Devices, Inc. | Using scatterometry to obtain measurements of in circuit structures |
JP2004153120A (ja) * | 2002-10-31 | 2004-05-27 | Canon Inc | 転写露光方法 |
SG137657A1 (en) * | 2002-11-12 | 2007-12-28 | Asml Masktools Bv | Method and apparatus for performing model-based layout conversion for use with dipole illumination |
-
2005
- 2005-12-21 US US11/312,650 patent/US7547495B2/en not_active Expired - Fee Related
-
2006
- 2006-12-08 TW TW095145896A patent/TW200728934A/zh unknown
- 2006-12-14 JP JP2006336454A patent/JP4567658B2/ja not_active Expired - Fee Related
- 2006-12-19 SG SG200608857-9A patent/SG133551A1/en unknown
- 2006-12-19 KR KR1020060129898A patent/KR100832078B1/ko not_active IP Right Cessation
- 2006-12-20 EP EP06256478A patent/EP1801657A1/en not_active Withdrawn
- 2006-12-20 CN CNA2006101690993A patent/CN1987658A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
KR100832078B1 (ko) | 2008-05-27 |
US7547495B2 (en) | 2009-06-16 |
JP2007173807A (ja) | 2007-07-05 |
EP1801657A1 (en) | 2007-06-27 |
CN1987658A (zh) | 2007-06-27 |
SG133551A1 (en) | 2007-07-30 |
US20070141486A1 (en) | 2007-06-21 |
KR20070067623A (ko) | 2007-06-28 |
JP4567658B2 (ja) | 2010-10-20 |
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