TW200722370A - Method and apparatus for producing nitrogen trifluoride - Google Patents

Method and apparatus for producing nitrogen trifluoride

Info

Publication number
TW200722370A
TW200722370A TW095131376A TW95131376A TW200722370A TW 200722370 A TW200722370 A TW 200722370A TW 095131376 A TW095131376 A TW 095131376A TW 95131376 A TW95131376 A TW 95131376A TW 200722370 A TW200722370 A TW 200722370A
Authority
TW
Taiwan
Prior art keywords
nitrogen trifluoride
tube reactor
solid product
gas
producing nitrogen
Prior art date
Application number
TW095131376A
Other languages
English (en)
Inventor
Hiromoto Ohno
Toshio Ohi
Yuji Sakai
Original Assignee
Showa Denko Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2005245781A external-priority patent/JP4828180B2/ja
Priority claimed from JP2005295498A external-priority patent/JP2007099600A/ja
Priority claimed from JP2005295497A external-priority patent/JP2007099599A/ja
Priority claimed from JP2005313241A external-priority patent/JP2007119292A/ja
Application filed by Showa Denko Kk filed Critical Showa Denko Kk
Publication of TW200722370A publication Critical patent/TW200722370A/zh

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
    • C01B21/083—Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
    • C01B21/083—Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms
    • C01B21/0832—Binary compounds of nitrogen with halogens
    • C01B21/0835—Nitrogen trifluoride
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01C—AMMONIA; CYANOGEN; COMPOUNDS THEREOF
    • C01C1/00—Ammonia; Compounds thereof
    • C01C1/16—Halides of ammonium
    • C01C1/162—Ammonium fluoride

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Low-Molecular Organic Synthesis Reactions Using Catalysts (AREA)
TW095131376A 2005-08-26 2006-08-25 Method and apparatus for producing nitrogen trifluoride TW200722370A (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2005245781A JP4828180B2 (ja) 2005-08-26 2005-08-26 三フッ化窒素の製造方法
JP2005295498A JP2007099600A (ja) 2005-10-07 2005-10-07 三フッ化窒素の製造方法
JP2005295497A JP2007099599A (ja) 2005-10-07 2005-10-07 三フッ化窒素の製造方法および製造装置
JP2005313241A JP2007119292A (ja) 2005-10-27 2005-10-27 三フッ化窒素の製造方法および製造装置

Publications (1)

Publication Number Publication Date
TW200722370A true TW200722370A (en) 2007-06-16

Family

ID=37771706

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095131376A TW200722370A (en) 2005-08-26 2006-08-25 Method and apparatus for producing nitrogen trifluoride

Country Status (4)

Country Link
US (1) US7820127B2 (zh)
KR (1) KR100975490B1 (zh)
TW (1) TW200722370A (zh)
WO (1) WO2007023968A1 (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007084370A (ja) * 2005-09-21 2007-04-05 Showa Denko Kk 三フッ化窒素の製造方法
JP4624905B2 (ja) * 2005-10-27 2011-02-02 昭和電工株式会社 三フッ化窒素の製造方法
EP2246296B1 (en) * 2007-12-27 2016-11-09 Central Glass Co., Ltd. Process and apparatus for producing fluorinated gaseous compound
US20110097253A1 (en) * 2009-10-27 2011-04-28 Fluoromer Llc Fluorine purification
US8163262B1 (en) * 2011-01-04 2012-04-24 Omotowa Bamidele A Method for production of nitrogen trifluoride from trimethylsilylamines

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4091081A (en) 1977-04-19 1978-05-23 Air Products And Chemicals, Inc. Preparation of nitrogen trifluoride
JPH02255513A (ja) 1989-03-28 1990-10-16 Asahi Glass Co Ltd 三フッ化窒素の製造方法
JPH02255511A (ja) 1989-03-28 1990-10-16 Asahi Glass Co Ltd 三フッ化窒素製造用反応器
JPH02255512A (ja) 1989-03-28 1990-10-16 Asahi Glass Co Ltd 三フッ化窒素の製造装置
JPH05105411A (ja) * 1991-10-22 1993-04-27 Onoda Cement Co Ltd 三フツ化窒素の製造方法
US6010605A (en) * 1995-10-17 2000-01-04 Florida Scientific Laboratories Inc. Nitrogen trifluoride production apparatus
US5759237A (en) * 1996-06-14 1998-06-02 L'air Liquide Societe Anonyme Pour L'etude Et, L'exploitation Des Procedes Georges Claude Process and system for selective abatement of reactive gases and recovery of perfluorocompound gases
US6231430B1 (en) * 1999-09-29 2001-05-15 Dill Engineering, Inc. Carbon electrode cleaning system and method
CN1213943C (zh) * 2000-05-12 2005-08-10 昭和电工株式会社 生产三氟化氮的方法及其应用
JP4508356B2 (ja) 2000-05-12 2010-07-21 昭和電工株式会社 三フッ化窒素の製造方法及びその用途
US6755150B2 (en) * 2001-04-20 2004-06-29 Applied Materials Inc. Multi-core transformer plasma source
KR100435002B1 (ko) 2002-02-22 2004-06-09 주식회사 에코다임 전해부상방법을 이용한 수처리 장치 및 그 운전방법
KR100452233B1 (ko) * 2002-07-19 2004-10-12 한국과학기술연구원 젯트루프식 분사형 반응기를 이용한 삼불화질소 제조방법
US20040096386A1 (en) * 2002-11-19 2004-05-20 Syvret Robert George Method for nitrogen trifluoride production
US7267842B2 (en) * 2004-03-15 2007-09-11 Air Products And Chemicals, Inc. Method for removing titanium dioxide deposits from a reactor
US7395823B2 (en) * 2004-04-09 2008-07-08 The Boc Group, Inc. Method and apparatus for local fluorine and nitrogen trifluoride production
US20060017043A1 (en) * 2004-07-23 2006-01-26 Dingjun Wu Method for enhancing fluorine utilization

Also Published As

Publication number Publication date
US20090280051A1 (en) 2009-11-12
KR20080040030A (ko) 2008-05-07
WO2007023968A1 (ja) 2007-03-01
US7820127B2 (en) 2010-10-26
KR100975490B1 (ko) 2010-08-11

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