TW200715160A - Metrology tool error log analysis methodology and system - Google Patents

Metrology tool error log analysis methodology and system

Info

Publication number
TW200715160A
TW200715160A TW095122514A TW95122514A TW200715160A TW 200715160 A TW200715160 A TW 200715160A TW 095122514 A TW095122514 A TW 095122514A TW 95122514 A TW95122514 A TW 95122514A TW 200715160 A TW200715160 A TW 200715160A
Authority
TW
Taiwan
Prior art keywords
errors
recipes
metrology tool
error log
normalized number
Prior art date
Application number
TW095122514A
Other languages
English (en)
Chinese (zh)
Inventor
Sarah A Kay
Eric P Solecky
Lin Zhou
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Publication of TW200715160A publication Critical patent/TW200715160A/zh

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41875—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by quality surveillance of production
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32222—Fault, defect detection of origin of fault, defect of product
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45031—Manufacturing semiconductor wafers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Quality & Reliability (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • General Factory Administration (AREA)
TW095122514A 2005-06-22 2006-06-22 Metrology tool error log analysis methodology and system TW200715160A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/160,404 US7065425B1 (en) 2005-06-22 2005-06-22 Metrology tool error log analysis methodology and system
US11/407,543 US7187993B2 (en) 2005-06-22 2006-04-19 Metrology tool error log analysis methodology and system

Publications (1)

Publication Number Publication Date
TW200715160A true TW200715160A (en) 2007-04-16

Family

ID=36586511

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095122514A TW200715160A (en) 2005-06-22 2006-06-22 Metrology tool error log analysis methodology and system

Country Status (4)

Country Link
US (2) US7065425B1 (https=)
JP (1) JP4398441B2 (https=)
CN (1) CN100523839C (https=)
TW (1) TW200715160A (https=)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7363098B2 (en) * 2005-12-19 2008-04-22 Tech Semiconductor Singapore Pte Ltd Method to identify machines causing excursion in semiconductor manufacturing
US7631286B2 (en) * 2005-12-30 2009-12-08 Wafertech Llc Automated metrology recipe generation
US7305320B2 (en) * 2006-02-15 2007-12-04 International Business Machines Corporation Metrology tool recipe validator using best known methods
EP2097794B2 (en) 2006-11-03 2017-03-08 Air Products and Chemicals, Inc. System and method for process monitoring
US7953511B1 (en) * 2007-09-21 2011-05-31 National Semiconductor Corporation System and method for reducing processing errors during wafer fabrication employing a 2D wafer scribe and monitoring system
JP5002395B2 (ja) * 2007-09-28 2012-08-15 株式会社日立ハイテクノロジーズ 荷電粒子線装置の制御装置
US10984143B2 (en) * 2015-01-23 2021-04-20 Hitachi High-Tech Corporation Recipe creation device for use in semiconductor measurement device or semiconductor inspection device
JP6339956B2 (ja) * 2015-03-19 2018-06-06 アズビル株式会社 不具合要因特定支援装置および不具合要因特定支援方法
US10372114B2 (en) * 2016-10-21 2019-08-06 Kla-Tencor Corporation Quantifying and reducing total measurement uncertainty
CN114245933B (zh) 2019-09-06 2025-11-18 株式会社日立高新技术 制程信息提示系统、制程错误推定系统
US12554571B2 (en) 2020-03-31 2026-02-17 Hitachi High-Tech Corporation Error cause estimation device and estimation method

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5914879A (en) * 1997-03-04 1999-06-22 Advanced Micro Devices System and method for calculating cluster tool performance metrics using a weighted configuration matrix
US6470227B1 (en) 1997-12-02 2002-10-22 Murali D. Rangachari Method and apparatus for automating a microelectric manufacturing process
US6303395B1 (en) * 1999-06-01 2001-10-16 Applied Materials, Inc. Semiconductor processing techniques
US6456894B1 (en) 1999-06-01 2002-09-24 Applied Materials, Inc. Semiconductor processing techniques
US6671570B2 (en) 2000-10-17 2003-12-30 Brooks Automation, Inc. System and method for automated monitoring and assessment of fabrication facility
US6727106B1 (en) * 2001-07-12 2004-04-27 Advanced Micro Devices, Inc. System and software for statistical process control in semiconductor manufacturing and method thereof
US6842659B2 (en) 2001-08-24 2005-01-11 Applied Materials Inc. Method and apparatus for providing intra-tool monitoring and control
US6708075B2 (en) * 2001-11-16 2004-03-16 Advanced Micro Devices Method and apparatus for utilizing integrated metrology data as feed-forward data
DE10240115B4 (de) 2002-08-30 2004-10-28 Advanced Micro Devices, Inc., Sunnyvale Verfahren und System zum Handhaben von Substraten in einer Produktionslinie mit einer Cluster-Anlage und einer Messanlage
US7684887B2 (en) 2003-04-30 2010-03-23 Infineon Technologies Ag Advanced process control method and advanced process control system for acquiring production data in a chip production installation
US20050010319A1 (en) 2003-07-09 2005-01-13 Sukesh Patel System and method for validating and visualizing APC assisted semiconductor manufacturing processes
US20050038554A1 (en) 2003-07-14 2005-02-17 Cory Watkins Inspection and metrology module cluster tool
US7257454B2 (en) * 2003-11-21 2007-08-14 Taiwan Semiconductor Manufacturing Company, Ltd. Dynamically adjusting the distribution for dispatching lot between current and downstream tool by using expertise weighting mechanism
US6999848B2 (en) 2003-12-19 2006-02-14 Intel Corporation Process control apparatus, systems, and methods
TWI236044B (en) * 2004-05-12 2005-07-11 Powerchip Semiconductor Corp System and method for real-time dispatching batch in manufacturing process

Also Published As

Publication number Publication date
CN1885049A (zh) 2006-12-27
CN100523839C (zh) 2009-08-05
US7065425B1 (en) 2006-06-20
US7187993B2 (en) 2007-03-06
US20060293778A1 (en) 2006-12-28
JP4398441B2 (ja) 2010-01-13
JP2007003528A (ja) 2007-01-11

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