TW200714374A - UV cure equipment with combined light path - Google Patents

UV cure equipment with combined light path

Info

Publication number
TW200714374A
TW200714374A TW095123184A TW95123184A TW200714374A TW 200714374 A TW200714374 A TW 200714374A TW 095123184 A TW095123184 A TW 095123184A TW 95123184 A TW95123184 A TW 95123184A TW 200714374 A TW200714374 A TW 200714374A
Authority
TW
Taiwan
Prior art keywords
light path
combined light
curing
cure equipment
combined
Prior art date
Application number
TW095123184A
Other languages
English (en)
Inventor
John I Kilburn
George T Mccollough
Rusty J Coleman
Craig A Caprio
James R Kircher
Daniel A Slater
Original Assignee
Eastman Kodak Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eastman Kodak Co filed Critical Eastman Kodak Co
Publication of TW200714374A publication Critical patent/TW200714374A/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B3/00—Drying solid materials or objects by processes involving the application of heat
    • F26B3/28—Drying solid materials or objects by processes involving the application of heat by radiation, e.g. from the sun

Landscapes

  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Microbiology (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Liquid Crystal (AREA)
  • Printing Methods (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
TW095123184A 2005-06-28 2006-06-27 UV cure equipment with combined light path TW200714374A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/169,368 US7638780B2 (en) 2005-06-28 2005-06-28 UV cure equipment with combined light path

Publications (1)

Publication Number Publication Date
TW200714374A true TW200714374A (en) 2007-04-16

Family

ID=37110352

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095123184A TW200714374A (en) 2005-06-28 2006-06-27 UV cure equipment with combined light path

Country Status (6)

Country Link
US (1) US7638780B2 (zh)
EP (1) EP1896788A1 (zh)
JP (1) JP2008547063A (zh)
CN (1) CN101208570A (zh)
TW (1) TW200714374A (zh)
WO (1) WO2007001970A1 (zh)

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TWI449099B (zh) * 2011-03-14 2014-08-11 Fujitsu Ltd 蝕刻方法、半導體裝置的製造方法及蝕刻裝置
TWI503505B (zh) * 2008-09-26 2015-10-11 Hamamatsu Photonics Kk Light source device
TWI596438B (zh) * 2012-12-18 2017-08-21 尼康股份有限公司 Substrate processing apparatus, component manufacturing system and component manufacturing method
TWI611469B (zh) * 2012-12-27 2018-01-11 三星顯示器有限公司 用於測試及蝕刻基板之多功能設備及包含其之基板處理設備

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US8980769B1 (en) 2005-04-26 2015-03-17 Novellus Systems, Inc. Multi-station sequential curing of dielectric films
US8137465B1 (en) 2005-04-26 2012-03-20 Novellus Systems, Inc. Single-chamber sequential curing of semiconductor wafers
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Also Published As

Publication number Publication date
WO2007001970A1 (en) 2007-01-04
CN101208570A (zh) 2008-06-25
US7638780B2 (en) 2009-12-29
EP1896788A1 (en) 2008-03-12
US20060292311A1 (en) 2006-12-28
JP2008547063A (ja) 2008-12-25

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