TW200707150A - Temperature control unit for bubblers - Google Patents
Temperature control unit for bubblersInfo
- Publication number
- TW200707150A TW200707150A TW095109180A TW95109180A TW200707150A TW 200707150 A TW200707150 A TW 200707150A TW 095109180 A TW095109180 A TW 095109180A TW 95109180 A TW95109180 A TW 95109180A TW 200707150 A TW200707150 A TW 200707150A
- Authority
- TW
- Taiwan
- Prior art keywords
- temperature control
- container
- bubblers
- control unit
- bubbler
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
- C23C16/4481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material
- C23C16/4482—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material by bubbling of carrier gas through liquid source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S261/00—Gas and liquid contact apparatus
- Y10S261/65—Vaporizers
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US66307205P | 2005-03-17 | 2005-03-17 | |
US66300005P | 2005-03-17 | 2005-03-17 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200707150A true TW200707150A (en) | 2007-02-16 |
TWI431449B TWI431449B (zh) | 2014-03-21 |
Family
ID=36992481
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095109180A TWI431449B (zh) | 2005-03-17 | 2006-03-17 | 起泡器的溫度控制裝置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8118939B2 (zh) |
EP (1) | EP1866458A4 (zh) |
JP (1) | JP5156621B2 (zh) |
TW (1) | TWI431449B (zh) |
WO (1) | WO2006099619A2 (zh) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2432371B (en) * | 2005-11-17 | 2011-06-15 | Epichem Ltd | Improved bubbler for the transportation of substances by a carrier gas |
US20080018004A1 (en) * | 2006-06-09 | 2008-01-24 | Air Products And Chemicals, Inc. | High Flow GaCl3 Delivery |
US8568529B2 (en) * | 2009-04-10 | 2013-10-29 | Applied Materials, Inc. | HVPE chamber hardware |
WO2011053505A1 (en) | 2009-11-02 | 2011-05-05 | Sigma-Aldrich Co. | Evaporator |
EA028837B1 (ru) * | 2009-11-30 | 2018-01-31 | Петер Сентиваньи | Способ и устройство для обработки газов |
CN102467136B (zh) * | 2010-10-31 | 2015-03-25 | 扬州百思德新材料有限公司 | 反应釜温度控制装置 |
DE102012015045A1 (de) * | 2012-07-31 | 2014-02-06 | Dockweiler Ag | Vorrichtung zum Temperieren eines Gefäßes in einer Kammer |
US20150053375A1 (en) * | 2013-08-20 | 2015-02-26 | Noah Precision, Llc | Multi-loop temperature control system for a semiconductor manufacture process |
JP6094513B2 (ja) * | 2014-02-28 | 2017-03-15 | 東京エレクトロン株式会社 | 処理ガス発生装置、処理ガス発生方法、基板処理方法及び記憶媒体 |
US11561032B2 (en) | 2019-11-12 | 2023-01-24 | Heat X, LLC | Magnetic induction water heater/chiller with separate heating/chilling zones |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3470902A (en) * | 1967-03-01 | 1969-10-07 | Atomic Energy Commission | Liquid flow control device |
US4269057A (en) * | 1979-10-24 | 1981-05-26 | The United States Of America As Represented By The Secretary Of The Army | Multipurpose humidity controlled agent generator |
CA1179144A (en) * | 1981-04-04 | 1984-12-11 | Hiroshi Ishizuka | Method and an apparatus for producing titanium metal from titanium tetrachloride |
JPS5995170U (ja) * | 1982-12-17 | 1984-06-28 | 富士通株式会社 | 化学気相成長装置 |
JPS62104022A (ja) * | 1985-10-30 | 1987-05-14 | Seiko Epson Corp | 液体原料気化装置 |
US4612772A (en) * | 1985-11-04 | 1986-09-23 | Jones David E | Thermo-electric temperature controller for liquid chemical bubbler containers |
US4911101A (en) * | 1988-07-20 | 1990-03-27 | General Electric Company | Metal organic molecular beam epitaxy (MOMBE) apparatus |
JPH0760258B2 (ja) * | 1988-09-28 | 1995-06-28 | 富士写真フイルム株式会社 | ハロゲン化銀カラー写真感光材料の処理方法 |
EP0366601B1 (de) * | 1988-10-21 | 1993-12-22 | Büchi Laboratoriums-Technik AG | Rotationsverdampfer |
JPH0644098Y2 (ja) * | 1989-02-27 | 1994-11-14 | 黒谷 信子 | 半導体ウェハーの洗浄用バブラー |
JPH0697081A (ja) * | 1992-09-10 | 1994-04-08 | Fujitsu Ltd | 気相成長装置 |
JP2791424B2 (ja) * | 1993-03-19 | 1998-08-27 | 工業技術院長 | 半導体加工装置 |
TW359943B (en) * | 1994-07-18 | 1999-06-01 | Silicon Valley Group Thermal | Single body injector and method for delivering gases to a surface |
US5968379A (en) * | 1995-07-14 | 1999-10-19 | Applied Materials, Inc. | High temperature ceramic heater assembly with RF capability and related methods |
JPH10130845A (ja) * | 1996-10-29 | 1998-05-19 | Mitsubishi Heavy Ind Ltd | 化学蒸着用蒸気発生装置 |
JP2948791B2 (ja) * | 1998-01-22 | 1999-09-13 | アプライド マテリアルズ インコーポレイテッド | 液体貯蔵容器の交換方法 |
FI118805B (fi) | 2000-05-15 | 2008-03-31 | Asm Int | Menetelmä ja kokoonpano kaasufaasireaktantin syöttämiseksi reaktiokammioon |
US6561498B2 (en) | 2001-04-09 | 2003-05-13 | Lorex Industries, Inc. | Bubbler for use in vapor generation systems |
TW539822B (en) * | 2001-07-03 | 2003-07-01 | Asm Inc | Source chemical container assembly |
US6790475B2 (en) * | 2002-04-09 | 2004-09-14 | Wafermasters Inc. | Source gas delivery |
US7077388B2 (en) * | 2002-07-19 | 2006-07-18 | Asm America, Inc. | Bubbler for substrate processing |
JP2004327534A (ja) | 2003-04-22 | 2004-11-18 | Nec Kansai Ltd | 有機金属原料気相成長装置 |
KR20050004379A (ko) * | 2003-07-02 | 2005-01-12 | 삼성전자주식회사 | 원자층 증착용 가스 공급 장치 |
-
2006
- 2006-03-17 TW TW095109180A patent/TWI431449B/zh not_active IP Right Cessation
- 2006-03-17 US US11/378,664 patent/US8118939B2/en not_active Expired - Fee Related
- 2006-03-17 WO PCT/US2006/010037 patent/WO2006099619A2/en active Application Filing
- 2006-03-17 JP JP2008502141A patent/JP5156621B2/ja not_active Expired - Fee Related
- 2006-03-17 EP EP06738999A patent/EP1866458A4/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
US8118939B2 (en) | 2012-02-21 |
TWI431449B (zh) | 2014-03-21 |
JP2008533746A (ja) | 2008-08-21 |
WO2006099619A2 (en) | 2006-09-21 |
EP1866458A4 (en) | 2010-10-20 |
WO2006099619A3 (en) | 2007-08-30 |
US20060213446A1 (en) | 2006-09-28 |
JP5156621B2 (ja) | 2013-03-06 |
EP1866458A2 (en) | 2007-12-19 |
WO2006099619A9 (en) | 2006-11-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |