TW200706589A - Resist composition and filmy optical member making use of the same - Google Patents

Resist composition and filmy optical member making use of the same

Info

Publication number
TW200706589A
TW200706589A TW095121431A TW95121431A TW200706589A TW 200706589 A TW200706589 A TW 200706589A TW 095121431 A TW095121431 A TW 095121431A TW 95121431 A TW95121431 A TW 95121431A TW 200706589 A TW200706589 A TW 200706589A
Authority
TW
Taiwan
Prior art keywords
resist composition
optical member
making use
same
member making
Prior art date
Application number
TW095121431A
Other languages
English (en)
Chinese (zh)
Other versions
TWI326293B (https=
Inventor
Kaoru Okaniwa
Takuya Sugishita
Tetsuo Yamanaka
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Publication of TW200706589A publication Critical patent/TW200706589A/zh
Application granted granted Critical
Publication of TWI326293B publication Critical patent/TWI326293B/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/04—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00—Use of organic ingredients
    • C08K5/04—Oxygen-containing compounds
    • C08K5/05—Alcohols; Metal alcoholates
    • C08K5/057—Metal alcoholates

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Polymerisation Methods In General (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
TW095121431A 2005-07-29 2006-06-15 Resist composition and filmy optical member making use of the same TW200706589A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005221910A JP2008255124A (ja) 2005-07-29 2005-07-29 樹脂組成物およびこれを用いた膜状光学部材

Publications (2)

Publication Number Publication Date
TW200706589A true TW200706589A (en) 2007-02-16
TWI326293B TWI326293B (https=) 2010-06-21

Family

ID=37683134

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095121431A TW200706589A (en) 2005-07-29 2006-06-15 Resist composition and filmy optical member making use of the same

Country Status (3)

Country Link
JP (1) JP2008255124A (https=)
TW (1) TW200706589A (https=)
WO (1) WO2007013230A1 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008297537A (ja) * 2007-02-21 2008-12-11 Hitachi Chem Co Ltd 樹脂組成物及びこれを用いた膜状光学部材、並びに樹脂組成物製造方法
US7923200B2 (en) 2007-04-09 2011-04-12 Az Electronic Materials Usa Corp. Composition for coating over a photoresist pattern comprising a lactam
WO2009019921A1 (ja) * 2007-08-06 2009-02-12 Hitachi Chemical Co., Ltd. 樹脂組成物およびこれを用いた膜状光学部材
WO2009051023A1 (ja) * 2007-10-16 2009-04-23 Hitachi Chemical Company, Ltd. 樹脂組成物及びこれを用いた膜状光学部材並びに樹脂組成物の製造方法
JP2009237306A (ja) * 2008-03-27 2009-10-15 Seiko Epson Corp 光学物品およびその製造方法
US7745077B2 (en) * 2008-06-18 2010-06-29 Az Electronic Materials Usa Corp. Composition for coating over a photoresist pattern

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06322136A (ja) * 1993-05-11 1994-11-22 Kansai Shin Gijutsu Kenkyusho:Kk 有機・無機ポリマー複合体およびその製造方法
JPH0790114A (ja) * 1993-09-28 1995-04-04 Hoya Corp レンズ用有機・無機複合体の製造方法
JP3419570B2 (ja) * 1994-12-07 2003-06-23 Ｈｏｙａ株式会社 有機−無機複合ポリマーの製造方法
JP4139701B2 (ja) * 2003-01-31 2008-08-27 日本曹達株式会社 有機−無機複合体
JP2005316219A (ja) * 2004-04-30 2005-11-10 Olympus Corp 光学材料

Also Published As

Publication number Publication date
TWI326293B (https=) 2010-06-21
JP2008255124A (ja) 2008-10-23
WO2007013230A1 (ja) 2007-02-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees