TW200706477A - Apparatus for sensing substrate - Google Patents

Apparatus for sensing substrate

Info

Publication number
TW200706477A
TW200706477A TW095122424A TW95122424A TW200706477A TW 200706477 A TW200706477 A TW 200706477A TW 095122424 A TW095122424 A TW 095122424A TW 95122424 A TW95122424 A TW 95122424A TW 200706477 A TW200706477 A TW 200706477A
Authority
TW
Taiwan
Prior art keywords
substrates
substrate
support frame
sensor support
cassette
Prior art date
Application number
TW095122424A
Other languages
Chinese (zh)
Other versions
TWI302140B (en
Inventor
Joung-Shin Kim
Original Assignee
Joung-Shin Kim
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Joung-Shin Kim filed Critical Joung-Shin Kim
Publication of TW200706477A publication Critical patent/TW200706477A/en
Application granted granted Critical
Publication of TWI302140B publication Critical patent/TWI302140B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Nonlinear Science (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
  • Controlling Sheets Or Webs (AREA)

Abstract

Provided is a substrate detection apparatus. The substrate detection apparatus includes: a sensor support frame disposed adjacent to a vertically elongated cassette in which a plurality of substrates are stacked; and a plurality of ultrasonic sensors installed at one surface of the sensor support frame, emitting ultrasonic waves in parallel to the substrates, and detecting the ultrasonic waves reflected by the substrates to detect the presence of each substrate. Therefore, since an operation for detecting whether substrates such as glass substrates or wafers are positioned in a cassette can be simplified, the detection process can be sped up.
TW95122424A 2005-08-08 2006-06-22 Apparatus for sensing substrate TWI302140B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR20050072505 2005-08-08
KR20060049887A KR100658520B1 (en) 2005-08-08 2006-06-02 Apparatus for sensing substrate

Publications (2)

Publication Number Publication Date
TW200706477A true TW200706477A (en) 2007-02-16
TWI302140B TWI302140B (en) 2008-10-21

Family

ID=37727507

Family Applications (1)

Application Number Title Priority Date Filing Date
TW95122424A TWI302140B (en) 2005-08-08 2006-06-22 Apparatus for sensing substrate

Country Status (5)

Country Link
JP (1) JP2009503885A (en)
KR (1) KR100658520B1 (en)
CN (1) CN101258437A (en)
TW (1) TWI302140B (en)
WO (1) WO2007018350A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201321286A (en) * 2011-11-18 2013-06-01 Au Optronics Corp Cassette and adjustable detect device thereof
KR101701419B1 (en) * 2016-08-17 2017-02-02 주식회사 오토닉스 Reflective type image detecting sensor

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06244268A (en) * 1993-02-16 1994-09-02 Tokyo Electron Tohoku Ltd Transfer equipment
JPH11214484A (en) * 1998-01-27 1999-08-06 Nikon Corp Substrate detector
KR100278807B1 (en) * 1998-05-01 2001-01-15 신덕교 Wafer inspection system
KR100570228B1 (en) * 2003-09-17 2006-04-11 동부아남반도체 주식회사 Cassette stage of processing unit and method for confirming alignment and dimension of cassette using it

Also Published As

Publication number Publication date
WO2007018350A1 (en) 2007-02-15
KR100658520B1 (en) 2006-12-15
CN101258437A (en) 2008-09-03
JP2009503885A (en) 2009-01-29
TWI302140B (en) 2008-10-21
KR20060069417A (en) 2006-06-21

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