TW200643053A - Organoaluminum precursor compounds - Google Patents

Organoaluminum precursor compounds

Info

Publication number
TW200643053A
TW200643053A TW095104234A TW95104234A TW200643053A TW 200643053 A TW200643053 A TW 200643053A TW 095104234 A TW095104234 A TW 095104234A TW 95104234 A TW95104234 A TW 95104234A TW 200643053 A TW200643053 A TW 200643053A
Authority
TW
Taiwan
Prior art keywords
precursor compounds
organoaluminum precursor
organoaluminum
producing
carbon atoms
Prior art date
Application number
TW095104234A
Other languages
English (en)
Inventor
David Walter Peters
Derrik S Helfer
Original Assignee
Praxair Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Praxair Technology Inc filed Critical Praxair Technology Inc
Priority to US11/395,142 priority Critical patent/US7348445B2/en
Publication of TW200643053A publication Critical patent/TW200643053A/zh
Priority to US12/020,953 priority patent/US7615250B2/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F5/00—Compounds containing elements of Groups 3 or 13 of the Periodic Table
    • C07F5/06—Aluminium compounds
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F5/00—Compounds containing elements of Groups 3 or 13 of the Periodic Table
    • C07F5/06—Aluminium compounds
    • C07F5/061—Aluminium compounds with C-aluminium linkage
    • C07F5/066—Aluminium compounds with C-aluminium linkage compounds with Al linked to an element other than Al, C, H or halogen (this includes Al-cyanide linkage)
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F4/00—Polymerisation catalysts
    • C08F4/02—Carriers therefor
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F4/00—Polymerisation catalysts
    • C08F4/42—Metals; Metal hydrides; Metallo-organic compounds; Use thereof as catalyst precursors
    • C08F4/44—Metals; Metal hydrides; Metallo-organic compounds; Use thereof as catalyst precursors selected from light metals, zinc, cadmium, mercury, copper, silver, gold, boron, gallium, indium, thallium, rare earths or actinides
    • C08F4/60—Metals; Metal hydrides; Metallo-organic compounds; Use thereof as catalyst precursors selected from light metals, zinc, cadmium, mercury, copper, silver, gold, boron, gallium, indium, thallium, rare earths or actinides together with refractory metals, iron group metals, platinum group metals, manganese, rhenium technetium or compounds thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Chemical Vapour Deposition (AREA)
  • Formation Of Insulating Films (AREA)
TW095104234A 2005-02-14 2006-02-08 Organoaluminum precursor compounds TW200643053A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US11/395,142 US7348445B2 (en) 2005-02-14 2006-04-03 Organoaluminum precursor compounds
US12/020,953 US7615250B2 (en) 2005-02-14 2008-01-28 Organoaluminum precursor compounds

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US65199505P 2005-02-14 2005-02-14
US11/341,668 US20060193984A1 (en) 2005-02-14 2006-01-30 Organoaluminum precursor compounds

Publications (1)

Publication Number Publication Date
TW200643053A true TW200643053A (en) 2006-12-16

Family

ID=36916924

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095104234A TW200643053A (en) 2005-02-14 2006-02-08 Organoaluminum precursor compounds

Country Status (6)

Country Link
US (1) US20060193984A1 (zh)
EP (1) EP1853384A4 (zh)
JP (1) JP2008532932A (zh)
KR (1) KR20070107124A (zh)
TW (1) TW200643053A (zh)
WO (1) WO2006088686A2 (zh)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8318966B2 (en) * 2006-06-23 2012-11-27 Praxair Technology, Inc. Organometallic compounds
KR100958333B1 (ko) * 2008-10-14 2010-05-17 (주)디엔에프 신규한 저머늄유도체 화합물 및 이의 제조방법
WO2012053433A1 (ja) * 2010-10-22 2012-04-26 Jsr株式会社 アルミナ膜形成方法
WO2012053436A1 (ja) * 2010-10-22 2012-04-26 Jsr株式会社 アルミナ膜形成用組成物及びアルミナ膜形成方法
JP5962124B2 (ja) * 2012-03-28 2016-08-03 株式会社明電舎 酸化膜の形成方法
JP2015149461A (ja) * 2014-02-10 2015-08-20 東京エレクトロン株式会社 金属酸化物膜の成膜方法および成膜装置
CN106163663A (zh) * 2014-04-07 2016-11-23 沙特基础工业公司 有机铝助催化剂组合物和过渡金属络合物催化剂组合物的冷冻干燥
KR102029071B1 (ko) * 2016-11-21 2019-10-07 한국화학연구원 13족 금속 전구체, 이를 포함하는 박막증착용 조성물 및 이를 이용하는 박막의 제조방법
KR20200074263A (ko) * 2017-11-19 2020-06-24 어플라이드 머티어리얼스, 인코포레이티드 금속 표면들 상의 금속 산화물들의 ald를 위한 방법들
EP3728688B1 (en) * 2017-12-20 2021-11-10 Basf Se Process for the generation of metal-containing films
JP7090174B2 (ja) * 2018-04-05 2022-06-23 アプライド マテリアルズ インコーポレイテッド 金属酸化物の低温ａｌｄのための方法
JP7401928B2 (ja) * 2018-07-30 2023-12-20 ユーピー ケミカル カンパニー リミテッド アルミニウム化合物及びこれを使用したアルミニウム含有膜の形成方法
US11319449B2 (en) 2019-12-20 2022-05-03 L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude Area selective deposition of metal containing films
KR20210093011A (ko) * 2020-01-17 2021-07-27 주식회사 한솔케미칼 원자층 증착용(ald), 화학 기상 증착용(cvd) 전구체 화합물 및 이를 이용한 ald/cvd 증착법
WO2021172867A1 (ko) * 2020-02-24 2021-09-02 주식회사 유피케미칼 알루미늄 전구체 화합물 및 이의 제조 방법, 이를 이용한 알루미늄 함유 막 형성 방법

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4009394A1 (de) * 1989-12-12 1991-06-13 Merck Patent Gmbh Heterocyclische metallorganische verbindungen

Also Published As

Publication number Publication date
US20060193984A1 (en) 2006-08-31
WO2006088686A3 (en) 2007-03-22
JP2008532932A (ja) 2008-08-21
EP1853384A2 (en) 2007-11-14
EP1853384A4 (en) 2010-06-30
KR20070107124A (ko) 2007-11-06
WO2006088686A2 (en) 2006-08-24

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