TW200633813A - CMP method, CMP apparatus, and manufacturing method of semiconductor device - Google Patents

CMP method, CMP apparatus, and manufacturing method of semiconductor device

Info

Publication number
TW200633813A
TW200633813A TW094144997A TW94144997A TW200633813A TW 200633813 A TW200633813 A TW 200633813A TW 094144997 A TW094144997 A TW 094144997A TW 94144997 A TW94144997 A TW 94144997A TW 200633813 A TW200633813 A TW 200633813A
Authority
TW
Taiwan
Prior art keywords
cmp
organic solvent
insulating film
interlayer insulating
substrate
Prior art date
Application number
TW094144997A
Other languages
English (en)
Other versions
TWI386281B (zh
Inventor
Syozo Takada
Hisanori Matsuo
Akira Ishikawa
Original Assignee
Nikon Corp
Nat Inst Of Advanced Ind Scien
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp, Nat Inst Of Advanced Ind Scien, Ebara Corp filed Critical Nikon Corp
Publication of TW200633813A publication Critical patent/TW200633813A/zh
Application granted granted Critical
Publication of TWI386281B publication Critical patent/TWI386281B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02057—Cleaning during device manufacture
    • H01L21/02068—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers
    • H01L21/02074—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers the processing being a planarization of conductive layers
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/50—Solvents
    • C11D7/5004—Organic solvents
    • C11D7/5013—Organic solvents containing nitrogen
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/50—Solvents
    • C11D7/5004—Organic solvents
    • C11D7/5022—Organic solvents containing oxygen
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
    • H01L21/76822—Modification of the material of dielectric layers, e.g. grading, after-treatment to improve the stability of the layers, to increase their density etc.
    • H01L21/76826—Modification of the material of dielectric layers, e.g. grading, after-treatment to improve the stability of the layers, to increase their density etc. by contacting the layer with gases, liquids or plasmas
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
    • H01L21/76822—Modification of the material of dielectric layers, e.g. grading, after-treatment to improve the stability of the layers, to increase their density etc.
    • H01L21/76828—Modification of the material of dielectric layers, e.g. grading, after-treatment to improve the stability of the layers, to increase their density etc. thermal treatment
    • C11D2111/22—
TW094144997A 2005-01-21 2005-12-19 CMP polishing method, CMP polishing apparatus, and manufacturing method of semiconductor element TWI386281B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005013734A JP4876215B2 (ja) 2005-01-21 2005-01-21 Ｃｍｐ研磨方法、ｃｍｐ研磨装置、及び半導体デバイスの製造方法

Publications (2)

Publication Number Publication Date
TW200633813A true TW200633813A (en) 2006-10-01
TWI386281B TWI386281B (zh) 2013-02-21

Family

ID=36692121

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094144997A TWI386281B (zh) 2005-01-21 2005-12-19 CMP polishing method, CMP polishing apparatus, and manufacturing method of semiconductor element

Country Status (7)

Country Link
US (2) US8241426B2 (zh)
EP (1) EP1852898A4 (zh)
JP (1) JP4876215B2 (zh)
KR (2) KR100893116B1 (zh)
CN (1) CN100472728C (zh)
TW (1) TWI386281B (zh)
WO (1) WO2006077730A1 (zh)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8021490B2 (en) * 2007-01-04 2011-09-20 Eastman Chemical Company Substrate cleaning processes through the use of solvents and systems
JP5435734B2 (ja) * 2010-05-27 2014-03-05 富士フイルム株式会社 鏡枠部品、レンズ組立体、撮像装置、および鏡枠部品の製造方法
CN102489474B (zh) * 2011-12-15 2016-01-13 北京石油化工学院 除尘装置及除尘式结构
JP6253089B2 (ja) * 2013-12-10 2017-12-27 株式会社ディスコ 研削装置
WO2017154673A1 (ja) * 2016-03-08 2017-09-14 株式会社荏原製作所 基板洗浄装置、基板洗浄方法、基板処理装置および基板乾燥装置
US20210210353A1 (en) * 2020-01-07 2021-07-08 Xia Tai Xin Semiconductor (Qing Dao) Ltd. Method of processing substrate having polysilicon layer and system thereof
CN114425534B (zh) * 2021-12-13 2024-04-16 金华博蓝特新材料有限公司 一种在蓝宝石衬底铜抛后清洗的方法

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JPH07211681A (ja) 1994-01-19 1995-08-11 Hitachi Ltd 洗浄方法および洗浄装置
US5855811A (en) * 1996-10-03 1999-01-05 Micron Technology, Inc. Cleaning composition containing tetraalkylammonium salt and use thereof in semiconductor fabrication
JP4557316B2 (ja) 1997-07-24 2010-10-06 Ｏｋｉセミコンダクタ株式会社 半導体素子の製造方法、および半導体素子製造用処理室
US5968280A (en) * 1997-11-12 1999-10-19 International Business Machines Corporation Method for cleaning a surface
JP3003684B1 (ja) * 1998-09-07 2000-01-31 日本電気株式会社 基板洗浄方法および基板洗浄液
US6123088A (en) * 1999-12-20 2000-09-26 Chartered Semiconducotor Manufacturing Ltd. Method and cleaner composition for stripping copper containing residue layers
KR100773165B1 (ko) * 1999-12-24 2007-11-02 가부시키가이샤 에바라 세이사꾸쇼 반도체기판처리장치 및 처리방법
TW572980B (en) * 2000-01-12 2004-01-21 Jsr Corp Aqueous dispersion for chemical mechanical polishing and chemical mechanical polishing process
TW586157B (en) * 2000-04-13 2004-05-01 Showa Denko Kk Slurry composition for polishing semiconductor device, and method for manufacturing semiconductor device using the same
WO2001084621A1 (en) * 2000-04-27 2001-11-08 Ebara Corporation Rotation holding device and semiconductor substrate processing device
US6623343B2 (en) * 2000-05-12 2003-09-23 Multi Planar Technologies, Inc. System and method for CMP head having multi-pressure annular zone subcarrier material removal control
JP2002110679A (ja) 2000-09-29 2002-04-12 Hitachi Ltd 半導体集積回路装置の製造方法
JP2002270570A (ja) * 2001-03-07 2002-09-20 Hitachi Ltd 半導体装置の製造方法および半導体製造装置
KR20040018558A (ko) * 2001-08-13 2004-03-03 가부시키 가이샤 에바라 세이사꾸쇼 반도체장치와 그 제조방법 및 도금액
US6706641B2 (en) * 2001-09-13 2004-03-16 Micell Technologies, Inc. Spray member and method for using the same
JP4025096B2 (ja) * 2002-03-08 2007-12-19 株式会社荏原製作所 基板処理方法
JP2004182773A (ja) 2002-11-29 2004-07-02 Nec Electronics Corp 疎水性基板洗浄用液体組成物
US6803291B1 (en) * 2003-03-20 2004-10-12 Taiwan Semiconductor Manufacturing Co., Ltd Method to preserve alignment mark optical integrity
JP4375991B2 (ja) * 2003-04-09 2009-12-02 関東化学株式会社 半導体基板洗浄液組成物
JP2005026277A (ja) 2003-06-30 2005-01-27 Sony Corp 低誘電率膜の成膜方法
US7344988B2 (en) * 2003-10-27 2008-03-18 Dupont Air Products Nanomaterials Llc Alumina abrasive for chemical mechanical polishing
US20050208774A1 (en) * 2004-01-08 2005-09-22 Akira Fukunaga Wet processing method and processing apparatus of substrate

Also Published As

Publication number Publication date
KR20070095297A (ko) 2007-09-28
US8241426B2 (en) 2012-08-14
US20120315831A1 (en) 2012-12-13
KR20080058510A (ko) 2008-06-25
CN100472728C (zh) 2009-03-25
KR100893116B1 (ko) 2009-04-14
JP2006203027A (ja) 2006-08-03
US20090047785A1 (en) 2009-02-19
EP1852898A4 (en) 2009-07-15
WO2006077730A1 (ja) 2006-07-27
EP1852898A1 (en) 2007-11-07
JP4876215B2 (ja) 2012-02-15
CN101107697A (zh) 2008-01-16
TWI386281B (zh) 2013-02-21

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