TW200632639A - Automatic defect repair system - Google Patents
Automatic defect repair systemInfo
- Publication number
- TW200632639A TW200632639A TW095102280A TW95102280A TW200632639A TW 200632639 A TW200632639 A TW 200632639A TW 095102280 A TW095102280 A TW 095102280A TW 95102280 A TW95102280 A TW 95102280A TW 200632639 A TW200632639 A TW 200632639A
- Authority
- TW
- Taiwan
- Prior art keywords
- repair
- classifiers
- classification
- defect
- tiered
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136259—Repairing; Defects
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F18/00—Pattern recognition
- G06F18/20—Analysing
- G06F18/24—Classification techniques
- G06F18/243—Classification techniques relating to the number of classes
- G06F18/2431—Multiple classes
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
- G06T7/001—Industrial image inspection using an image reference approach
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
- G06V10/00—Arrangements for image or video recognition or understanding
- G06V10/70—Arrangements for image or video recognition or understanding using pattern recognition or machine learning
- G06V10/764—Arrangements for image or video recognition or understanding using pattern recognition or machine learning using classification, e.g. of video objects
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136259—Repairing; Defects
- G02F1/136263—Line defects
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/10—Image acquisition modality
- G06T2207/10024—Color image
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30108—Industrial image inspection
- G06T2207/30121—CRT, LCD or plasma display
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G2330/00—Aspects of power supply; Aspects of display protection and defect management
- G09G2330/08—Fault-tolerant or redundant circuits, or circuits in which repair of defects is prepared
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- Nonlinear Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Optics & Photonics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Artificial Intelligence (AREA)
- Evolutionary Computation (AREA)
- Data Mining & Analysis (AREA)
- Bioinformatics & Cheminformatics (AREA)
- General Health & Medical Sciences (AREA)
- Software Systems (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Bioinformatics & Computational Biology (AREA)
- Evolutionary Biology (AREA)
- General Engineering & Computer Science (AREA)
- Medical Informatics (AREA)
- Multimedia (AREA)
- Databases & Information Systems (AREA)
- Computing Systems (AREA)
- Computer Hardware Design (AREA)
- Quality & Reliability (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mathematical Physics (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Image Processing (AREA)
Abstract
A repair system for flat panel display (FDP) substrates performs a number of operations, such as automatic image capture and processing, automatic defect classification, automatic repair classification, and repair macro(instruction) generation software. Defect classification, repair classification, and repair macro generation are based on an open architecture and can address any number of use-cases through the use of multi-tiered classifiers, and thus a wide variety of panel designs may be repaired within a single repair tool. The multi-tiered set of classifiers, e.g., defect classifiers, repair classifiers, enables an efficient decision-making repair process with capability for customization. The multi-tiered classifiers are optionally extended to support statistical learning (both online and batch) and active learning, in the context of a supporting database of defects and associates tools. The classifiers and recipes rules may be automatically or semi-automatically improved over time, incorporating lessons learned by operators while judging defect or repair needs.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US64611105P | 2005-01-21 | 2005-01-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200632639A true TW200632639A (en) | 2006-09-16 |
TWI447575B TWI447575B (en) | 2014-08-01 |
Family
ID=36692929
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095102280A TWI447575B (en) | 2005-01-21 | 2006-01-20 | Automatic defect repair system |
Country Status (6)
Country | Link |
---|---|
US (1) | US7761182B2 (en) |
JP (1) | JP2008529067A (en) |
KR (1) | KR101387785B1 (en) |
CN (1) | CN101536011B (en) |
TW (1) | TWI447575B (en) |
WO (1) | WO2006078916A2 (en) |
Cited By (3)
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---|---|---|---|---|
TWI475215B (en) * | 2009-03-31 | 2015-03-01 | Lg Display Co Ltd | System and method for testing liquid crystal display device |
TWI755312B (en) * | 2021-04-07 | 2022-02-11 | 佑昇雷射股份有限公司 | Intelligent visual laser cutting expert system and its operation process |
TWI821571B (en) * | 2019-06-13 | 2023-11-11 | 日商V科技股份有限公司 | Laser repair method, laser repair device |
Families Citing this family (67)
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US7761182B2 (en) | 2005-01-21 | 2010-07-20 | Photon Dynamics, Inc. | Automatic defect repair system |
US7301133B2 (en) * | 2005-01-21 | 2007-11-27 | Photon Dynamics, Inc. | Tracking auto focus system |
JP4956984B2 (en) * | 2005-12-14 | 2012-06-20 | ソニー株式会社 | Defect correction apparatus and defect correction method |
JP2007189589A (en) * | 2006-01-16 | 2007-07-26 | Sony Corp | Information processor and information processing method, learning device and learning method, and program |
US7786742B2 (en) | 2006-05-31 | 2010-08-31 | Applied Materials, Inc. | Prober for electronic device testing on large area substrates |
DE102006039356A1 (en) * | 2006-08-22 | 2008-03-20 | Robert Bosch Gmbh | Robotic laser welding process and assembly for automotive body panels uses programmable logic controls to regulate time-critical operations |
JP4813322B2 (en) * | 2006-10-17 | 2011-11-09 | シャープ株式会社 | Substrate repair system, substrate repair method, program, and computer-readable recording medium |
JP4940941B2 (en) * | 2006-12-25 | 2012-05-30 | ソニー株式会社 | Defect correction apparatus and defect correction method |
JP4374552B2 (en) | 2007-04-12 | 2009-12-02 | ソニー株式会社 | Substrate manufacturing method, substrate manufacturing system, and display device manufacturing method |
US8023766B1 (en) * | 2007-04-30 | 2011-09-20 | Hewlett-Packard Development Company, L.P. | Method and system of processing an image containing undesirable pixels |
JP5353179B2 (en) * | 2008-10-22 | 2013-11-27 | ソニー株式会社 | Defect correction apparatus and defect correction method |
JP5158365B2 (en) * | 2008-11-14 | 2013-03-06 | オムロン株式会社 | Substrate defect inspection system |
US7979969B2 (en) * | 2008-11-17 | 2011-07-19 | Solopower, Inc. | Method of detecting and passivating a defect in a solar cell |
US8219514B2 (en) * | 2009-01-07 | 2012-07-10 | Oracle International Corporation | Methods, systems, and computer program product for implementing expert assessment of a product |
US9020943B2 (en) * | 2009-01-07 | 2015-04-28 | Oracle International Corporation | Methods, systems, and computer program product for automatically categorizing defects |
JP5640328B2 (en) * | 2009-05-20 | 2014-12-17 | ソニー株式会社 | Defect correction apparatus and defect correction method |
US10996258B2 (en) * | 2009-11-30 | 2021-05-04 | Ignis Innovation Inc. | Defect detection and correction of pixel circuits for AMOLED displays |
JP2013068645A (en) * | 2010-01-28 | 2013-04-18 | Sharp Corp | Method for correcting defect in display device, display device, and method for manufacturing the same |
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US8331650B2 (en) | 2010-07-29 | 2012-12-11 | Sharp Laboratories Of America, Inc. | Methods, systems and apparatus for defect detection |
US8995747B2 (en) | 2010-07-29 | 2015-03-31 | Sharp Laboratories Of America, Inc. | Methods, systems and apparatus for defect detection and classification |
US9053391B2 (en) | 2011-04-12 | 2015-06-09 | Sharp Laboratories Of America, Inc. | Supervised and semi-supervised online boosting algorithm in machine learning framework |
CN102829858B (en) * | 2011-06-15 | 2014-09-10 | 上海天马微电子有限公司 | Defect detecting and repairing device and method of optical sensor array panel |
CN102262663B (en) * | 2011-07-25 | 2013-01-02 | 中国科学院软件研究所 | Method for repairing software defect reports |
US9092842B2 (en) | 2011-08-04 | 2015-07-28 | Sharp Laboratories Of America, Inc. | System for defect detection and repair |
US9715723B2 (en) | 2012-04-19 | 2017-07-25 | Applied Materials Israel Ltd | Optimization of unknown defect rejection for automatic defect classification |
US10043264B2 (en) | 2012-04-19 | 2018-08-07 | Applied Materials Israel Ltd. | Integration of automatic and manual defect classification |
JP2013257208A (en) * | 2012-06-12 | 2013-12-26 | Sharp Corp | Defect causing stage analyzing device and defect causing stage analyzing method |
US8831333B2 (en) * | 2012-06-13 | 2014-09-09 | Nanya Technology Corporation | Mask pattern analysis apparatus and method for analyzing mask pattern |
US8995745B2 (en) * | 2012-07-31 | 2015-03-31 | Fei Company | Sequencer for combining automated and manual-assistance jobs in a charged particle beam device |
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US10114368B2 (en) | 2013-07-22 | 2018-10-30 | Applied Materials Israel Ltd. | Closed-loop automatic defect inspection and classification |
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CN106814479B (en) * | 2017-01-11 | 2019-07-16 | 昆山国显光电有限公司 | A kind of offset compensating method of panel defect location, apparatus and system |
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US7761182B2 (en) | 2005-01-21 | 2010-07-20 | Photon Dynamics, Inc. | Automatic defect repair system |
-
2006
- 2006-01-20 US US11/336,655 patent/US7761182B2/en active Active
- 2006-01-20 CN CN2006800029681A patent/CN101536011B/en active Active
- 2006-01-20 JP JP2007552292A patent/JP2008529067A/en active Pending
- 2006-01-20 KR KR1020077019110A patent/KR101387785B1/en active IP Right Grant
- 2006-01-20 WO PCT/US2006/002058 patent/WO2006078916A2/en active Application Filing
- 2006-01-20 TW TW095102280A patent/TWI447575B/en active
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI475215B (en) * | 2009-03-31 | 2015-03-01 | Lg Display Co Ltd | System and method for testing liquid crystal display device |
TWI821571B (en) * | 2019-06-13 | 2023-11-11 | 日商V科技股份有限公司 | Laser repair method, laser repair device |
TWI755312B (en) * | 2021-04-07 | 2022-02-11 | 佑昇雷射股份有限公司 | Intelligent visual laser cutting expert system and its operation process |
Also Published As
Publication number | Publication date |
---|---|
TWI447575B (en) | 2014-08-01 |
WO2006078916A2 (en) | 2006-07-27 |
JP2008529067A (en) | 2008-07-31 |
WO2006078916A3 (en) | 2009-04-16 |
KR101387785B1 (en) | 2014-04-25 |
US7761182B2 (en) | 2010-07-20 |
CN101536011B (en) | 2013-01-09 |
US20060226865A1 (en) | 2006-10-12 |
CN101536011A (en) | 2009-09-16 |
KR20070095437A (en) | 2007-09-28 |
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