CN102829858B - Defect detecting and repairing device and method of optical sensor array panel - Google Patents
Defect detecting and repairing device and method of optical sensor array panel Download PDFInfo
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- CN102829858B CN102829858B CN201110161648.3A CN201110161648A CN102829858B CN 102829858 B CN102829858 B CN 102829858B CN 201110161648 A CN201110161648 A CN 201110161648A CN 102829858 B CN102829858 B CN 102829858B
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Abstract
The invention relates to a defect detecting and repairing device and a defect detecting and repairing method of an optical sensor array panel. The defect detecting and repairing device comprises a detection unit, a process display unit and a location repairing unit, wherein the detection unit is used for detecting an analog electric signal output by an optical sensor array panel which is arranged on the detection unit and converting the analog electric signal into a digital electric signal; the process display unit is used for receiving the digital electric signal outputted by the detection unit and converting the digital electric signal into an image to be displayed, and can judge whether the optical sensor array panel has a defect or not according to the displayed image; and the location repairing unit is used for repairing the defect after locating the defect of the optical sensor array panel. According to the defect detecting and repairing device, operations of detecting, locating and repairing the defect are finished in the same detection repair device, and the position of each pixel unit of the optical sensor array panel is determined without determining a coordinate system; furthermore a sensor pixel unit with the defect can be located after the defect is found, and the repairing effect can be determined when the defect is repaired; and therefore, the operation method is simple and convenient, is low in error rate and high in operating efficiency.
Description
Technical field
The present invention relates to optical sensor field, particularly a kind of defects detection prosthetic device and method thereof of photosensor array panel.
Background technology
Flat X-ray detector is a kind of new x-ray imaging device, because Flat X-ray detector has very high spatial resolution and dynamic range, and digital picture obtaining means fast can be provided again, therefore Flat X-ray detector obtains a wide range of applications.
The major part of Flat X-ray detector is imaging system, and the core of imaging system is X ray sensor arraying bread board.X ray sensor arraying bread board is made up of multiple pixel cells, and each pixel cell comprises an X ray sensor, and described X ray sensor is the one in optical sensor.Optical sensor can be accepted external optical signal and light signal is converted to electric signal output, mainly contains photodiode, phototriode, photoresistance, photomultiplier cell, photoelectric cell, PIN pipe, CCD etc.Optical sensor is the sensor that utilizes the photoelectric effect of material to be made into, and due to different material characters, the scope of the different acceptable light of optical sensor by ultraviolet to infrared wavelength not etc., also comprises X ray, and corresponding light signal is converted to electric signal.
Flat X-ray detector basic imaging principle is: X-ray signal is converted to electric signal by the X ray sensor array on X ray sensor arraying bread board, then by corresponding field effect transistor (FET, Field Effect Transistor) array reads electric signal, and form digital signal by analog to digital converter, pass through again the image processing system processing of computing machine, finally form image and show.
But existing Flat X-ray detector in the course of the work, if there is defect in X ray sensor pixel cell, can cause the light signal of image and induction not corresponding, such as having under illumination condition, defective X ray sensor pixel cell can not be converted to electric signal by X-ray signal, and corresponding image pixel is dark.Therefore, X ray sensor arraying bread board must detect before dispatching from the factory, but because X ray sensor pel array panel self can only induction light, and can not be luminous, can not direct imaging on X ray sensor arraying bread board, therefore utilize microscope in X ray sensor array, to find out defective X ray sensor pixel cell very difficult, and further limit research and the reparation of the X ray sensor to there is defect.
The existing method that defect on X ray sensor arraying bread board is detected and repaired is as follows:
1, image display step: X ray sensor arraying bread board is arranged on detecting devices, shows the image that X ray sensor arraying bread board induction light produced after treatment on display;
2, defect detection procedure: whether defectiveness of the detection from the image showing, it is just defect point, generally the device defectiveness of the X ray sensor pixel cell of this pixel that the GTG that the GTG showing as certain pixel and surrounding pixel show has notable difference; On the image showing, set up coordinate system, this coordinate system can be determined the position of each X ray sensor pixel cell, and the coordinate of the defect point on document image completes the detection to defect;
3, defect location is repaired step: X ray sensor arraying bread board is positioned on prosthetic appliance, on prosthetic appliance, be also provided with coordinate system, the coordinate system of setting up on image in coordinate system on described prosthetic appliance and defect detection procedure is consistent, also can determine the position of each X ray sensor pixel cell; On input picture, the coordinate of defect point finds the defect pixel unit on X ray sensor arraying bread board, completes the location to defect, then recoverable defect is carried out to corresponding reparation with prosthetic appliance;
4, determine repairing effect step: take off X ray sensor arraying bread board from prosthetic appliance, and X ray sensor arraying bread board is arranged on detecting devices again, again on image, set up and coordinate system corresponding to the each pixel cell of X ray sensor arraying bread board, find the coordinate of former defect, judge by the display effect of display epigraph whether former defect reaches reparation target.If reach reparation target, repair and finish; If do not reach reparation target, repeat above-mentioned 1～4 step.
Said method all will be set up the coordinate system of the each pixel cell of corresponding X ray sensor arraying bread board at detecting devices and prosthetic appliance, and need set up different coordinates to different model X ray sensor arraying bread board, and complicated operation, easily makes mistakes; Be what on different devices, to be carried out respectively to defect location and reparation, X ray sensor arraying bread board need to be moved back and forth, processing step complexity, and inefficiency, and also the risk of X ray sensor arraying bread board breakage in the action of moving is back and forth also very large; To not learning at once repairing effect after the pixel cell reparation of defect point, also to again detect.
Summary of the invention
The problem that the present invention solves is to provide a kind of defects detection prosthetic device and method thereof of photosensor array panel, the problem such as solve in prior art the detection of photosensor array panel defect, location and repair system complexity, detection and restorative procedure are loaded down with trivial details, easily make mistakes.
Probe unit, in order to detect the analog electrical signal of photosensor array panel output, and is converted to digital electric signal by analog electrical signal;
Processes and displays unit, is converted to image by the digital electric signal of probe unit output and shows, shown in image demonstrate photosensor array panel and whether there is defect;
Unit is repaired in location, the defect on photosensor array panel is positioned, and the defect behind location is repaired.
A kind of method that the invention provides defects detection prosthetic device of photosensor array panel, comprising:
Probe unit is provided, surveys the analog electrical signal of exporting on photosensor array panel placed thereon, and analog electrical signal is converted to digital electric signal;
Processes and displays unit, receives the digital electric signal of probe unit output, and is converted to image and shows, shown in image display light sensor array panel whether there is defect;
Unit is repaired in location, after the defect on photosensor array panel is positioned, repairs described defect.
Compared with prior art, technical scheme of the present invention has the following advantages:
Photosensor array panel is positioned in the device that comprises probe unit, display unit, positioning unit, reparation unit and carries out defects detection, location and reparation.Owing to completing detection, location and the reparation of defect in same device, detecting and repair step reduces, without being set up to coordinate system, photosensor array panel carries out contraposition, after disfigurement discovery, just can position defect sensor pixel in addition, and can judge repairing effect when defect repair, error rate reduces, and work efficiency improves.
Further, the position of photosensor array positions of panels and defect is presented on display unit in real time, only needs mobile lasing light emitter bright spot cursor can be moved in defect image pixel, accurately the position of location defect pixel on photosensor array panel.
Brief description of the drawings
Fig. 1 is defects detection prosthetic device the first embodiment schematic diagram of the present invention;
Fig. 2 is using method specific embodiment schematic flow sheet of the present invention;
Fig. 3 is defects detection prosthetic device the second embodiment schematic diagram of the present invention;
Fig. 4 is defects detection prosthetic device the 3rd embodiment schematic diagram of the present invention;
Fig. 5 is defect and the bright spot cursor schematic diagram that embodiment processes and displays unit shows;
Fig. 6 is the aligning defective locations schematic diagram that embodiment processes and displays unit shows.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is elaborated.
Embodiment mono-
As shown in Figure 1, a kind of detection prosthetic device of photosensor array panel defect, comprising: probe unit 210, and the analog electrical signal that the photosensor array panel 214 being placed on it in order to detection is exported, and analog electrical signal is converted to digital electric signal; Processes and displays unit 205, the digital electric signal that probe unit 210 is detected is converted to picture signal, and described picture signal is converted to image shows, and described image can feed back photosensor array panel and whether have defect; Unit 202 is repaired in location, the defect on photosensor array panel 214 is positioned, and the defect behind location is repaired.
In the present embodiment, reparation unit, described location 202 includes lasing light emitter, micro-unit and image unit.The Ear Mucosa Treated by He Ne Laser Irradiation that described lasing light emitter produces, on the photosensor array panel 214 being positioned on probe unit 210, positions or repairs the defect on photosensor array panel 214; The power of described lasing light emitter can regulate, and can produce low power laser and high power laser light.Described micro-unit has the microlens of multiple multiple, for the device architecture on photosensor array panel is amplified, is convenient to observe defect, determines defect type; Device situation on described image unit Real-time Collection photosensor array panel, described image unit also can gather the device situation after micro-unit amplifies.
In the present embodiment, in described micro-unit, be also provided with lighting source.
In the present embodiment, described processes and displays unit 205 comprises: graphics processing unit 208, is electrically connected with described probe unit 210, in order to receive the digital signal that probe unit 210 exports and to be converted to picture signal; The first display unit 206, is shown as image in order to graphics processing unit 208 is processed to the picture signal obtaining.
In the present embodiment, the detection prosthetic device of described photosensor array panel defect also comprises: the second display unit 204, and repair unit 202 with location and be electrically connected, in order to show the device situation of the photosensor array panel that image unit collects.
In another example of the present invention, described the first display unit 206 and the second display unit 204 can be same display unit and repair unit 202 with location, graphics processing unit 208 is connected, in order to graphics processing unit 208 is processed to the picture signal obtaining is shown as image and in order to show the device situation of the photosensor array panel that image unit collects.
In an example more of the present invention, described the second display unit 204 can omit, and directly observes defect by micro-unit with human eye.
In the present embodiment, the detection prosthetic device of described photosensor array panel defect, also comprise: control module 200, for controlling the various operations that detect prosthetic device, repair the movement of unit, the On/Off of installation's power source, energy adjustment, the On/Off of microscope light source etc. of lasing light emitter such as controlling location.
In the present embodiment, the detection prosthetic device of described photosensor array panel defect also comprises: base station 212, and for carrying probe unit 210.
Illustrate now the detection prosthetic device principle of work of above-mentioned photosensor array panel defect in conjunction with the using method schematic flow sheet shown in Fig. 2:
S11 shows image: carry photosensor array panel 214 with probe unit 210, photosensor array panel 214 receives external optical signal, and converts light signal to analog electrical signal.Probe unit 210 receives the analog electrical signal that photosensor array panel 214 is exported, and analog electrical signal is converted to digital electric signal.The digital electric signal that graphics processing unit 208 in processes and displays unit 205 is exported probe unit 210 is converted to picture signal; The first display unit 206 in processes and displays unit 205 is processed by graphics processing unit 208 picture signal obtaining and is shown as image.
Whether S12 detects defectiveness: observe the image that the first display unit 206 shows, judge whether to exist defect according to each pixel gray level situation, because whole photosensor array panel 214 is all receiving outside light signal uniformly, so the GTG of each pixel should be consistent in the picture signal of exporting, if the GTG of certain pixel is obviously different with the GTG of other pixel in the image showing, can substantially determine this pixel defectiveness.
S13 defect location: open location by control module 200 and repair the lasing light emitter in unit 202, and make lasing light emitter launch low power laser, low power laser is irradiated on photosensor array panel 214, photosensor array panel produces corresponding analog electrical signal, described analog electrical signal is converted to digital electric signal by probe unit 210, and digital electric signal is shown as bright spot cursor after graphics processing unit 208 is processed on the first display unit 206.Unit 202 is repaired in running fix, and observes the bright spot cursor position showing on the first display unit 206, and bright spot cursor position is overlapped with defective locations; Then, observe the defect image of being repaired the pixel cell that the image unit in unit 202 captures by location by the second display unit 204, now can repair the micro-unit amplification defect image in unit 202 by location, till the image of demonstration is enough known; Next, determine the type of defect on photosensor array panel.
S14 repairs: controlled low power laser is switched to high power laser light by control module 200, carry out corresponding reparation according to defective locations and defect type.
S15 determines repairing effect: check the outward appearance of the pixel cell after defect repair by the second display unit 204, whether the pixel gray level of observing after defect repair by the first display unit 206 reaches reparation target, to judge that whether reparation is successful.
In the present embodiment, check the outward appearance of the pixel cell after defect repair by the second display unit 204, the pixel gray level of observing after defect repair by the first display unit 206 is to produce a desired effect, and described the first display unit 206 and the second display unit 204 can be same display units.
In the present embodiment, described defect repair comprises cutting and is connected.The reparation of cutting for needs, the part of needs being cut with high power laser light cutting.The reparation connecting for needs, in patching material atmosphere, with Ear Mucosa Treated by He Ne Laser Irradiation, spot heating, makes material gas generation thermal decomposition, piles up film forming, thereby the part disconnecting is connected again.Described for cutting the laser power difference of repairing and being connected reparation, can regulate as the case may be the power of required laser.
The detection prosthetic device of photosensor array panel defect provided by the invention completes detection, location and the reparation of defect in same device, without photosensor array panel is picked and placeed back and forth in different devices, and work simplification, step reduces; Also locate the each pixel cell on photosensor array panel without set up coordinate system on different devices, error rate reduces, and work efficiency improves.
Further, the image that on photosensor array panel, the signal of each pixel output forms is after treatment presented on display unit in real time, only need mobile lasing light emitter bright spot cursor can be moved in defect image pixel, the accurately position of location defect pixel on photosensor array panel, and the power in switched laser source just can be repaired defect.Successfully whether, simple to operate, work efficiency is high in the reparation that at once just can judge photosensor array panel by the image showing on display unit after reparation.
Embodiment bis-
As shown in Figure 3, a kind of detection prosthetic device of photosensor array panel defect, comprising: base station 312, and for carrying probe unit 310.Probe unit 310, the analog electrical signal that the photosensor array panel 314 being placed on it in order to detection is exported, and analog electrical signal is converted to digital electric signal.Processes and displays unit 305 comprises: graphics processing unit 308 and the first display unit 306; Described graphics processing unit 308 is electrically connected with described probe unit 310, is converted to picture signal in order to the digital electric signal that probe unit 310 is detected; Described the first display unit 306, is shown as image in order to the picture signal that graphics processing unit 308 is obtained.Unit 302 is repaired in location, the defect on photosensor array panel 314 is positioned, and the defect behind location is repaired.The second display unit 304, repairs unit 302 with location and is electrically connected, in order to the device image on display light sensor array panel.Control module 300, repairs movement, the On/Off of installation's power source, the adjusting location of unit 302 and repairs the energy in 302 inner laser sources, unit and the On/Off of microscope light source etc. for controlling location.Light shield 316, and be provided with light source in light shield 316, the spectral range of described light source, from ultraviolet to infrared wavelength, also comprises X ray.Light shield 316, for reparation unit 302, location, probe unit 310 and base station 312 and extraneous light are separated, is avoided external interference, makes photosensor array panel 314 receive only the light of light source, and the signal sending is more clear and stable.
In the present embodiment, light shield 316 is made up of light barrier.
In the present embodiment, photosensor array panel 314 is taking X-ray sensor array panel as example.
In the present embodiment, reparation unit, described location 302 includes lasing light emitter, micro-unit and image unit.The laser that described lasing light emitter produces can be radiated on the photosensor array panel 314 being placed on probe unit 310, and the defect on photosensor array panel 314 is positioned or repaired; The power of described lasing light emitter is adjustable, can produce low power laser and high power laser light.Described micro-unit, is convenient to determine defect type for defect is amplified; Described image unit is by the device situation on micro-unit Real-time Collection photosensor array panel.
In the present embodiment, described the first display unit 306 and the second display unit 304 can be same display units.
In the present embodiment, described the second display unit 304 can also omit, and directly observes defect by micro-unit with human eye.
In the present embodiment, judge whether to exist defect, in the image showing on common the first display unit 306, pixel gray level is defect point with the visibly different point of pixel gray level around.
In the present embodiment, described defect repair comprises cutting and is connected.The reparation of cutting for needs, the part of needs being cut with high power laser light cutting.The reparation connecting for needs, in patching material atmosphere, with Ear Mucosa Treated by He Ne Laser Irradiation, spot heating, makes material gas generation thermal decomposition, piles up film forming, thereby the part disconnecting is connected again.Described for cutting the laser power difference of repairing and being connected reparation, can regulate as the case may be the power of required laser.
In the present embodiment, the detection prosthetic device principle of work of photosensor array panel defect, with embodiment mono-, does not repeat them here.
The detection prosthetic device of photosensor array panel defect provided by the invention is provided with light shield, and be provided with light source in light shield inside, can avoid external interference, make photosensor array panel receive only the light of light source, the signal sending is more clear and stable.
Embodiment tri-
As shown in Figure 4, a kind of detection prosthetic device of photosensor array panel defect, comprising: base station 412, and for carrying probe unit 410.Probe unit 410, the analog electrical signal that the photosensor array panel 414 being placed on it in order to detection is exported, and convert electrical signals to digital electric signal.Processes and displays unit 405 comprises: graphics processing unit 408 and the first display unit 406; Described graphics processing unit 408 is electrically connected with described probe unit 410, is converted to picture signal in order to the electric signal that probe unit 410 is detected; Described the first display unit 406, is converted into image and shows in order to graphics processing unit 408 is processed to the picture signal obtaining.Unit 402 is repaired in location, the defect on photosensor array panel 414 is positioned, and the defect behind location is repaired.The second display unit 404, repairs unit 402 with location and is electrically connected, in order to show the image of device on sensor panel.Control module 400, repairs unit 402 adjustings of inner laser source energy and the On/Off of microscope light source etc. for On/Off, the location of control device power supply.Light shield 416, and be placed with light source in light shield 416, the spectral range of light source, from ultraviolet to infrared wavelength, also comprises X ray described in the spectral range of described light source.Light shield 416 is for separating control module 400, reparation unit 402, probe unit 410, reparation platform 412, image display device 404, image display device 406 and graphics processing unit 408 and extraneous light, avoid external interference, make photosensor array panel 414 receive only the light of light source, the signal sending is more clear and stable.
In the present embodiment, light shield 416 is made up of light barrier.Described light shield 414 can hold operating personnel and in this shading environment, carry out detection and the repair of photosensor array panel.
Photosensor array panel 414 in the present embodiment is taking X-ray sensor array panel as example.
In the present embodiment, reparation unit, described location 402 includes lasing light emitter, micro-unit and image unit.The Ear Mucosa Treated by He Ne Laser Irradiation that described lasing light emitter produces, at the photosensor array panel 414 being placed on probe unit 410, positions or repairs the defect on photosensor array panel 414; Described lasing light emitter can produce low power laser and high power laser light.Described micro-unit, is convenient to determine defect type for defect is amplified; Described image unit is by the device situation on micro-unit Real-time Collection photosensor array panel.
In the present embodiment, described the first display unit 406 and the second display unit 404 can also be same display units.
In the present embodiment, described the second display unit 404 can also omit, and directly observes defect by micro-unit with human eye.
In the present embodiment, judge whether to exist defect, in the image showing on common the first display unit 306, pixel gray level and the visibly different point of surrounding pixel GTG are defect point.
In the present embodiment, described defect repair comprises cutting and is connected.The reparation of cutting for needs, the part of needs being cut with high power laser light cutting.The reparation connecting for needs, in patching material atmosphere, with Ear Mucosa Treated by He Ne Laser Irradiation, spot heating, makes material gas generation thermal decomposition, piles up film forming, thereby the part disconnecting is connected again.Described for cutting the laser power difference of repairing and being connected reparation, can regulate as the case may be the power of required laser.
In the present embodiment, the detection prosthetic device principle of work of photosensor array panel defect, with embodiment mono-, does not repeat them here.
The detection prosthetic device that the invention provides photosensor array panel defect provided by the invention is provided with light shield, and is provided with light source in light shield inside, and operating personnel can operate in light shield inside, avoid external interference, and work efficiency is higher.
Fig. 5 is defect and the bright spot cursor schematic diagram in the image that in embodiment, processes and displays unit shows.As shown in Figure 5, observe the image showing on the first display unit, the pixel gray level that can see defect 60 present positions on image is obviously different from surrounding pixel ash valency, now can process decision chart picture on the pixel cell defectiveness of photosensor array panel of defect 60 correspondences exist.
Fig. 6 is the intention of the location defect position that in embodiment, processes and displays unit shows.As shown in Figure 6, exist after defect 60 when determining, lasing light emitter need to be registered to defect reparation.First lasing light emitter is transferred to low power laser, be radiated on photosensor array panel, photosensor array panel receives the light place that lasing light emitter sends and produces corresponding analog electrical signal, described analog electrical signal is converted to digital electric signal by probe unit, and digital electric signal is shown as bright spot cursor 62 after graphics processing unit is processed on display unit; Unit is repaired in running fix, and observes bright spot cursor 62 positions that show on display unit, and bright spot cursor position 62 is overlapped with defect 60 positions.
The power of laser and light beam can regulate, and regulate Ear Mucosa Treated by He Ne Laser Irradiation to the spot size on photosensor array panel, determine that laser only can be irradiated on a pixel cell or on multiple pixel cell; Meanwhile, low power laser can not produce damage to photosensor array panel because power is low.
Using method described in the embodiment of the present invention, utilizes the low power laser of repairing in unit to carry out defect location, then directly the lasing light emitter of repairing in unit is switched to high power laser light, defect is repaired, and show Real Time Observation reparation situation by image.The method flow process is simple, is easy to grasp, and has repaired horse back and just can confirm the effect of repairing, and efficiency is high.
Although the present invention discloses as above with preferred embodiment, the present invention is not defined in this.Any those skilled in the art, without departing from the spirit and scope of the present invention, all can do various changes and amendment, and therefore protection scope of the present invention should be as the criterion with claim limited range.
Claims (16)
1. a defects detection prosthetic device for photosensor array panel, is characterized in that, comprising:
Probe unit, in order to detect the analog electrical signal of photosensor array panel output, and is converted to digital electric signal by analog electrical signal;
Processes and displays unit, is converted to image by the digital electric signal of probe unit output and shows, shown in image demonstrate photosensor array panel and whether there is defect;
Unit is repaired in location, the defect on photosensor array panel is positioned, and the defect behind location is repaired;
Described location comprises:
With low power laser light irradiation sensor array panel;
The light signal of laser is converted to analog electrical signal by photosensor array panel;
Probe unit receives described analog electrical signal, and analog electrical signal is converted to digital electric signal;
Processes and displays unit is shown as bright spot cursor after to digital Electric signal processing;
Unit is repaired in running fix, and bright spot cursor is overlapped with defect.
2. device according to claim 1, is characterized in that, also comprises light shield, is provided with light source in light shield inside, and described light shield is positioned at probe unit and repairs around positioning unit.
3. device according to claim 1, is characterized in that, also comprises light shield, is provided with light source in light shield inside, and described light shield is positioned at probe unit, repairs around positioning unit and processes and displays unit.
4. device according to claim 1, is characterized in that, described processes and displays unit comprises:
Graphics processing unit, is converted to picture signal in order to the digital electric signal that probe unit is detected;
The first display unit, in order to be shown as image by described picture signal.
5. device according to claim 1, is characterized in that, reparation unit, described location includes lasing light emitter, micro-unit and image unit.
6. device according to claim 5, is characterized in that, described lasing light emitter produces different capacity laser.
7. device according to claim 1, is characterized in that, also comprises: the second display unit, and in order to show the device image of the photosensor array panel that image unit collects.
8. device according to claim 1, is characterized in that, also comprises: control module, repair the movement of unit, On/Off, the energy adjustment of lasing light emitter and the On/Off of microscope light source of installation's power source for controlling location.
9. device according to claim 1, is characterized in that, also comprises: base station, and for carrying probe unit.
10. according to claim 2 or device claimed in claim 3, it is characterized in that, the spectral range of described light source, from ultraviolet to infrared wavelength, also comprises X ray.
The defects detection restorative procedure of 11. 1 kinds of photosensor array panels, is characterized in that, comprises the steps:
Probe unit is provided, surveys the analog electrical signal of exporting on photosensor array panel placed thereon, and analog electrical signal is converted to digital electric signal;
Processes and displays unit, receives the digital electric signal of probe unit output, and is converted to image and shows, shown in image display light sensor array panel whether there is defect;
Unit is repaired in location, after the defect on photosensor array panel is positioned, repairs described defect;
Described location comprises:
With low power laser light irradiation sensor array panel;
The light signal of laser is converted to analog electrical signal by photosensor array panel;
Probe unit receives described analog electrical signal, and analog electrical signal is converted to digital electric signal;
Processes and displays unit is shown as bright spot cursor after to digital Electric signal processing;
Unit is repaired in running fix, and bright spot cursor is overlapped with defect.
12. methods according to claim 11, is characterized in that, described reparation comprises:
Determine defect type by processes and displays unit;
Carry out corresponding reparation according to defect type with high power laser light.
13. methods according to claim 11, is characterized in that, also comprise and check reparation result step:
Receive the digital electric signal of probe unit output by processes and displays unit, and be converted to image and show whether repair successfully from the defect of shown image inspection photosensor array panel.
14. methods according to claim 11, is characterized in that, described defect repair comprises cutting and is connected.
15. methods according to claim 14, is characterized in that, the reparation of cutting for needs, the part of needs being cut with high power laser light cutting.
16. methods according to claim 14, is characterized in that, the reparation connecting for needs, and in patching material atmosphere, with Ear Mucosa Treated by He Ne Laser Irradiation, spot heating, makes material gas generation thermal decomposition, piles up film forming, thereby the part disconnecting is connected again.
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| CN109472078B (en) * | 2018-10-31 | 2023-05-09 | 天津大学 | 3D image sensor defect detection and repair method based on 2X 2 pixel subarray |
| CN109799237A (en) * | 2019-01-21 | 2019-05-24 | 深圳市南科燃料电池有限公司 | Defect detection device and detection method |
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