TW200630580A - Working-beam heat treatment apparatus - Google Patents
Working-beam heat treatment apparatusInfo
- Publication number
- TW200630580A TW200630580A TW094146139A TW94146139A TW200630580A TW 200630580 A TW200630580 A TW 200630580A TW 094146139 A TW094146139 A TW 094146139A TW 94146139 A TW94146139 A TW 94146139A TW 200630580 A TW200630580 A TW 200630580A
- Authority
- TW
- Taiwan
- Prior art keywords
- working
- heat treatment
- treatment apparatus
- substrate
- stationary
- Prior art date
Links
Landscapes
- Tunnel Furnaces (AREA)
- Reciprocating Conveyors (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005036939A JP4447482B2 (ja) | 2005-02-14 | 2005-02-14 | ウオーキングビーム式熱処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200630580A true TW200630580A (en) | 2006-09-01 |
TWI361879B TWI361879B (ja) | 2012-04-11 |
Family
ID=36923180
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094146139A TW200630580A (en) | 2005-02-14 | 2005-12-23 | Working-beam heat treatment apparatus |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4447482B2 (ja) |
CN (1) | CN1821694B (ja) |
TW (1) | TW200630580A (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4738372B2 (ja) | 2007-04-03 | 2011-08-03 | 株式会社ノリタケカンパニーリミテド | ウオーキングビーム式熱処理装置 |
JP4387432B2 (ja) * | 2007-10-01 | 2009-12-16 | 株式会社石井表記 | 塗布膜用乾燥装置 |
KR101378049B1 (ko) * | 2007-10-03 | 2014-03-27 | 이시이 효키 가부시키가이샤 | 도포막용 건조장치 |
CN102706142A (zh) * | 2012-01-16 | 2012-10-03 | 苏州工业园区姑苏科技有限公司 | 一种防止工件位移的限位装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1983003785A1 (en) * | 1982-04-30 | 1983-11-10 | Koyo Chuki Co., Ltd | Molten metal filling table in molding machine |
DE3331341C2 (de) * | 1983-08-31 | 1986-07-10 | Rolf Dipl.-Ing. 5828 Ennepetal Peddinghaus | Vorrichtung zum Quertransport eines Profilstabes für Profilstab-Bearbeitungsstraßen mit Längstransport-Rollgang |
-
2005
- 2005-02-14 JP JP2005036939A patent/JP4447482B2/ja not_active Expired - Fee Related
- 2005-12-23 TW TW094146139A patent/TW200630580A/zh not_active IP Right Cessation
-
2006
- 2006-02-14 CN CN 200610007486 patent/CN1821694B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN1821694B (zh) | 2010-05-26 |
JP2006222401A (ja) | 2006-08-24 |
CN1821694A (zh) | 2006-08-23 |
JP4447482B2 (ja) | 2010-04-07 |
TWI361879B (ja) | 2012-04-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |