TW200629973A - Display panel manufacturing method - Google Patents
Display panel manufacturing methodInfo
- Publication number
- TW200629973A TW200629973A TW095101506A TW95101506A TW200629973A TW 200629973 A TW200629973 A TW 200629973A TW 095101506 A TW095101506 A TW 095101506A TW 95101506 A TW95101506 A TW 95101506A TW 200629973 A TW200629973 A TW 200629973A
- Authority
- TW
- Taiwan
- Prior art keywords
- position detecting
- marks
- film formation
- reference marks
- forming
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electroluminescent Light Sources (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005028603A JP2006216425A (ja) | 2005-02-04 | 2005-02-04 | 表示パネルの製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200629973A true TW200629973A (en) | 2006-08-16 |
Family
ID=36907785
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095101506A TW200629973A (en) | 2005-02-04 | 2006-01-13 | Display panel manufacturing method |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP2006216425A (ko) |
KR (1) | KR20060089625A (ko) |
CN (1) | CN1815687A (ko) |
TW (1) | TW200629973A (ko) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012173075A1 (ja) * | 2011-06-17 | 2012-12-20 | シャープ株式会社 | 成膜基板の成膜位置検査方法 |
KR101893309B1 (ko) * | 2017-10-31 | 2018-08-29 | 캐논 톡키 가부시키가이샤 | 얼라인먼트 장치, 얼라인먼트 방법, 성막장치, 성막방법, 및 전자 디스바이스 제조방법 |
CN107742623B (zh) * | 2017-11-15 | 2024-01-23 | 京东方科技集团股份有限公司 | 显示基板、有机发光器件及膜层蒸镀检测方法、显示装置 |
JP6662841B2 (ja) * | 2017-12-21 | 2020-03-11 | 株式会社アルバック | 蒸着装置 |
-
2005
- 2005-02-04 JP JP2005028603A patent/JP2006216425A/ja active Pending
- 2005-12-23 CN CNA2005101350713A patent/CN1815687A/zh active Pending
-
2006
- 2006-01-12 KR KR1020060003357A patent/KR20060089625A/ko not_active Application Discontinuation
- 2006-01-13 TW TW095101506A patent/TW200629973A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
KR20060089625A (ko) | 2006-08-09 |
JP2006216425A (ja) | 2006-08-17 |
CN1815687A (zh) | 2006-08-09 |
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