TW200629973A - Display panel manufacturing method - Google Patents

Display panel manufacturing method

Info

Publication number
TW200629973A
TW200629973A TW095101506A TW95101506A TW200629973A TW 200629973 A TW200629973 A TW 200629973A TW 095101506 A TW095101506 A TW 095101506A TW 95101506 A TW95101506 A TW 95101506A TW 200629973 A TW200629973 A TW 200629973A
Authority
TW
Taiwan
Prior art keywords
position detecting
marks
film formation
reference marks
forming
Prior art date
Application number
TW095101506A
Other languages
English (en)
Chinese (zh)
Inventor
Kenichi Takahashi
Daisuke Yaguchi
Original Assignee
Pioneer Tohoku Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pioneer Tohoku Corp filed Critical Pioneer Tohoku Corp
Publication of TW200629973A publication Critical patent/TW200629973A/zh

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10Measuring as part of the manufacturing process
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electroluminescent Light Sources (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Physical Vapour Deposition (AREA)
TW095101506A 2005-02-04 2006-01-13 Display panel manufacturing method TW200629973A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005028603A JP2006216425A (ja) 2005-02-04 2005-02-04 表示パネルの製造方法

Publications (1)

Publication Number Publication Date
TW200629973A true TW200629973A (en) 2006-08-16

Family

ID=36907785

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095101506A TW200629973A (en) 2005-02-04 2006-01-13 Display panel manufacturing method

Country Status (4)

Country Link
JP (1) JP2006216425A (ko)
KR (1) KR20060089625A (ko)
CN (1) CN1815687A (ko)
TW (1) TW200629973A (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012173075A1 (ja) * 2011-06-17 2012-12-20 シャープ株式会社 成膜基板の成膜位置検査方法
KR101893309B1 (ko) * 2017-10-31 2018-08-29 캐논 톡키 가부시키가이샤 얼라인먼트 장치, 얼라인먼트 방법, 성막장치, 성막방법, 및 전자 디스바이스 제조방법
CN107742623B (zh) * 2017-11-15 2024-01-23 京东方科技集团股份有限公司 显示基板、有机发光器件及膜层蒸镀检测方法、显示装置
JP6662841B2 (ja) * 2017-12-21 2020-03-11 株式会社アルバック 蒸着装置

Also Published As

Publication number Publication date
KR20060089625A (ko) 2006-08-09
JP2006216425A (ja) 2006-08-17
CN1815687A (zh) 2006-08-09

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