TW200629459A - Mounting substrate stage - Google Patents

Mounting substrate stage

Info

Publication number
TW200629459A
TW200629459A TW094134492A TW94134492A TW200629459A TW 200629459 A TW200629459 A TW 200629459A TW 094134492 A TW094134492 A TW 094134492A TW 94134492 A TW94134492 A TW 94134492A TW 200629459 A TW200629459 A TW 200629459A
Authority
TW
Taiwan
Prior art keywords
pins
overlap
positions
disposed
support plate
Prior art date
Application number
TW094134492A
Other languages
English (en)
Inventor
Atsuo Kajima
Shinji Takase
Kazunobu Yamaguchi
Yuki Yamamoto
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Tazmo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd, Tazmo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Publication of TW200629459A publication Critical patent/TW200629459A/zh

Links

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Liquid Crystal (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
TW094134492A 2004-10-04 2005-10-03 Mounting substrate stage TW200629459A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004290898A JP2006108265A (ja) 2004-10-04 2004-10-04 基板載置ステージ

Publications (1)

Publication Number Publication Date
TW200629459A true TW200629459A (en) 2006-08-16

Family

ID=36377654

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094134492A TW200629459A (en) 2004-10-04 2005-10-03 Mounting substrate stage

Country Status (4)

Country Link
JP (1) JP2006108265A (zh)
KR (1) KR20060052002A (zh)
CN (1) CN100481371C (zh)
TW (1) TW200629459A (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011007616A1 (ja) * 2009-07-13 2011-01-20 シャープ株式会社 支持装置およびこの支持装置を備える乾燥装置
WO2012141082A1 (ja) * 2011-04-13 2012-10-18 シャープ株式会社 基板支持装置、及び乾燥装置
CN107526196A (zh) * 2017-09-27 2017-12-29 武汉华星光电技术有限公司 玻璃基板承载装置及检测设备
CN108447800B (zh) * 2018-01-31 2019-12-10 北京铂阳顶荣光伏科技有限公司 薄膜电池的制造方法
KR102399627B1 (ko) 2020-09-16 2022-05-19 양영제 스팀 실내 크리닝 전용장비

Also Published As

Publication number Publication date
KR20060052002A (ko) 2006-05-19
CN1790660A (zh) 2006-06-21
JP2006108265A (ja) 2006-04-20
CN100481371C (zh) 2009-04-22

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