TW200629459A - Mounting substrate stage - Google Patents
Mounting substrate stageInfo
- Publication number
- TW200629459A TW200629459A TW094134492A TW94134492A TW200629459A TW 200629459 A TW200629459 A TW 200629459A TW 094134492 A TW094134492 A TW 094134492A TW 94134492 A TW94134492 A TW 94134492A TW 200629459 A TW200629459 A TW 200629459A
- Authority
- TW
- Taiwan
- Prior art keywords
- pins
- overlap
- positions
- disposed
- support plate
- Prior art date
Links
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Liquid Crystal (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004290898A JP2006108265A (ja) | 2004-10-04 | 2004-10-04 | 基板載置ステージ |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200629459A true TW200629459A (en) | 2006-08-16 |
Family
ID=36377654
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094134492A TW200629459A (en) | 2004-10-04 | 2005-10-03 | Mounting substrate stage |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP2006108265A (zh) |
KR (1) | KR20060052002A (zh) |
CN (1) | CN100481371C (zh) |
TW (1) | TW200629459A (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011007616A1 (ja) * | 2009-07-13 | 2011-01-20 | シャープ株式会社 | 支持装置およびこの支持装置を備える乾燥装置 |
WO2012141082A1 (ja) * | 2011-04-13 | 2012-10-18 | シャープ株式会社 | 基板支持装置、及び乾燥装置 |
CN107526196A (zh) * | 2017-09-27 | 2017-12-29 | 武汉华星光电技术有限公司 | 玻璃基板承载装置及检测设备 |
CN108447800B (zh) * | 2018-01-31 | 2019-12-10 | 北京铂阳顶荣光伏科技有限公司 | 薄膜电池的制造方法 |
KR102399627B1 (ko) | 2020-09-16 | 2022-05-19 | 양영제 | 스팀 실내 크리닝 전용장비 |
-
2004
- 2004-10-04 JP JP2004290898A patent/JP2006108265A/ja active Pending
-
2005
- 2005-10-03 TW TW094134492A patent/TW200629459A/zh unknown
- 2005-10-04 KR KR1020050092958A patent/KR20060052002A/ko not_active Application Discontinuation
- 2005-10-04 CN CNB2005101249756A patent/CN100481371C/zh active Active
Also Published As
Publication number | Publication date |
---|---|
CN1790660A (zh) | 2006-06-21 |
JP2006108265A (ja) | 2006-04-20 |
KR20060052002A (ko) | 2006-05-19 |
CN100481371C (zh) | 2009-04-22 |
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