TW200613205A - Device for exchanging and transporting coating-line components - Google Patents

Device for exchanging and transporting coating-line components

Info

Publication number
TW200613205A
TW200613205A TW094129482A TW94129482A TW200613205A TW 200613205 A TW200613205 A TW 200613205A TW 094129482 A TW094129482 A TW 094129482A TW 94129482 A TW94129482 A TW 94129482A TW 200613205 A TW200613205 A TW 200613205A
Authority
TW
Taiwan
Prior art keywords
transport path
coating line
exchanging
hoist
components
Prior art date
Application number
TW094129482A
Other languages
English (en)
Inventor
Guido Hattendorf
Original Assignee
Applied Films Gmbh & Co Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Films Gmbh & Co Kg filed Critical Applied Films Gmbh & Co Kg
Publication of TW200613205A publication Critical patent/TW200613205A/zh

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001General methods for coating; Devices therefor
    • C03C17/002General methods for coating; Devices therefor for flat glass, e.g. float glass
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Spray Control Apparatus (AREA)
  • Chain Conveyers (AREA)
  • Coating Apparatus (AREA)
TW094129482A 2004-09-03 2005-08-29 Device for exchanging and transporting coating-line components TW200613205A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102004042776A DE102004042776A1 (de) 2004-09-03 2004-09-03 Vorrichtung zum Austausch und Transport von Komponenten von Beschichtungsanlagen

Publications (1)

Publication Number Publication Date
TW200613205A true TW200613205A (en) 2006-05-01

Family

ID=35995146

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094129482A TW200613205A (en) 2004-09-03 2005-08-29 Device for exchanging and transporting coating-line components

Country Status (7)

Country Link
US (1) US20060049126A1 (zh)
EP (1) EP1681261A1 (zh)
JP (1) JP2006068741A (zh)
KR (1) KR100694692B1 (zh)
CN (1) CN1757584A (zh)
DE (1) DE102004042776A1 (zh)
TW (1) TW200613205A (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MX360675B (es) * 2011-01-31 2018-11-13 Luoyang Landglass Tech Co Ltd Dispositivo para procesar continuamente un miembro de vidrio al vacío.
KR102175820B1 (ko) * 2013-09-12 2020-11-09 삼성디스플레이 주식회사 증착원 반송 장치
CN110181536A (zh) * 2019-06-28 2019-08-30 华中科技大学无锡研究院 用于高铁车体定位的系统

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3774778A (en) * 1971-06-09 1973-11-27 R Flaig Case packing machine
EP0166791B1 (de) * 1984-06-01 1987-12-16 Branson Europa B.V. Transportvorrichtung mit Laufschiene und rädergeführter Laufkatze
DE3432284A1 (de) * 1984-09-01 1986-03-13 Clemens-A. Dipl.-Ing. 5600 Wuppertal Verbeek Schienen-transportsystem mit im abstand von der lagerebene angeordnetem verfahrwagen
DE19733940C2 (de) * 1997-08-06 2001-03-01 Leybold Systems Gmbh Vorrichtung zum Beschichten von plattenförmigen Substraten mit dünnen Schichten mittels Kathodenzerstäubung
DE19834592A1 (de) * 1998-07-31 2000-02-03 Leybold Systems Gmbh Vorrichtung zum Beschichten von plattenförmigen Substraten
EP1122221B1 (de) * 2000-02-01 2003-07-23 Emil BÄCHLI Einrichtung zur Oberflächenbehandlung und/oder Beschichtung bzw. zur Fertigung von Bauelementen, insbesondere flacher Bauelemente aus Glas, Glaslegierungen oder Metall, im Durchlaufverfahren
DE10215040B4 (de) * 2002-04-05 2019-02-21 Leybold Optics Gmbh Vorrichtung und Verfahren zum Be- und Entladen einer Vakuumkammer

Also Published As

Publication number Publication date
US20060049126A1 (en) 2006-03-09
KR100694692B1 (ko) 2007-03-13
CN1757584A (zh) 2006-04-12
DE102004042776A1 (de) 2006-03-23
JP2006068741A (ja) 2006-03-16
EP1681261A1 (de) 2006-07-19
KR20060050971A (ko) 2006-05-19

Similar Documents

Publication Publication Date Title
TW200737392A (en) Method and apparatus for transferring and receiving article by overhead hoist transport carrier
EP1803151A4 (en) TOOL LOADING AND BUFFERING SYSTEM ON LIFT BASE
MY164303A (en) Method and device for processing silicon substrates
UA103891C2 (ru) Система подвесной дороги и установка для обработки погружением с подобной системой
IL206426A0 (en) Method and device for treating silicon wafers
TW200618161A (en) Substrate transport device, substrate transport method and exposure device
TW200616068A (en) Processing apparatus for cleaning substrate and substrate processing unit
HK1065298A1 (en) A production device for transporting a workpiece carrier
TW200624396A (en) Method and apparatus for scribing brittle material board and system for breaking brittle material board
TW200605255A (en) Elongated features for improved alignment process integration
EP2195138A4 (en) LIFTING DEVICE FOR A CONVEYOR SYSTEM, CONVEYOR SYSTEM AND METHOD
WO2008094845A3 (en) System and method for glass sheet semiconductor coating
SG157342A1 (en) Lithographic apparatus and a method of operating the apparatus
MY161815A (en) Carrier for reducing entrance and/or exit marks left by a substrate-processing meniscus
TW200613205A (en) Device for exchanging and transporting coating-line components
KR20070070731A (ko) 기판 절단 장치
MX2009003104A (es) Sistema de transporte.
KR101537249B1 (ko) 피처리체의 반송 기구 및 이를 이용한 성막 장치
CA2401286A1 (en) Conveying apparatus for open containers
ATE466118T1 (de) Prozesskammer, inline-beschichtungsanlage und verfahren zur behandlung eines substrats
TW200728184A (en) Transportation system
UA98307C2 (ru) Установка для изготовления и/или обработки панелей
MY125967A (en) Apparatus, assembly and method for processing electronic components
ATE409672T1 (de) Verfahren und vorrichtung zum bearbeiten von druckereiprodukten
KR900017454A (ko) 부품 공급장치