TW200603505A - System and method for generating and controlling multiple independently steerable laser beams for material processing - Google Patents

System and method for generating and controlling multiple independently steerable laser beams for material processing

Info

Publication number
TW200603505A
TW200603505A TW093124098A TW93124098A TW200603505A TW 200603505 A TW200603505 A TW 200603505A TW 093124098 A TW093124098 A TW 093124098A TW 93124098 A TW93124098 A TW 93124098A TW 200603505 A TW200603505 A TW 200603505A
Authority
TW
Taiwan
Prior art keywords
beamlet
generating
mirror
independently steerable
steering mirror
Prior art date
Application number
TW093124098A
Other languages
Chinese (zh)
Inventor
Todd E Lizotte
Orest Ohar
Original Assignee
Hitachi Via Mechanics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/883,290 external-priority patent/US20040251243A1/en
Application filed by Hitachi Via Mechanics Ltd filed Critical Hitachi Via Mechanics Ltd
Publication of TW200603505A publication Critical patent/TW200603505A/en

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  • Laser Beam Processing (AREA)

Abstract

A laser process system with multiple, independently steerable laser beamlets and including a laser and beam shaper for generating a shaped source beam, a splitter stage for generating a plurality of beamlets from the shaped source beam, a beamlet controller including an independently steerable beamlet steering mirror for and corresponding to each beamlet for independently directing the corresponding beamlet, a mirror controller for controlling each beamlet steering mirror, and an optical path including a scanning lens for directing each steered beamlet to a target area of a workpiece. Each beamlet steering mirror is a multi-axis micro-electro-mechanical mirror and the system further includes a beam dump located in the optical path for intercepting a beamlet steered into the beam dump by the corresponding beamlet steering mirror.
TW093124098A 2004-07-01 2004-08-11 System and method for generating and controlling multiple independently steerable laser beams for material processing TW200603505A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/883,290 US20040251243A1 (en) 2003-04-10 2004-07-01 System and method for generating and controlling multiple independently steerable laser beams for material processing

Publications (1)

Publication Number Publication Date
TW200603505A true TW200603505A (en) 2006-01-16

Family

ID=35790098

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093124098A TW200603505A (en) 2004-07-01 2004-08-11 System and method for generating and controlling multiple independently steerable laser beams for material processing

Country Status (3)

Country Link
JP (1) JP2006015402A (en)
CN (1) CN1714982A (en)
TW (1) TW200603505A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4786698B2 (en) * 2008-12-09 2011-10-05 株式会社東芝 Processing equipment
JP5511644B2 (en) * 2010-12-07 2014-06-04 住友重機械工業株式会社 Laser processing apparatus and laser processing method
CN111868602B (en) * 2018-03-20 2022-07-26 罗伯特·博世有限公司 Apparatus and method for shaping a laser beam by a programmable beam shaper

Also Published As

Publication number Publication date
CN1714982A (en) 2006-01-04
JP2006015402A (en) 2006-01-19

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