TW200603505A - System and method for generating and controlling multiple independently steerable laser beams for material processing - Google Patents
System and method for generating and controlling multiple independently steerable laser beams for material processingInfo
- Publication number
- TW200603505A TW200603505A TW093124098A TW93124098A TW200603505A TW 200603505 A TW200603505 A TW 200603505A TW 093124098 A TW093124098 A TW 093124098A TW 93124098 A TW93124098 A TW 93124098A TW 200603505 A TW200603505 A TW 200603505A
- Authority
- TW
- Taiwan
- Prior art keywords
- beamlet
- generating
- mirror
- independently steerable
- steering mirror
- Prior art date
Links
Landscapes
- Laser Beam Processing (AREA)
Abstract
A laser process system with multiple, independently steerable laser beamlets and including a laser and beam shaper for generating a shaped source beam, a splitter stage for generating a plurality of beamlets from the shaped source beam, a beamlet controller including an independently steerable beamlet steering mirror for and corresponding to each beamlet for independently directing the corresponding beamlet, a mirror controller for controlling each beamlet steering mirror, and an optical path including a scanning lens for directing each steered beamlet to a target area of a workpiece. Each beamlet steering mirror is a multi-axis micro-electro-mechanical mirror and the system further includes a beam dump located in the optical path for intercepting a beamlet steered into the beam dump by the corresponding beamlet steering mirror.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/883,290 US20040251243A1 (en) | 2003-04-10 | 2004-07-01 | System and method for generating and controlling multiple independently steerable laser beams for material processing |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200603505A true TW200603505A (en) | 2006-01-16 |
Family
ID=35790098
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW093124098A TW200603505A (en) | 2004-07-01 | 2004-08-11 | System and method for generating and controlling multiple independently steerable laser beams for material processing |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP2006015402A (en) |
CN (1) | CN1714982A (en) |
TW (1) | TW200603505A (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4786698B2 (en) * | 2008-12-09 | 2011-10-05 | 株式会社東芝 | Processing equipment |
JP5511644B2 (en) * | 2010-12-07 | 2014-06-04 | 住友重機械工業株式会社 | Laser processing apparatus and laser processing method |
CN111868602B (en) * | 2018-03-20 | 2022-07-26 | 罗伯特·博世有限公司 | Apparatus and method for shaping a laser beam by a programmable beam shaper |
-
2004
- 2004-08-11 TW TW093124098A patent/TW200603505A/en unknown
- 2004-08-31 JP JP2004252320A patent/JP2006015402A/en active Pending
- 2004-08-31 CN CNA2004100769602A patent/CN1714982A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
CN1714982A (en) | 2006-01-04 |
JP2006015402A (en) | 2006-01-19 |
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