200532175 ⑴ 玖、發明說明 【發明所屬的技術領域】 本發明是關於在真空等特殊環境下進行製造的裝置的 驅動部。詳細來說’是關於半導體元件製造裝置或電子質 件製造裝置等的驅動部的磁性結合式旋轉機構。 【先前技術】 針對在真空等特殊環境下進行製造的裝置的驅動部所 使用的旋轉導入機’旋轉力（扭力）的傳達方式，例如有： 磁性結合式、波形管密封式、0形環密封式、磁性流體密 封式等。這些旋轉導入機’會考慮裝置的規格、製造物等 ’來決定使用哪種型式的構造。而波形管密封式、0形環 密封式、磁性流體密封式會有下述的問題。 (1) 對於波形管密封式，由於波形管的使用壽命，可 能會限制產生扭力。 (2) 對於Ο形環密封式，由於是中介有潤滑機油，所 以可能會污染環境。 (3 )即使是磁性流體密封式，由於是中介有密封用機 油，所以可能會污染環境。 由於上述原因，對於在高真空狀態（不能有粒子的淸 淨真空下）所使用的半導體製造裝置或電子零件製造裝置 等，適合磁性結合式旋轉導入機，可以使用相當數量的台 數。在第6圖中，是顯示以往的磁性結合式旋轉導入機1 0 1 的例子。旋轉輸出軸1 03，是具備有藉由永久磁鐵的磁性 -4- 200532175 (2) 作用而旋轉的磁力線作用部1 0 5，是藉由軸承1 〇 7可旋轉地 被軸支承著。旋轉輸出軸1 0 3及磁力線作用部1 〇 5，在使用 時需要維持真空環境1 1 1。因此，是將收容著旋轉輸出軸 103及磁力線作用部1〇5的盒體109安裝在容器隔壁部1 13， 、 在兩者之間設置密封件U 7以阻斷大氣環境1 1 5。 ， 在收容於盒體109的磁力線作用部105的隔著盒體109 的大氣環境1 1 1的外側周圍，是配設有安裝著旋轉傳達用 磁鐵片1 1 9的電磁軟鐵製的軛部1 2 1。藉由該構造，軛部 馨 121，是被軸支承在與驅動源連接軸123成爲一體的軸承 1 2 5，是被連接在沒有圖示的馬達而旋轉。藉由該構造， 讓旋轉輸出軸1 03與軛部1 2 1的旋轉同步旋轉，通過旋轉輸 出軸1 〇 3來傳達扭力。 使用.第7圖（a)的正面剖面圖及第7圖（b)的側面剖面圖 ，針對使用習知例的磁性結合式旋轉導入機1 0 1的作業例 子來加以說明。磁性結合式旋轉導入機1 〇 1，是藉由耦聯 器連結於馬達，與馬達的旋轉同步旋轉的旋轉輸出軸，是 # 被連結在小齒輪1 3 3。在搬運板1 3 9，是安裝有：與小齒輪 1 3 3嚙合，藉由小齒輪1 3 3的旋轉而朝向左右方向1 4 3移動 _ 的齒條1 3 5。也就是說，是藉由旋轉輸出軸的旋轉，讓載 置著工件141的搬運板139經由軸承137朝向圖面的左右方 向1 43移動。 磁性結合式旋轉導入機1 0 1，不具備有機械性的從外 部傳達扭力的接合部，是使用利用旋轉磁力來傳達扭力的 機構。因此，由於某些原因，會有可能產生與磁性結合式 -5- 200532175 (3) 旋轉導入機1 〇 1的大氣環境1 1 5側所連接的馬達1 3 1等的驅 動源沒有達到同步的狀況。一般稱作脫調的現象，是產生 真空環境1 Π側的旋轉輸出軸1 0 3的旋轉的延遲或停止的現 象。 · 爲了避免這種現象，如第7圖（b)所示，例如，需要設 _ 置工件定位感應器或驅動確認感應器等的位置感應器1 47 ，來經常確認例如搬運板139或齒條135等的作動狀態。可 是，也有真空環境1 1 1這樣的特殊環境，所設置的感應器 肇 是很高價的，設計很複雜，費用也會增加，會成爲成本上 升的主要原因。 【發明內容】 磁性結合式旋轉導入機，是由：設置在設置成可密閉 的盒體的外側，連接於具備有旋轉的磁鐵片的軛部的旋轉 軸、在上述設置成可密閉的盒體的內側’用來將利用上述 旋轉的磁鐵片所產生的磁場而旋轉的磁力線作用部予以軸 · 支承的輸出旋轉軸、安裝在上述旋轉輸出軸的旋轉訊號輸 出手段、以及用來檢測來自於上述旋轉訊號輸出手段的訊 號而設置在上述盒體的外側的訊號檢測手段所構成。 【實施方式】 本發明的第一實施方式，是由以下的構件所構成的磁 性結合式旋轉導入機。 (a)設置在設置成可密閉的盒體的外側’連接於具備 -6 - 200532175 (4) 有旋轉的磁鐵片的軛部的旋轉軸。 (b) 在上述設置成可密閉的盒體的內側，用來將利用 上述旋轉的磁鐵片所產生的磁場而旋轉的磁力線作用部予 以軸支承的輸出旋轉軸。 (c) 安裝在上述旋轉輸出軸的旋轉訊號輸出手段。 (d) 以及用來檢測來自於上述旋轉訊號輸出手段的訊 號而設置在上述盒體的外側的訊號檢測手段。 本發明的第二實施方式，其中上述旋轉訊號輸出手段 ，是在旋轉輸出軸的一處位置或複數處位置設置有磁性構 件。 本發明的第三實施方式，其中上述訊號檢測手段，是 當上述磁性構件接近時會感應的磁性感應器。 本發明的第四實施方式，其中上述旋轉訊號輸出手段 ，當盒體是使用光穿透性的材質的盒體時，是光反射板， 上述訊號檢測手段是使用用來檢測反射的光的光感應器。 本發明的第五實施方式，其中上述盒體的外側是大氣 ，其內側是真空或高純度的特殊環境。 本發明的第六實施方式，其中上述記載的磁性結合式 旋轉導入機，是具備有控制系統，該控制系統，會監測上 述訊號檢測手段的訊號，來進行旋轉異常動作的監測及/ 或回復正常動作。 以下，針對本發明參照圖面詳細說明。 使用第1圖，針對本發明的磁性結合式旋轉導入機來 加以說明。在本發明，在旋轉輸出軸1 03的旋轉體5具備有 200532175 (5) 感應器用的磁鐵片段3。在盒體1 09的外側，是設置有：會 由於與旋轉體5的旋轉一起旋轉的磁鐵片段3的接近而感應 的磁性感應器7。 在第2圖，是顯示與磁鐵片段3成爲一體而旋轉的旋轉 體5的剖面形狀。磁鐵片段3是在旋轉體5安裝一個或複數 ‘ 個磁鐵的構造。安裝方法，有使磁鐵片段3嵌合到旋轉體5 ' 所設置的孔部等的方法。作爲其他方法，例如用螺栓固定 的方法。在磁鐵片段3也可使用鐵。 φ 在磁鐵片段3與盒體10 9之間，爲了不互相接觸，而設 置有餘隙。因此，會因應旋轉體5的直徑與餘隙的尺寸， 適當地變更設置於旋轉體的磁鐵片段的尺寸。 在安裝於盒體1 09的外側的磁性感應器7，是使用當磁 鐵片段3接近時會感應的磁性感應器，可以檢測出旋轉輸 出軸1 〇 3的旋轉狀態。當設置有複數個磁鐵片段時，則可 進行更精細的檢測。 盒體1 09的材質’是使用：非磁性不鏽鋼、鋁、玻璃 馨 、樹脂，例如丙烯樹脂等。於是，當將盒體的材質選擇爲 玻璃、樹脂等的透明材料時’則取代磁鐵片段，安裝反射 _ 板9等’藉由設置用來檢測反射的光的感應器來達成上述 . 目的。作爲感應器，可以使用光感應器。主要只要是可以 經常檢測旋轉輸出軸1 0 3的旋轉，耐得住高真空環境或不 同於大氣環境的特殊條件，且不會成爲環境的污染源的話 ，就可以達成上述目的。 200532%) [實施例] 以下藉由實施例來更詳細地說明本發明。 使用第3圖（a)的正面剖面圖及第3圖（b)的側面剖面圖 ’針對使用本發明例的磁性結合式旋轉導入機1 〇 1的作業 例子來加以說明。磁性結合式旋轉導入機1 〇 1，是藉由耦 聯器連結於馬達，與馬達的旋轉同步旋轉的旋轉輸出軸， 是被連結在小齒輪133。在搬運板139，是安裝有：與小齒 輪1 3 3嚙合，藉由小齒輪1 3 3的旋轉而朝向左右移動的齒條 135。也就是說，是藉由旋轉輸出軸的旋轉，讓載置著工 件1 4 1的搬運板1 3 9在軸承1 3 7朝向圖面的左右移動。 在本發明，如第7圖所示，例如，是設置有：工件定 位感應器、驅動確認感應器等的位置感應器1 4 7，不需要 經常確認搬運板1 3 9的作動狀態。 針對使用本發明例的磁性結合式旋轉導入機1 0 1的其 他實施例來加以說明。在第4圖，是顯示：在淸淨的大氣 或氬氣、氮氣等的惰性氣體環境的腔室來加熱工件1 4 1時 的適用例。磁性結合式旋轉導入機1 〇 1，是藉由耦聯器連 結於馬達，與馬達的旋轉同步旋轉的旋轉輸出軸，是被連 結在對流產生用的風扇1 5 1。本設備，會在加熱室1 5 7均勻 地加熱工件1 4 1，加熱後通過閥門1 5 5移動到工件加工用的 特殊環境室1 5 9。 當對流產生用風扇1 5 1停止時，工件1 4 1會產生溫度分 布不均的現象，製品會產生缺陷，所以需要使風扇1 5 1經 常旋轉將溫度經常保持均一。於是必須確認旋轉導入機軸 -9 - 200532175 (7) 是經常旋轉的。在現有的裝置，雖然是在馬達側1 3丨安裝 編碼器等的旋轉檢測器來進行確認，可是只是間接地確認 旋轉’藉由設置本發明的磁性結合式旋轉導入機，則可達 到上述效果。當然’磁性結合式旋轉導入機，也可使用於 用來驅動搬運工件的搬運板1 3 9。 藉由第5圖所示的流程圖，針對第4圖所示的使用本發 明的磁性結合式旋轉導入機的實施例加以說明。首先，在 工件設置步驟1 6 3 ’是將工件1 4 1設置在密閉容器1 4 9內的 鲁 搬運板1 3 9上。接著，在加熱、旋轉檢測開始步驟！ 6 5，是 開始進行利用密閉容器內所設置的加熱器153的加熱動作 ，並且開始進行對流產生用風扇1 〇 1的旋轉，利用本發明 的磁性結合式旋轉導入機1 0 1的感應器開始進行監測。 在設定溫度、旋轉檢測無異常的步驟1 67，會以感應 器監測，來檢測出加熱溫度、或是對流產生用風扇的旋轉 數等，在異常的情況會發出警報，並且採取適當的對應手 段。在沒有異常的情況，則會將均勻地加熱的工件1 4 1通 泰 過閥門1 5 5將其移動到工件加工用的特殊環境室1 5 9。接著 ，在特殊環境室159內開始進行工件的加工處理步驟171。 也就是說，藉由使用本發明的磁性結合式旋轉導入機 ，能監測磁性感應器的訊號而可判斷是否爲正常運轉。而 使用控制用的電腦，由磁性感應器訊號控制馬達，則可使 異常動作回到正常動作。 當在需要高溫、高真空等條件的室內設置位置感應器 時，經常在規格上的選擇很困難。例如，當將高溫的加熱 -10- 200532175 (δ) 物作爲被驅動物時’對於將其進行感應的方式，感應器的 種類、配線的種類或材料等的選擇會非常繁雜，而藉由使 用本發明的磁性結合式旋轉導入機，規格會很簡單。@此 ’成本與習知方式相比會是數十分之~以下。特別是裝置 側設計程序的減少效果非常好，可讓裝置全體的可靠度飛 - 躍性地提昇。 · 錯由使用本發明的磁性結合式旋轉導入機可達到以下 的效果。 ^ · 第一 ’耢由監測磁性感應器的訊號而可判斷是否爲正 常運轉。 第二’而使用控制用的電腦，由磁性感應器訊號控制 馬達，則可使異常動作回到正常動作。 第三’當在被驅動物側設置位置感應器時，由於高真 空等條件，裝置規格選擇會很困難。例如，當將高溫的加 熱物作爲被驅動物時，對於將其進行感應的方式，感應器 的種類、配線的種類或材料等的選擇會非常繁雜，而藉由 馨 使用本發明的磁性結合式旋轉導入機則會很簡單。 第四’藉由使用本發明的磁性結合式旋轉導入機，與 習知方法能實現相同性能的情況加以比較，成本與習知方 式相比會是數十分之一以下。特別是裝置側設計程序的減 少效果非常好，可讓裝置全體的可靠度飛躍性地提昇。 【圖式簡單說明】 第1圖是是本發明的磁性結合式旋轉導入機的例子。 -11 - 200532175 ⑼ 第2圖是本發明的安裝有磁鐵片段的旋轉體的剖面形 狀。 第3圖是本發明的使用磁性結合式旋轉導入機的例子 〇 第4圖是本發明的使用磁性結合式旋轉導入機的例子 〇 第5圖是本發明的使用磁性結合式旋轉導入機的例子 第6圖是習知例的磁性結合式旋轉導入機。 第7圖是習知例的使用磁性結合式旋轉導入機的例子 〇 【主要元件符號說明】 3 :磁鐵片段 5 :旋轉體 7 :磁鐵感應器 φ 1 〇 1 :磁性結合式旋轉導入機 1 〇 3 :旋轉輸出軸 109 :盒體 1 3 1 :馬達 * 1 3 3 :小齒輪 1 3 5 :齒條 1 3 7 :軸承 1 3 9 :搬運板 -12- 200532175 (10) 1 4 1 :工件 1 4 7 :位置感應器 1 5 1 :風扇 1 5 3 :加熱器 1 5 5 :閥門 1 5 7 :加熱器 1 5 9 :特殊環境室200532175 ⑴ 玖, description of the invention [Technical field to which the invention belongs] The present invention relates to a drive unit of a device which is manufactured in a special environment such as a vacuum. More specifically, '' relates to a magnetic coupling type rotation mechanism of a driving unit such as a semiconductor element manufacturing apparatus or an electronic component manufacturing apparatus. [Prior art] Transmission methods of the rotational force (torque) of a rotary introducer used in a drive unit of a device manufactured in a special environment such as a vacuum include a magnetic coupling type, a corrugated tube seal type, and a 0-ring seal Type, magnetic fluid sealed type, etc. These rotary introduction machines 'take into consideration the specifications of the device, manufactured products, and the like' to decide which type of structure to use. The wave tube sealed type, 0-ring sealed type, and magnetic fluid sealed type have the following problems. (1) For the wave tube sealed type, the torque may be limited due to the life of the wave tube. (2) As for the O-ring seal type, it is possible to pollute the environment due to the lubrication oil. (3) Even if it is a magnetic fluid-sealed type, it is possible to pollute the environment because the sealing oil is interposed. Due to the above reasons, a semiconductor manufacturing apparatus or an electronic component manufacturing apparatus used in a high vacuum state (under a net vacuum without particles) is suitable for a magnetically coupled rotary introduction machine, and a considerable number can be used. Fig. 6 shows an example of a conventional magnetically coupled rotary introduction machine 1 0 1. The rotary output shaft 10 03 is provided with a magnetic field line acting portion 105 which is rotated by the magnetism of a permanent magnet -4- 200532175 (2), and is rotatably supported by a shaft through a bearing 107. The rotating output shaft 103 and the magnetic field line acting portion 105 need to maintain a vacuum environment 1 1 1 during use. Therefore, the box body 109 containing the rotary output shaft 103 and the magnetic field line acting portion 105 is mounted on the container partition wall portion 13, and a seal U 7 is provided therebetween to block the atmospheric environment 1 15. A yoke made of electromagnetic soft iron is provided around the outside of the atmospheric environment 1 1 1 of the magnetic field line acting portion 105 housed in the case 109 with the case 109 interposed therebetween. 1 2 1. With this structure, the yoke 121 is a bearing 1 2 5 which is axially supported by the drive source connection shaft 123 and is connected to a motor (not shown) to rotate. With this structure, the rotation output shaft 103 is rotated in synchronization with the rotation of the yoke portion 121, and the torque is transmitted by rotating the output shaft 103. A front sectional view of FIG. 7 (a) and a side sectional view of FIG. 7 (b) will be described with reference to a working example using a conventional magnetically coupled rotary introduction machine 101. The magnetically coupled rotary introduction machine 101 is a rotary output shaft that is connected to the motor by a coupler and rotates in synchronization with the rotation of the motor. It is # connected to the pinion 1 3 3. A rack 1 3 5 which is engaged with the pinion gear 1 3 3 and is moved in the left-right direction 1 4 3 by rotation of the pinion gear 1 3 3 is attached to the transfer plate 1 3 9. That is, the rotation of the rotary output shaft causes the conveying plate 139 on which the workpiece 141 is placed to move through the bearing 137 in the left-right direction 1 43 of the drawing. The magnetically coupled rotary introduction machine 101 does not include a mechanically connected joint that transmits torque from the outside, and uses a mechanism that transmits torque using a rotating magnetic force. Therefore, due to some reasons, it may be possible to generate a drive that is not synchronized with the magnetic coupling type -5- 200532175 (3) The driving environment such as the motor 1 3 1 connected to the atmospheric environment 1 1 5 side of the rotary importer 1 〇1 is not synchronized. situation. This phenomenon, commonly referred to as detuning, is a phenomenon in which the rotation or rotation of the rotary output shaft 103 on the side of the vacuum environment 1 is delayed or stopped. · In order to avoid this phenomenon, as shown in Fig. 7 (b), for example, it is necessary to set a position sensor 1 47 such as a workpiece positioning sensor or a drive confirmation sensor to constantly check, for example, the conveying plate 139 or the rack 135 and other operating states. However, there are also special environments such as the vacuum environment 1 1 1 where the installed sensors are very expensive, the design is complicated, the cost will increase, and it will become the main reason for rising costs. [Summary of the Invention] A magnetically coupled rotary introduction machine is provided on the outer side of a box provided to be sealed, and is connected to a rotary shaft having a yoke portion provided with a rotating magnet piece, and the box provided to be sealed in the above. "Inside" is an output rotary shaft for supporting and rotating the magnetic field line acting part rotated by the magnetic field generated by the rotating magnet piece, a rotary signal output means mounted on the rotary output shaft, and detecting from the above The signal of the signal output means is rotated to form a signal detection means provided outside the box. [Embodiment] A first embodiment of the present invention is a magnetically coupled rotary introduction machine composed of the following members. (a) It is provided on the outer side of a sealable casing 'and is connected to a rotating shaft including a yoke portion having a magnet piece with rotation. (b) An output rotary shaft supported by the magnetic force line acting portion that is rotated by the magnetic field generated by the rotating magnet piece is provided inside the box that is provided to be hermetically sealed. (c) Rotary signal output means mounted on the rotary output shaft. (d) and a signal detection means for detecting a signal from the rotary signal output means and provided on the outside of the case. According to a second embodiment of the present invention, the rotation signal output means is provided with a magnetic member at one position or a plurality of positions of the rotation output shaft. According to a third embodiment of the present invention, the signal detection means is a magnetic sensor that is induced when the magnetic member approaches. According to a fourth embodiment of the present invention, the rotary signal output means is a light reflecting plate when the box body is a box body using a light-transmitting material, and the signal detection means is a light used to detect the reflected light. sensor. A fifth embodiment of the present invention, wherein the outer side of the box body is the atmosphere, and the inner side thereof is a vacuum or a high-purity special environment. According to a sixth embodiment of the present invention, the magnetically combined rotary introduction machine described above is provided with a control system that monitors signals of the signal detection means to monitor abnormal rotation and / or return to normal action. Hereinafter, the present invention will be described in detail with reference to the drawings. The magnetically coupled rotary introducer of the present invention will be described with reference to Fig. 1. In the present invention, the rotating body 5 of the rotating output shaft 103 is provided with a magnet segment 3 for 200532175 (5) inductor. On the outside of the case body 1009, a magnetic sensor 7 is provided which is induced by the approach of the magnet segment 3 which rotates together with the rotation of the rotating body 5. Fig. 2 shows a cross-sectional shape of the rotating body 5 which rotates integrally with the magnet segment 3. The magnet segment 3 has a structure in which one or plural magnets are attached to the rotating body 5. The mounting method includes a method of fitting the magnet segment 3 to a hole provided in the rotating body 5 ′. As another method, for example, a method using bolts. Iron can also be used for the magnet segment 3. φ is provided with a gap between the magnet segment 3 and the case body 10 9 so as not to contact each other. Therefore, the size of the magnet segment provided in the rotating body is appropriately changed in accordance with the diameter of the rotating body 5 and the size of the clearance. The magnetic sensor 7 mounted on the outer side of the case body 10 09 is a magnetic sensor that senses when the magnetic segment 3 approaches, and can detect the rotation state of the rotary output shaft 103. When multiple magnet segments are set, finer detection is possible. The material of the box body 10 is used: non-magnetic stainless steel, aluminum, glass, resin, such as acrylic resin. Therefore, when the material of the box body is selected to be a transparent material such as glass or resin, ’instead of a magnet segment, a reflection plate 9 and the like are installed, and the above-mentioned purpose is achieved by setting a sensor for detecting reflected light. As the sensor, a light sensor can be used. Mainly as long as the rotation of the rotating output shaft 103 can be detected frequently, can withstand high vacuum environments or special conditions different from the atmospheric environment, and does not become a source of environmental pollution, this can be achieved. 200532%) [Examples] Hereinafter, the present invention will be described in more detail with reference to examples. A description will be given of an operation example using the magnetically coupled rotary introduction machine 101 of the example of the present invention using a front sectional view of FIG. 3 (a) and a side sectional view of FIG. 3 (b). The magnetically coupled rotary introduction machine 101 is a rotary output shaft that is connected to the motor by a coupling and rotates in synchronization with the rotation of the motor, and is connected to the pinion 133. A rack 135 is attached to the transfer plate 139 and meshes with the pinion gears 1 3 3 and moves to the left and right by the rotation of the pinion gears 1 3 3. That is, the rotation of the rotary output shaft causes the conveying plate 1 3 9 on which the work piece 1 4 1 is placed to move to the left and right of the drawing 1 3 7 in the bearing. In the present invention, as shown in FIG. 7, for example, a position sensor 1 4 7 including a workpiece positioning sensor, a drive confirmation sensor, and the like is provided, and it is not necessary to constantly check the operating state of the conveying plate 1 3 9. A description will be given of another embodiment using the magnetically coupled rotary introduction machine 101 according to the embodiment of the present invention. Fig. 4 shows an application example when heating the workpiece in a clean atmosphere or an inert gas atmosphere such as argon or nitrogen to heat the workpiece. The magnetically coupled rotary introduction machine 101 is a rotary output shaft that is connected to the motor by a coupler and rotates in synchronization with the rotation of the motor. The fan 1 51 is connected to a convection generator. This equipment heats the workpiece 1 4 1 evenly in the heating chamber 1 5 7 and moves to the special environment chamber 1 5 9 for workpiece processing through the valve 1 5 5 after heating. When the fan 1 51 for convection generation is stopped, the temperature distribution of the workpiece 1 4 1 will be uneven, and the product will be defective. Therefore, it is necessary to rotate the fan 1 5 1 to maintain the temperature uniformly. Therefore, it is necessary to confirm that the rotation guide shaft -9-200532175 (7) rotates frequently. In the existing device, although a rotation detector such as an encoder is installed on the motor side for confirmation, the rotation is only confirmed indirectly. By installing the magnetically combined rotation introduction machine of the present invention, the above-mentioned effect can be achieved. . Of course, the magnetic coupling type rotary introduction machine can also be used to drive a conveying plate 1 3 9 for conveying a workpiece. An embodiment using the magnetically coupled rotary introduction machine of the present invention shown in Fig. 4 will be described with reference to the flowchart shown in Fig. 5. First, in the workpiece setting step 1 6 3 ′, the workpiece 1 4 1 is set on the Lu conveying plate 1 3 9 in the closed container 1 4 9. Next, start the heating and rotation detection steps! 65. The heating operation by the heater 153 provided in the closed container is started, and the rotation of the convection generating fan 1 〇1 is started. The sensor of the magnetic combined rotation introduction machine 1 0 1 of the present invention is started. To monitor. In step 1 67 of the set temperature and rotation detection, no abnormality is detected by the sensor to detect the heating temperature or the number of rotations of the fan for convection generation. An alarm will be issued in the event of an abnormality and appropriate measures will be taken . When there is no abnormality, the uniformly heated workpiece 1 4 1 is passed through the valve 1 5 5 and moved to the special environment room 1 5 9 for workpiece processing. Next, the workpiece processing step 171 is started in the special environment chamber 159. That is, by using the magnetically combined rotary introduction machine of the present invention, it is possible to monitor the signal of the magnetic sensor and determine whether it is operating normally. Using a control computer and controlling the motor with a magnetic sensor signal can return abnormal operation to normal operation. When a position sensor is installed in a room that requires high temperature, high vacuum, etc., it is often difficult to choose a specification. For example, when a high-temperature heating-10-200532175 (δ) object is used as the driven object, 'for the way of sensing it, the choice of the type of sensor, the type of wiring, or the material will be very complicated. The magnetic combined rotary introduction machine of the present invention will have simple specifications. @ 此 ’The cost will be a tenth or less compared to the conventional method. In particular, the reduction effect of the device-side design program is very good, which can greatly improve the reliability of the entire device. • The following effects can be achieved by using the magnetically combined rotary introduction machine of the present invention. ^ · First, it can be judged whether it is operating normally by monitoring the signal of the magnetic sensor. Secondly, using a control computer and controlling the motor by a magnetic sensor signal can return abnormal operation to normal operation. Third, when a position sensor is installed on the side of the driven object, it may be difficult to select a device specification due to conditions such as high vacuum. For example, when a high-temperature heating object is used as a driven object, the way of sensing it is very complicated to choose the type of sensor, the type of wiring, or the material, etc., and uses the magnetic combination of the present invention with Xin Rotating the importer is simple. Fourthly, by using the magnetically combined rotary introduction machine of the present invention, compared with the case where the conventional method can achieve the same performance, the cost will be less than one tenth compared with the conventional method. In particular, the reduction effect of the device-side design program is very good, which can greatly improve the reliability of the entire device. [Brief Description of the Drawings] Fig. 1 is an example of a magnetically coupled rotary introduction machine of the present invention. -11-200532175 ⑼ Figure 2 is a cross-sectional view of a rotating body with a magnet segment mounted thereon according to the present invention. Fig. 3 is an example of using a magnetically coupled rotary introduction machine of the present invention. Fig. 4 is an example of using a magnetically coupled rotary introduction machine of the present invention. Fig. 5 is an example of using a magnetically coupled rotary introduction machine of the present invention. Fig. 6 is a conventional magnetic coupling type rotary introduction machine. Fig. 7 shows a conventional example using a magnetically coupled rotary introduction machine. [Description of main component symbols] 3: Magnet segment 5: Rotating body 7: Magnet sensor φ 1 〇1: Magnetically combined rotary introduction machine 1 〇 3: Rotating output shaft 109: Box 1 3 1: Motor * 1 3 3: Pinion 1 3 5: Rack 1 3 7: Bearing 1 3 9: Transport plate-12- 200532175 (10) 1 4 1: Workpiece 1 4 7: Position sensor 1 5 1: Fan 1 5 3: Heater 1 5 5: Valve 1 5 7: Heater 1 5 9: Special environment room
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