JP6507966B2 - roller - Google Patents

Description

  The present invention relates to a roller used, for example, in a film transport apparatus.

  Patent Document 1 and Patent Document 2 describe a motor-integrated roller in which a motor for rotatably driving a roller rotatably supported with respect to a fixed shaft is incorporated. The motor built-in roller described in these patent documents 1 and patent documents 2 presuppose that it is used for a belt conveyor, a roller conveyor, etc.

JP 2003-102143 A JP, 2005-176588, A

  For example, in a film transport apparatus used for producing a high-performance film such as a liquid crystal film or an organic EL film used for a flexible substrate or a curved surface display, the film can be processed at high speed without causing defects such as scratches, wrinkles and deformation due to slip. It is necessary to transport the film under proper tension. In addition, since the above-described high-performance film is generally weak to heat, the heat generation of the motor portion may cause deterioration of the quality of the film. Although the structure which provided the cooling fan which rotates with a motor shaft inside a roller is described in the said patent document 2, there is no clear description about the presence or absence of the inflow path of external air, and sufficient cooling efficiency is obtained. There is no possibility.

  This invention is made in view of the above, Comprising: It aims at providing the roller which can suppress the temperature rise by heat_generation | fever of a motor part.

  In order to solve the problems described above and to achieve the object, the roller includes a motor portion including a stator and a rotor that is disposed to face the radial outer side of the stator so as to face each other, and cylindrical roller housing that rotates with the rotor A cylindrical torsion bar to which the stator is fixed, and a through shaft which is penetrated through a gap between the inner wall of the torsion bar and which fixes one axial end of the torsion bar in the axial direction; And a bearing which is disposed at a position sandwiching the motor unit and rotatably supports the roller housing, and at least a cooling flow passage for flowing a refrigerant is provided inside the through shaft. .

  According to the above configuration, since the temperature rise due to the heat generation of the motor unit can be suppressed, it is possible to suppress the quality deterioration of the film in the film conveyance device and to perform appropriate tension control.

  As a desirable mode, the range in which the cooling channel is provided preferably includes at least an axial range in which the motor unit is provided.

  According to the above configuration, it is possible to efficiently suppress the temperature rise due to the heat generation of the motor unit.

  As a desirable mode, it is preferred that the above-mentioned cooling channel contains a channel provided in the above-mentioned penetration shaft.

  With the above configuration, the refrigerant flowing through the pipe can absorb the heat generation of the motor unit.

  In addition, the through shaft may be provided with an inlet and an outlet of the refrigerant flowing through the pipe at an end portion on the fixed end side with the torsion bar.

  As a desirable mode, the cooling channel preferably further includes the gap.

  With the above configuration, the heat generated by the motor unit can be absorbed more efficiently by the refrigerant supplied from the storage unit to the gap.

  Moreover, as a desirable aspect, it is preferable that the storage part of the said refrigerant | coolant which flows through the said clearance gap is provided in the end part by the side of a fixed end with the said penetration shaft as for the said torsion bar.

  By the above configuration, the pressure applied to the gap can be made uniform in the circumferential direction.

  Further, the penetration shaft is provided at an end portion on the fixed end side with the torsion bar, with an inlet for the refrigerant flowing to the storage portion and an outlet for the refrigerant flowing to the pipe. May be

  Moreover, as a desirable mode, it is preferable to be a structure which has a sealing member between the said torsion bar and the said penetration shaft.

  The above configuration can prevent the refrigerant from leaking out of the gap.

  Further, the seal member may be an O-ring.

  As a desirable mode, a first rotation detector which detects rotation of the roller housing, and a second rotation detector which detects relative rotation of the other end of the torsion bar in the axial direction with respect to the penetration shaft It is preferable that it is the structure which has ,.

  According to the above configuration, the target is obtained using position information of the motor unit detected by the first rotation detector and the angular displacement of the other end of the torsion bar in the axial direction detected by the second rotation detector. By controlling the output of the motor unit so that tension can be obtained, tension control can be performed to convey the band-like conveyed object with an appropriate tension.

  Also, as a desirable mode, a first rotation detector for detecting the rotation of the roller housing, and a second rotation detector for detecting the relative rotation of the roller housing with respect to the other axial end of the torsion bar It is preferable that it is the structure which has ,.

  With the above configuration, position information detected by the first rotation detector, position information of the motor unit detected by the first rotation detector, and position information of the motor unit detected by the second rotation detector By controlling the output of the motor unit so as to obtain a target tension by using the difference of the above, it is possible to perform tension control for conveying the band-like conveyed object with an appropriate tension.

  As a desirable mode, at least one of the first rotation detector and the second rotation detector is preferably a resolver.

  According to the above configuration, it is possible to obtain a roller that is resistant to vibration and that is suitable for use in high temperature environments.

  According to the present invention, it is possible to provide a roller capable of suppressing a temperature rise due to heat generation of the motor unit.

FIG. 1 is a cross-sectional view showing an example of a roller according to the first embodiment. FIG. 2 is a view for explaining the relationship between tension and torque applied to a band-shaped transported object in the roller according to the first embodiment. FIG. 3 is a view showing an operation example of the roller according to the first embodiment. FIG. 4 is a cross-sectional view showing an example of a roller according to Embodiment 2. FIG. 5 is a plan view of the through shaft of the roller according to the second embodiment as viewed in the direction of arrow A in FIG. 6 is a plan view of the torsion bar in the roller according to the second embodiment as viewed in the direction of arrow A in FIG.

  A mode (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the contents described in the following embodiments. Further, the components described below include those which can be easily conceived by those skilled in the art and those which are substantially the same. Furthermore, the components described below can be combined as appropriate.

(Embodiment 1)
FIG. 1 is a cross-sectional view showing an example of a roller according to the first embodiment. In the example shown in FIG. 1, the roller 1 is a direct drive motor that directly transmits generated power to an object without intervention of a speed reduction mechanism. As shown in FIG. 1, the roller 1 includes a motor unit 2 that generates a power for transporting a band-like conveyed object, for example, a high-performance film such as a liquid crystal film or an organic EL film used for a flexible substrate or curved display. , A rotation detector 3 for detecting the rotation of the motor unit 2, a housing 4 for holding the motor unit 2 and the rotation detector 3, and a torque detector 5 for detecting a torque generated by the roller 1 . The motor unit 2, the rotation detector 3 and the torque detector 5 are each electrically connected to a control device (not shown), and the roller 1 is controlled by this control device.

  The motor unit 2 has a stator 21 and a rotor 22 rotatable with respect to the stator 21. The rotor 22 rotates around the rotation axis AX. Hereinafter, the direction parallel to the rotation axis AX is also referred to as “axial direction”.

  In the present embodiment, the motor unit 2 is an outer rotor type motor. The rotor 22 is disposed around the stator 21. The rotor 22 is disposed outside the stator 21 with respect to the rotation axis AX.

  The stator 21 has a stator core 21A and a coil 21B supported by the stator core 21A. The stator core 21A has teeth arranged at equal intervals around the rotation axis AX. A plurality of coils 21B are provided. The coil 21B is supported by each of the plurality of teeth of the stator core 21A.

  The rotor 22 includes permanent magnets arranged at equal intervals around the rotation axis AX. The stator core 21A of the stator 21 and the rotor 22 face each other via the gap g1.

  In the present embodiment, the rotation detector 3 is a resolver including a resolver stator 31 and a resolver rotor 32 and includes position information including at least one of the rotational speed, rotational direction, and rotational angle of the rotor 22 in the motor unit 2. To detect.

  In the present embodiment, the torque detector 5 is a resolver including a resolver stator 51 and a resolver rotor 52. The torque detector 5 will be described later.

  The housing 4 includes a cylindrical roller housing 41 that rotates with the rotor 22, a torsion bar 42, a through shaft 43, and a disk member 45.

  The penetration shaft 43 is provided to penetrate the torsion bar 42. One end of the through shaft 43 in the axial direction is fixed to one end of the torsion bar 42 in the axial direction, and a fitting portion 43A is provided for positioning with a device (not shown) by means of solder. There is. The through shaft 43 faces the torsion bar 42 via the gap g2 from the fixed portion with the torsion bar 42 toward the other end in the axial direction. The other axial end of the penetration shaft 43 penetrates the disc member 45, and is fixed to the disc member 45 by a nut 43B.

  The torsion bar 42 extends from the disc portion 42A to the other end in the axial direction via a gap g2 between the disc portion 42A provided at one end in the axial direction fixed to the penetrating shaft 43 and the penetrating shaft 43. And a cylindrical portion 42B. The disk portion 42A of the torsion bar 42 is provided with a mounting surface for equipment (not shown). A stator core 21A of the stator 21 and a resolver stator 31 of the rotation detector 3 are provided on the outer peripheral surface of the cylindrical portion 42B of the torsion bar 42. A support member 44 is provided at the other axial end of the cylindrical portion 42B. Hereinafter, one axial end at which the torsion bar 42 is fixed to the penetration shaft 43 is also referred to as “fixed end of the torsion bar 42”. In addition, the other axial end of the cylindrical portion 42B is also referred to as "the open end of the torsion bar 42".

  The support member 44 includes a disk portion 44A fixed to the open end of the torsion bar 42, and a cylindrical portion 44B extending from the outer peripheral portion of the disk portion 44A to the other end in the axial direction. The resolver rotor 52 of the torque detector 5 is provided on the inner peripheral surface of the cylindrical portion 44B of the support member 44, and the resolver stator 51 of the torque detector 5 is provided on the through shaft 43 at a position facing the resolver rotor 52. Is provided.

  One end of the roller housing 41 in the axial direction is supported by the outer peripheral portion of the disk portion 42A of the torsion bar 42 through the bearing 6, and the other end in the axial direction is supported by the outer peripheral portion of the disk member 45 through the bearing 7. ing. The inner ring of the bearing 6 is supported by the disc portion 42 A of the torsion bar 42, and the outer ring is supported by the inner circumferential surface of the roller housing 41. The inner ring of the bearing 7 is supported by the disk member 45, and the outer ring is supported by the inner circumferential surface of the roller housing 41. A rotor 22 of the motor unit 2 is provided on the inner peripheral surface of the roller housing 41 at a position facing the stator 21 of the motor unit 2, and a resolver for the rotation detector 3 at a position facing the resolver stator 31 of the rotation detector 3. A rotor 32 is provided.

  In the present embodiment, in order to absorb the heat generated when the motor unit 2 is driven, a pipe path 43C that constitutes a cooling flow path for flowing the refrigerant is provided inside the through shaft 43.

  The range in which the cooling flow path is provided includes at least the axial range in which the motor portion 2 is provided in the cylindrical portion 42B of the torsion bar 42. More specifically, the conduit 43C is provided in communication with the inlet 43D and the outlet 43E of the refrigerant provided at the end of the through shaft 43, and is folded in the vicinity of the open end of the torsion bar 42 . That is, the duct 43C constituting the cooling channel extends in the axial direction including the axial position where the stator 21 of the motor section 2 is provided in the cylindrical section 42B of the torsion bar 42. A refrigerant injection pipe (not shown) is connected to the inlet 43D. A discharge pipe (not shown) of the refrigerant is connected to the discharge port 43E. In addition, as a connection method between the injection pipe of the refrigerant and the injection port 43D, for example, the injection pipe may be screwed and connected to an inner screw provided on the inner periphery of the injection port 43D. In addition, as a method of connecting the discharge pipe of the refrigerant and the discharge port 43E, for example, the discharge pipe may be screwed and connected to an inner screw provided on the inner periphery of the discharge port 43E. The present invention is not limited by the connection method between the inlet pipe and the inlet 43D and the connection method between the outlet pipe and the outlet 43E.

  In this configuration, by injecting the refrigerant from the inlet 43D, the heat generated in the motor unit 2 is absorbed by the refrigerant in the conduit 43C, and the refrigerant that has absorbed heat is discharged from the outlet 43E. Thereby, a temperature rise due to heat generation of the motor unit 2 when the motor unit 2 is driven can be suppressed.

  Next, the operation of the roller 1 according to the first embodiment will be described using FIGS. 1 to 3. FIG. 2 is a view for explaining the relationship between tension and torque applied to a band-shaped transported object in the roller according to the first embodiment. FIG. 3 is a view showing an operation example of the roller according to the first embodiment.

  As shown in FIG. 2, assuming that the radius of the roller housing 41 of the roller 1 is r and the tension applied to the band-like article 200 is F, the torque T acting around the rotation axis AX is represented by T = F × r. . When this is deformed with respect to the tension F, it is expressed as the following equation (1). That is, by detecting the torque T, the tension F can be obtained.

  F = T / r (1)

  Here, in the present embodiment, the rigidity of the penetrating shaft 43 in the rotational direction is sufficiently large with respect to the torque generated by the driving force of the motor unit 2, and the rigidity of the torsion bar 42 in the rotational direction is the rotational direction of the penetrating shaft 43 Should be less than the stiffness for

  As shown in FIG. 3, when the motor unit 2 is driven to rotate the roller housing 41 in the direction of arrow A, the cylindrical portion 42B of the torsion bar 42 to which the stator core 21A of the stator 21 is fixed is opposite to the direction of arrow B. A force acts to cause relative twisting to the through shaft 43.

  In the present embodiment, the rotation detector 3 is a first rotation detector, and the torque detector 5 is, for example, a second rotation detector capable of detecting an angular displacement of 1 degree or less. The angular displacement (small angle θ) of the open end of the torsion bar 42 when it is driven is detected. By converting the angular displacement of the open end of the torsion bar 42 into a torque T, the tension F shown in the equation (1) can be obtained. That is, position information of the motor unit 2 detected by the rotation detector 3 (first rotation detector), and an angle of the open end of the torsion bar 42 detected by the torque detector 5 (second rotation detector) By controlling the output of the motor unit 2 so that the target tension can be obtained using displacement (small angle θ), tension control for conveying the band-like article 200 with appropriate tension is performed. It becomes possible.

  The gap g2 is preferably narrow enough not to inhibit the twisting of the torsion bar 42 when the motor unit 2 is driven. More specifically, for example, it is desirable that the gap g2 be about 0.05 mm to 0.2 mm. Further, by providing the gap g2 between the cylindrical portion 42B of the torsion bar 42 and the through shaft 43, the error range of the gap g1 interposed between the stator core 21A of the stator 21 and the rotor 22 becomes large. Here, when the relationship between the gap g1 and the gap g2 is g1 ≦ g2, the stator core 21A of the stator 21 may come in contact with the rotor 22 when the motor unit 2 is driven. Therefore, it is desirable that the relationship between the gap g1 and the gap g2 be g1> g2.

  Further, in the example shown in FIG. 1, the shielding plate 8 for preventing magnetic interference between the rotation detector 3 and the motor unit 2 is provided, but the magnetic interference between the rotation detector 3 and the motor unit 2 is provided. When it arrange | positions to such an extent that it does not receive to the influence by H, the shielding board 8 does not need to be provided. In addition, it is possible to prevent magnetic interference between the torque detector 5 and the motor unit 2 by configuring the support member 44 with a ferromagnetic member having a magnetic shielding effect, and the example shown in FIG. In the above, the shield plate is not provided between the torque detector 5 and the motor unit 2, but when the support member 44 is made of a member such as resin or aluminum, the torque detector 5 and the motor unit 2 A shielding plate may be provided between them to prevent magnetic interference between them.

  In the example shown in FIG. 1, the rotation detector 3 is disposed closer to the fixed end of the torsion bar 42 than the motor unit 2. However, when the motor unit 2 is driven, the rotation detector 3 detects The range of change of the position information of the motor unit 2 is sufficiently large relative to the relative twist of the cylindrical portion 42B of the torsion bar 42 with respect to the penetrating shaft 43, and the rotation detector is provided The influence on the detection accuracy of 3 is small. Therefore, for example, the rotation detector 3 may be disposed between the motor unit 2 and the torque detection unit 5. In this case, the twist in the rotational direction position of the resolver stator 31 of the rotation detector 3 with respect to the through shaft 43 when driving the motor unit 2 becomes larger than the example shown in FIG. The change range of the position information of the motor unit 2 detected by the rotation detector 3 when driven is sufficiently large relative to the relative twist of the cylindrical portion 42B of the torsion bar 42 with respect to the penetration shaft 43. The influence of the position on the torsion bar 42 on the detection accuracy of the rotation detector 3 can be ignored. Alternatively, the rotation detector 3 may be disposed closer to the other end in the axial direction than the torque detector 5. In this case, the resolver stator 31 of the rotation detector 3 is provided on the through shaft 43 whose rigidity in the rotational direction is larger than that of the torsion bar 42. Therefore, the detection accuracy of the rotation detector 3 when the motor unit 2 is driven is not affected by the relative twist of the cylindrical portion 42B of the torsion bar 42 with respect to the through shaft 43.

  As described above, even if the resolver stator 31 of the rotation detector 3 is disposed on the cylindrical portion 42B of the torsion bar 42, the position information detected by the rotation detector 3 penetrates the resolver stator 31 of the rotation detector 3 It can be regarded as equivalent to the case of 43. That is, the rotation detector 3 can be regarded as detecting the positional information of the roller housing 41 with respect to the through shaft 43.

  In the present embodiment, as described above, the rotation detector 3 is the first rotation detector, and the torque detector 5 is, for example, the second rotation detector capable of detecting an angular displacement of 1 degree or less. The angular displacement (minute angle θ) of the open end of the torsion bar 42 with respect to the through shaft 43 when the motor unit 2 is driven is detected using this. That is, as the torque detector 5 (second rotation detector), a rotation detector with higher resolution than that of the rotation detector 3 (first rotation detector) for detecting the position information of the motor unit 2 may be used. More preferably, when the amount of torsion of the torsion bar 42 at the time of maximum torque generation of the motor unit 2 is 1, it is desirable to have a resolution smaller than 1/100.

  Further, in the present embodiment, the torque detector 5 may be, for example, a strain gauge provided on the torsion bar 42. In this case, the amount of change in resistance of the strain gauge when the motor unit 2 is driven is detected, and the amount of change in resistance of the strain gauge is converted to torque T to obtain the tension F shown in equation (1). As described above, tension control can be performed to transport the band-like conveyed product 200 with an appropriate tension.

  As described above, the roller 1 according to the first embodiment includes the stator 21 and the motor unit 2 including the rotor 22 disposed so as to face the radial outer side of the stator 21 so as to face the radial direction outer side. A penetrating shaft 43 penetrates through a gap between the roller housing 41, the cylindrical torsion bar 42 to which the stator 21 is fixed, and the inner wall of the torsion bar 42 and fixes one axial end of the torsion bar 42. And bearings 6 and 7 which are disposed at the positions sandwiching the motor portion in the axial direction and rotatably support the roller housing 41, and at least a cooling for flowing the refrigerant into the inside of the through shaft 43 A flow path is provided. The provision of the cooling path includes at least an axial range in which the motor part 2 is provided. The cooling channel includes a conduit 43 </ b> C provided on the through shaft 43.

  In this configuration, the refrigerant generated in the motor section 2 is absorbed by the refrigerant in the pipe 43C by flowing the refrigerant through the pipe 43C. Thereby, since the temperature rise due to the heat generation of the motor unit 2 can be suppressed, the quality deterioration of the band-like conveyed product 200 (film in the film conveying device) can be suppressed, and appropriate tension control can be performed.

  In the roller 1 according to the first embodiment, the rotation detector 3 (first rotation detector) for detecting the rotation of the roller housing 41 and the other end of the torsion bar 42 in the axial direction relative to the through shaft 43 are relative to each other. And a torque detector 5 (second rotation detector) for detecting the rotation.

  In this configuration, position information of the motor unit 2 detected by the rotation detector 3 (first rotation detector) and an axial direction of the torsion bar 42 detected by the torque detector 5 (second rotation detector). The belt-like conveyed product 200 is conveyed with an appropriate tension by controlling the output of the motor unit 2 so as to obtain a torque with which a target tension can be obtained using the angular displacement (small angle θ) of the other end of It is possible to control tension for

Second Embodiment
FIG. 4 is a cross-sectional view showing an example of a roller according to Embodiment 2. In addition, the same code | symbol is attached | subjected to the component same as Embodiment 1 mentioned above, and the overlapping description is abbreviate | omitted.

  In the roller 1a according to the present embodiment, in addition to the conduit 43C provided in the through shaft 43, the gap g2 between the torsion bar 42 and the through shaft 43 is used as a cooling channel.

  FIG. 5 is a plan view of the through shaft of the roller according to the second embodiment as viewed in the direction of arrow A in FIG. As shown in FIG. 5, at the end of the through shaft 43, the inlets 43D for the plurality of refrigerants and the outlets 43E for the refrigerant are provided. The example shown in FIG. 5 shows an example in which the discharge port 43E is provided around the rotation axis AX, and six inlets 43D are equally distributed around the discharge port 43E. The positions and the number of the inlets 43D and the outlets 43E are not limited to these. Further, as a method of connecting a refrigerant inlet pipe (not shown) and an inlet 43D, and a method of connecting a refrigerant outlet pipe (not shown) and an outlet 43E, as in the first embodiment, for example, The injection pipe may be screwed into and connected to an inner screw provided on the inner circumference of the injection port 43D, and the discharge pipe may be screwed and connected to an inner screw provided on the inner circumference of the discharge port 43E. The present invention is not limited by the connection method between the inlet pipe and the inlet 43D and the connection method between the outlet pipe and the outlet 43E.

  6 is a plan view of the torsion bar in the roller according to the second embodiment as viewed in the direction of arrow A in FIG. As shown in FIG. 6, in the disk portion 42A of the torsion bar 42, a communication passage 42D communicating with a storage portion 42C described later corresponding to the axial position of the injection port 43D provided at the end of the penetrating shaft 43 Is provided. A groove 42E is provided around the communication passage 42D, and as shown in FIG. 4, an O-ring 42F, which is a seal member, is attached to the groove 42E.

  In the present embodiment, the conduit 43C is provided to axially extend from the fixed end of the torsion bar 42 toward the open end. That is, the duct 43C constituting the cooling channel extends in the axial direction including the axial position where the stator 21 of the motor section 2 is provided in the cylindrical section 42B of the torsion bar 42.

  The conduit 43 </ b> C communicates with the discharge port 43 </ b> E provided at the end of the penetration shaft 43 at the fixed end side of the torsion bar 42. Further, the conduit 43C is provided in communication with the gap g2 on the open end side of the torsion bar 42.

  The penetration shaft 43 is provided with a groove 43F in the circumferential direction near the open end of the torsion bar 42, and an O-ring 43G as a seal member is attached to the groove 43F.

  Further, the diameter of the penetration shaft 43 is smaller than the open end of the torsion bar 42 in the range from the attachment position of the O-ring 43G to the fixed end of the torsion bar 42. As a result, the gap g2 is increased, and a refrigerant flow path is formed. That is, the gap g2 constituting the cooling flow path extends in the axial direction, including the axial position where the stator 21 of the motor unit 2 is provided in the cylindrical portion 42B of the torsion bar 42.

  The disk portion 42A of the torsion bar 42 is provided with a storage portion 42C of the refrigerant communicating with the gap g2. The storage portion 42C and the inlet 43D provided at the end of the through shaft 43 communicate with each other through a communication passage 42D provided in the disk portion 42A of the torsion bar 42.

  In this configuration, by injecting the refrigerant from the injection port 43D, the heat generated in the motor unit 2 is absorbed by the refrigerant in the gap g2 and the conduit 43C, and the absorbed heat is discharged from the discharge port 43E. Thereby, a temperature rise due to heat generation of the motor unit 2 when the motor unit 2 is driven can be suppressed.

  In the present embodiment, as described above, the gap g2 is used as the cooling channel. Therefore, heat can be efficiently absorbed from the cylindrical portion 42B of the torsion bar 42 in contact with the stator core 21A of the stator 21 that constitutes the motor portion 2. Thereby, the cooling effect of the motor unit 2 can be enhanced more than the first embodiment, and the effect of suppressing the temperature rise due to the heat generation of the motor unit 2 when the motor unit 2 is driven can be enhanced.

  Further, in the example shown in FIG. 4, the relative position information of the roller housing 41 with respect to the open end of the torsion bar 42 is detected by the second rotation detector 5.

  In the example shown in FIG. 4, the second rotation detector 5 is provided at the open end of the torsion bar 42, and the first rotation detector 3 holds the motor unit 2 with respect to the second rotation detector 5. It is provided on the fixed end side of the torsion bar 42. More specifically, the resolver stator 51 of the second rotation detector 5 is provided at the open end of the torsion bar 42, and the resolver stator 31 of the first rotation detector 3 is the fixed end of the torsion bar 42 rather than the motor 2. It is located close to you. The resolver rotor 32 of the first rotation detector 3 is provided at a position facing the resolver stator 31 of the first rotation detector 3 on the inner circumferential surface of the rotor 41, and the resolver rotor 52 of the second rotation detector 5. Is provided on the inner peripheral surface of the rotor 41 at a position facing the resolver stator 51 of the second rotation detector 5.

  The amount of twist in the rotational direction of the torsion bar 42 with respect to the through shaft 43 generated by the reaction force received by the torsion bar 42 when the motor unit 2 is driven becomes 0 at the fixed end of the torsion bar 42 and opens the torsion bar 42 in the axial direction. It becomes large as it goes to the end. That is, the amount of twist in the rotational direction at the axial position of the torsion bar 42 in which the first rotation detector 3 is disposed is the twist in the rotational direction in the open end of the torsion bar 42 in which the second rotation detector 5 is disposed. Less than the amount. In other words, the positional information detected by the first rotation detector 3 is less affected by the twist in the rotational direction of the torsion bar 42 than the positional information detected by the second rotation detector 5.

  In the present embodiment, the difference between the position information detected by the first rotation detector 3 and the position information detected by the second rotation detector 5 is calculated, and this difference is used as a twist in the rotation direction of the torsion bar 42. Converted to torque T as angular displacement due to Thereby, the tension F shown in equation (1) of the first embodiment can be obtained. That is, the position information detected by the first rotation detector 3, the position information of the motor unit 2 detected by the first rotation detector 3, and the motor unit 2 detected by the second rotation detector 5 By controlling the output of the motor unit 2 so that the target tension can be obtained using the difference from the position information, tension control for conveying the band-like conveyed object 200 with appropriate tension is possible. It becomes.

  In the first embodiment, the change range of the position information of the motor unit 2 detected by the rotation detector 3 when the motor unit 2 is driven is a relative twist of the cylindrical portion 42B of the torsion bar 42 with respect to the through shaft 43. In the present embodiment, although the influence on the detection accuracy of the first rotation detector 3 is small due to the position in the axial direction where the first rotation detector 3 is provided. Then, the difference between the position information detected by the first rotation detector 3 and the position information detected by the second rotation detector 5 is calculated, and this difference is the angular displacement due to the twist in the rotation direction of the torsion bar 42. The torque T is intended to be converted as Therefore, as the first rotation detector 3 and the second rotation detector 5 in the second embodiment, a high resolution rotation detector equivalent to the torque detector 5 (the second rotation detector) in the first embodiment It is preferable to use a resolution smaller than 1/100 when the amount of torsion of the torsion bar 42 at the time of maximum torque generation of the motor unit 2 is 1, more specifically.

  Further, as described in the first embodiment, the change range of the position information of the motor unit 2 detected by the first rotation detector 3 when the motor unit 2 is driven is the cylinder of the torsion bar 42 with respect to the through shaft 43 It is sufficiently large relative to the relative twist of the part 42B. Therefore, it can be regarded as equivalent to the case where the resolver stator 31 of the first rotation detector 3 is disposed on the through shaft 43. That is, the first rotation detector 3 can be regarded as detecting the positional information of the roller housing 41 with respect to the through shaft 43.

  On the other hand, in the present embodiment, as the difference between the position information detected by the first rotation detector 3 and the position information detected by the second rotation detector 5 increases, the control accuracy in the subsequent stage can be improved. it can. Therefore, it is preferable to provide the first rotation detector 3 on the other end side in the axial direction with respect to the second rotation detector 5. In this case, the resolver stator 31 of the first rotation detector 3 is provided on the through shaft 43 whose rigidity in the rotational direction is larger than that of the torsion bar 42. Therefore, the detection accuracy of the first rotation detector 3 when the motor unit 2 is driven is not affected by the relative twist of the cylindrical portion 42B of the torsion bar 42 with respect to the through shaft 43. Therefore, the difference between the position information detected by the first rotation detector 3 and the position information detected by the second rotation detector 5 can be increased.

  As described above, the roller 1a according to the second embodiment is configured to use the gap g2 between the torsion bar 42 and the penetration shaft 43 as a cooling flow path in addition to the conduit 43C provided in the penetration shaft 43 . As a result, the cooling effect of the motor unit 2 can be enhanced more than in the first embodiment in which only the conduit 43C provided in the through shaft 43 is used as the cooling flow passage, and the motor unit 2 is driven. The effect of suppressing the temperature rise due to heat generation can be enhanced.

  The roller 1a according to the second embodiment detects the relative rotation of the first rotation detector 3 for detecting the rotation of the roller housing 41 and the roller housing 41 with respect to the other end in the axial direction of the torsion bar 42. And 2 rotation detectors 5.

  In this configuration, position information detected by the first rotation detector 3, position information of the motor unit 2 detected by the first rotation detector 3, and motor unit detected by the second rotation detector 5. By controlling the output of the motor unit 2 so as to obtain a target tension by using the difference with the position information of 2, the tension control for conveying the band-like conveyed product 200 with an appropriate tension Is possible.

  In the first and second embodiments described above, the example in which the resolver is used as the rotation detector has been described. A magnetic sensor such as a resolver is resistant to vibration and suitable for use in high-temperature environments, but if more precise control needs to be performed, an optical encoder can be used as a rotation detector. Needless to say, it may be used.

  In the first and second embodiments described above, an example in which a PM (Permanent Magnet) type motor using a permanent magnet is used for the motor unit has been described, but a configuration using a VR (Variable Reluctance) type motor is also described. good. Although PM motors can rotate more smoothly, it is needless to say that VR motors are suitable for applications under high temperature environments, and VR motors may be used as the motor section. .

  Moreover, when using a resolver as a rotation detector, the magnetic pole position estimation operation | movement at the time of starting can be abbreviate | omitted by matching the number of teeth of a resolver with the number of teeth of a motor part.

  As described above, the rollers 1, 1a according to the present embodiment can suppress the temperature rise due to the heat generation of the motor unit, and can suppress the quality deterioration of the band-like conveyed object 200, and enable appropriate tension control. Therefore, the rollers 1 and 1a according to this embodiment are suitable for use in, for example, a film transport apparatus used for manufacturing high-performance films such as liquid crystal films used for flexible substrates and curved displays, or organic EL films.

1, 1a roller 2 motor unit 3 rotation detector (first rotation detector)
4 housing 5 torque detector (second rotation detector)
DESCRIPTION OF SYMBOLS 6 bearing 7 bearing 8 shielding plate 21 stator 21A stator core 21B coil 22 rotor 41 roller housing 42 torsion bar 42A disk part 42B cylindrical part 42C storage part 42D communicating path 42E groove part 42F O ring (seal member)
43 through shaft 43A fitting portion 43B nut 43C pipeline 43D inlet 43E outlet 43F groove 43G O-ring (seal member)
44 support member 44A disc portion 44B cylindrical portion 45 disc member 200 band-like conveyed object AX rotation axis g1, g2 gap

Claims (12)

A motor portion including a stator and a rotor which is disposed to face the radially outer side of the stator so as to rotate relative to each other;
A cylindrical roller housing that rotates with the rotor;
A cylindrical torsion bar to which the stator is fixed;
A penetration shaft which is penetrated through a gap between the torsion bar and the inner wall of the torsion bar and which fixes one axial end of the torsion bar;
A bearing disposed at a position sandwiching the motor portion in the axial direction and rotatably supporting the roller housing;
Have
A roller provided with a cooling flow passage for flowing a refrigerant at least inside the through shaft.   The roller according to claim 1, wherein the range in which the cooling channel is provided includes at least an axial range in which the motor unit is provided.   The roller according to claim 2, wherein the cooling flow path includes a conduit provided in the through shaft.   The roller according to claim 3, wherein the through shaft is provided at an end portion on the fixed end side with the torsion bar, with an inlet and an outlet of the refrigerant flowing through the pipe.   The roller according to claim 3, wherein the cooling channel further comprises the gap.   The roller according to claim 5, wherein the torsion bar is provided with a storage portion of the refrigerant flowing to the gap at an end portion on the fixed end side with the penetration shaft. The penetration shaft is provided at an end portion on the fixed end side with the torsion bar, with an inlet for the refrigerant flowing to the reservoir and an outlet for the refrigerant flowing to the pipe. ,
The roller according to claim 6.   The roller according to any one of claims 5 to 7, further comprising a seal member between the torsion bar and the through shaft.   The roller according to claim 8, wherein the seal member is an O-ring. A first rotation detector for detecting rotation of the roller housing;
A second rotation detector that detects relative rotation of the other axial end of the torsion bar with respect to the penetration shaft;
Have
A roller according to any one of the preceding claims. A first rotation detector for detecting rotation of the roller housing;
A second rotation detector that detects relative rotation of the roller housing with respect to the other axial end of the torsion bar;
Have
A roller according to any one of the preceding claims.   The roller according to claim 10, wherein at least one of the first rotation detector and the second rotation detector is a resolver.

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