TW200532153A - Ultra-low temperature refrigerating equipment, refrigerating system, and vacuum plant - Google Patents

Abstract

In an ultra-low temperature refrigerating equipment (R) with a mixed refrigerant prepared by mixing a plurality of refrigerants having mutually different boiling points, for assuring the liquid refrigerant flow of a subcooler (31) and increasing the cooling efficiency of a low-temeprature coil (32), a secondary refrigerant loop (39) including a capillary (28) is positioned with the upstream end thereof being connected to the upstream end of a primary refrigerant loop (38) including the low-temeprature coil (32) and the capillary (28), wherein the position of the secondary refrigerant loop (39) is lower than the position of the primary refrigerant loop (38), so that the refrigerant in a gas-liquid mixing state expelled at the subcooler (31) and the liquid refrigerant both flow in a larger amount into the secondary refrigerant loop (39) than into the primary refrigerant loop (38).

Description

200532153 IX. Description of the invention: 1. [Technical field to which the invention belongs] Cold The present invention relates to an ultra-low temperature refrigerating system and a vacuum device for generating ultra-low temperature cold capacity. & II. [Previous Technology] So far, as a cold rolling system for generating ultra-low temperature cold capacity below -100 C, as shown in Patent Documents B2 and 3, a plurality of non-coexisting refrigerants having different boiling point temperatures are mixed. The mixed refrigerant method of sealing the refrigerant to the refrigerant is a known method of ultra-low temperature cold storage. This ultra-low temperature freezing device, such as a substrate (wafer), etc. ^ The moisture in the vacuum tank of the vacuum film forming device is removed by freezing to improve the vacuum level. The refrigerant circuit of the refrigerating system is basically composed of, for example, compressors, chillers, multiple gas-liquid separators, multiple gas-liquid separators, multiple-stage 'heat-father exchangers, and multiple decompressions. And cooler (evaporator). Among the mixed refrigerants ejected from the above compressors, the high-boiling-point refrigerant is mainly condensed by a condenser, and then the radon refrigerant and the gas refrigerant are separated at the radon / separation stage, and the gas refrigerant is classified in the first stage of the heat exchanger once. On the side, it is exchanged with the liquid after cold separation and decompression after the above-mentioned liquid cooling. In addition, staged heat exchangers after stage 2 are also carried out. Iii. In the gas-liquid separation 11, the separation is condensed by the stage-stage heat exchanger in the upper stage ^ the medium-the refrigerant and the liquid refrigerant. The separated refrigerant is depressurized by a pressure reducer f ,, and is evaporated at the heat exchange 11 of each stage of f, and the vaporized refrigerant from the gas-liquid separation radon is condensed by the evaporation heat. And, on the multiple-stage fractional heat exchangers, the refrigerants are condensed in the order from the high boiling point to the low boiling point of the mixed refrigerant. &Amp; After decompressing the refrigerant flowing out from the secondary heat-exchanging side of the graded heat parent by a pressure reducer such as a capillary tube, the refrigerant is evaporated in a cooler. As a result, an ultra-low-temperature cooling capacity below 0 (rc) is generated, and the cold portion of the cooling capacity cools things to be cooled, such as the water content of a true towel. Ίί, Ιwill tthis !! After evaporating, the gaseous refrigerant returns to the second, ",,,,, and parent, and then returns to the compressor after passing through the step changer of each stage twice. 200532153 The above decompression repeatedly The main refrigerant circuit set in the cooler is connected in parallel to the sub-cooling line f, and a subcooler pressure reducer is installed on the sub-refrigerant circuit. There is a full flow between the upper condenser and the cooler. The second medium f1 discharged from the above condenser can exchange heat with the primary-side refrigerant twice. The side-side supercooler formed by the father is replaced by f, and the refrigerant on the side of side j is replaced. Cooling with the refrigerant on the secondary side ^ Cooling ° on the other side, the decompressor 11 for the subcooler is a device for reducing the pressure of the liquid refrigerant provided by the secondary side heat exchange system at the secondary side. Also, the above-mentioned mixed refrigerant In order to prevent the abrasion of bearings and other components in the compressor from mixing into the refrigerant, a mixture of refrigerant from the discharge side of the compressor to the condenser is provided. Low: But the oil separator 'prevents freezing due to the refrigerating machine oil being supplied to the cooler, and the refrigerant is ultra-low temperature. The two refrigerants are not sufficiently condensed at the beginning of the start, and the discharge pressure rises. The pressure resistance of the device. For this purpose, a separate tank can be provided. The refrigerant circuit includes a valve that operates when the pressure in the refrigerant circuit exceeds a prescribed pressure (such as a slightly lower pressure). The pipeline connection allows the buffer tank to enter into the tank, and the operation with reduced discharge pressure can be continued. 〇 In Patent Document 4, the buffer tank and the compressor are connected to circulate the refrigerant in the buffer tank. 1 ^ Πβ, there is a cooler in the above-mentioned true two film-forming device (the main cooling is required. For this purpose, the above-mentioned cold; east device 'will connect the pressure discharge port * cooler two earth circuit, and compress by The machine bleeds gas, but prevents the defrost from turning, and performs defrosting of the cooler. Preventing transportation (Patent Document 1) Utility Model Registration No. 2559220 (Patent Document 2) JP-A No. 2-67855 (Patent Document) 3) Japanese Unexamined Patent Publication No. 6-347112 (Patent Document 4) Japanese Unexamined Patent Publication No. 6-159831 (Problems to be Solved by the Invention) 200532153 However, the conventional refrigeration system described above has the following problems. In the East system, it is usually set as the main cooling ^ and the subcooling center twice-the flow of the overcooling medium is mutually crying, and the branch of the circuit and the sub-refrigerant circuit flows to the main cooling side. It is composed of liquid refrigerant, which provides ^ 3-part of the milk refrigerant gas-liquid mixed state refrigerant. For this reason, such as ^ direction, cold "and subcooling are set to do each other with the amount of cold ship, although such as J, M, over When there is little liquid refrigerant on the secondary side of the cooler, The cooling of i is inadequate, which leads to a decrease in the liquid θ liquefied by the supercooler > the cooling efficiency of the main cooler W is reduced. As a result, there is a change in the cooling load of the cooling target by the cold f , Or it is unable to cool the negative county steadily, or the cooling time required by the main cooler to cool the object from normal temperature to low temperature is longer. ^ $ (2) 其-人 ， 彳〒 Stop the normal operation of the refrigerating device, and let the gas discharged from the compressor be supplied to the cooler through the wide-phase circuit to perform the defrost operation of the cooler. If the defrost operation is not started at the beginning of the defrost operation, If you rely on oil, it will produce cold; Dongji oil flows to the road to provide ultra-low temperature cold mail, and the problem of solidification in the cold bead cooler. ^ (3) Once again, such refrigerator oil is provided to the cooler to cool After the solidified solids in the cooler, even when the cold oil is passed through the cooler when the cooler heats up, the refrigerating machine oil flowing out from this unit is equal to the same ultra-low temperature state and is supplied to the heat exchanger. The oil will also solidify. It takes time to wait for solidification, resulting in a longer defrosting operation time. (4) In addition, in recent years, in order to improve the cooling capacity of refrigeration equipment, a low-boiling-point refrigerant maintained in the gas phase state during operation and during shutdown has been used more often For this reason, the problem of insufficient buffer tank capacity has arisen. 'In order to solve such a problem of insufficient buffer tank capacity, a large-capacity buffer tank can be used. However, the buffer tank capacity is simply increased to ensure the buffer tank. It is difficult to report the installation space. Also, the specific gravity of the refrigerants with different boiling points is different. It is difficult to return the 200532153 refrigerant to the distant position of the refrigerant return pipe of the refrigerant circuit from the buffer tank. To achieve the complete cycle and refrigerant sealing efficiency of the first two. Here, I will describe the following: the ultra-low temperature water of the high-vacuum device will cool the cooler in a short period of time. 3. [Summary of the Invention] The invention of the scholar is invented in view of the above points. The first goal is to adjust the flow rate of each refrigerant appropriately, to stabilize and fill the liquid refrigerant flow rate, to increase the cooling efficiency of the main cooler, and to shorten the cooling object from normal temperature to low-temperature water accumulation. In the above-mentioned system, the defrost circuit is set up to remove the cold oil under the condition of ultra-low temperature cold and cold oil, so that the special purpose of the heat exchange is "the 4th largest system of the county: Banxian cold condition." _Wei can realize the buffer tank, and can effectively circulate the gas refrigerant in the buffer tank. The fifth object of the invention is to not lose its cooling 200532153 in the ultra-low temperature cold beam device. Objective 'The first In the invention, the cooling “East System” that flows to the main cooler and the supercooling μ is ingenious. The first invention of the second invention includes the pressure of compressing the refrigerant. Second, the condenser that discharges the refrigerant to the condenser. From the condenser side, and from the primary side, and the secondary side that is decompressed by the subcooler, the secondary side, the primary side side and the secondary side, the second part of the L parent is replaced by Θ. Cooler, evaporation from the subcooler once spit To the main refrigerant is mixed with the amount of the cold refrigerant. The refrigerant system of the invention of the refrigerant 2 includes: a compressor that compresses and mixes boiling points to each other, and a compressor that cools the refrigerant, and a mixture that cools the compressor's discharge. &Quot; si ΪΪΓ1, The condenser that quenches the medium, from high boiling point to low boiling point; plural: tf = liquid knife and liquid refrigerant in the mixed refrigerant discharged from the machine are separated by $, and the refrigerant separated by each gas-liquid separator The disk is made of refrigerant wd, there are low boiling points spit out from the stage heat exchanger of the last stage and 2 times from the side-side and full of decompressed refrigerant flow from the subcooler-side, 纟 i times-side low Buddha point = ^ two ft low 'Fu point cold exchange between the subcooler and evaporation ㈣: people-side spit out and low dust by the main cooler with a pressure reducer "cold :; tr elephant to ultra low temperature The level of the main cooler, from the above subcooling m medium 'flow through subcooling 112 times-the side of the liquid refrigerant flow is large,' reducing the amount of subcooling age to the main 2 to increase the amount of material. The structure of the invention, because the domain sub-cooler 2 times-side liquid refrigerant 200532153, the liquid refrigerant flow rate is large The subcooler 1 - Zhen cooling County side of the main charge cooler even be " spoon ° tongue in the female can be cooled with the cooling set between objects. ， 51, § 51: ‘When a subject quickly cools from normal temperature to light and ultra-low temperature, the temperature is lowered [4]; The refrigerant flow increaser of the cooling system is based on the minimum cross-sectional area of the above-mentioned sub-refrigerant circuit, which is greater than the maximum k / f of the main refrigerant circuit. It features a large area structure. And the auxiliary device 1-the refrigerant discharged from the side flows into the main refrigerant circuit and the main refrigerant circuit is broken. 2: Because the minimum cross-sectional area of the auxiliary refrigerant circuit is larger than the larger cross-sectional area of the main refrigerant circuit, as a whole, Because i has a large amount of liquid refrigerant flow to the main refrigerant circuit of the over-flowing person. However, the gas refrigerant can achieve sufficient cooling efficiency. 0 ~ U Liquefied Nylon Refrigerant Flow Increased Cooling of the Main Cooler The above-mentioned supercooled refrigerant flow increased by 11 and the main refrigerant circuit including the pressure reducer for the cooler and the upstream branch branch. A sub-refrigerant return 5 with a supercooler pressure reducer is provided. The above-mentioned path of the main refrigerant circuit and the sub-refrigerant circuit branch is lower than the lowest height position of the main refrigerant circuit. When the refrigerant discharged from one side of the two-time t-cooler once flows into the main refrigerant and returns, the lowest height of the highest path of the sub-refrigerant circuit at its branch is low. Therefore, the gas-liquid mixed state is cold and medium. There are many liquids, mediums, and sub-refrigerant circuits with a relatively low height. They flow to the sub-cooling unit. 200532153 This is the time to pass; ::: ¾ Main back:: knife cold = increase In the fifth invention, the third invention described above The effect described above. The secondary circuit of the refrigerant circuit and the sub-refrigerant circuit branch has the effect of the main and fourth inventions, and the third and sixth inventions of Fengjia are based on the above-mentioned cooling efficiency. The main cooler cools the vacuum capacity. 5 | Endothelium Bagan, any one of the refrigeration system. This, the binding vacuum device makes the real capacity. Tugn from the out-side to the condensation 7 is not a cold spray set to remove the cold shaft from the compressor. 'Duck +, bitch defense; specifically, in the seventh invention, the mixed refrigerant of plural kinds of refrigerant presses the high-boiling-point refrigerant in the medium with different boiling point of ik5 into the mixed refrigerant of the mixed cooler discharged from the compressor. Except = ^^ = 1, exit; side to side the condensed liquid refrigerant and gas are separated by the above-mentioned condenser liquefied refrigerant, separated from the separator, the heat exchange of the liquid refrigerant of each gas-liquid separator is cooled S-level and stand The mixed refrigerant discharged from the decompressed machine is supplied to "^ Defrost 7 = When defrosting and defrosting, the compression is configured to remove the cold equipment from the above-mentioned mixed refrigerant. ^ First '11 Karma 200532153 Roller branch road' Remove the cold circuit from the above mixed refrigerant In the medium ^ Because the second defrosting circuit is equipped with the second male, the mountain cry, and the eighth ramming middle 'is the above defrosting, the machine closes the valve, the above second oil separator, with J: open during frost It is characterized by opening the valve. 11 In addition to the opening of the phase port to the above opening and closing, the invention, because the second point of oil crying, Ji Yubu, +, enter one = 42 points of oil H · higher pressure than the latter ; ^ = [Off suction oil return to the compressor suction side of the compressor is connected to separate the cold roller oil lubricator, the former is higher than the latter ΐ = = ::; ί :: = 22 ΐ to make cold Kang oil flow back. Force In the ninth invention, the reverse flow of the poor mixed cold oil can be set up by using the second oil separator, which is located at a distance longer than the distance to the downstream end of the defrost circuit. 2 The oil separator is arranged to the upper = the distance is shorter than the distance to the downstream end of the defrost circuit = the cold in the state of the upper degree is low; the Dongji oil can be cooled more reliably ^ 12 200532153 Brother 10 La Mingzhong A plurality of buffer tanks are provided, and by the connection between the buffer tanks, the gas refrigerant can be smoothly circulated in the buffer tanks. The body refrigerant is effectively circulated. Also, the body is prevented from being lost. Specifically, in the invention, the compressor is compressed and mixed with the boiling points of each other, and the compressor cools the high-quality refrigerant in the mixed refrigerant discharged from the compressor. Separate according to the order of the refrigerant from high_refrigerant to = cold_ condensing n liquefied refrigerants and gas refrigerants with multiple levels of turbulent liquid separation, depending on the refrigerant separated from H by the gas age, i After the liquid separator is separated and decompressed by the pressure reducer, the liquid refrigerant has evaporated from the last of these plural stages: the low boiling point refrigerant cooled by the tlf 2 pressure is cooled to the ultra-low temperature level. The line is connected by the refrigerant circuit. Dry τ Yes! ^ The refrigerant circuit is characterized by a plurality of buffer tanks connected to prevent the compressor discharge pressure from rising. ㈣A plurality of buffer tanks are connected to the refrigerant circuit. Compared with the case of one of the i-capacity tanks, it is ensured that the stop pressure f and the discharge pressure are abnormally increased in the factory, which is beneficial to the stable operation of the cold bead device. +, $ Private / 1 invention, in the ultra-low temperature freezing device of the tenth invention above, is the above 3, which is composed of at least one first buffer tank, at least one second that is located at a position more than the first male 1 Buffer tank composition. The first and second buffers cool the gas, and the communication tubes flowing between the second and second buffer tanks are interconnected. If the second buffer tank is connected to the compressor discharge side and the suction side, Features a refrigerant circuit. Since the two and second buffer tanks are connected to each other by a communication pipe, the remaining tbufan X η 0 is the refrigerant. As a result, it is possible to prevent the stagnation component of the gas refrigerant in the tank from being completely circulated, and to prevent the ribbed mixed refrigerant component from changing compared to that when the sheep ^ refrigerant is sealed, thereby causing a decrease in cooling performance. The 12th invention, in the ultra-low temperature freezing device of the 10th invention, is composed of the above 13 200532153 buffer tank. 5 flute = less includes-1 buffer tank, at least-2 buffer tanks flow between 2 buffer tanks, the gas refrigerant is discharged from the 1st and 2nd machines-side; human media ^ = mesh interconnected, The first buffer tank is connected to the compression-side refrigerant circuit H. "The middle of the communication tube and the compressor are sucked in between the two and 5", and the flushing tanks are connected to each other by the communication tube. "Therefore, the ratio plate cold chest ttf element is fully touched to prevent the ribbed mixed refrigerant component ϊίΐ, Changes in the ratio cause a decrease in cooling performance. Connected from the refrigerant: the refrigerant circuit on the suction side of the compressor facilitates circulation in the tank. Therefore, the gas refrigerant on the suction side of the compressor is sequentially passed through a plurality of buffer tanks, and the ultra-low-shirt freezing installation of A s, 5 and 5 is composed of the above buffer tanks. The / =; ^ 1 1 buffer tank, at least-2 of the 2 buffer tank _ 敎 3 phase tank '2 wire, mixed with the refrigerant circuit connection side of the discharge side of the 1st and 2nd shrink machine, the 2nd buffer The buffer tank is connected to the pressure medium circuit. The cold side on the suction side of the Yuchong tank and the reverse fine machine is the invention, because the first and second circulates the refrigerant between the two buffer tanks. Therefore, 2 is connected to each other by the communication pipe, so the refrigerant components with different specific gravity are kept completely circulated: the hysteresis ratio of the internal gas refrigerant is changed from time to time, resulting in a decrease in the composition of the Pf as described above. Retention of gas refrigerant in the tank. This can prevent the temperature increase of the defrost circuit downstream exchanger at the same time in the first invention. The σ 卩 blade is two, so that the cooler and the heat, specifically, in the fourteenth invention, a mixture of a plurality of types of refrigerants, such as a spoon and a mixture of refrigerants, may be combined with each other at different points. The condensed mixture is pressed ... The liquid refrigerant and gas in the refrigerant from the high boiling point cold 14 200532153 are separated by the gas-liquid separator separator and the refrigerant is separated from the graded heat exchange for cooling, and two, t The liquid heat exchanger spit out the heat exchange grading heat exchanger, and "the final level of the cooler in the double level is connected by the refrigerant circuit = the same as a certain two = part of the object to the ultra-low temperature freezer on the premise. , 5 / Ringbuichi's defrost circuit is connected to the cooler at the downstream end of the injection branch circuit during ultra-low temperature cutting. -Side refrigerant return ^ Invention, the downstream end of the defrost circuit is mainly connected to the cooler at the downstream side of the main branch circuit. Population ^ Two branches, because the downstream side is connected to the cooler outlet side of the cooler, the medium circuit stops the refrigerant circuit caused by the solidification of the cold shaft oil, etc. ^ During frost operation The above-mentioned sub-branch in the ultra-low temperature cold rolling device of the circuit 由 invention is made by the invention, and the cooler and the valve are opened by the opening and closing valve as described above, and then the opening and closing valve is closed, so that the flow is diverted to the main branch until then The old refrigerant of the circuit ^^ = only flows into the main branch circuit to heat up the cooler, so that in the ^ 6th invention, the refrigerant circuit is connected in parallel to each other as a plurality of 15 200532153

GiS: Each branch pressure reducer is connected ‘to allow refrigerant to selectively flow through these complexes… ίΐΓ’ ‘The 16th Japanese species’ to include: Compression mixed boiling points are different from each other?压缩机 Refrigerant mixed refrigerant compressor, cooling the refrigerant in the mixed secondary medium discharged from the compressor to the liquefied condenser, and separating the liquid refrigerant liquefied from the condenser and ϋ in the order of the low refrigerant in the mixed refrigerant Liquid separator, heat exchange of the refrigerant 'pan f' separated from each gas-liquid separator, decompressed liquid refrigerant, heat exchange of the knife-level heat of the Ding Department ◎, decompression from the boiling point refrigerant in the multiple stages The pressure reducer and the evaporation are formed by the pressure reducer. Moreover, it is characterized in that a plurality of H from each of the supply paths are compressed and flowed through the city H of the refrigerant. At least one of the branch circuits was invented, and each of the two branches was connected to each other on the road. The two branches = at least-one branch in the upper branch circuit. The branches in the plural branch circuits ensure that the cooling object is cooled. Until the stipulation, the resistance changes by the cold "γ," ', the search ability' until the cooling temperature can be shortened, and it is also characterized by the setting of an on-off valve in at least one of the number 22: 1. The partial flow is controlled by the = selector valve, which can adjust the branch branch time. In the cold center, you can adjust the cooling temperature and cold arbitrarily according to the 16th or 17th invention of the ultra-low temperature cold rolling shock installation. 16 200532153 is a multi-branch pressure reducer with a different pressure. Features. According to this invention, since the plural branch pressure reducers each have the same decompression ability, the second case is to increase the adjustment range of the cooling temperature and the cooling time in the cooling system. In the nineteenth invention, the above-mentioned inventions of any one of the sixteenth to eighteenth inventions are characterized in that the branch pressure reducer is a capillary tube. Low (cold dish cold-from the invention 'Because the capillary is used as a pressure reducer, the pressure is reduced at an ultra-low pressure. Therefore, the use of an expansion valve "reduces the pressure", which stabilizes the device. It is also advantageous. Compared with the% expansion valve, the price is lower, so the equipment cost is greatly reduced. G Furthermore, in the 帛 20 invention, the cooler of any one of the 6th to 19th inventions Cool the water in the vacuum container to make it, and install the characteristics. From this, you can get the production efficiency of the vacuum device: Φς: two. Heart (effect of the invention) The above system, the first or second riches For the subcooling that includes the cooling object, the primary-side refrigerant is cooled by the secondary-side refrigerant twice; the line '㈣subcooling㈣ 2: owing to the refrigerant flow rate Many, mixed pairs of supercoolers 丨 time-side gas △ ϊ 'ί ii charge, ΐ ΐ'! Improve the cooling effect of the main cooler, you can find the daughter-in-law of the door's crotch and shrink when i The temperature of the object cooling down to the ultra-low temperature level is m. Media circuit, the minimum cross-sectional area of the sub-refrigerant circuit is larger than the main tii, and the accumulation is larger than that of the subcooler once-when the refrigerant discharged from the side flows into the sub-cooling path and the sub-cooling path, The flow of the road is more than the refrigerant in the circuit, which can increase the liquid refrigerant flow in the sub-refrigerant circuit than the main refrigerant circuit, which also has the above-mentioned financial age and capacity increaser. 17 200532153 Refrigerant 3 The cooler and the decompressor of the main cooler reducer are connected to the main refrigerant circuit, and a supercooling 11 pressure reducer is installed. :: Xu, the main refrigerant circuit and the sub refrigerant circuit branch The proportion of the sub-refrigerant liquid refrigerant in the sub-refrigerant circuit, which flows to a relatively low level, increases, so the refrigerant flow rate is greater than the flow increaser flowing to the main refrigerant circuit. The super-cooling has been concretely achieved by the early construction. The position of the refrigerant refrigerant flow position is lower than the lowest position of the medium refrigerant f circuit than the main refrigerant circuit, so that d = month. "; The main cooling system of the East and the Central 11 cooling water in the vacuum container has a high production rate. Stingy, empty state 'and shortened cooling Evacuation, time, lifting and cooling machine, and the defrost circuit installed, when self-mixing is set, it can also prevent multiple oil separators in series from being connected with the refrigerant ring on the same day. The oil separator is installed between the opening and closing valve to close the mixing, and the closing pressure is between the suction side of the fine makeup and the oil separator. The suction of the compressor \ From the ninth invention, the oil separator is assembled and the temperature is determined by Gao Lai oil, more reliably ^ to recover the 10th ㈣, and a plurality of buffer tanks are connected to the refrigerant circuit. Slow down 18 200532153 The gift of space for flushing tanks 彳 Force difference = rise to cool; east device large capacity tilting _ machine discharge pressure from the 11th invention, the article and the surface between the two buffer tanks 2 = „communicating pipe to each other The connection allows the mixed refrigerant component ratio of the refrigerant to freeze and stay, which can prevent the decrease in the device. When the medium is sealed, the cooling performance is changed due to the change in the refrigerant seal. From the refrigerant circuit] When entering the room, the refrigerant circuit on the suction-side of the shrinking machine circulates in the tank and shuts down. Retention of gas refrigerant. The suction-side return circuit of the machine flows into the outlet side and is retained by compression. The main branch that constitutes this to prevent the gas refrigerant in the tank from m = _τ _ partly branched from side to side makes the cooler and heat exchange cry to the cold-hearted population-side and outlet-chiller. Inner and two liters: 'It can prevent the defrosting operation from being shortened by the above-mentioned good cooling cycle. The mixed refrigerant in the surface refrigerant circuit will be opened. The heat exchanger is invented by the 16th. The Zhuang link turns even shorter. The plurality of branches are connected to a pressure reducer, and then the number of circuits is switched by two, and the amount of 3 is also cooled. The cooling object is cooled to the prescribed cooling temperature.] = Force ^ can be asked to shorten the cooling time until it reaches the cooling temperature. From the 17th invention, the switcher can be arbitrarily adjusted the cooling temperature and the cooling time when the branch is returned to the cooler towel. ^ ≫ An on-off valve, from the 18th invention, each of the branch pressure reducers has different reductions. Pressure capacity, 19 200532153 can be increased in cooling H t to increase the cooling temperature and cold work. Invented by the 19th invention, the above pressure reducer is gross: enough to decompress the low-boiling point refrigerant, so that the device; the ultra-low temperature region can indeed be used. Raise and increase wealth and local employment facilities. & Miscellaneous catching can be obtained. According to the twentieth invention, the ultra-low-temperature freezing true ^ capacity 1 ^ moisture makes it silk 'can improve the stability of the ball placement. "Production efficiency and action 4 of Eryizhi [Embodiment] Hereinafter, the embodiment of the present invention will be described in detail based on the drawings, which does not exceed the example in essence, but the good month is limited by this use. It is also not suitable for this application Or (Embodiment 1) Slightly 1 Γ This embodiment describes the layout of the vacuum-side-to-side space-to-green-place A—a vacuum container in which an exemplary true display substrate (also known as a wafer) is formed. Status Unillustrated, the substrate to be filmed is sent into a direct space to cry 丨 opened m. ^ Nti〇tiSi: r ;; T〇3 ϊ work to make the vacuum container 100 into a vacuum state. Relationship: ^^ set among the public ^ constitutes the embodiment of the present invention 丨 the low-temperature coil 32 described later ^ straight === the cooling object water in the excitation of the cold beam device R, the second fruit J is drawn directly from the work The vacuum container is divided to raise the vacuum container to the level of ultra-low temperature, thereby 'capturing this; East water map, ‚two-square two-two \ shows the layout of other examples of the vacuum film-forming device A, the flat low-temperature coil of the east 4 sets of low-temperature coils 32 is not placed in the vacuum container contact 20 200532153. It is evacuated by vacuum pump 103 In the state, the vacuum degree of the vacuum container is increased. The structure is the same as that of the vacuum film forming device A shown in Fig. 1. The medium R ϊϊ ΐ ΐ 装置 装置 device R 'uses a number of different types of cold Buddha i Install the refrigerant from the county. ⑶ The ultra-low temperature level cooling capacity under the bu ΐΐ i as shown in w 3, the overall structure of the R, installed R, 1 series seal description _ ring refrigerant Peng, the refrigerant circuit 1 is connected to the following The refrigerant piping 2 of the compressor 4 is a compressor for compressing gas refrigerant, and the oil separator 5 is connected to the oil separator 5. The oil separator 5 is mixed from the messy refrigerant of the second gas refrigerant oil. The compressor is cooled with lubricating oil, etc .; East = two than =, returns to the shrinking machine 4 through the oil return pipe 6 and the refrigerant gas from the machine 4 is divided into Γ points, which is connected to the discharge part of the self-compressing moisture impurity device 8 between Remove the condenser 10 in the refrigerant. In the future, the primary side of the water-assisted device 10 will be returned twice at the auxiliary temperature-the side of the refrigerant, and the low condenser 8 and the auxiliary unit sucked by the machine 4 Crying ^ people = cohesion. In this embodiment, the cold condensate is mixed with water to form a boil, and the two condensers 8 and 10 are used to liquefy the refrigerant. The discharge part on the side of the device is connected to the first gas-liquid separation mixed refrigerant separation into two, Γ separation " V2 _ from the above lion condensation ϋ1. The gas-liquid refrigerant discharge part is connected to the gas-liquid refrigerant discharge part f 18 on the primary side of the liquid refrigerant discharge part, and there is also 1 heat exchanger 18 2 attack—such as 4 reduced capillaries 24 and the same The first liquid refrigerant is capillarity by J. Widely, the first gas-liquid separator 12 is separated from the secondary side and plugged. After being reduced, it is supplied to the first heat exchanger 18-2. The gas cooler on the side is cooled once by the bladder and condensed and mixed. 21 200532153 Gas Refrigerant to liquefaction. The gas-liquid separator 13 is connected to the second gas-liquid mixed state refrigerant separator at the side of the second side of the '2: = 18 which is discharged once. The separator 13' will come from the first heat exchanger 18 separator. The gas refrigerant medium of Π and «f /, ° are at the second gas-liquid, and then the second refrigerant is separated from the second refrigerant through a second capillary 25 connector 13 as a pressure reducer. ^ 2 side. And 'the second gas-liquid separator 19-side f is decompressed and supplied to the second condensate-mixing refrigerant, and the primary-side exhalation part is cooled; even ^^ coincidentally, f' the second heat exchange The third capillary 26 in the separator 19, as well as the Yele separator 14, the third heat exchanger 20, and the fourth gas-liquid separator ㈡;; = 1 and = out part, it1 phase of the capillary 2Γ == 12, the first heat exchanger! 8 and A separator 14 separate liquid details). And 'the third side of the third gas-liquid exchanger 20 is decompressed from the side W5 thin tube 26 and supplied to the third heat exchanger 14 once. The side gas is evaporated and cooled from the third gas-liquid separation gas refrigerant to the liquefaction cold shot. At miscellaneous temperature, the fourth capillary tube 27 is reduced to ^^^ 4th f = the separated liquid refrigerant is from 骖, Shigu Ganwaiyou 1 ..., fan brother 4 heat exchanger 21 2nd side who Xuanmou The second cooling is from the 4th gas-liquid separator 15 once-the side gas refrigerant, a high gas refrigerant at the core temperature to the liquid:

The “lobes” of the spit out part 31: on the secondary side are composed of = J and the main refrigerant piping 2a and the auxiliary refrigerant piping 2b. By reducing ΐΐ4, the medium piping 2b is connected with the fifth capillary in the middle. Decompression for cooling the piano • Also, the downstream side of the sub-refrigerant pipe 2b is connected to the same (^ 然 ^ 22 200532153 " 3 1 2 times-side 31b, the subcooler 31 evening 9; μ J is connected to The 4th heat exchanger 21-2 above: the 7th side 31b refers to the 3 medium, and the refrigerant discharged from the exchange 21 passes through the subcooler 31 ^^ and the 5th vehicle that will be from the 4th heat transfer part to the sub refrigerant pipe έ # > After 31a on one side of the person, decompress it once the super cooler 31 '+ 2 and supply the refrigerant to the gas refrigerant. Person b Luofa, cooled by the evaporation!

The low-temperature coil 32 constitutes the main cooling n: = string, which is connected to the cooling objects f 1 and ^ 2 in the vacuum container 100 described above. The cold part is connected to the fourth number exchange ^ 2 \ ^. The main refrigerant pipe flows below the refrigerant pipe 2 between the two sides ;; subcooling ^ ^ side / f-2 of the cooler 31 The remainder of the refrigerant is discharged from the main refrigerant pipe 2a 7 〃1-the human side Wa The temperature of the coil 32 is evaporated, and the vacuum is supplied to the low degree after the vacuum = 29 pressure. 、 、 ′ ， By freezing and catching the water / min to increase ^ 32) f ^ 4 connected in series, the order of G condensation A load is from refrigerant pipe 2

Mixing = steaming = = = the inhalation side of machine 4, and Figure 5 in: with trachea 3 = set; That is, as shown in Fig. 4: Γ2 = 2 = 妾, one side of the cooler 31 ... 1… 35 ^ of the ejection part 5 and ten Γί are connected in a hermetically sealed state. In addition, there is a main refrigerant circuit 38 inside the main branch pipe_refrigerant pipe 23 200532153 branch 1 35b and inside the main refrigerant pipe 2a, and a sub refrigerant circuit 39 inside the sub branch pipe 35c and the sub refrigerant pipe 2b. The main branch pipe of the branch pipe 35 is the same as the sub branch pipe 35c.] The main refrigerant pipe 2a connected to the main branch pipe 35b and the sub refrigerant pipe 2b connected to the subside branch officer 35c. Piping with the same inner diameter = Cheng. In addition, the main branch pipe 35b and the secondary branch pipe 35c are configured as secondary branches: 35c: The main branch f 35b is arranged in parallel with the lower side of the main branch branch 35 and the auxiliary refrigerant connected to it along an approximately vertical surface. The pipe 2b is located at a predetermined height h lower than the main refrigerant pipe branched by the + It connection on the main side. Therefore, the height of the entire medium circuit 39 is set to a position lower than the entire position of the main refrigerant circuit%. Furthermore, in FIG. 3, 44 is the temperature between the capillary tube 29 and the low-temperature coil 32 as described above, 54ifi electricity __44 and low Ximenxi wf and knife such as 5 and water condenser 8 refrigerant pipe 2 No. 46 is an electromagnetic on-off valve connected to the 45 ° way of the defrost circuit. The vacuum container at the bottom is usually placed in a vacuum container of 2 A, which is in a vacuum state, and the film is formed. The closed electromagnetic switch valve 46 closes the defrost circuit 45 and is opened and opened. The cutting person 4 opens the main refrigerant pipe 2a, thereby It was captured by the moisture in the low-temperature coil 32 at a low ^ 2 m empty container 100; On the other hand, the operation of “1” is performed. If the if container is just opened to the atmosphere in a state where no substrate filming is performed, the electromagnetic switch valve 46 is opened, the defrost circuit 45 is opened, and the medium (敎 ^ 4 直 refrigerant pipe 2a ') is self-compressed. The high-temperature gas discharged from the machine 4 is cold-entered. ^ == is supplied to the low-bulk 32, and the body is cold-cooled at the low-temperature coil 32. The tank is 60, and the gas from the first gas-liquid separator 12 is 18. 1 ^ ^ Media piping 2, which is connected by the tank 60 and the refrigerant return pipe 62 on the suction side of the compressor 4 to slowly transport the refrigerant back to the compressor 4 on the suction side. In order to prevent compression due to the abnormal rise in the discharge pressure of the ultra-low temperature refrigeration unit R 24 200532153 Machine 4 during start-up. Insufficient condensing gas refrigerant caused compression 0 0 near the electromagnetic switch valve 46 of the defrost circuit 45, No. 6 Maozhi & quot 44 ^ 32 ： To the 3rd manual switching valve S 72 丨 t respectively set the 1st i refrigerant ^ repair the $ 'to separate the closed __ so that the remaining mixed media in the piping I: 3 is 2 way out 7 〇. Also, the refrigerant supply 4 channels ^ Refrigerant refrigerant supply pipe The role of the mixed refrigerant discharge pipe is recorded to remove the medium from the inside of the refrigerant circuit 1 The supply opened during supply and discharge = Secondary media supply pipe 7 ° 'Cold 28 ^ 35c 5 is installed in the vacuum container 100 inside the vacuum container 100 of the film-forming substrate space-time film-forming device A is inside the path 102 and the ruler is running' Vacuum container 100 Internal (or continuous capture, the ultra-low temperature level is closed by cold _ 46 for defrosting: when the road R is running, the electromagnetic switch valve is closed by this, and the main refrigerant pipe 2a is opened by _44. The condenser is cooled by the return unit 8 Then in the coldest part at the highest temperature of the auxiliary point ^ in the refrigerant cooling section of the human-human side, boil in the mixed refrigerant to reduce the liquid refrigerant in the body, and then the liquid refrigerant in the first capillary 24 gas-liquid separator 12 ^, 1 Luofa on the side of the side "cools the condensed liquefied gas in the first center by the evaporation heat; the refrigerant with the highest temperature of the Buddha's point in the mixed refrigerant is 19 ^ 21 tit ίί; ^: mouth V /, middle boiling point temperature from south Condensed liquefied gas cold 25 200532153 medium. &Amp;, person 1 on = 4 heat father change f 211: the refrigerant discharged from the underside becomes a gas-liquid mixed state, the gas-liquid mixed state refrigerant passes through the supercooler 311 times One side 3 is separated from the branch officer 35 as the main refrigerant circuit 38 (main refrigerant distribution port 39 (sub refrigerant) With f 2b). And the secondary refrigerant circuit ^ t capillary 28 is decompressed and supplied to the subcooler 31 twice. A steam = f heat from the above f 4 heat exchange ㈣ is supplied to the subcooler 31. The two sides of i are further cooled by the gas-liquid composite refrigerant of 3fa to increase the amount of liquid refrigerant. ⑼Return ?: After being discharged from the primary side 31a of 1 cooler 31, the remaining portion of the main refrigerant pipe 2a is at the first. 6 The capillary 29 is decompressed and decompressed. The moisture in the vessel 100 is provided by the following 2 ② given by the cooling capacity below W 00C; the vacuum in the vacuum container 100 and the vacuum degree in the vacuum container 100. h Ή and t from the primary heat exchanger circuit of the fourth heat exchanger 21 passing through the subcooler 31-side plus emulsion mixing & state refrigerant shunt branch f35 (), Lang refrigerant circuit 39 (sub refrigerant pipe) 2b), (2 the height position of the refrigerant Γ38, return = f 彳 _ 冷 翻 路 39, the sub refrigerant ... 7 31 1 gas side 31a gas refrigerant can be fully 32 nni ^, 100 bottom film formation quality It can be obtained by keeping the cooling in the touch of the real work μ. On the other hand, the vacuum container of the film-forming farmhouse A should be turned to the defrost of the film j by 'opening the electromagnetic opening_ frost * 3 closing the electromagnetic opening Μ 44 closes the main refrigerant distribution f 2a. Therefore, since ^^ 45 ^, the warm gas refrigerant is supplied to the low-temperature coil 32H by the defrost circuit 45 = the wire for dehydration. Red, after _ frost Jane, and then money straight ★ Rong 26 200532153 ϊϋkong 'is the same as the above, except that _Electromagnetic Open_ 46 _ except H 5 t is opened by Opening Electromagnetic Open _ 44 to open the primary refrigerant & the low-budget refrigerant flowing out of the side 31a in minutes 38 and Sub-refrigerant circuit 39. This situation is also d back. The height difference h of the medium circuit 39 flows into the subcooling ㈣ and the sub-cooling flow is greater than the flow to the low-temperature coil 32. Vacuum capacity ^ = Refrigerant quasi- 'can shorten the cooling day ^, it can be, and then, so as to increase the low _32 ^ === ^ 1 rate ° the difference between the main refrigerant circuit 38 and the secondary refrigerant circuit 39 The above-mentioned effect is obtained. ”Poor structure can be achieved early. In this embodiment, the overall height of the main refrigerant piping 2a and the sub-refrigerant 2 is required. However, it is not necessary to set the H second degree lower than the main refrigerant circuit. The overall height difference of 38. At least 4 = = highest position of matchmaker circuit 39 and primary refrigerant circuit% secondary refrigerant circuit 39 ===== parts' (Embodiment 2) The lower position of the dead road percentage may be lower. FIG. 6 shows a second embodiment of the present invention (and the same parts in FIG. 5 are marked with the same symbols. In the formulas, the detailed description of the sub-refrigerant circuit 39 in FIGS. 1 to i is omitted.) The secondary-side 31b of the cooler 31 increases the amount of the sub-refrigerant according to the refrigerant circuit 38 ′. In this regard, when the liquid = degree position of the low-temperature coil 32 is at the same height, the sub-refrigerant circuit 39 is The cross-sectional area is that, in this embodiment, the toilet wire joint portion 35a and the main side branch pipe 35b are the same as Qin Ertong. The secondary side branch pipe 35c of the header 35 of the officer 35 and the _ = main refrigerant pipe 2a and the branch plane connected to the core are arranged at the same height position and connected to the secondary refrigerant pipe 2b of the dagger at the same water and 77 branches of Lu 35 The main branch pipe 35b and the secondary branch pipe 35c have the same diameter as the real 27 200532153. However, the connection to the main branch pipe is relatively smaller than that allowed by the secondary branch pipe 3. The refrigerant is provided with its pipeline. Therefore, the cross-sectional area of the inside of the sub-branch pipe 35c and the sub-refrigerant circuit 39 formed in the inner part of the sub-g 2b is larger than the interior of the main-side branch 3 = and formed in the main refrigerant. The main refrigerant penumin section 42 in the tube 2 & is the same as the first embodiment. And 'transitioner sentences are not shown in FIG. 、、 田 & 8, but has the same structure as that of the first embodiment (see FIG.

As the main refrigerant piping 2a, a section with a diameter smaller than 38 is used: "The cross-sectional area of the sub-refrigerant circuit 39 is larger than that of the main refrigerant circuit by eight shi, renminbei. Therefore, the supercooling When the refrigerant paths 3, 8 and the sub-refrigerant circuit 39 are discharged from the primary side 31a of the device 31 as a whole, the flow rate of the gas-liquid two into the sub-refrigerant circuit 39 is larger than that of the main refrigerant circuit 38. The flow rate of the refrigerant flowing into the sub-refrigerant circuit 39 is higher than that of the refrigerant flowing into the main refrigerant. For the primary side of the subcooler 31, the amount of vapor cooling of the subcooler 31 is increased. Cooling efficiency, so 'can be obtained with the above real

At the same time, the 'sub-refrigerant piping 2b' in the second embodiment is used in the same way as in the first embodiment of the second embodiment, and the sub-refrigerant circuit 39 as a whole has an area larger than The maximum cross-sectional area of the main refrigerant circuit 38. (Performance Mode 3) 28 200532153 Figure 7 and Figure 8 show the third embodiment, which is the product of the technical matters of Combination 2. That is to say, "1 is the same as the way of viewing." The main branch pipe branch method 1 of the branch pipe 35 is arranged in parallel, and the secondary branch pipe 35c and the connection ^ extend vertically below and below the main branch pipe 35b and are connected to Its configuration is at the same time as in the second embodiment, it is connected to the branch f main = standing. Small pipelines, diameters and main refrigerant formed in the main refrigerant piping 2a return 28 open 3 main = branch | 35b The embodiment i and the embodiment 2 have the same area of the road 38. The other and therefore 'this embodiment can work effectively * Jianxian 32 2 Mod 2 works and the sub refrigerant circuit 39 of the 38 refrigerant circuit 38 The lowest position is ok. The position of Road 9 is lower than the main one: square = with the main cooler and its ^ system can also adapt to the structure Γ and 44 ultra-low temperature cold; Caixin said that the device 50 is connected between the upstream end of the circuit 45 and the electromagnetic switch valve 46, which is connected to the second sub-oil 2 50 separated by the gas refrigerant and returned to the compression through the return pipe 6 The suction-side of machine 4. Here, the ^ oil 5 ^^ 29 200532153 Yu Zifen Road East ::: flow ::: addition: cold cold oil, Set === 嶋 Gang lacquer Therefore, in the method of defrosting, the second oil separator 5G of defrosting ^ order ^ oil is turned off when the defrosting operation in the state of ^ toi ^ is set in Chengdu County. On-off valve 44 and on-off valve 46, the mixture discharged from the compressor 4; the person opens the electromagnetic pipe opening material, even if it is the first! Points ^ 5 未 = ^ = 4 ^ ί low temperature plate, mountain cry a soil,丨 show Xuan Zang / fruit oil, you can go from the 2nd 3f45 -Li temperature coil 32 _ 啦 无 至 _, the low of ΐΓίίί; short, = get the emptying time in the vacuum container 100 or into :. order = distance ⑽ R high up to the upper end-⑽ == 二 ： ΐ ^ Ι! ^ Μ " ξ 44 2: The oil flowing back from the oil tank can be divided into 4 units in Shundong. The overall ultra-low temperature cold cooling device R in Embodiment 5 of the present invention Structure, 200532153 The first buffer tank, 64 is a second buffer tank located below the first buffer tank 63, and the first and second buffer tanks 63 and 64 temporarily put g during the start of the ultra-low temperature freezer R, and the condensation was insufficient. The pressure of the high-pressure gas refrigerant is controlled to increase the discharge pressure of the compressor 4. The first and second buffer tanks 63 and 64 are connected by a communication path 65 (connecting the gas refrigerant between the two tanks). ) Are connected to each other. In addition, the refrigerant pipe 2 between the second refrigerant tank 64 and the gas refrigerant discharge portion of the first gas-liquid separator 12 and the j-th side of the first heat exchanger 18 is connected by a refrigerant inflow pipe 61. The refrigerant &

^ Middle ^ is connected to an electromagnetic switch 66 for controlling flow to the first and second buffer tanks 63 and 64. In the middle, the refrigerant flowing into the pipe 61 (the part between the electromagnetic switch valve and the tank 64) is connected to return the refrigerant in the jth and second buffer tanks 63 and 64, and the machine 4 sucks into the side The refrigerant return pipe of the refrigerant pipe 2 is connected to a soluble pickup 67 below the first buffer tank 63. This system can be formed by opening the i-th buffer tank 63 from the heat of a fire or the like, and lowering the tank. The safety fuse is caused by the ',' a real-life type towel, which is placed at an ultra-low temperature and placed at a low temperature. The rotation of the compressor 4 with an inadequate gas ^ refrigerant causes the discharge pressure of the compressor 4 to abnormally increase, which is detected by the pressure 59. Accompanied by this detection, one of the gas refrigerants separated by the electromagnetic switch is turned on-partly flows through the refrigerant f

ϋ4 cans Γ ϋΐ When there is a large number of people, the communication pipe 65 flows into the first and second cans 63 again. In addition, the above-mentioned spit-out warfare meter 59 detected that the two-way electromagnetic switch valve 66 was closed, and the gas refrigerant was returned to the compressor side through the return pipe 62 from the first and second buffer m, as described above, because Refrigerant circuit! The gas between Lu 2 and 63 and 64 tanks: the medium ^^ 65: the pipes 65 are connected to each other and the two are detained. As a result, it is possible to change the composition of the mixed refrigerant in the device R of the gas refrigerant in the tanks 7 and 64, and the tanks 63 and 64 = ㈡ " " Prevent from the cold East 31 200532153, and not only the refrigerant inflow pipe 61 described above, The refrigerant return valve is closed by the compressor. The pressure is discharged from the corresponding compressor 4. Yudang is also connected to the electromagnetic opening valves that flow into the first and second buffer tanks 63 and 64. The electromagnetic opening valves are controlled by 2 buffer tanks 63 and 64 to return to the refrigerant. The same applies to the gas refrigerant in the circuit 1, and from the first and seventh embodiments. Dan 7 "is OK. This is the following (Embodiment 6)

Fig. 1B shows a refrigerant circuit according to a sixth embodiment of the present invention. Different from the above-mentioned fifth embodiment, t ^ 9, R ^ 64, No. 2 are frozen, and only the differences are described (the same is true for the seventh embodiment). Note that the same applies to the first and second buffer tanks 63 and 64, which are the 6th phase of the communication pipe in which the refrigerant flows between the two tanks 63 and 64 in the fifth embodiment. Also, the gas is different from the fifth embodiment in that the first! The buffer tank t is connected to the other side, and is connected to the refrigerant cooling medium inflow pipe 61 of the body refrigerant discharge portion and the first heat exchanger 18 of the first heat exchanger 18. In addition, the above-mentioned continuous media pipe 2 in $ a is composed of the second buffer tank 63, 64 g of gas, and the refrigerant return pipe 62. • Also, it can be connected to 67 Tulian = 4m medium and other components. This is the same as the fifth embodiment. Posts 2 _ cans 64. In the case of this embodiment, inadequate freezing and condensation of gas refrigerant at ultra-low temperature causes the compressor 4 to spit out the pressure 4 "from the start of operation" to the situation, the electromagnetic switch valve 66 is opened, and the gas-liquid [force: 5-2 5 Test 61 ^ Detect that the abnormal rising condition on the H side is lifted by the grinder 59 through the cold heading 1 and the second buffer tank 63, 64. ^ ΓΓ yell back_4 inhalation—age medium pipe 2. The mouth is the above-mentioned communication pipe 65, which is connected to the shrinking machine 4 midway through the suction-side refrigerant 32 200532153 circuit υ 'From the refrigerant circuit 1 flows into the first buffer tank 63 and returns to compression. The refrigerant on the inlet side and the inlet side are in the first and second buffer tanks. 63, 64 flow smoothly. With the ratio of 1 g 2 i and the retention of the gas refrigerant in the second buffer tank 63'64, the ring can also be changed to prevent the mixed refrigerant in the cold R from forming the first and second buffer tanks 63 and 64 as described above. For the positional relationship, look at their upper and lower positions, and arrange them side by side horizontally. The points are the same as the following implementation method 7. (Embodiment 7)

The circuit of 7 R flush tanks 63 and 64 is different from H type 5 or 6. 'Only the first and second buffers, that is, the first and second buffer tanks 63 and 64 are the same, so that the gas refrigerant is used in the two tanks 63 and 64. There are 64 phases, phase 5 or phase 6, and they are connected to each other to implement the plum phase. The gas refrigerant discharge part and the 埶 σσ gas-liquid separator 12 2 are connected by the refrigerant inflow pipe 61. The refrigerant piping tank 64 and the machine 4 suction side refrigerant piping are not, the second buffer may be Solvent = 7 is connected to the second buffer tank 64. The connection and the situation of the t-mail package method are the same as those of the ultra-low temperature cold packing. Insufficient gas cooling is done _ machine 4 spit _ 3 ^ 〖, when ^ turn, from the cold to this situation, open the electromagnetic switch valve 66, the liquid two force gauge 59 detects a part of the refrigerant through the refrigerant inflow pipe 61 into the i The bladed gaseous refrigerant flows into f = 3 through the communication pipe 65. The gas _ is sucked into the refrigerant pipe 2 on the-side. The medium β return pipe 62 is returned to the compressor 4 through the refrigerant return pipe 62 and is sucked into the interior of the compressor. 33 200532153 'Cold refrigerant flows into the first buffer tank 63 through the refrigerant circuit 1 and flows into the second buffer through L s 65. Tank 64, return to the compressor through the refrigerant return pipe ^ to make the media piping 'so' two tanks 63, 64 M gas refrigerant can be more smoothly piled into two% of this' can make the specific gravity of the first and second buffer tanks 63, 64 different The cold fruit ^ 'prevents the cooling effect caused by the change in the composition of the mixed refrigerant in the cold green R (Embodiment 8)

Refrigerant = ultra-low-temperature wire device R related to the eighth embodiment of the second and second temperature: 4 = 4 = 缩 机 4 幽 高 哕 昤 Enjoy the fourth heat exchanger 21 of disk 32. That is, females match ^ 2. The other 1 end is connected to the cold end between the first oil separator 5 and the water condenser 8 ^ Lr45 ^ 45 45a The inlet side of the toilet 45a downstream end is connected to the low temperature coil 32. Her downstream end is connected to the refrigerant. The refrigerant distribution outlet between the secondary side of the secondary branch circuit and the side of the pipe is on the side of the 4th heat exchanger 21 and the electromagnetic switch valve 46 is connected to the distant circuit. The defrosting circuit 45 on the upstream side The main gate f 44 'between the electric circuit 45a and the sub-branch circuit 45b 29 and the low-temperature coil 32 is connected to the upstream side of the connection position of the 6th capillary end (the main branch circuit 45a of the y-th secondary circuit is described in the downstream mode 4 are the same.,,, G 29 side). Other Structures and Implementations In this embodiment, during the defrosting operation in the Λ + film-forming state, the substrate (wafer) is not performed in the thunderbolt 100 and the electromagnetic switch valve 44 is closed. The high-temperature gas refrigerant in circuit 45 self-defrosting circuit 45m2a. Thus, while being discharged from the compressor 4 and supplied to the low-temperature coil 32, it also passes the inlet side to change state 21 through the circuit 45a, and simultaneously performs the low-temperature coil 32 and the fourth knife 4 to provide the fourth heat transfer moisture. The release of capture. In the second to second heat exchangers 21 to 19, that is, the downstream branch of the defrosting circuit 45 branches into the main branch circuit and the secondary branch 34 200532153 circuit 45b, the main branch circuit 45 & the downstream coil w tube 2 is connected to the secondary branch. The circuit is connected to the refrigerant inlet 2 on the 32 inlet side. Therefore, the refrigerant pipe on the π side of the low-temperature coil 32 provides the low-temperature fresh 32 / Λ refrigerant to the low-temperature coil 32, and the low-temperature coil 32 is on the 0-side; return to f 45b refrigerant is provided for connection at the beginning of the operation and there is ultra-low temperature on-time communication. Special defrost 4 ~ 2nd heat exchanger 21 ~ 19 = ^ low; = 32 people's cold * oil at the same time, also Can shorten the defrost operation day steel. The possible exhaust time or film processing time is shortened and high 1: Gonghekou. Within 100 (performing method 9) Refrigerant ====== Shuttle device Han Midway, solenoid switch valve 68. Secondly, in the same way as the circuit 45b, the vacuum film-forming device A is vacuum-proof. When the film is running, the electromagnetic switch valve 68 is opened to open the valve. The on-off valve 46 opens the defrosting return 5 and closes the electromagnetic switch 44. The main cold ship f 2 Zi Li, the gas refrigerant self-defrosting circuit 45, the main branch circuit 45 2 =: = low temperature coil 32, and also passes through the sub branch circuit. Extremely provided

At the same time, the low temperature coil 32 and the fourth to second heat exchangers η, = release of moisture capture are performed simultaneously. J and 't the 4th heat-exchanger Gong 21 warms up to the cold bead oil flow point (such as _50. When it is above, close the electromagnetic switch valve 68 to close the sub-branch circuit 45b. Thus, the circuit 45 0 South temperature gas refrigerant, From the state where the main branch circuit 45a and the auxiliary branch circuit 45b have been shunted to this point, only the main branch circuit 45a flows to the low-temperature pan officer 32, and the temperature can be increased to further reduce the defrosting operation time. Now, Rong In Embodiment 9, the downstream side of the sub-branch circuit 45b is not connected to the fourth heat parent converter 21, but is connected to the secondary side of the higher-temperature side heat exchanger. It is also irrelevant. 35 200532153 (Embodiment 10) Media: The main refrigerant i umbrella in the second refrigerant piping 2a, and in the 80 and 80, the main refrigerant circuit 38 = the knife branch is the first and second branch circuits 80 and 8m connected in parallel to each other, and the second branch of Chengcheng 1 branch circuit The first branch capillary 80a is connected in series at 80. In addition, the solenoid switch valve 81b and the second branch capillary 81 2 2 Γ, γ side are connected in series on the two knife support circuit 81. The above-mentioned solenoid switch valve 8ib, It is configured to switch the refrigerant supply device to the knife support circuit 81. Also, the Two branch hairs ^ 〇a and 81a are used with capillary tubes having mutually different decompression capabilities. The ultra-low temperature cold_set R is set to detect the temperature U of the low-temperature coil 32 to double measure the other members. The other structure is the same as that of the fourth embodiment. Therefore, in this embodiment, when the ultra-low temperature is set to R, the switch = switch 46 is turned off, the defrost is hidden 45, and the solenoid valve 44 is opened to open the main ^ 38 °. Then, the solenoid valve is opened, and the second branch circuit 81 is opened. Among the refrigerants in the gas-liquid mixed state discharged from the secondary side of the heat exchanger 21 and passing through the subcooler 3, the refrigerant flowing through the main refrigerant circuit 38 is decompressed by ϋ Γϋ capillary 8Ga and 81a respectively. After being pressed, four shots are provided in the low-temperature coil 32 to provide moisture to the moisture in the vacuum container 100. At this time, the first and second branches of the refrigerant are removed from the first and second branches by opening the electromagnetic switch valve 81b. Capillary 8Ga, 8ia decompression, can increase the cold ^ and 'cold by ultra-low temperature; detection by the above-mentioned temperature detector of the east device R' to reach a preset temperature (such as -10. 00, turn off the electromagnetic switch See 8ib, the A medium flows through the first branch capillary 80a. 7 Therefore, this In the embodiment, by increasing the pipeline resistance of the refrigerant, in order to ensure the cooling capacity of the cold 36 200532153 low-temperature level, it is also possible to obtain ultra-low temperature. In the case of refrigerant, the expansion valve is more reliable than the expansion valve. The capillary tube with different decompression capabilities is used in the expansion of the reader. However, the same reduction is used: (Embodiment 11) Figure? Embodiment of the invention η ^ ^ 7 ′ The 1st to 4th branches of the connected J roads 80 to 83 are cold, loops, and 38 are halfway, forming a parallel flow part = the upper and lower ^ sides are combined with the A main refrigerant circuit irtiSist: ^ 81b ^ 3 s; since high ==. S is used on the first and fourth branched capillaries 80a to 83a, which is the same.战 Capillary that does not fight pressure. Other Structures and Embodiments 10 In the 100-to-1 discharge operation, the second-stage operation is performed from the subcooler, 31 of the primary side of 80, and the gas-liquid mixed state refrigerant flowing in the first side of 80% is branched in the first branch. Back to t.财, @ 了 __ Cooling pair From this, • # =: pipe = 13 有 == 200532153 After decompression, the low-temperature coil% new to the private capacity _ 1QG 0 moisture cooling capacity. The detection value detected by the Japanese detector 检测 ί reaches the set temperature ^ (such as _100 ° c) ^. When the electromagnetic switches 81b to 83b are closed, the refrigerant flows in the second branch capillary only to open the second type n, and the cooling time of the second to fourth branch capillary can be reached. . 、 Gonghe can adjust the cooling temperature or go to = support = square; OK (her heart line): (Embodiment 12) ^-Side pull handle, West ship total /, 1 side of the subcooling tribe 31 The entrance / side of the Low / Dish Panguan 32 is connected, that is, the person in the mouth, the real money towel, the main cold _ 5 = road composition. The first and second branch circuits 80 and 8 connected to each other are connected side by side with the ^ 'axis = the downstream side and the main refrigerant circuit%: connected in series to the above-mentioned first branch circuit 80, which is lower than 8 to 8着 繁】 八 w 皿 ▲ e 32. On-off valve 80b, and second branch circuit 81, string 80a and electromagnetic

Ur _㈣, which are connected in series from the upper side to the 21st, 2th == ,,, and g 80a, 81a, and use the electromagnetic switch valve having the first and second capillary g 80a and the second blade g: · ^ 1 There are 2 magnetic switch valves · The main refrigerant circuit branch capillary 81a is closed at the moment. The electromagnetic switch valve 44 in the method 10 (refer to the figure! The implementation is omitted. ^ The structure is the same as that of the tenth embodiment. When the direct ultra-low temperature freezing device R of the film forming device A is normally operated, the film forming substrate T in the unit is discharged after one side 38 200532153 = the remaining part of the refrigerant in the gas-liquid mixed state flowing in the main cooling circuit 38 By opening the electromagnetic switch valves 80b and 81b of the second and second branch circuits 80 and 81, the pressure is reduced in the first and second branch capillaries 80a and 81a, and the pressure is reduced and sent to the low-temperature coil ^ 蒗The amount of cold water in the vacuum container 100. ",, ^ and ', when the detection value detected by the temperature detector or pressure detector reaches the set temperature (for example, -100 C or less) or reaches the set pressure, the electromagnetic switch valves 80b of the i and second branch circuits 80 and 81 are closed. 81b, so that the refrigerant flows through only one of the first or second divided φ capillary tubes 80a, 81a. In this embodiment, the electromagnetic switch valves 80b, 81b of the first and second branch circuits 80, 81 are selected by a switch, It is possible to selectively branch the i-th or second branch capillaries 1GG _ edited or to open the two electromagnetic on-off valves 80b and 81b at the same time, and only open the electromagnetic on-off valves 80b and 81b in the first. 13) The invention of the ultra-low temperature cold R tube 32 which is difficult to implement the embodiment 13 is different from the embodiment 12 in that the circuit structure of the capillary tube is connected only between the supercooling 11 31 and the low-temperature pan Lu 2. The connection is f / type In the middle of the main refrigerant circuit 38, a lower side of the & fi branch circuit 8G ~ 83 is formed, which is a confluence part of the branch circuit 8G ~ 83. &Quot; η · -side /, a low temperature disk is connected in series to the main refrigerant circuit 38 The first branch hair is connected in series to the electromagnetic branch circuit 80. Tube and = two _, and then =, === connected. It; string, capacity ,, tube. Other structures and implementation 丄: The same use. Has a mutually different decompression / Bates method 'Vacuum film forming device A The film container of the vacuum container just formed the substrate 39 200532153; = 2 = '= 、 = 3 The 2nd 4th branch capillary 8_ minute cooling capacity. After the low, the dish plate 32 evaporates to the water in the vacuum volume H 100, The detection value of the valve also reaches the set temperature (for example, below the post) degree ^ & 'Adjust the cooling temperature in the vacuum container 100 arbitrarily or the knife reaches the cold ^ (Other embodiments) In the above embodiments, the system will The low-temperature coil 32 is arranged in the straight pipe 32 to directly cool the moisture in the vacuum container 1GG, but i, π r0fri is provided with a brine air conditioner, so that the brine air conditioner is connected to the water container and the brine circuit located in the straight empty container. The salt temperature in the cooling brine circuit of the air conditioner provides the same two water condensers 8 and 10, the heat exchangers 18 to 21, and the subcooler 31 to the heat absorbing part in the vacuum container 100. The plate type Any one of the structure and the capillary structure is possible. In addition, the four thin tubes 24 to 29 The pressure reducer can be used, for example, an expansion valve, etc. Mixed person ii. In the above embodiments, a mixture of 5 types of refrigerants and 6 types of refrigerants is used, which is mixed with 5 or 6 different types of refrigerants. Two = Of course, the refrigeration system is also possible. In addition, the above-mentioned implementations can also be used for other cold training systems of the cooling target. Yes, in the above embodiment, the principle of gas-liquid separation in four stages is shown A system suitable for gas-liquid separation of three or less levels and five or more levels is also possible in 200532153. In this embodiment, a water cooling system using a water condenser 21 is shown, but a configuration using an air condenser system is also possible. (Industrial application possibility) According to the present invention, even if the load changes, the door can be cooled and cooled stably, and the object can be rapidly cooled from the normal temperature to the ultra-low temperature level. The shortened cooling medium can be smoothly circulated to suppress the gas refrigerant in the tank. == Cooling capacity two: all kinds of effects of the nature of the question, the industrial applicability is extremely high. d real

41 200532153 V. [Brief description of the drawings] Flattening = is the layout of the vacuum-gu device for the general age of the wealth management system Figure 2 is a plan view showing other layouts of the vacuum film-forming device. Chengzhi == shows the overall structure of low-temperature cold recording in the 1st Wei-Wei mode. Figure 4 is an enlarged view of the main parts of the ultra-low temperature freezer. Figure 5 is a view in the direction of V in Figure 4. solid. FIG. 6 is a diagram showing a second embodiment corresponding to FIG. 4. FIG. 7 is a diagram corresponding to Embodiment 3 and FIG. 4. FIG. 8 is a view from the direction of FIG. 7M. Fig. 9 is a refrigerant system diagram showing a superstructure according to the fourth embodiment of the present invention. _ 7 King of Dongyizhi Figure 10 shows the cold «, system ® composed of ultra-low temperature + strong $ αχ body related to Embodiment 5 of the present invention. ~ The 6th structure of the silk structure_The whole structure of the low-temperature material cutting device is shown in Figure 7. The whole figure 13 shows a refrigerant system related to the eighth embodiment of the present invention and the composition of the human body Illustration. (Low) 4 figures of the whole figure shows the cold position of the body structure of the ninth embodiment of the present invention. On behalf of the entire system of the money M Yang device, the entire real-life style of 1G paste slave warmth is placed. 11 The overall style of the super-feeder device 12 The complete 42_32 of the device 200532153 Figure 18 is a refrigerant system diagram showing the overall structure of an ultra-low temperature freezer related to the thirteenth embodiment of the present invention. Symbol description: A vacuum film formation Device R Ultra-low temperature refrigeration unit 1 Refrigerant circuit 2 Refrigerant piping 2a Main refrigerant piping 2b Sub-refrigerant piping 4 Compressor 5 Oil separator 6 Oil return pipe 8 Water condenser 9 Dryer 10 Auxiliary condenser 12 First gas-liquid separator 13 Second Gas-liquid separator 14 Third gas-liquid separator 15 Fourth gas-liquid separator 18 First heat exchanger 19 Second heat exchanger 20 Third heat exchanger 21 Fourth heat exchanger 24 First capillary (pressure reducer ) 25 Capillary tube 2 (reducer) 26 Capillary tube 3 (reducer) 27 Capillary tube 4 (reducer) 28 Capillary tube 5 (reducer for subcooler) 43 200532153 29 Capillary tube 6 6 (main cooling) Pressure reducer) 31 Subcooler 31a 1st side 31b 2 Secondary side 32 Low temperature coil (main cooler) 35 branch pipe 35b primary side pipe 35c secondary side pipe h south

38 Main refrigerant circuit 39 Sub refrigerant circuit 44 Solenoid switch valve 45 Antifreeze circuit 45a Main branch circuit 45b Sub branch circuit 46 Solenoid valve 50 Second oil separator 59 Pressure gauge 60 Buffer tank

61 Refrigerant inflow pipe 62 Refrigerant return pipe 63 First buffer tank 64 Second buffer tank 65 Connecting pipe 66 Solenoid valve 68 Solenoid valve 70 Refrigerant supply line 71 First manual on / off valve 72 Second manual on / off valve 44 200532153 73 Third manual on-off valve 75 Supply on-off valve 80 First branch circuit 80a First branch capillary 80b Solenoid valve 81 Second branch circuit 81a Second branch capillary 81b Solenoid valve 82 Third branch circuit 82a Third branch capillary 82b Electromagnetic switch Valve 83 4th branch circuit 83a 4th branch capillary 83b solenoid switch valve 100 vacuum container 101 opening and closing door 102 communication pipe 103 vacuum pump 104 slide valve 45

Claims (1)

200532153 Scope of patent application: 1. A refrigeration system, characterized by: Including: a compressor for compressing the refrigerant; cold-cooling the above-mentioned compressor to discharge the refrigerant to the condensing condenser · one side = the heat of the medium and the secondary-side cold shutdown The supercooling cry in exchange for cooling. The cold ==== pressurized by the main cooler with a pressure reducer ^ flowing through the refrigerant that is discharged from the condenser 丨 times-; and flowing through the due !! The refrigerant is decompressed by the pressure reducer twice-side, by! Times 2. —A refrigeration system, which is characterized by: Including: a condenser; • The cold section of a mixed refrigerant that mixes a plurality of types of refrigerants with different boiling points from each other, and the high refrigerant point refrigerant from the mixed refrigerant discharged from the compressor to the condensation section. The low-boiling point of the cold compressed medium is sequentially separated from the liquid refrigerant and the gas refrigerant in the mixed cold refrigerant discharged from the compressor in a multiple-stage gas-liquid separator; the refrigerant separated by the separation 11 is separated from the refrigerant The gas-liquid separator exchanges the heat exchange of the depressurized liquid refrigerant for cooling. The classification of thermal attack-You have spit out the low-budget refrigerant 1 from the last-stage gradation heat exchange 11 above. Low boiling two times this time-side discharge. And the supercooler uses a pressure reducer to reduce the pressure of the two sides of the medium, and the medium is cooled by the low-boiling point of the secondary side, and the heat exchange between the refrigerant is performed. / '/' The main cooler that evaporates from the i-side of the subcooler and is decompressed by the main cooler with a pressure reducer 46 200532153 to cool the cooling object to an ultra-low temperature level; a self-cooler 1 Second side The refrigerant flows out through the cooler 2 3. If you apply for the first item or the second item of the Δ amount increaser, it has: For the two ^ L 山 ^ ίϋ circuit is set up; the upstream branch is connected to the main The above-mentioned sub-refrigerant circuit is provided on the refrigerant circuit. The structure with an area of 4 is larger than the maximum cross-sectional area of the main refrigerant circuit. = The patent application Gu described in item 丨 or item 2 has: for the main cooler, the main refrigerant circuit is installed; the upstream branch is connected to the main refrigerant circuit, and a supercooler pressure reducer is installed In the secondary refrigerant circuit, the above-mentioned sub-refrigerant circuit of the branch of the circuit is the highest; the structure is lower in height than the lowest position of the main refrigerant circuit. 5. As described in the third paragraph of the scope of the patent application, the system is centered: the supercooler flow booster, the rich refrigerant circuit and the auxiliary medium circuit = the highest height of the auxiliary refrigerant pendant is higher than the main refrigerant pendant. Low The device 6 ^ 4 is specially designed for cold cooling and cooling system described in item 1 or 2. It includes vacuum and cooling. Any of the cold materials and cooling systems are used to cool the cooling water in the vacuum container. • An ultra-low temperature freezing device , Its characteristics are: Including: Compression mixed boiling_Compression of different multiple-surface cold mixed refrigerants; cooling depends on the mixed cold rich liquids condensed at the high boiling age and liquefaction condensing 47 200532153 cold refrigerant wire mixed refrigerants, In addition to the found cold, the gas separated by the above gas-liquid separators; Renzen, Jinshan 1 knife away from the mouth σ, pressure reducer to reduce liquid 'heat exchange; pressure suppressor ΐϊ ^^, will record ㈣ Age Refrigerant: For the cold 2nd road, equipped with the ultra-low temperature cold storage as described in item 7 of the m patent scope of the cold cold oil removal from the above mixed cold shot, in which: defrost is set in the two-phase circuit Open and close the valve at any time, 9 between the upstream end of the defrost circuit and the above switch. Among them: 1 month, the ultra-low temperature cold as described in item 7 or item 8 of the sibling; the distance between the upstream device and the upstream end of the frost circuit is reduced to a type of ultra-low temperature freezing device, which is characterized by: including the refrigerant circuit connected : Compressor; a compressor that compresses mixed refrigerants of a plurality of types of refrigerants with different buddha points; each of the refrigerants discharged from the above compressors is condensed from high buddha refrigerant to liquefaction; the refrigerant is from high boiling point refrigerant to low buddha point refrigerant Separately separate the mixed refrigerants written in the upper device into liquid refrigerants and gas refrigerants in multiple stages of gas-liquids. 48 200532153 The refrigerant separated by the separator is heat exchanged with each of the gas-liquid separators in stages Γ② & The heat exchange of the liquid refrigerant is used to reduce the pressure of the multiple fractions. D H 最后 The last stage of the multiple stage. The low-handle refrigerant discharged from the staged heat exchange 11 cools the cooling object to the ultra-low temperature level. In order to prevent the compressor from spitting out the abnormal rise in pressure, the at least one flushing tank, which is located at the first, is located between the first and second buffer tank circuits, and the gas refrigerant is described in the first and second buffer tank circuits. 2 Slowly connect the second buffer tank of the refrigerant that is connected to the spit-out side and the suction-side side;) Connect the 1st buffer tank with at least one and 1! Tanks connected to the refrigerant on the discharge side of the compressor On the loop; ϋLian ^^ The middle shrink machine attracts people-Lu Jia Road connection. ——— As described in the scope of the patent application 帛 10, several ultra-low temperature cold flushing tanks have several buffer tanks, including at least one first buffer tank, up to one first buffer 1 ^ ^ 1 _ tank and compressor discharge-side Refrigerant circuit connection · The second buffer tank is connected to the refrigerant circuit on the suction side of the compressor '. 49 200532153 An ultra-low temperature freezing device comprising a refrigerant circuit machine; a waste condenser cooled by a mixed refrigerant of a plurality of refrigerants having different boiling points and having different boiling points from each other; The mixed refrigerant from the boiling point refrigerant to the low point = the liquid refrigerant and gas are the mixed refrigerant liquefied = = the gas A separated by each of the gas-liquid separators above, the cold heat exchange = "= low: refrigerant Cold II; cooling iSS frost; = mentioned pressure ^ = addition = part of the downstream end of the circuit is branched into the main branch circuit and the secondary branch circuit. The downstream end of the n circuit __out ^ the same as a certain route ^^ = the ultra-low temperature described The operation set includes: ^ Ultra-low-temperature relays, which are characterized by: machine; compression condenser for compressing a mixed refrigerant of a plurality of types of refrigerants having different boiling points from each other; The cold 50 200532153 The cryogenic separation of the gas refrigerant separated by the separator is cooled by the heat exchange of the liquid refrigerant separated and decompressed by the respective gas-liquid separation stages. The graded heat exchange 11 spit out the low-temperature cold water and cold water from the cold reel to the ultra-low-secondary cooler. 'The plurality of branches connected in series in each of the above-mentioned plurality of branch circuits are switched in the complex division circuit. At least one The ultra-low temperature cold wire set described in item 16 of the patent scope of the branch circuit to flow the refrigerant, where 18 is as%?; = 5 $ on-off valves in at least one of the branch circuits. In particular, the ultra-low temperature cold practice plural branch pressure reducers described in item 16 or item 17 of Shen Zhuanweidi have their respective decompression capabilities. The description of ultra-low temperature _ set, of which: warm cold ^ 丨: 9 items to go-the outline of ultra-low 51