CN101963409A

CN101963409A - Ultra-low temperature freezer, refrigeration system and vacuum apparatus

Info

Publication number: CN101963409A
Application number: CN2010105033889A
Authority: CN
Inventors: 高桥正幸; 八木昌文; 清水宽正; 友泽章; 池田昌彦; 盐野真士
Original assignee: Shinmaywa Industries Ltd
Current assignee: Shinmaywa Industries Ltd
Priority date: 2004-01-07
Filing date: 2005-01-05
Publication date: 2011-02-02
Anticipated expiration: 2025-01-05
Also published as: US20090188270A1; CN101943498A; CN101963409B; WO2005066554A1; TW200532153A

Abstract

An ultralow temperature refrigerator (R) using a mixed refrigerant containing a plurality of kinds of refrigerants having different boiling points. The refrigerator (R) comprises a main refrigerant circuit (38) provided with a criocoil (32) and a capillary tube (29) and a sub-refrigerant circuit (39) the upstream end of which is branched and connected to the upstream end of the main refrigerant circuit (38) and which is provided with a capillary tube (28). In order to ensure the flow of the liquid refrigerant for a supercooler (31) and to enhance the cooling eficiiency of the criocoil (32), the height of the sub-refrigerant circuit (39) is less than the height of the main refrigerant circuit (38). The flow of the refrigerant in a gas-liquid mixed state discharged from the primary side (31a) of the supercooler (31) and flowing into the sub-refrigerant circuit (39) is greater than the flow into the main refrigerant circuit (38), so that the flow of the liquid refrigerant into the sub-refrigerant circuit (39) is increased more than the flow into the main refrigerant circuit (38).

Description

Superfreeze device and vacuum plant

The application is at divide an application 200910118136.1 divide an application of the denomination of invention of submitting on March 2nd, 2009 for " superfreeze device and vacuum plant "

Technical field

The present invention is about a kind of superfreeze device, refrigeration system and vacuum plant for generation ultralow temperature cold.

Background technology

Up to now, as refrigeration system for the ultralow temperature cold of generation below-100 ℃, shown in

patent documentation

1,2,3, mix non-azeotropic point that the different plural number kind refrigerant of boiling temperature forms and mix refrigerant and enclose known to the mixing refrigerant mode superfreeze device in refrigerant loop has been.This kind superfreeze device, as be arranged at substrate (wafer) thus etc. make with the moisture in the vacuum film formation apparatus vacuum tank and improve the vacuum level by freezing removal.

The refrigerant loop of this refrigeration system, its basic comprising are to comprise as the gas-liquid separator of: compressor, condenser, plural number level gas-liquid separator, plural number level, classification heat exchanger, a plurality of pressure reducer and the cooler (evaporimeter) of plural number level.From the mixing refrigerant of above-mentioned compressor ejection, mainly be the higher boiling refrigerant by condenser condenses after, at first gas-liquid separator separates liquid coolant and the gas coolant, with one time one side of this gas coolant, with also post-decompression liquid coolant heat exchange and cooling after above-mentioned the separation at first order classification heat exchanger.Also have, the later classification heat exchanger in the second level also carries out same heat exchange.Just, in the gas-liquid separator at different levels, separate gas coolant and liquid coolant by the refrigerant of upper level classification heat exchanger condensation.After refrigerant after this separates is reduced pressure by pressure reducer, in the heat exchangers evaporations above-mentioned at different levels of correspondence, by the gas coolant of this heat of evaporation condensation from above-mentioned gas-liquid separator.And, on the classification heat exchanger of plural number level according to mix refrigerant from higher boiling to the above-mentioned refrigerant of each autocondensation of lower boiling order.After will reducing pressure by pressure reducers such as capillaries from the refrigerant that one time one effluent of afterbody classification heat exchanger goes out again, this refrigerant is evaporated at cooler.Thus, produce the ultralow temperature cold below-100 ℃, the cold of cooling end cools off the object of desire cooling thus, as catching the moisture in the vacuum tank.Have again, will turn back to the classification heat exchanger of final step, make it get back to compressor then through classification heat exchanger secondary one side at different levels at the gas coolant after this cooler has carried out the cooling effect evaporation.

Have, the main refrigerant loop that above-mentioned pressure reducer and cooler are provided with is connecting secondary refrigerant loop side by side again, is provided with the subcooler pressure reducer on this pair refrigerant loop.Between above-mentioned condenser and cooler, have one time one side of trickling from the refrigerant of above-mentioned condenser ejection, can carry out the subcooler that forms by heat exchanger of secondary one side of heat exchange with the refrigerant of this one time side, the refrigerant of one time one side and the refrigerant of secondary one side are carried out the cooling that heat exchange makes.On the other hand, the subcooler pressure reducer is the utensil of the liquid coolant that provided for reduce pressure above-mentioned subcooler and secondary one side heat exchange.

Also have, in the above-mentioned mixing refrigerant, sneak into refrigerator oil, spray a side between the condenser at compressor for preventing wearing and tearing such as compressor inner bearing, be provided with from mixing refrigerant and remove the separator of refrigerator oil, prevent to solidify the reduction cooling effectiveness owing to refrigerator oil offers cooler.

Have again, in this mixing refrigerant type superfreeze device, when it begins startup etc.,, ejection pressure occurs and rise above the withstand voltage situation of refrigerating plant because low temperature boiling point composition refrigerant does not fully condense.For this reason, surge tank is set in addition, by making this surge tank and refrigerant loop by comprising that the pipeline that surpasses the valve that the pressure of defined moves when (as than withstand voltage lower slightly the pressure of design) when the pressure in the refrigerant loop is connected, make the high pressure refrigerant temporarily enter surge tank, the operation that has reduced ejection pressure is continued.

Have again, shown in the patent documentation 4 in, surge tank sucks a side with compressor and is connected by return duct, makes the refrigerant circulation in the surge tank.

Also having, in the above-mentioned vacuum film formation apparatus, is to catch moisture by cooler (primary cooler), stops the usual running of refrigerating plant when film forming not, and the defrosting of cooler has just necessitated.,, the compressor ejiction opening is connected with antifreeze loop with cooler for this reason, supplies with the antifreeze running of cooler, carry out the defrosting of cooler by compressor being sprayed gas to above-mentioned refrigerating plant.

(patent documentation 1) utility model is logined communique No. 2559220

(patent documentation 2) spy opens flat 2-67855 communique

(patent documentation 3) spy opens flat 6-347112 communique

(patent documentation 4) spy opens flat 6-159831 communique

(inventing problem to be solved)

But, in the above-mentioned refrigeration system in the past, have following problem.

(1) at first, in the refrigeration system that has connected subcooler, it is identical mutually with the flow of subcooler secondary one refrigerant that side flows through to be set at primary cooler usually as mentioned above.

But the refrigerant that the component by main refrigerant loop and secondary refrigerant loop flows to secondary one side of primary cooler and subcooler is not made of liquid coolant entirely, provides the gas-liquid mixed state refrigerant that is comprising a part of gas coolant.For this reason, the cold medium flux that flows to primary cooler and subcooler as mentioned above is set at mutually and equates, however, flow under the few situation of the liquid coolant of subcooler secondary one side, appearance is to the cooling deficiency of its one time side gas coolant, and this just causes the liquid coolant flow that has been liquefied by subcooler and reduces the cooling effectiveness that makes primary cooler and reduce.Its result, just produced cooling object load change by the primary cooler cooling, or can't cool off the cooling object of this load change unchangeably, will cool off object is cooled to ultralow temperature state needed cool time of lengthening from normal temperature problem again or by primary cooler.

(2) secondly, stop the common running of refrigerating plant, when making compressor ejection gas offer cooler and carry out the defrosting running of defrosting of cooler by defrost circuit, if when this defrosting running beginning, do not remove refrigerator oil by above-mentioned separator, will produce refrigerator oil and flow into defrost circuit, offer the cooler of ultralow temperature state, coagulation problem in freezer unit.

(3) once more, so if the refrigerator wet goods offers the words that cooler solidifies in cooler, thereafter, even if refrigerator oil passes through cooler when cooler heats up, refrigerator oil by this cooler outflow certainly equals to offer heat exchanger under the equal ultralow temperature state, refrigerator oil also can solidify in heat exchanger, solidifies and needs the time for eliminating this refrigerator wet goods, produces the problem of the defrosting lengthening duration of runs.

Therefore, in order to solve this refrigerator wet goods coagulation problem in cooler, consider that series connection is provided with a plurality of oil eliminators till from ejection one side of compressor to condenser.But, in this method, produced the pressure loss owing to mix the flow impedance of refrigerant, produced the other problem that cooling effectiveness reduces again.

(4) also have, in recent years,, for this reason, produced the problem of surge tank off-capacity in order to improve the cooling capacity of refrigerating plant, be used in the low boiling refrigerant that remains gas phase state in the running and in stopping morely.

For solving so problem of surge tank off-capacity, can use jumbo surge tank.But, just strengthen the surge tank volume simply, it is just very difficult again to guarantee that surge tank is provided with the space.Also have, the refrigerant proportion difference separately that boiling point is different, the position that the link position that refrigerant is back to the refrigerant return pipe in refrigerant loop by surge tank will reach circulation fully is difficult.For this reason, each several part props up the composition ratio that mixes refrigerant and compared change originally with the refrigerant inclosure in the refrigerating plant, and the worry that reduces cooling performance is just arranged.

(5) have, in the above-mentioned superfreeze device, best is to make cooler be cooled to the ultralow temperature state from the normal temperature state at short notice, just can improve the operating efficiency of vacuum plant again.At this, use under the situation capillaceous as above-mentioned pressure reducer, shorten the resistance that entire length capillaceous reduces pipeline, so, just can in the short time, cool off cooler to low-temperature condition and satisfy above-mentioned requirements and just become possibility.

In contrast, the entire length capillaceous that extends can be cooled to the evaporating temperature of low boiling refrigerant make refrigerant to be depressurized to the low pressure that can fully reach and make the cooling object reach the ultralow temperature level.

So, in before during the pressure reducer loop constitutes, cooler is cooled to the ultralow temperature level in the short time be difficult.

Summary of the invention

The present invention invents in view of above-mentioned all points.Its first purpose is by the flow of above-mentioned primary cooler and subcooler secondary one side suitably being adjusted each refrigerant, stabilize and fully guarantee the liquid coolant flow of subcooler, increase the primary cooler cooling effectiveness, at load change cooling object unchangeably, shorten the cooling object is cooled to low temperature level from normal temperature cool time.

Second purpose of the present invention is, as above-mentioned being provided with in the defrost circuit superfreeze device, carries out removing of refrigerator oil under the cooling effectiveness situation really in not losing, and makes refrigerator oil not offer cooler.

The 3rd purpose of the present invention is, controlled solidifying of refrigerator wet goods can obtain the defrosting effect of running as above-mentioned being provided with in the defrost circuit superfreeze device, particularly heat exchanger.

The 4th purpose of the present invention is that the low boilingization that is accompanied by refrigerant can realize the high capacity of surge tank, and the gas coolant in the surge tank is circulated effectively.

The 5th purpose of the present invention is, in the superfreeze device, do not lose its cooling capacity and makes cooler be cooled to the ultralow temperature level in short time.

(for solving the method for problem)

For reaching above-mentioned purpose, in first invention, make the liquid coolant flow that flows to primary cooler and subcooler have difference, allow liquid coolant flow in subcooler secondary one side flow more than primary cooler.

Particularly, the refrigeration system of this first invention, to comprise: the compressor of compression refrigerant, cool off this compressor ejection refrigerant to condenser condensing, has one time one side from this condenser ejection refrigerant, and from this one time side ejection and by secondary one side of subcooler with the refrigerant trickling of pressure reducer decompression, subcooler by heat exchange cooling between the refrigerant of the refrigerant of one time one side and secondary one side, evaporation is from one time one side ejection of this subcooler and by the primary cooler of primary cooler with the refrigerant cooling cooling object of pressure reducer decompression, make in the refrigerant of one time one side ejection of above-mentioned subcooler, flowing through subcooler secondary one side liquid coolant flow is feature more than the subcooler cold medium flux increase device that flows to primary cooler liquid coolant flow.

Also have, the refrigeration system of second invention, to comprise: the compressed mixed boiling point is the compressor of the mixing refrigerant of different plural kind refrigerant mutually, cool off in the mixing refrigerant of this compressor ejection the higher boiling refrigerant to condenser condensing, according to separate the liquid coolant in the mixing refrigerant of this compressor ejection and the plural number level gas-liquid separator of gas coolant from higher boiling to lower boiling order, with this each gas-liquid separator separates refrigerant, with the classification heat exchanger that cools off by the heat exchange of the liquid coolant that has reduced pressure by pressure reducer again after this each gas-liquid separator separates, has one time one side from this classification heat exchanger ejection low boiling refrigerant trickling of afterbody, and from this one time side ejection and by secondary one side of subcooler with the low boiling refrigerant trickling of pressure reducer decompression, subcooler by heat exchange cooling between the low boiling refrigerant of the low boiling refrigerant of one time one side and secondary one side, evaporation is cooled off the primary cooler of object to the ultralow temperature level from one time one side ejection of this subcooler and by primary cooler with the low boiling refrigerant cooling of pressure reducer decompression, make in the refrigerant of one time one side ejection of above-mentioned subcooler, flowing through subcooler secondary one side liquid coolant flow is feature more than the subcooler cold medium flux increase device that flows to primary cooler liquid coolant flow.

By constituting of this each invention, because flowing through the liquid coolant flow-rate ratio of subcooler secondary one side, to flow to the liquid coolant flow of primary cooler many, gas coolant to one time one side of this subcooler maintains sufficient cooling, increases the cooling effect that the liquid coolant flow that has been liquefied by this subcooler improves primary cooler.Thus, even if the cooling object load change of primary cooler cooling when can cool off this cooling object unchangeably, can shorten and will cool off object is cooled to the ultralow temperature level rapidly from normal temperature temperature fall time.

In the 3rd invention, above-mentioned subcooler cold medium flux increases device, be with comprise be provided with primary cooler and primary cooler with the main refrigerant loop of pressure reducer and, end branch in upper reaches is connected this upper end, main refrigerant loop, be provided with subcooler with on the basis, secondary refrigerant loop of pressure reducer, the minimum cross section area that also has an above-mentioned secondary refrigerant loop than the maximum cross-sectional area in main refrigerant loop also big be configured to feature.

So, when the refrigerant of one time one side ejection of subcooler flows into main refrigerant loop and secondary refrigerant loop respectively, because the minimum cross section area in secondary refrigerant loop is also bigger than the maximum cross-sectional area in main refrigerant loop, the gas-liquid mixed state refrigerant flow that flows into secondary refrigerant loop just increases than the refrigerant that flows into main refrigerant loop as a whole, and being directly proportional with it, just the liquid coolant flow than the main refrigerant of inflow loop is many for liquid coolant that flows into secondary refrigerant loop.Therefore, for the gas coolant of one time one side of subcooler, can access sufficient cooling, increase the cooling effectiveness that liquid coolant flow that this subcooler liquefied improves primary cooler.

In the 4th invention, above-mentioned subcooler cold medium flux increases device, be with comprise be provided with primary cooler and primary cooler with the main refrigerant loop of pressure reducer and, end branch in upper reaches is connected this upper end, main refrigerant loop, be provided with subcooler with on the basis, secondary refrigerant loop of pressure reducer, the maximum height position, above-mentioned secondary refrigerant loop that also has above-mentioned main refrigerant loop and secondary refrigerant branch of a circuit part than main refrigerant loop smallest height low be configured to feature.

So do, when the refrigerant of one time one side ejection of subcooler flows into main refrigerant loop and secondary refrigerant loop respectively, because the maximum height position, above-mentioned secondary refrigerant loop in its component is lower than main refrigerant loop smallest height, so, liquid coolant in the gas-liquid mixed state refrigerant, it is just many to flow into the low secondary refrigerant loop of relative altitude, and flowing to secondary refrigerant loop liquid coolant flow just increases than the flow that flows to main refrigerant loop.Therefore, for the gas coolant of one time one side of subcooler, can access sufficient cooling, increase the cooling effectiveness that liquid coolant flow that this subcooler liquefied improves primary cooler.

Also have, if make main refrigerant loop and secondary refrigerant loop height have difference both can, the difference that does not form cross-sectional area also can, so can obtain above-mentioned effect by enough simple structures.

In the 5th invention, the subcooler flow of above-mentioned the 3rd invention increases device, and the maximum height position, secondary refrigerant loop with main refrigerant loop and secondary refrigerant branch of a circuit part is than the low structure of main refrigerant loop smallest height.Thus, just can play the effect of stack the above-mentioned the 3rd and the 4th invention effect, further improve the cooling effectiveness of primary cooler.

The 6th invention is to be feature to make its freezing vacuum plant by moisture in the primary cooler cooling vacuum container of any one refrigeration system of above-mentioned first to the 5th invention.Thus, freeze the moisture in the vacuum tank in the vacuum plant, in the time of the vacuum state that can obtain stabilizing, because of the shortening of cool time at short notice the emptying vacuum tank enhance productivity.

In the 7th invention, the separator that uses when antifreeze is not arranged on compressor and sprays a side between the condenser, and is arranged in the antifreeze loop, removes refrigerator oil from the mixing refrigerant that flows into antifreeze loop.

Particularly, the 7th invention, to comprise: the compressed mixed boiling point is the compressor of the mixing refrigerant of different plural kind refrigerant mutually, cool off in the mixing refrigerant of this compressor ejection the higher boiling refrigerant to the condenser of liquefaction, spray first separator that a side is removed the refrigerator oil of sneaking into to the mixing refrigerant of condenser from above-mentioned compressor, separate the liquid coolant that liquefied by above-mentioned condenser and the plural number level gas-liquid separator of gas coolant according to mixing in the refrigerant order to the low boiling refrigerant from the higher boiling refrigerant, with this each gas-liquid separator separates refrigerant, with the classification heat exchanger that cools off by the heat exchange of the liquid coolant that has reduced pressure by pressure reducer again after this each gas-liquid separator separates, have evaporation in these plural number levels this classification heat exchanger ejection of afterbody and the low boiling refrigerant cooling cooling object that reduced pressure to the cooler of ultralow temperature level, during this cooler defrosting, the mixing refrigerant of above-mentioned compressor ejection is offered the defrost circuit of cooler, and, on this defrost circuit, being provided with second separator of removing refrigerator oil from above-mentioned mixing refrigerant is feature.

By this invention, because on the defrost circuit, be provided with second separator of removing refrigerator oil from above-mentioned mixing refrigerant, in this cooler so the refrigerator oil in the time of just can preventing to defrost in the above-mentioned mixing refrigerant offers cooler from defrost circuit and solidifies.

And, can also prevent that a plurality of separators are series at compressor sprays a side is established the such pressure loss of situation to row between the condenser increase.Thus, can obtain when making mixing refrigerant good circulation, preventing that cooling effectiveness as described above from descending.

Have again, because be provided with second separator on the defrost circuit, so, can seek and component sharingization between the refrigerating plant of defrost circuit is not set in defrost circuit, the equipment cost aspect is favourable in reducing.Also have, maintenance activity such as also can easily exchange.

In the 8th invention, be with in the above-mentioned defrost circuit, the open and close valve of opening when being provided with defrosting, above-mentioned second separator is arranged at above-mentioned defrost circuit upper reaches end to being feature between the above-mentioned open and close valve.

By this invention, because second separator is arranged at above-mentioned defrost circuit upper reaches end between the above-mentioned open and close valve, so, by closing above-mentioned open and close valve, can prevent that compressor from sucking the generation of the former pressure differential higher than the latter between a side and second separator.

That is, between second separator and compressor, adopted the refrigerator oil that makes separation to return the connected mode that compressor sucks a side, if compressor sucks the former pressure differential higher than the latter between a side and second separator, worry to flow to the refrigerator oil adverse current of second separator from compressor.But, close the open and close valve that is disposed at the second separator downstream, one side, just can prevent the adverse current of the refrigerator oil that takes place by above-mentioned pressure differential, refrigerator oil is successfully flowed back to.

In the 9th invention, be with above-mentioned second separator, being arranged at the position that the distance till the end of above-mentioned defrost circuit upper reaches lacks than the distance to the dirty end of above-mentioned defrost circuit till is feature.

By the present invention, because second separator is arranged at the position that the distance till the end of above-mentioned defrost circuit upper reaches is lacked than the distance till the dirty end of above-mentioned defrost circuit, refrigerator oil under can the separation temperature high viscosity low state can more positively carry out removing of refrigerator oil.

In the tenth invention, a plurality of surge tanks that are provided with are connected by the pipe arrangement between this surge tank, and gas coolant is circulation smoothly in surge tank, can also prevent from effectively that gas coolant is detained gas coolant is circulated effectively in surge tank.

Particularly, in the tenth invention, the compressed mixed boiling point is the compressor of the mixing refrigerant of different plural kind refrigerant mutually, cool off in the mixing refrigerant of this compressor ejection the higher boiling refrigerant to the condenser of liquefaction, separate the liquid coolant that liquefied by this condenser and the plural number level gas-liquid separator of gas coolant according to mixing in the refrigerant order to the low boiling refrigerant from the higher boiling refrigerant, with this each gas-liquid separator separates refrigerant, with the classification heat exchanger that cools off by the heat exchange of the liquid coolant that has reduced pressure by pressure reducer again after this each gas-liquid separator separates, having evaporation this classification heat exchanger ejection of afterbody and the low boiling refrigerant cooling cooling object that reduced pressure to cooler of ultralow temperature level in these plural number levels is to be connected by the refrigerant loop.

And, be with on the above-mentioned refrigerant loop, having connected a plurality of surge tanks that prevent the rising of above-mentioned compressor ejection pressure anomaly is feature.

By this invention, because on the refrigerant loop, connected a plurality of surge tanks, and compare for solving the not enough situation of a big capacity jar that adopts of tankage size, guarantee factory in etc. that the space of placement jar becomes easy.Have again,, can prevent that compressor ejection pressure anomaly from rising, and turns round favourable to refrigerating plant unchangeably by a plurality of jars of capacity that increase jar.

The 11 invention in the superfreeze device of above-mentioned the tenth invention, is with above-mentioned a plurality of surge tanks, is by comprising one first surge tank at least, be positioned at than this first surge tank more at least one second surge tank of lower position form.This first and second surge tank is by interconnecting the communicating pipe that gas coolant is circulated between first and second surge tank.And connecting the refrigerant loop that compressor sprays a side and suck a side on above-mentioned second surge tank is feature.

By this invention, because first and second surge tank was interconnected by communicating pipe, so the refrigerant that between two surge tanks, circulating.Thus, can prevent that the delay of jar interior gas coolant from circulate the different refrigerant composition of proportion fully, compare change when the mixing refrigerant composition ratio in the anti-locking apparatus is enclosed with refrigerant and cause the reduction of cooling performance.

The 12 invention in the superfreeze device of above-mentioned the tenth invention, is with above-mentioned a plurality of surge tanks, is by comprising one first surge tank at least, at least one second surge tank composition.This first and second surge tank, by interconnecting the communicating pipe that gas coolant is circulated between first and second surge tank, above-mentioned first surge tank is connected in compressor and sprays on the refrigerant loop of a side.And, suck a side refrigerant loop with compressor in the middle of above-mentioned communicating pipe and be connected to feature.

Also have,, go into surge tank from the refrigerant loop stream and return the gas coolant that compressor sucks a side and successfully in jar, circulate because be connected above-mentioned communicating pipe in the refrigerant loop that middle and compressor suck a side.Thus, can more positively prevent the delay of jar interior gas coolant.

The 13 invention in the superfreeze device of above-mentioned the tenth invention, is with above-mentioned a plurality of surge tanks, is by comprising one first surge tank at least, at least one second surge tank composition.This first and second surge tank is by interconnecting the communicating pipe that gas coolant is circulated between first and second surge tank.And above-mentioned first surge tank is connected with the refrigerant loop that compressor sprays a side, and second surge tank and compressor suck a side refrigerant loop and be connected to feature.

Also have, constitute, can more positively prevent the delay of jar interior gas coolant because formed loop as described above.

In the 14 invention, the dirty end of defrost circuit is branched into two, cooler and heat exchanger are heated up simultaneously.

Particularly, in the 14 invention, to comprise: the compressed mixed boiling point is the compressor of the mixing refrigerant of different plural kind refrigerant mutually, cool off in the mixing refrigerant of this compressor ejection the higher boiling refrigerant to the condenser of liquefaction, separate the liquid coolant that liquefied by this condenser and the plural number level gas-liquid separator of gas coolant according to mixing in the refrigerant order to the low boiling refrigerant from the higher boiling refrigerant, with this each gas-liquid separator separates refrigerant, with the classification heat exchanger that cools off by the heat exchange of the liquid coolant that has reduced pressure by pressure reducer again after this each gas-liquid separator separates, having evaporation this classification heat exchanger ejection of afterbody and the low boiling refrigerant cooling cooling object that reduced pressure to cooler of ultralow temperature level in these plural number levels is by loop-coupled while of refrigerant, when above-mentioned cooler defrosted, the superfreeze device that will offer the defrost circuit of cooler from the mixing refrigerant of above-mentioned compressor ejection was a prerequisite.

And, be so that the dirty end of defrost circuit is branched into main split loop and secondary duplexure.Also have, when the dirty end in above-mentioned main split loop connected cooler inlet side refrigerant loop, it was feature that the dirty end of secondary duplexure connects cooler outlet one side refrigerant loop.

By this invention, the dirty end of defrost circuit branches in the major and minor duplexure, because the dirty end in main split loop connects cooler inlet side refrigerant loop, the dirty end of secondary duplexure connects cooler outlet one side refrigerant loop, therefore, the refrigerant that will flow through the main split loop offers cooler this cooler and this heat exchanger that the refrigerant that will flow through secondary duplexure offers the heat exchanger that is connected in cooler outlet one side refrigerant loop can be heated up simultaneously.Thus, can prevent from heat exchanger, to solidify once more by the refrigerator wet goods of above-mentioned cooler.Prevented that so solidifying the refrigerant loop that causes by the refrigerator wet goods stops up, guaranteed the good circulation of the mixing refrigerant refrigerant loop in, shortened defrosting duration of runs.

In the 15 invention, being provided with open and close valve on the above-mentioned secondary duplexure in the superfreeze device of the 14 invention is feature.

By this invention, the valve of opening with open and close valve makes cooler and heat exchanger heat up simultaneously as mentioned above, in the heat exchanger refrigerator wet goods is warmed up to after the temperature more than the pour point that can flow swimmingly by closing open and close valve, make the mixing refrigerant that is diverted to main split loop and secondary duplexure till this moment only flow into main split's loop intensification cooler, the defrosting running is shortened more.

In the 16 invention, the refrigerant loop that connects side by side mutually of near cooler is connected with each branch's pressure reducer as a plurality of duplexures, makes refrigerant flow through these plural branch pressure reducers selectively.

Particularly, in the 16 invention, to comprise: the compressed mixed boiling point is the compressor of the mixing refrigerant of different plural kind refrigerant mutually, cool off in the mixing refrigerant of this compressor ejection the higher boiling refrigerant to the condenser of liquefaction, separate the liquid coolant that liquefied by this condenser and the plural number level gas-liquid separator of gas coolant according to mixing in the refrigerant order to the low boiling refrigerant from the higher boiling refrigerant, with this each gas-liquid separator separates refrigerant, with the classification heat exchanger that cools off by the heat exchange of the liquid coolant that has reduced pressure by pressure reducer again after this each gas-liquid separator separates, the pressure reducer of decompression low boiling refrigerant of this classification heat exchanger ejection of afterbody in this plural number level, the low boiling refrigerant that evaporation has been reduced pressure by this pressure reducer to the cooler of ultralow temperature level cooling cooling object is a prerequisite by the loop-coupled superfreeze device of refrigerant.

And, be will offer the refrigerant loop of refrigerant from above-mentioned final level classification heat exchanger to above-mentioned cooler, and to constitute by the plural duplexure that connects side by side mutually.Also have, above-mentioned pressure reducer, each plural branch pressure reducer that is connected in series constitutes by above-mentioned plural duplexure.Have, being provided with at least one in the above-mentioned plural duplexure, to make the switch that duplexure flows through refrigerant be feature again.

By this invention, on the plural duplexure that connects side by side mutually, connected branch's pressure reducer separately, and be provided with and switch to the switch that at least one duplexure in the above-mentioned plural duplexure flows through refrigerant, so, refrigerant branch flow in plural duplexure is increased by the switching of this switch.Therefore, change in the reduced pressure capabilities of guaranteeing to make till the cooling object is cooled to the defined chilling temperature, also can shorten the cool time that arrives till the chilling temperature simultaneously by the pipe resistance of refrigerant.

In the 17 invention,, be, for the open and close valve that is arranged in the above-mentioned plural duplexure at least one is a feature with above-mentioned switch in sixteenth superfreeze device.

By this invention,, can adjust the cold medium flux of plural duplexure shunting by opening open and close valve selectively.Thus, in cooler, both can adjust chilling temperature and cool time arbitrarily.

In the 18 invention, in the superfreeze device of the 16 or the 17 invention, be with above-mentioned plural branch pressure reducer, having different separately reduced pressure capabilities is feature.

By this invention,,, can in cooler, increase the adjusting range of chilling temperature and cool time so compare with the situation that plural branch pressure reducer has identical reduced pressure capabilities separately because plural branch pressure reducer has different reduced pressure capabilities separately.

In the 19 invention, in the above-mentioned the 16 to the eighteenth invention any one superfreeze device, be with above-mentioned branch pressure reducer, for capillary is a feature.

By this invention,, can carry out the decompression of low boiling refrigerant really in the ultralow temperature zone because used capillary as pressure reducer.Thus, compare the reliability height as the situation of pressure reducer, in making the stable running of device go up favourable with using expansion valve.Also have, it is low that capillary and expansion valve are compared price, so cutting down installation cost significantly becomes possibility.

Have again, in the 20 invention, be with in any one of above-mentioned the 6th to the 19 invention by the cooler cooling vacuum container of superfreeze device in moisture to make its vacuum plant that freezes to constitute be feature.Thus, can be in the hope of the raising of the production efficiency of vacuum plant and action stability.

(effect of invention)

As described above, in first or second invention, for the primary cooler that comprises cooling cooling object, with the refrigerant of one time one side refrigeration system by the subcooler of the refrigerant cooling of secondary one side, the liquid coolant flow that is flowed to primary cooler by the liquid coolant flow-rate ratio that flows through subcooler secondary one side is many, guarantee the gas coolant of one time one side of subcooler is maintained sufficient cooling, the cooling effect of primary cooler can be improved, can the temperature fall time that object is cooled to the ultralow temperature level will be cooled off in the hope of the stabilization and the shortening of the cooling of cooling object.

By the 3rd invention, for comprising the main refrigerant loop that is provided with primary cooler and primary cooler usefulness pressure reducer, branch is connected in this main refrigerant loop, be provided with the secondary refrigerant loop of subcooler with pressure reducer, minimum cross section area by secondary refrigerant loop is also bigger than the maximum cross-sectional area in main refrigerant loop, when the refrigerant of one time one side ejection of subcooler flows into main refrigerant loop and secondary refrigerant loop respectively, by making the flow that flows into secondary refrigerant loop more than the refrigerant that flows into main refrigerant loop, can increase the flow of the liquid coolant that flows into secondary refrigerant loop than main refrigerant loop, also just having specialized above-mentioned subcooler cold medium flux increases device.

By the 4th invention, for being provided with primary cooler and primary cooler main refrigerant loop with pressure reducer, branch is connected in this main refrigerant loop, be provided with the secondary refrigerant loop of subcooler with pressure reducer, lower by the maximum height position, secondary refrigerant loop that makes main refrigerant loop and secondary refrigerant branch of a circuit part than main refrigerant loop smallest height, when the refrigerant of one time one side ejection of subcooler flows into main refrigerant loop and secondary refrigerant loop respectively, make the liquid coolant in the gas-liquid mixed state refrigerant, flow into the low secondary refrigerant loop of relative altitude, just can make and flow to the flow increase that secondary refrigerant loop liquid coolant flow-rate ratio flows to main refrigerant loop, so with simple structure, obtaining having specialized above-mentioned subcooler cold medium flux increases device.

By the 5th invention, refrigeration system in the 3rd invention, by the maximum height position, secondary refrigerant loop of main refrigerant loop and secondary refrigerant branch of a circuit part than the low structure of main refrigerant loop smallest height, just can play the effect of stack the above-mentioned the 3rd and the 4th invention effect, further improve the cooling effectiveness of primary cooler.

By the 6th invention, make it freezing by moisture in the primary cooler cooling vacuum container of above-mentioned refrigeration system, try to achieve stable vacuum state, and shorten cooling emptying, time, enhance productivity.

By the 7th invention, on the defrost circuit of superfreeze device, be provided with from mixing the separator that refrigerant is removed refrigerator oil, when the refrigerator oil in the time of just can preventing to defrost in the above-mentioned mixing refrigerant offers cooler and solidifies from defrost circuit, can also prevent that a plurality of separators are series at compressor sprays a side is established the such pressure loss of situation to row between the condenser increase in this cooler.Thus, can obtain when making mixing refrigerant good circulation, preventing that cooling effectiveness as described above from descending.

Invention by the 8th, be provided with separator in defrost circuit between the open and close valve, close open and close valve and prevent the high pressure differential of the former latter between suction one side of compressor and the separator, the refrigerator oil from the suction one side direction separator of compressor that has prevented to be taken place by above-mentioned pressure differential flows backwards, and can make refrigerator oil successfully flow back to compressor.

By the 9th invention, by the upper reaches that separator is arranged at defrost circuit, can the low refrigerator oil of recovered temperature high viscosity, more positively carry out removing of refrigerator oil.

By the tenth invention, on the refrigerant loop, connected a plurality of surge tanks, try to achieve surge tank guaranteeing of space is set, also the high capacity by surge tank prevents that the rising of compressor ejection pressure anomaly from turn round refrigerating plant unchangeably.

By the 11 invention, first and second surge tank was interconnected by communicating pipe, refrigerant is circulated between two surge tanks, prevent the delay of jar interior gas coolant, can prevent comparing change when mixing refrigerant composition ratio in the locking apparatus is enclosed with refrigerant and the reduction that causes cooling performance.

By the 12 invention, be connected with refrigerant loop that compressor sucks a side in the middle of communicating pipe, go into surge tank from the refrigerant loop stream and return the gas coolant that compressor sucks a side and successfully in jar, circulate, can more positively prevent the delay of jar interior gas coolant.

By the 13 invention, make gas coolant spray a side inflow from compressor, suck the loop that a side returns by compressor again and constitute, can positively prevent the delay of jar interior gas coolant.

By the 14 invention, the dirty end of defrost circuit in the superfreeze device is branched into main split loop and secondary duplexure and be connected to the cooler inlet side separately and export a side, cooler and heat exchanger can be heated up simultaneously, can prevent to equal to solidify in the heat exchanger by the refrigerator oil of above-mentioned cooler, the good circulation of guaranteeing in the refrigerant loop to mix refrigerant has shortened defrosting duration of runs.

By the 15 invention, in above-mentioned secondary duplexure, be provided with open and close valve, in the heat exchanger refrigerator wet goods is warmed up to after the temperature more than the pour point that can flow swimmingly by closing open and close valve and makes the mixing refrigerant that is diverted to main split loop and secondary duplexure till this moment only flow into main split's loop intensification cooler, the defrosting running is shortened more.

By the 16 invention, the refrigerant branch of a circuit that makes one time one side to cooler of final level classification heat exchanger from the superfreeze device offer refrigerant is plural duplexure, should connect pressure reducer by the plural number duplexure, again by the switching of switch, can increase the flow of refrigerant, both can guarantee to make the reduced pressure capabilities till the cooling object is cooled to the defined chilling temperature, also can try to achieve the cool time till shortening arrives chilling temperature.

By the 17 invention, with switch, at least one open and close valve is set in duplexure, in cooler, can adjust chilling temperature and cool time arbitrarily.

By the 18 invention, make plural branch pressure reducer have different reduced pressure capabilities separately, can in cooler, increase the adjusting range of chilling temperature and cool time.

By the 19 invention, above-mentioned pressure reducer is capillary, can carry out the decompression of low boiling refrigerant really in the ultralow temperature zone, and is favourable in the stable running of device is gone up, and can try to achieve the raising of reliability and cut down installation cost significantly.

By the 20 invention, moisture freezes it in the vacuum tank of the cooler cooling vacuum device of above-mentioned superfreeze device, can be in the hope of the raising of the production efficiency and the action stability of vacuum plant.

Description of drawings

Fig. 1, be summary represent embodiment of the present invention about the plane of arrangement figure of vacuum film formation apparatus.

Fig. 2 is other plane of arrangement figure that vacuum film formation apparatus represented in summary.

Fig. 3 is 1 of an embodiment of the present invention of expression about the whole refrigerant system diagram that constitutes of cryogenic freezing device.

Fig. 4 is the plane that enlarges the main position of expression superfreeze device.

Fig. 5 is the V direction view of Fig. 4.

Fig. 6 is expression embodiment 2 figure suitable with Fig. 4.

Fig. 7 is expression embodiment 3 figure suitable with Fig. 4.

Fig. 8 is Fig. 7 VIII direction view.

Fig. 9 is 4 of embodiment of the present invention of expression about the refrigerant system diagram of all formations of superfreeze device.

Figure 10 is 5 of embodiment of the present invention of expression about the refrigerant system diagram of all formations of superfreeze device.

Figure 11 is 6 of embodiment of the present invention of expression about the refrigerant system diagram of all formations of superfreeze device.

Figure 12 is 7 of embodiment of the present invention of expression about the refrigerant system diagram of all formations of superfreeze device.

Figure 13 is 8 of embodiment of the present invention of expression about the refrigerant system diagram of all formations of superfreeze device.

Figure 14 is 9 of embodiment of the present invention of expression about the refrigerant system diagram of all formations of superfreeze device.

Figure 15 is 10 of embodiment of the present invention of expression about the refrigerant system diagram of all formations of superfreeze device.

Figure 16 is 11 of embodiment of the present invention of expression about the refrigerant system diagram of all formations of superfreeze device.

Figure 17 is 12 of embodiment of the present invention of expression about the refrigerant system diagram of all formations of superfreeze device.

Figure 18 is 13 of embodiment of the present invention of expression about the refrigerant system diagram of all formations of superfreeze device.

(symbol description)

The A vacuum film formation apparatus

R superfreeze device

1 refrigerant loop

2 coolant pipings

2a master's coolant piping

The secondary coolant piping of 2b

4 compressors

5 separators

6 oil return pipes

8 water condensers

9 drying machines

10 auxiliary condensers

12 first gas-liquid separators

13 second gas-liquid separators

14 the 3rd gas-liquid separators

15 the 4th gas-liquid separators

18 first heat exchangers

19 second heat exchangers

20 the 3rd heat exchangers

21 the 4th heat exchangers

24 first capillaries (pressure reducer)

25 second capillaries (pressure reducer)

26 three capillaries (pressure reducer)

27 the 4th capillaries (pressure reducer)

28 the 5th capillaries (subcooler pressure reducer)

29 the 6th capillaries 30 (primary cooler pressure reducer)

31 subcoolers

One time one side of 31a

31b secondary one side

32 low-temperature coils (primary cooler)

35 branched pipes

35b master branched pipe

The secondary side branched pipe of 35c

The h height

38 main refrigerant loops

39 secondary refrigerant loops

44 electromagnetic switch valves

45 antifreeze loops

45a main split loop

The secondary duplexure of 45b

46 electromagnetic switch valves

50 second separators

59 pressure gauges

60 surge tanks

61 refrigerant inflow pipes

62 refrigerant return pipes

63 first surge tanks

64 second surge tanks

65 communicating pipes

66 electromagnetic switch valves

68 electromagnetic switch valves

80 first duplexures

The 80a first branched hair tubule

The 80b electromagnetic switch valve

81 second duplexures

The 81a second branched hair tubule

The 81b electromagnetic switch valve

82 the 3rd duplexures

82a the 3rd branched hair tubule

The 82b electromagnetic switch valve

83 the 4th duplexures

83a the 4th branched hair tubule

The 83b electromagnetic switch valve

100 vacuum tanks

The specific embodiment

Below, describe embodiments of the present invention in detail based on accompanying drawing.Below best embodiment, from being no more than example in essence, yet the present invention is also by being suitable for thing or this purposes is not limited.

(embodiment 1)

Fig. 1, be summary represent embodiment of the present invention about plane of arrangement figure one example of vacuum film formation apparatus A of vacuum film formation apparatus.The 100th, inner keep the not shown substrate of vacuum state (also claiming wafer) film forming vacuum tank.On this vacuum tank 100, offered gateway (not shown) by shutter door 101 switches, the state of opening in shutter door 101, substrate that will film forming is sent into vacuum tank 100, or the substrate after the film forming is taken out in vacuum tank 100.In the coupling part of this communicating pipe 102 with vacuum tank 100, be provided with by switching and make both be in the switching clamp gate valve 104 who is communicated with or blocks state, close shutter door 101 and the work by vavuum pump 103 of opening under clamp gate valve 104 the state makes in the vacuum tank 100 and becomes vacuum state.

In above-mentioned vacuum film formation apparatus A, be provided with constitute 1 of embodiments of the present invention about the superfreeze device R of refrigeration system.By the low-temperature coil described later 32 of this superfreeze device R, directly the moisture of the cooling object in the vacuum tank 100 is cooled to the ultralow temperature level in the state that vavuum pump 103 vacuumizes, thus, catch the vacuum in this frozen water content raising vacuum tank 100.

On the other hand, Fig. 2, other routine plane of arrangement figure of expression vacuum film formation apparatus A, the low-temperature coil 32 of superfreeze device R are disposed in the vacuum tank 100 but are disposed at communicating pipe 102 midway.Catching moisture in communicating pipe 102 by superfreeze device R under the state that vavuum pump 103 vacuumizes, also is exactly that the water branch in the cooling vacuum container 100 is freezing indirectly, improves the interior vacuum of vacuum tank 100.Other structure is identical with vacuum film formation apparatus A shown in Figure 1.

Above-mentioned superfreeze device R, being to use the non-azeotropic point refrigerant that mixes several different mutually refrigerants formation of boiling point is the device that refrigerant produces the ultralow temperature level cold below-100 ℃.

Just, all formations of superfreeze device R as shown in Figure 3, the 1st, enclose the closed circulation refrigerant loop of above-mentioned mixing refrigerant, this refrigerant loop 1 is connected in the coolant piping 2 of the various machines of connection of following explanation.The 4th, the compressor of Compressed Gas refrigerant, the ejection of this compressor 4 is partly connecting separator 5.This separator 5 is the compressor separators that lubricate the wet goods refrigerator oil of sneaking in the gas coolant of gas coolant separate compressors 4 ejections, and the refrigerator oil of this separation turns back to suction one side of compressor 4 through oil return pipe 6.In the refrigerant of above-mentioned separator 5 ejection part, connecting and to be cooled to the water condenser 8 of condensation from the heat exchange of the cooling water of the ejection gas coolant of compressor 4 and cooling water pipe 7.Ejection part in water condenser 8, the drying machine 9 of the moisture impurity in removing refrigerant is connecting one time one side of auxiliary condenser 10, in this auxiliary condenser 10, will be from the gas coolant of water condenser 8, the cooling cohesion that the low temperature secondary one side reflux refrigerant heat exchange that sucks with compressor 4 makes.In this embodiment, constitute condenser, mix the liquefaction that the higher high-temperature gas refrigerant of refrigerant mid-boiling point makes by these two condensers 8 and 10 cohesions by water condenser 8 and auxiliary condenser 10.

One time one side ejection part of above-mentioned auxiliary condenser 10 is connecting first gas-liquid separator 12, will be separated into liquid coolant and gas coolant from the gas-liquid mixed refrigerant of above-mentioned auxiliary condenser 10 by this first gas-liquid separator 12.The gas coolant of this first gas-liquid separator 12 ejection part is connecting one time one side of stagewise first heat exchanger 18, also has in liquid coolant ejection part between linking to each other with secondary one side of identical first heat exchanger 18 as first capillary 24 of pressure reducer.And, secondary one side that the liquid coolant that first gas-liquid separator 12 is separated offers first heat exchanger 18 after by 24 decompressions of first capillary is evaporated, by one time one side gas coolant of this evaporative cooling, the extremely liquefaction of gas coolant that condensation mixing refrigerant mid-boiling point temperature is next high.

Have, one time one side ejection part is connecting second gas-liquid separator 13 in above-mentioned first heat exchanger 18, in this second gas-liquid separator 13, will be separated into liquid coolant and gas coolant from the gas-liquid mixed state refrigerant of first heat exchanger 18 again.Gas coolant in this second gas-liquid separator 13 sprays one time one side that part is connecting stagewise second heat exchanger 19, is connecting secondary one side of same second heat exchanger 19 between second capillary 25 as pressure reducer in liquid coolant ejection part.And, secondary one side that the liquid coolant that second gas-liquid separator 13 is separated offers second heat exchanger 19 after by 25 decompressions of second capillary is evaporated, by one time one side gas coolant of this evaporative cooling, the extremely liquefaction of gas coolant that condensation mixing refrigerant mid-boiling point temperature is next high.

Have again, with the above-mentioned same way of structure that is connected, one time one side ejection part is connecting the 3rd gas-liquid separator 14, the 3rd heat exchanger 20 and three capillary 26 in above-mentioned second heat exchanger 19, also have, in 20 1 times one side ejections of the 3rd heat exchanger part, connecting the 4th gas-liquid separator 15, the 4th heat exchanger 21 and the 4th capillary 27 (it is identical with the connection structure of above-mentioned first gas-liquid separator 12, first heat exchanger 18 and first capillary 24 that these connect structure, omits its detailed description).And, secondary one side that the liquid coolant that the 3rd gas-liquid separator 14 is separated offers the 3rd heat exchanger 20 after by three capillary 26 decompressions is evaporated, by the one time one side gas coolant of this evaporative cooling from the 3rd gas-liquid separator 14, the extremely liquefaction of gas coolant that condensation mixing refrigerant mid-boiling point temperature is next high.Also have, secondary one side that the liquid coolant that the 4th gas-liquid separator 15 is separated offers the 4th heat exchanger 21 after by 27 decompressions of the 4th capillary is evaporated, by the one time one side gas coolant of this evaporative cooling from the 4th gas-liquid separator 15, the extremely liquefaction of gas coolant that condensation mixing refrigerant mid-boiling point temperature is next high.

And, one time one side ejection part in above-mentioned the 4th heat exchanger 21 is connecting the one time one side 31a of subcooler 31 (second air-conditioning) that is formed by heat exchanger, be connected in the coolant piping 2 of ejection part of one time one side 31a of this subcooler 31, branch into main coolant piping 2a and secondary coolant piping 2b by midway branched pipe 35.

Connecting the 5th capillary 28 (subcooler pressure reducer) midway in above-mentioned secondary coolant piping 2b.Also have, the dirty end of secondary coolant piping 2b is connecting the secondary one side 31b of same subcooler 31, and the secondary one side 31b of this subcooler 31 is connected in secondary one side of above-mentioned the 4th heat exchanger 21 between coolant piping 2.And, after will passing through one time one side 31a of subcooler 31 from the refrigerant of the 4th heat exchanger 21 ejections, make of five capillary 28 decompressions of its part in secondary coolant piping 2b, and this refrigerant offered the secondary one side 31b evaporation of subcooler 31, by the gas coolant of one time one side 31a of this evaporative cooling.

On the other hand,, be connected in series from separately upper reaches one side with the 6th capillary 29 of pressure reducer and low-temperature coil 32 as primary cooler in above-mentioned main coolant piping 2a midway.Above-mentioned low-temperature coil 32 is to constitute primary cooler, and as shown in Figures 1 and 2, cooling is as the moisture of the cooling object in the above-mentioned vacuum tank 100.The dirty end of main coolant piping 2a, be connected in the coolant piping 2 between secondary one side of secondary one side of above-mentioned the 4th heat exchanger 21 and subcooler 31, offer low-temperature coil 32 evaporations after the 6th capillary 29 decompressions of refrigerant remainder with one time one side 31a ejection of subcooler 31 by main coolant piping 2a, make moisture (cooling object) in the vacuum tank 100 be cooled to the temperature of the ultralow temperature level below-100 ℃ by this evaporation, by freezing and catching this moisture gas clean-up.

Also have, each secondary one side of secondary one side of above-mentioned subcooler 31 (and low-temperature coil 32) and the 4th heat exchanger 21, the 3rd heat exchanger 20, second heat exchanger 19, first heat exchanger 18 and auxiliary condenser 10 is connected in series by coolant piping 2 according to the order of record, secondary one side of auxiliary condenser 10 is connected in suction one side of compressor 4, mixes refrigerant because each refrigerant that evaporation has been gasified sucks compressor 4.

The invention is characterized in the arrangement of above-mentioned branched pipe 35.Just represent as the expansion of Fig. 4 and Fig. 5, branched pipe 35 by set part 35a and certainly this set part 35a be branched off into the master of two strands of shapes and a pair of component 35b, the 35c of secondary side forms.In set part 35, be combined into airtight conditions by being tightly connected by the one time one side 31a ejection coolant piping 2 dirty ends partly that are connected in subcooler 31.Also have,, also have in the upper reaches end of the secondary coolant piping 2b of secondary side branched pipe 35c each freely to be tightly connected and be airtight conditions in the upper reaches end of the above-mentioned main coolant piping 2a of master branched pipe 35b.These main coolant piping 2a and secondary coolant piping 2b substantially are along horizontal-extending, each self-forming the main refrigerant loop 38 of the inner and main coolant piping 2a inside of master branched pipe 35b, also have the secondary refrigerant loop 39 of the inner and secondary coolant piping 2b of secondary side branched pipe 35c.

Above-mentioned branched pipe 35 master branched pipe 35b and secondary side branched pipe 35c have same diameter (interior external diameter homogeneous phase together), also form for the pipe arrangement with identical interior warp with main coolant piping 2a and the secondary coolant piping 2b that is connected with secondary side branched pipe 35c that master branched pipe 35b connects.And, master branched pipe 35b and secondary side branched pipe 35c, be configured to secondary side branched pipe 35c and be positioned at the downside of master branched pipe 35b along approximately perpendicular configuration side by side up and down, the secondary coolant piping 2b of secondary side branched pipe 35c and connection thereof is positioned at the position of the defined height h lower than the main coolant piping 2a of master branched pipe 35b and connection thereof.Therefore, above-mentioned secondary refrigerant loop 39 whole heights are set at the low position of integral position than main refrigerant loop 38.

Have again, among Fig. 3,44 for being connected in the electromagnetic switch valve of main coolant piping 2a between above-mentioned the 6th capillary 29 and the low-temperature coil 32,45 is the defrost circuit between this electromagnetic switch valve 44 and 32 main coolant piping 2a of low-temperature coil and separator 5 and 8 coolant pipings 2 of water condenser, and 46 for being connected in this defrost circuit 45 electromagnetic switch valve midway.And, when the vacuum tank 100 that makes vacuum film formation apparatus A is in the common running of vacuum state film forming substrate, close defrost circuit 45 and open electromagnetic switch valve 44 and open main coolant piping 2a by closing electromagnetic switch valve 46, thus, by low-temperature coil 32 evaporation low boiling refrigerants, the moisture in the cooling vacuum container 100 is caught and is freezed.On the other hand, open shutter door 101 make vacuum tank 100 to atmosphere opening when not carrying out the defrosting running that substrate becomes membrane stage, open defrost circuit 45 and close main coolant piping 2a by opening electromagnetic switch valve 46 by closing electromagnetic switch valve 44, high-temperature gas refrigerant (hot gas) from compressor 4 ejections offers low-temperature coil 32 by defrost circuit 45 straight, and the freezing seizure of carrying out moisture in low-temperature coil 32 is replied it.

Also have, 60 is surge tank, and the coolant piping 2 between the gas coolant ejection part of this surge tank 60 and first gas-liquid separator 12 and one time one side of first heat exchanger 18 is connected by refrigerant inflow pipe 61.Also have, surge tank 60 and compressor 4 suck the coolant piping 2 of a side, by making the gas coolant in the surge tank 60 return refrigerant return pipe 62 connections that compressor 4 sucks a side, in the surge tank 60, prevent that the inadequate gas coolant of condensation when beginning to start because of superfreeze device R from causing the unusual rising of compressor 4 ejection pressure.

Also have, near the electromagnetic switch valve 46 of above-mentioned defrost circuit 45, near the electromagnetic switch valve 44 that the 6th capillary 29 and low-temperature coil are 32, on the coolant piping 2, be provided with first to the 3rd hand switch valve 71 to 73 respectively between low-temperature coil 32 outlet one sides and the 4th heat exchanger 21 secondaries one side.These hand switch valves 71 to 73 when changing low-temperature coil 32 or maintenance, cut out these shut off valves respectively the remaining mixing refrigerant in the pipe arrangement are leaked.

Have again, on the coolant piping 2, connecting between low-temperature coil 32 outlet one sides and the 4th heat exchanger 21 secondaries one side in refrigerant loop 1, offering the refrigerant feeding pipe 70 of refrigerant.Also have, this refrigerant feeding pipe 70 has in refrigerant loop 1 effect to the discharge pipe of outer eliminating mixing refrigerant concurrently.And, in refrigerant feeding pipe 70, the supply open and close valve of opening when the providing and discharge of refrigerant is provided 75.

And among Fig. 4,42 are branched pipe 35 secondary side branched

pipe

35c and 28 filters that are connected in series of the 5th capillary (Fig. 3 does not show).

Therefore, in this embodiment, in the vacuum tank 100 of vacuum film formation apparatus A during the film forming substrate, make superfreeze device R running, the moisture of vacuum tank 100 inside (or access 102 inside) is cooled to ultralow temperature level below-100 ℃ by freezing seizure, makes in the vacuum tank 100 to reach vacuum state.

Particularly, during this superfreeze device R running, close defrost circuit 45 and open main coolant piping 2a by opening electromagnetic switch valve 44 by closing electromagnetic switch valve 46.Thus, being cooled off by the refrigerant that returns compressor 4 secondaries one side in auxiliary condenser 10 after the mixing refrigerant of compressor 4 ejections is cooled off by water condenser 8, is center condensation liquefaction gas coolant to mix the highest refrigerant of refrigerant mid-boiling point temperature again.This refrigerant is separated into gas coolant and liquid coolant in first gas-liquid separator 12, liquid coolant evaporates in 18 1 times one sides of first heat exchanger after 24 decompressions of first capillary again, cooling off the gas coolant of first gas-liquid separator 12 by this heat of evaporation, is center condensation liquefaction gas coolant to mix the highest refrigerant of refrigerant mid-boiling point temperature.After, same way, in second to the 4th heat exchanger 19 to 21 according to mixing the order condensation liquefaction gas coolant of refrigerant mid-boiling point temperature from height.

Refrigerant from 21 1 times one side ejections of above-mentioned the 4th heat exchanger becomes gas-liquid mixed state refrigerant, this gas-liquid mixed state refrigerant is by being separated into main refrigerant loop 38 (main coolant piping 2a) and secondary refrigerant loop 39 (secondary coolant piping 2b) two-way in branched pipe 35 behind 31 1 times one side 31a of subcooler.And, the refrigerant that flows in secondary refrigerant loop 39 offers the secondary one side 31b evaporation of subcooler 31 after 28 decompressions of the 5th capillary, further cool off the amount that increases liquid coolant by this heat of evaporation from the gas-liquid mixed state refrigerant that above-mentioned the 4th heat exchanger 21 offers one time one side 31a of subcooler 31.

Also have, flow in main coolant piping 2a in one time one side 31a ejection back from subcooler 31, the residual fraction of gas-liquid mixed state refrigerant is in the decompression of the 6th capillary 29, and the decompression back provides cold below-100 ℃ for moisture in the vacuum tank 100 in low-temperature coil 32 evaporations.Freeze the moisture in the vacuum tank 100 and catch the vacuum that improves in the vacuum tank 100 by this cold below-100 ℃.

And, from above-mentioned the 4th heat exchanger 21 through the gas-liquid mixed state coolant distribution of one time one side 31a of subcoolers 31 in the main refrigerant loop 38 of branched pipe 35 (main coolant piping 2a) and when secondary refrigerant loop 39 (secondary coolant piping 2b), be lower than the height and position in main refrigerant loop 38 by the height and position in above-mentioned secondary refrigerant loop 39, the liquid coolant of gas-liquid mixed state refrigerant flows into highly lower secondary refrigerant loop 39 morely, and the liquid coolant flow-rate ratio that flows to this pair refrigerant loop 39 flows to the flow increase in main refrigerant loop 38.Therefore, can cool off fully, increase the cooling effectiveness that liquid coolant flow that this subcooler 31 liquefied can improve low-temperature coil 32 for the gas coolant of one time one side 31a of subcooler 31.And,, can try to achieve the raising that substrate becomes film quality even if the thermic load change in the vacuum tank 100 when becoming membrane stage can keep the cooling in the vacuum tank 100 unchangeably.

On the other hand, when the vacuum tank 100 of film formation device A is not carried out the Defrost operation of film forming to atmosphere opening, open defrost circuit 45 and close main coolant piping 2a by closing electromagnetic switch valve 44 by opening electromagnetic switch valve 46.Thus, the high-temperature gas refrigerant that sprays from compressor 4 offers low-temperature coil 32 through defrost circuit 45, removes freezing of moisture in low-temperature coil 32.And, after this defrosting running, make vacuum tank 100 enter vacuum state once again, with above-mentioned same way, close defrost circuit 45 and open main coolant piping 2a by opening electromagnetic switch valve 44 by closing electromagnetic switch valve 46, the low boiling refrigerant that one time one side 31a of subcooler 31 flows out splits into main refrigerant loop 38 and secondary refrigerant loop 39 in branched pipe 35.This situation also is, because the difference in height h in main refrigerant loop 38 and secondary refrigerant loop 39, the secondary one side 31b liquid coolant flow that flows into subcooler 31 is more than the flow that flows into low-temperature coil 32, make in the vacuum tank 100 and be cooled to the ultralow temperature level rapidly from normal temperature, just can shorten temperature fall time, also just can and raise the efficiency in the hope of the shortening of the emptying times in the vacuum tank 100 or the activity time in film forming processing time.

Have again, so improve the cooling effectiveness of low-temperature coil 32, because just set the discrepancy in elevation in main refrigerant loop 38 and secondary refrigerant loop 39, so structure just can access above-mentioned effect simply.

And, in this embodiment, be along the horizontal plane extension by main coolant piping 2a and secondary coolant piping 2b, the whole height position in secondary refrigerant loop 39 is lower than the whole height in main refrigerant loop 38, but the unnecessary whole discrepancy in elevation of setting secondary refrigerant loop 39 and main refrigerant loop 38.To the component that is less than main refrigerant loop 38 and secondary refrigerant loop 39, the extreme lower position that the extreme higher position in secondary refrigerant loop 39 is lower than main refrigerant loop 38 both can.

[0124] (embodiment 2)

Fig. 6 represent embodiment of the present invention 2 (and, below in each embodiment, the part mark identical symbol identical with Fig. 1 to Fig. 5 also omits its detailed description).Height and position with secondary refrigerant loop 39 in the above-mentioned embodiment 1 is lower than main refrigerant loop 38, makes the liquid coolant of the secondary one side 31b that flows into subcooler 31 more than the liquid coolant that flows into low-temperature coil 32.To this, present embodiment, in secondary refrigerant loop 39 and the height and position in main refrigerant loop 38 when high, the cross-sectional area that makes secondary refrigerant loop 39 is greater than main refrigerant loop 38.

Just, in this embodiment, different with embodiment 1, set part 35a, the master branched pipe 35b of branched pipe 35 and connect with it main coolant piping 2a, branched pipe 35 secondary side branched pipe 35c and be connected and its secondary coolant piping 2b is positioned on the same horizontal plane, be disposed at same high position.

And, the master branched pipe 35b of branched pipe 35 and secondary side branched pipe 35c, identical with embodiment 1 have a same diameter, still, be connected in the main coolant piping 2a of this master branched pipe 35b, use be than the little pipeline of secondary coolant piping 2b diameter that is connected in this pair side branched pipe 35c.Thus, the inside of secondary side branched pipe 35c and be formed at the cross-sectional area in the secondary refrigerant loop 39 of secondary coolant piping 2b inside is greater than the inside of master branched pipe 35b and be formed at the cross-sectional area in the main refrigerant loop 38 of main coolant piping 2a inside.

Other formation is identical with embodiment 1.And, do not represent filter 42 and the 5th capillary 28 among Fig. 6, but have identical construction (with reference to Fig. 4) with embodiment 1.

The situation of this embodiment, as main coolant piping 2a, use be the pipeline of caliber less than secondary coolant piping 2b, the cross-sectional area in secondary refrigerant loop 39 is bigger than the cross-sectional area in main refrigerant loop 38.Thus, the coolant distribution of one time one side 31a ejection of subcooler 31 is in main refrigerant loop 38 and secondary refrigerant loop 39 time, from integral body, the flow that the flow-rate ratio that gas-liquid mixed state refrigerant flows into secondary refrigerant loop 39 flows into main refrigerant loop 38 is many, and the cold medium flux that flows into secondary refrigerant loop 39 that is directly proportional therewith increases than the flow that flows into main refrigerant loop 38.For this reason, gas coolant for one time one side 31a of subcooler 31 keeps cooling fully, increase the cooling effectiveness that liquid coolant flow that this subcooler 31 liquefied just can improve primary cooler, so, can access the effect same with above-mentioned embodiment 1.

And, in this embodiment 2, secondary coolant piping 2b uses is thing with the same common caliber of embodiment 1, by using than the pipeline of its minor diameter coolant piping 2a that decides, make the diameter of the diameter of secondary coolant piping 2b greater than main coolant piping 2a, on the contrary, main coolant piping 2a uses common caliber, use the pipeline bigger to be secondary coolant piping 2b, reach same purpose and also can than its diameter.

Also have, in this embodiment 2, also be greater than main refrigerant loop 38 whole cross-sectional areas with secondary refrigerant loop 39 whole cross-sectional areas, but the cross-sectional area that does not need to be provided with secondary refrigerant loop 39 and main refrigerant loop 38 integral body is poor, as long as the minimum cross section area in secondary refrigerant loop 39 both can greater than the maximum cross-sectional area in main refrigerant loop 38.

(embodiment 3)

Fig. 7 and Fig. 8 represent embodiment 3, are the products that has made up the technology item of embodiment 1 and embodiment 2.Just, in this embodiment, the same with above-mentioned embodiment 1, the master branched pipe 35b of branched pipe 35 and secondary side branched pipe 35c, secondary side branched pipe 35c is configured to be positioned at master branched pipe 35b lower position and extends configuration arranged side by side up and down along the near normal face, secondary side branched pipe 35c and be connected in its secondary coolant piping 2b is disposed at the height and position that is lower than master branched pipe 35b and is connected in its main coolant piping 2a.Meanwhile, in the embodiment 2, be connected in the main coolant piping 2a of branched pipe 35 master branched pipe 35b, use is than the little pipeline of secondary coolant piping 2b diameter that is connected in secondary side branched pipe 35c, and the cross-sectional area in secondary refrigerant loop 39 is greater than being formed at master branched pipe 35b and being formed at the cross-sectional area in the main refrigerant loop 38 in the main coolant piping 2a.Other and embodiment 1 and embodiment 2 have same formation.

Therefore, in this embodiment, the stack of can prove effective embodiment 1 and embodiment 2 action effects can further improve the cooling effect of low-temperature coil 32.

And also the same with embodiment 1 under this situation, to the component that is less than main refrigerant loop 38 and secondary refrigerant loop 39, the extreme lower position that the extreme higher position in secondary refrigerant loop 39 is lower than main refrigerant loop 38 both can.

And above-mentioned embodiment 1 to 3 is the refrigeration systems that are applicable to mixing the non-azeotropic point mixing refrigerant of refrigerant in the plural number, for not using the also applicable the present invention of refrigeration system who mixes refrigerant, mainly is to have primary cooler both can with other subcoolers.

(embodiment 4)

Fig. 9,4 integral body about superfreeze device R of expression embodiment of the present invention constitute.And in the following stated embodiment 4 to 13, the structure of the branched pipe 35 that above-mentioned embodiment 1 to 3 is illustrated is not must important document.

In this embodiment 4, be that the loop with defrost circuit 45 constitutes feature.Just, as shown in Figure 9, between the upper reaches of defrost circuit 45 end and electromagnetic switch valve 46, disposed second separator 50 (the ejection separator 5 partly that is connected in compressor 4 is as first separator) that compressor is separated from gas coolant with lubricated wet goods refrigerator oil.By the refrigerator oil of these second separator, 50 separation, with above-mentioned first separator, 5 the same suction one sides that turn back to compressor 4 through oil return pipes 6.At this, second separator 50, by the low refrigerator oil of separation temperature high viscosity, can remove refrigerator oil really, be disposed at from the distance of separator 50 till the defrost circuit 45 upper reaches ends and be shorter than position till the defrost circuit 45 dirty ends (defrost circuit 45 upper reaches one side half locate).Other formations are identical with embodiment 1.

Therefore, in this embodiment, on the defrost circuit 45, be provided with from mixing refrigerant and remove second separator 50 of refrigerator oil, when the vacuum tank 100 of film formation device A does not carry out defrosting running that substrate becomes membrane stage, close electromagnetic switch valve 44 and open electromagnetic switch valve 46, when the mixing refrigerant of compressor 4 ejections offers low-temperature coil 32 by defrost circuit 45, even if first separator 5 is not removed refrigerator oil, can also remove by second separator 50.Thus, can offer low-temperature coil 32 from defrost circuit 45 by freezing-inhibiting machine oil.When particularly the defrosting running began, the low-temperature coil 32 interior cooling refrigerator oils that also do not reach the ultralow temperature level can guarantee to mix the good circulation of refrigerant to solidifying.Can also try to achieve emptying time or the shortening of film forming treatment process time and high efficiency in the vacuum tank 100.

Also have, above-mentioned second separator 50 is disposed at distance till the defrost circuit 45 upper reaches ends than the short position of distance till defrost circuit 45 dirty ends.Thus, favourable to the refrigerator oil that the separation temperature high viscosity is low, also just can the more definite low refrigerator oil of removing.

And, after this defrosting running, when making vacuum tank 100 be in vacuum state once again, to open electromagnetic switch valve 44 and close electromagnetic switch valve 46, the refrigerator oil that is separated by second separator 50 sucks side recovery from compressor 4.At this moment, because disposed above-mentioned second separator 50 between the upper reaches end of defrost circuit 45 and the electromagnetic switch valve 46, so, just can suppress the generation that compressor 4 sucks the former pressure differential higher than the latter between a side and second separator 50.Thus, can prevent that the refrigerator oil that sucks a side direction second separator 50 from compressor 4 from flowing backwards, can trying to achieve successfully, refrigerator oil returns compressor 4.

(embodiment 5)

Figure 10, the superfreeze device R of expression embodiment of the present invention 5 is whole to be constituted, in this embodiment, with the feature that constitutes of surge tank.Just, among Figure 10, compressor 4 ejection parts have connected the pressure gauge 59 that detects the ejection pressure of gas coolant.63 is first surge tank, 64 for being positioned at second surge tank of first surge tank, 63 downsides, by this first and

second surge tank

63,64, when starting, temporarily lets slip superfreeze device R the inadequate pressurized gas refrigerant of condensation, and control compressor 4 ejection pressure anomalies rise.

Above-mentioned first and

second surge tank

63,64 is by interconnecting for the access 65 (communicating pipe) that gas coolant is circulated between two jar 63,64.Also have, the coolant piping 2 between the gas coolant ejection part of second surge tank 64 and first gas-liquid separator 12 and one time one side of first heat exchanger 18 is connected by refrigerant inflow pipe 61.This refrigerant inflow pipe 61 is connecting the electromagnetic switch valve 66 that control flows to first and

second surge tank

63,64 midway.Also have, (part between the electromagnetic switch valve 66 and second surge tank 64) midway of above-mentioned refrigerant inflow pipe 61 connecting the gas coolant that makes in first and

second surge tank

63,64 and returning the refrigerant return pipe 62 that compressor 4 sucks the coolant piping 2 of a side.

Also have, first surge tank, 63 downsides are connecting fusiblely fastens 67.This is fusible fastens 67, is to be fastened from the insurance that molten open first surge tank 63 reduces jar internal pressure by heats such as fire.Other constitute identical with above-mentioned embodiment 4.

Therefore, in this embodiment, when superfreeze device R entry into service, by the insufficient gas coolant of condensation compressor 4 ejection pressure anomalies are risen, this is detected by pressure gauge 59.Be accompanied by this detection and open electromagnetic switch valve 66, pass through refrigerant inflow pipe 61 by the part of above-mentioned first gas-liquid separator, 12 gas separated refrigerants and flow into second surge tank 64.Also have, when the gas coolant inflow is many, flow into first surge tank 63 by communicating pipe 65 again.And, removed the abnormal ascending of above-mentioned ejection one side, detect by pressure gauge 59 equally, close electromagnetic switch valve 66, by refrigerant return pipe 62 gas coolant is returned compressor 4 from first and

second surge tank

63,64 and suck a side coolant piping 2.

This situation as mentioned above, because connected first and second two

surge tanks

63,64 on refrigerant loop 1, and is provided with one big jar and compares for eliminating the buffer capacity deficiency, and the space that is provided with of guaranteeing jar becomes easy.

Have, first and

second surge tank

63,64 was interconnected by communicating pipe 65 again, and two jars of 63,64 gas coolants circulations have prevented the delay of gas coolant in each surge tank 63,64.Thus, the different refrigerant of proportion is circulated fully, can prevent to cause cooling effect to reduce by mixing the variation of refrigerant composition in the refrigerating plant R.

And, it is not above-mentioned refrigerant inflow pipe 61, refrigerant return pipe 62 also connects electromagnetic switch valve, open and close each electromagnetic switch valve by corresponding compressor 4 ejection pressure anomalies risings, control flows into the gas coolant amount of first and

second surge tank

63,64, and all can from the gas coolant amount that first and

second surge tank

63,64 returns refrigerant loop 1.This and following

embodiment

6,7 also with.

(embodiment 6)

Figure 11,6 of embodiments of the present invention of expression about superfreeze device R refrigerant loop.Different with above-mentioned embodiment 5, because have only the loop of first and

second surge tank

63,64 to constitute,, different locating (embodiment 7 is too) only is described so the part identical with embodiment 5 marks same symbol.

First and

second surge tank

63,64, identical with embodiment 5, by for gas coolant was interconnected in the communicating pipe 65 of two jars of 63,64 circulations.On the other hand, different with embodiment 5 is that the coolant piping 2 between the gas coolant ejection part of first surge tank 63 and first gas-liquid separator 12 and one time one side of first heat exchanger 18 is connected by refrigerant inflow pipe 61.Also have, above-mentioned communicating pipe 65 is connecting the gas coolant in first and

second surge tank

63,64 is being returned the refrigerant return pipe 62 that compressor 4 sucks a side coolant piping 2 midway.Also have, fusiblely fasten 67 and be connected in second surge tank 64.Other formation is identical with embodiment 5.

The situation of this embodiment, when superfreeze device R entry into service, by the insufficient gas coolant of condensation compressor 4 ejection pressure anomalies are risen, pressure gauge 59 detects this situation, open electromagnetic switch valve 66, pass through refrigerant inflow pipe 61 by the part of first gas-liquid separator, 12 gas separated refrigerants and flow into first surge tank 63.And a part that flows into the gas coolant of this first surge tank 63 flows into second surge tank 64 by communicating pipe 65, and remainder returns the coolant piping 2 that compressor 4 sucks a side by refrigerant return pipe 62.

Also have, after the information that the abnormal ascending situation of above-mentioned ejection one side is removed is detected by pressure gauge 59, close electromagnetic switch valve 66, the refrigerant in first and

second surge tank

63,64 returns compressor 4 by refrigerant return pipe 62 and sucks a side coolant piping 2.

So, suck a side coolant piping 2 (refrigerant loop 1) because connected compressor 4 above-mentioned communicating pipe 65 midway, the refrigerant that returns compressor 4 suctions one side after refrigerant loop 1 flows into first surge tank 63 flows in first and

second surge tank

63,64 swimmingly.Thus, prevented the delay of gas coolant in first and

second surge tank

63,64, the different refrigerant of proportion is circulated fully, prevented to cause cooling effect to reduce by mixing the variation of refrigerant composition in the refrigerating plant R.

And, the position of first and

second surge tank

63,64 of this embodiment 6 about, as above-mentioned embodiment 5, the downside that is not restricted to first surge tank 63 disposes the mode of second surge tank 64, conversion their upper-lower position once for example, laterally configuration also can side by side.This point is identical with following embodiment 7.

(embodiment 7)

Figure 12,7 of embodiments of the present invention of expression about superfreeze device R refrigerant loop.Different with above-mentioned

embodiment

5 or 6, have only the loop of first and

second surge tank

63,64 to constitute.

Just, first and

second surge tank

63,64, identical with

embodiment

5 or 6, by for gas coolant was interconnected in the communicating pipe 65 of two jars of 63,64 circulations.And identical with embodiment 6, the coolant piping 2 between the gas coolant ejection part of first surge tank 63 and first gas-liquid separator 12 and one time one side of first heat exchanger 18 is connected by refrigerant inflow pipe 61.Also have, different with embodiment 6, second surge tank 64 sucks a side coolant piping 2 with compressor 4 and is connected by refrigerant return pipe 62.And, fusiblely fasten 67 and be connected in second surge tank 64.Other formation is identical with embodiment 6.

The situation of this embodiment, when superfreeze device R entry into service, by the insufficient gas coolant of condensation compressor 4 ejection pressure anomalies are risen, pressure gauge 59 detects this situation, open electromagnetic switch valve 66, pass through refrigerant inflow pipe 61 by the part of first gas-liquid separator, 12 gas separated refrigerants and flow into first surge tank 63.And this gas coolant flows into second surge tank 64 by communicating pipe 65, returns the coolant piping 2 that compressor 4 sucks a side by refrigerant return pipe 62.

second surge tank

So, this gas coolant flows into first surge tank 63 by refrigerant loop 1, by communicating pipe 65 flowing into second surge tank 64, return compressor 4 by refrigerant return pipe 62 and suck a side coolant piping, so, gas coolants can flow more swimmingly in two jar 63,64.Thus, first and

second surge tank

63,64 interior different refrigerants of proportion are circulated fully, prevent to cause cooling effect to reduce by mixing the variation of refrigerant composition in the refrigerating plant R.

(embodiment 8)

Figure 13,8 of embodiments of the present invention of expression about superfreeze device R refrigerant loop.In this embodiment, defrost circuit 45 will offer the 4th heat exchanger 21 that comprises low-temperature coil 32 from the high-temperature gas refrigerant of compressor 4 ejections.Just, these defrost circuit 45 upper reaches ends are connected in the coolant piping 2 between first separator 5 and the water condenser 8.On the other hand, defrost circuit 45 dirty ends branch into loop 45a of main split and secondary duplexure 45b.The dirty end of the loop 45a of main split, be connected on the main coolant piping 2a between low-temperature coil 32 inlet sides and the 6th capillary 29, the dirty end of secondary duplexure 45b is connected on the coolant piping 2 between secondary one side of low-temperature coil 32 outlet one sides and the 4th heat exchanger 21.

And, electromagnetic switch valve 46, be connected on the defrost circuit 45 of loop 45a of main split and secondary duplexure 45b upper reaches one side, electromagnetic switch valve 44 is connected in link position upper reaches one side (the 6th capillary 29 1 sides) of the dirty end of the loop 45a of above-mentioned main split of main coolant piping 2a between the 6th capillary 29 and the low-temperature coil 32.Other formation is identical with embodiment 4.

In this embodiment, do not carry out substrate (wafer) in the film formation device A vacuum tank 100 when becoming the Defrost operation of membrane stage, open defrost circuit 45 and close electromagnetic switch valve 44 and close main coolant piping 2a by opening electromagnetic switch valve 46.Thus, from the high-temperature gas refrigerant of compressor 4 ejection from the loop 45a of main split of defrost circuit 45 offers low-temperature coil 32 through this entrance side when, also offer the 4th heat exchanger 21, carry out the releasing that the moisture in low-temperature coil 32 and the 4th to second heat exchanger 21 to 19 is caught simultaneously through secondary duplexure 45b.

Just, defrost circuit 45 dirty ends branch into loop 45a of main split and secondary duplexure 45b, the dirty end of the loop 45a of main split is connected with the coolant piping 2 of low-temperature coil 32 entrance sides, the dirty end of secondary duplexure 45b is connected with low-temperature coil 32 outlet side coolant pipings 2, so, the refrigerant that flows through the loop 45a of main split offers low-temperature coil 32, and with this low-temperature coil 32, flow through the refrigerant of secondary duplexure 45b, offer the 4th to second heat exchanger 21 to 19 that is connected in low-temperature coil 32 outlets one side coolant piping 2 the 4th to second heat exchanger 21 to 19 is heated up simultaneously.Thus; solidify once more in refrigerator oil the in the 4th to second heat exchanger 21 to 19 by low-temperature coil 32 when also having the ultralow temperature level when having suppressed particularly defrosting running beginning; when can guarantee to mix the good circulation of refrigerant, also can shorten defrosting duration of runs.And, can try to achieve emptying time or the shortening of film forming treatment process time and high efficiency in the vacuum tank 100.

(embodiment 9)

Figure 14,9 of embodiments of the present invention of expression about superfreeze device R refrigerant loop.Different with above-mentioned embodiment 8, defrost circuit 45 secondary duplexure 45b have connected electromagnetic switch valve 68 midway.Other formations are identical with embodiment 8.

In this embodiment, when not carrying out the Defrost operation of substrate (wafer) one-tenth membrane stage in the vacuum film formation apparatus A vacuum tank 100, open secondary duplexure 45b by opening electromagnetic switch valve 68, the same electromagnetic switch valve 46 of opening with above-mentioned embodiment 8 is opened defrost circuit 45 and is closed electromagnetic switch valve 44 and close main coolant piping 2a, from the high-temperature gas refrigerant of compressor 4 ejection from the loop 45a of main split of defrost circuit 45 offers low-temperature coil 32 through this entrance side when, also offer the 4th heat exchanger 21, carry out the releasing that the moisture in low-temperature coil 32 and the 4th to second heat exchanger 21 to 19 is caught simultaneously through secondary duplexure 45b.

And,, close above-mentioned electromagnetic switch valve 68 and close secondary duplexure 45b when the 4th heat exchanger 21 is warmed up to refrigerator oil pour point (as-50 ℃) when above.Thus, high-temperature gas refrigerants in the defrost circuit 45 become only to flow in the loop 45a of main split from the state of hereto loop 45a of main split and secondary duplexure 45b shunting and offer low-temperature coil 32, can carry out its intensification, further shorten the duration of runs of defrosting.

And in this embodiment 9, the dirty end of secondary duplexure 45b does not connect the 4th heat exchanger 21, and secondary one side of high temperature one side heat exchanger also has nothing to do but connect more.Just, the position that is connected to the following temperature of the pour point that the refrigerator wet goods can flow smoothly in coolant piping 2 (as-50 ℃) provides high-temperature gas refrigerant (hot gas) also can.

(embodiment 10)

Figure 15 represents embodiment of the present invention 10, has changed the figure that main refrigerant loop 38 constitutes in the main coolant piping 2a.Just, in this embodiment, main refrigerant loop 38 branches into first and

second duplexure

80,81 that mutually side by side connects midway, than these two duplexures, 80,81 dirty ends interflow parts more by the low-temperature coil 32 of connecting on a dirty side and the main refrigerant loop 38.

On above-mentioned first duplexure 80, the first branched hair tubule 80a is connecting.Also have, on above-mentioned second duplexure 81, each is connected in series the electromagnetic switch valve 81b and the second branched hair tubule 81a since upper reaches one side.Above-mentioned electromagnetic switch valve 81b constitutes switching provides switch from refrigerant to second duplexure 81.Also have, on first and second branched hair tubule 80a, the 81a, used capillary with mutual different vacuum ability.Also have, not shown, on the superfreeze device R, be provided with the Temperature Detector that detects low-temperature coil 32 temperature.Other structures are identical with embodiment 4.

Therefore, in this embodiment, when superfreeze device R turns round usually, close electromagnetic switch valve 46 and close defrost circuit 45 and open electromagnetic switch valve 44 and open main refrigerant loop 38.Have again, open electromagnetic switch valve 81b and open second duplexure 81.Thus, in the gas-liquid mixed state refrigerant of one time one rear flank passing through subcooler 31 of one time one side ejection of the 4th heat exchanger 21, flow through the refrigerant in main refrigerant loop 38, be branched off into first and second

branched hair tubule

80a, 81a and reduce pressure separately, decompression back evaporation moisture in vacuum tank 100 in low-temperature coil 32 provides cold.

At this moment, refrigerant is reduced pressure in first and second branched hair tubule 80a, the 81a of first and

second duplexure

80,81 branches, can increase the flow of refrigerant by opening electromagnetic switch valve 81b.

And, by the detected value that the said temperature detector of superfreeze device R detects, when reaching predefined temperature (as-100 ℃), close electromagnetic switch valve 81b, refrigerant only flows through in the first branched hair tubule 80a.

Therefore, in this embodiment,,, also can try to achieve and shorten the cool time that arrives the ultralow temperature level in the cooling capacity of guaranteeing the cooling object is cooled to the ultralow temperature level by the pipe resistance that increases refrigerant.

Have again, used first and second

branched hair tubule

80a, 81a, can carry out the decompression of refrigerant really in the ultralow temperature zone as pressure reducer, with use compare as the situation of the expansion valve of pressure reducer with a high credibility, make in the stable work of device favourable.Also have, than expansion valve cheapness, become possibility so cut down cost of equipment significantly by capillary.

And, in the present embodiment, among first and second branched hair tubule 80a, the 81a, used capillary with different vacuum ability, have also can of same reduced pressure capabilities but use.

(embodiment 11)

Figure 16,11 of embodiments of the present invention of expression about superfreeze device R refrigerant loop.Different with above-mentioned embodiment 10, only one time one side in subcooler 31 constitutes to having connected loop capillaceous between low-temperature coil 32 inlet sides.

Just, in this embodiment, main refrigerant loop 38 forms first to fourth duplexure 80 to 83 that connects side by side mutually midway, than these duplexure 80 to 83 dirty ends interflow parts more by the low-temperature coil 32 of connecting on a dirty side and the main refrigerant loop 38.

Have, on above-mentioned first duplexure 80, the first branched hair tubule 80a is connecting again.Also have, on second duplexure 81, on the electromagnetic switch valve 81b and the second branched hair tubule 81a, the 3rd duplexure 82, electromagnetic switch valve 81b and the 3rd branched hair tubule 82a, have on the 4th duplexure 83, each is connected in series electromagnetic switch valve 83b and the 4th branched hair tubule 83a since upper reaches one side again.At this, on the first to fourth branched hair tubule 80a to 83a, used the capillary that has the different vacuum ability mutually.Other structures are identical with embodiment 10.

In this embodiment, when the superfreeze device R in the vacuum tank 100 of superfreeze device R during the film forming substrate turns round usually, one time one side from subcooler 31 sprays the 38 gas-liquid mixed state refrigerants that flow in main refrigerant loop afterwards, in the first branched hair tubule 80a of first duplexure 80 decompression.Also have,, open each switch valve 81b to 83b of second to the 4th duplexure 81 to 83 selectively for short time cooling cooling object.Thus, branch's decompression selectively in second to the 4th branched hair tubule 81a to 83a, the moisture cold of giving in the vacuum tank 100 is evaporated in low-temperature coil 32 in its decompression back.

And, when the detected value that Temperature Detector detects reaches the temperature (as-100 ℃) of setting, close electromagnetic switch valve 81b to 83b, refrigerant only flows through in the first branched hair tubule 80a.

By present embodiment, open each switch valve 81b to 83b of second to the 4th duplexure 81 to 83 selectively, refrigerant selectively can be branched off on second to the 4th branched hair tubule 81a to 83a, just can in vacuum tank 100, adjust the time of chilling temperature or arrival chilling temperature arbitrarily.

And, in the present embodiment, formed four loops formations that main refrigerant loop 38 branches become first to fourth branched hair tubule 80a to 83a, be limited to this but have more than, for example be branched off into three loops, perhaps five loops all can (with reference to the imagination line of Figure 16).On this aspect, following embodiment 13 is also identical.

(embodiment 12)

Figure 17 represent 12 of embodiment of the present invention about superfreeze device R refrigerant loop.Different with above-mentioned embodiment 10, only one time one side in subcooler 31 constitutes to having connected loop capillaceous between low-temperature coil 32 inlet sides.

Just, in this embodiment, main refrigerant loop 38 forms first and

second duplexure

80,81 that connects side by side mutually midway, than these duplexure 80,81 dirty ends interflow parts more by the low-temperature coil 32 of connecting on a dirty side and the main refrigerant loop 38.

On above-mentioned first duplexure 80, the connecting first branched hair tubule 80a and electromagnetic switch valve 80b also have on second duplexure 81, the connecting second branched hair tubule 81a and electromagnetic switch valve 81b, and each is connected in series since upper reaches one side.On first and second branched hair tubule 80a, the 81a, used capillary with mutual different vacuum ability.Also have, because the electromagnetic switch valve 80b of the first branched hair tubule 80a, the electromagnetic switch valve 81b of the second branched hair tubule 81a closes main refrigerant loop 38 simultaneously and just is closed, and has omitted the electromagnetic switch valve 44 (with reference to Figure 15) in the embodiment 10.Other structures are identical with embodiment 10.

In this embodiment, when superfreeze device R turns round usually during the film forming substrate in the vacuum tank 100 of vacuum film formation apparatus A, one time one residual fraction of side ejection back in the gas-liquid mixed state refrigerant that flows in main refrigerant loop 38 of subcooler 31, be branched off among first and second branched hair tubule 80a, the 81a by the electromagnetic switch valve 80b, the 81b that open first and

second duplexure

80,81 and reduce pressure, moisture cold in the vacuum tank 100 is given in low-temperature coil 32 evaporations in its decompression back.

And, when the detected value that is detected by Temperature Detector or pressure detector reaches design temperature (as below-100 ℃) or reaches setting pressure, close electromagnetic switch valve 80b, the 81b of first and

second duplexure

80,81, only one of them flows through in the first or second

branched hair tubule

80a, 81a to make refrigerant.

In this embodiment,

electromagnetic switch valve

80b, 81b by first and

second duplexure

80,81 of selector switch, branch first or the second

branched hair tubule

80a, 81a selectively just can adjust chilling temperature arbitrarily or arrive time of chilling temperature in vacuum tank 100.

And, do not open two

electromagnetic switch valve

80b, 81b simultaneously, only open one of them

electromagnetic switch valve

80b, 81b and also can.

(embodiment 13)

Figure 18 represent 13 of embodiment of the present invention about superfreeze device R refrigerant loop.Different with above-mentioned embodiment 12, only connected loop capillaceous between 32 and constituted in subcooler 31 to low-temperature coil.

Just, in this embodiment, main refrigerant loop 38 forms first to fourth duplexure 80 to 83 that connects side by side mutually midway, than these duplexure 80 to 83 interflow parts more by the low-temperature coil 32 of connecting on a dirty side and the main refrigerant loop 38.

Have again, the first branched hair tubule 80a and electromagnetic switch valve 80b are connecting on above-mentioned first duplexure 80, also have connecting on second the duplexure 81 second branched hair tubule 81a and electromagnetic switch valve 81b, connecting on the 3rd the duplexure 82 second branched hair tubule 82a and electromagnetic switch valve 82b are arranged again, connecting on the 4th duplexure 83 the 4th branched hair tubule 83a and electromagnetic switch valve 83b are arranged again, and all one side is connected in series from the upper reaches separately.On the first to fourth branched hair tubule 80a to 83a, used capillary with mutual different vacuum ability.Other structures are identical with embodiment 12.

In this embodiment, when superfreeze device R turns round usually during the film forming substrate in the vacuum tank 100 of vacuum film formation apparatus A, for cooling cooling object in the short time is opened the electromagnetic switch valve 80b to 83b of first to fourth duplexure 80 to 83 selectively, one time one residual fraction of side ejection back in the gas-liquid mixed state refrigerant that flows in main refrigerant loop 38 of subcooler 31, flow in first to fourth branched hair tubule 80a to 83a of selection branch and reduce pressure, the moisture cold of giving in the vacuum tank 100 is evaporated in low-temperature coil 32 in its decompression back.

And, reach design temperature when (as below-100 ℃) by the detected value of Temperature Detector, suitably close the electromagnetic switch valve 80b to 83b of first to fourth duplexure 80 to 83, make refrigerant in first to fourth branched hair tubule 80a to 83a, select to flow through.

In this embodiment, electromagnetic switch valve 80b to 83b by selector switch first to fourth duplexure 80 to 83, the first to fourth branched hair tubule 80a to 83a of branch selectively adjusts chilling temperature arbitrarily or arrives time of chilling temperature in vacuum tank 100.

(other embodiments)

In the respective embodiments described above, be that low-temperature coil 32 is disposed in the vacuum tank 100, by the moisture in these low-temperature coil 32 direct cooling vacuum containers 100, but, replace low-temperature coil 32 that the salt solution air-conditioning is set, make this salt solution air-conditioning be connected in heat absorbing part and the brine loop that is positioned at vacuum tank 100, the salt solution in this salt solution air-conditioning refrigerated brine loop is provided the cold of synthermal level to the ultralow temperature level by the heat absorbing part of this salt solution in vacuum tank 100.

Also have, above-mentioned

water condenser

8,10, heat exchanger 18 to 21 and subcooler 31 are that any in double pipe structure, plate-like construction, the capillary structure all can.Also have, replace other pressure reducers of capillary 24 to 29, can adopt as expansion valve etc.

Also have, in the respective embodiments described above, used 5 kinds or 6 kinds of mixing refrigerants that refrigerant mixes, still, use the mixing refrigerant that mixes with the refrigerant of 5 kinds or 6 kinds variety classes numbers also to be fine certainly in refrigeration system.Also have, in the respective embodiments described above, for the refrigeration system that cools off other cooling objects also can.

Also have, in the above-mentioned embodiment, represented the system that the quadravalence layer carries out gas-liquid separation, and the present invention is applicable to that the system that three-layered is following, carry out gas-liquid separation more than five stratum also is possible.

Also have, represented to use the water-cooling system of water condenser 21 in the present embodiment, still, use the formation of aerial condenser system also can.

(utilizing possibility on the industry)

The present invention; even if load changes when also can cool off object unchangeably; can be reduced to the ultralow temperature level from normal temperature to the cooling object cools off rapidly and shortens cool time; when comprising defrost circuit Ultra-low temp refrigerating device defrosting running; guarantee well to mix the circulation of refrigerant and improve cooling effectiveness; gas coolant is successfully circulated suppress the delay of gas coolant in the tank; keep well refrigerant composition ratio; shorten the duration of runs of defrosting; guarantee to be cooled to for cooling off object the cooling capacity of the chilling temperature of defined; shorten the cool time that arrives this chilling temperature; obtain the high various effect of practicality, the usability on industry is high.

Claims

1. superfreeze device is characterized by:

Comprise by refrigerant loop-coupled with the lower part:

Compressor, the compressed mixed boiling point is the mixing refrigerant of different plural kind refrigerant mutually;

Condenser, the higher boiling refrigerant is to liquefaction in the mixing refrigerant of cooling above-mentioned compressor ejection;

Plural number level gas-liquid separator, to separate the mixing refrigerant that has been liquefied by above-mentioned condenser be liquid coolant and gas coolant according to mixing in the refrigerant from the higher boiling refrigerant order to the low boiling refrigerant;

Plural number level classification heat exchanger, with above-mentioned each gas-liquid separator separates gas coolant, and cool off by the heat exchange of the liquid coolant that has reduced pressure by pressure reducer again after this each gas-liquid separator separates; With

Cooler, the ejection of classification heat exchanger and the low boiling refrigerant that reduced pressure with evaporation afterbody in above-mentioned plural number level is cooled to the ultralow temperature level to the cooling object,

On the above-mentioned refrigerant loop, connected a plurality of surge tanks that prevent that above-mentioned compressor ejection pressure anomaly from rising,

Above-mentioned a plurality of surge tank is by comprising one first surge tank at least, be positioned at than this first surge tank more at least one second surge tank of lower position form,

Above-mentioned first and second surge tank, by interconnecting the communicating pipe that gas coolant is circulated between first and second surge tank,

Connecting the refrigerant loop that compressor sprays a side and sucks a side on above-mentioned second surge tank.

2. superfreeze device is characterized by:

Comprise by refrigerant loop-coupled with the lower part:

Above-mentioned a plurality of surge tank is by comprising one first surge tank at least, with at least one second surge tank composition,

Above-mentioned first surge tank is connected in compressor and sprays on the refrigerant loop of a side,

Sucking a side refrigerant loop with compressor in the middle of above-mentioned communicating pipe is connected.

3. superfreeze device is characterized by:

Comprise by refrigerant loop-coupled with the lower part:

Above-mentioned a plurality of surge tank comprises at least one first surge tank, at least one second surge tank,

Above-mentioned first surge tank is connected with the refrigerant loop that compressor sprays a side,

Above-mentioned second surge tank is connected with the refrigerant loop that compressor sucks a side.

4. vacuum plant is characterized by:

Be to constituting of freezing by the moisture in any one the cooler cooling vacuum container of superfreeze device of claim 1 to 3.