JPH06347112A - Cooling device - Google Patents
Cooling deviceInfo
- Publication number
- JPH06347112A JPH06347112A JP2053094A JP2053094A JPH06347112A JP H06347112 A JPH06347112 A JP H06347112A JP 2053094 A JP2053094 A JP 2053094A JP 2053094 A JP2053094 A JP 2053094A JP H06347112 A JPH06347112 A JP H06347112A
- Authority
- JP
- Japan
- Prior art keywords
- refrigerant
- evaporator
- branch
- compressor
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Defrosting Systems (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、カスケード式冷凍サイ
クルを用いた冷却装置の改良に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement of a cooling device using a cascade type refrigeration cycle.
【０００２】[0002]
【従来の技術】従来、カスケード式冷凍サイクルを用い
た超低温を得るための冷却装置として、特開平２−１７
６３７１号公報等に開示された装置があり、近年、ウェ
ーハ等の製造において、ロードロック室等における水分
やガスのトラップに利用されている。2. Description of the Related Art Conventionally, as a cooling device for obtaining an ultralow temperature using a cascade type refrigeration cycle, Japanese Patent Laid-Open No. 2-17
There is an apparatus disclosed in Japanese Patent No. 6371, etc., and in recent years, it has been used for trapping moisture or gas in a load lock chamber or the like in the production of wafers or the like.
【０００３】例えば、図７に示される冷却装置１０１に
おいては、圧縮機１０２と、凝縮器１０３と、第１およ
び第２の気液分離器１０４、１０５と、第１ないし第３
のカスケード熱交換器１０６、１０７、１０８と、第１
ないし第３のキャピラリチュ−ブ（膨張手段）１０９、
１１０、１１１と、蒸発器１１２とが備えられ、これら
が冷媒供給管路１１３と冷媒戻り管路１１４により適宜
配管接続され、冷凍サイクルの循環経路が構成されてい
る。For example, in the cooling device 101 shown in FIG. 7, the compressor 102, the condenser 103, the first and second gas-liquid separators 104 and 105, and the first to third parts.
The cascade heat exchangers 106, 107, 108 of the first
To a third capillary tube (expansion means) 109,
110, 111 and an evaporator 112 are provided, and these are appropriately pipe-connected by a refrigerant supply pipe line 113 and a refrigerant return pipe line 114 to form a refrigeration cycle circulation path.
【０００４】また、この冷凍サイクル内に沸点温度の異
なる複数種類の成分の冷媒が混合されて封入されてい
る。Further, a plurality of types of refrigerants having different boiling points are mixed and enclosed in this refrigeration cycle.
【０００５】そして、圧縮機１０２から吐出された高
温、高圧の混合ガス冷媒は凝縮器１０３で水または空気
によって冷却され、一部が凝縮されて気液混相の冷媒と
なり第１の気液分離器１０４に送り込まれる。ここで、
気液混相の冷媒は気相冷媒と液相冷媒とに分離されて、
液相冷媒は第１のキャピラリチュ−ブ１０９で減圧膨張
された後、冷媒戻り管路１１４の戻り冷媒と合流する。
一方、気相冷媒は第１のカスケード熱交換器１０６に送
り込まれ、そこで冷媒戻り管路１１４の戻り冷媒との熱
交換により冷却されて、一部が凝縮液化して気液混相の
冷媒となり、第２の気液分離器１０５に送り込まれる。The high-temperature, high-pressure mixed gas refrigerant discharged from the compressor 102 is cooled by water or air in the condenser 103, and a part thereof is condensed to become a gas-liquid mixed phase refrigerant, which is the first gas-liquid separator. It is sent to 104. here,
The gas-liquid mixed phase refrigerant is separated into a gas phase refrigerant and a liquid phase refrigerant,
The liquid-phase refrigerant is decompressed and expanded by the first capillary tube 109 and then merges with the return refrigerant in the refrigerant return pipe line 114.
On the other hand, the gas-phase refrigerant is sent to the first cascade heat exchanger 106, where it is cooled by heat exchange with the return refrigerant in the refrigerant return line 114, and a part thereof is condensed and liquefied to become a gas-liquid mixed phase refrigerant, It is sent to the second gas-liquid separator 105.
【０００６】第２の気液分離器１０５、第２のカスケー
ド熱交換器１０７、および第２のキャピラリチュ−ブ１
１０においても上記と同様な動作が繰り返される。The second gas-liquid separator 105, the second cascade heat exchanger 107, and the second capillary tube 1
Also in 10, the same operation as described above is repeated.
【０００７】以上のようにして、混合冷媒のうち沸点の
高い成分の冷媒から順に冷媒戻り管路１１４を通じて圧
縮機１０２側に戻され、最も沸点の低い成分の冷媒が気
相状態で第２のカスケード熱交換器１０７に送り込ま
れ、そこで冷却されて凝縮され、さらに第３のカスケー
ド熱交換器１０８で冷却された後、第３のキャピラリチ
ューブ１１１に送り込まれる。As described above, the refrigerant having the highest boiling point in the mixed refrigerant is returned to the compressor 102 side in order from the refrigerant having the highest boiling point component, and the refrigerant having the lowest boiling point is in the second phase in the vapor phase state. It is sent to the cascade heat exchanger 107, cooled and condensed there, further cooled by the third cascade heat exchanger 108, and then sent to the third capillary tube 111.
【０００８】そして、液相状態の冷媒は第３のキャピラ
リチュ−ブ１１１で減圧膨張されて気液混相状態とな
り、蒸発器１１２に送り込まれる。蒸発器１１２に送り
込まれた冷媒は、蒸発器１１２で熱を吸収して蒸発し、
ここに蒸発器１１２を超低温に冷却する。Then, the refrigerant in the liquid phase state is decompressed and expanded by the third capillary tube 111 to be in a gas-liquid mixed phase state, and sent to the evaporator 112. The refrigerant sent to the evaporator 112 absorbs heat in the evaporator 112 and evaporates,
Here, the evaporator 112 is cooled to an ultralow temperature.
【０００９】また、蒸発器１１２から冷媒戻り管路１１
４に流出した気相状態の戻り冷媒は第３ないし第１のカ
スケード熱交換器１０８、１０７、１０６を順次経由し
て自身の温度を次第に上昇させながら、最終的に常温の
低圧ガスとなって圧縮機１０２に戻るよう構成されてい
る。Further, the refrigerant return line 11 from the evaporator 112
The return refrigerant in the gas phase that has flowed out to No. 4 gradually passes through the third to first cascade heat exchangers 108, 107 and 106 to gradually increase its own temperature and finally become a low pressure gas at room temperature. It is configured to return to the compressor 102.
【００１０】そして、図５や図６に示される如く、冷却
装置１０１の蒸発器１１２がロードロック室等の真空チ
ャンバ１２０内や、真空ポンプ１２１と真空チャンバ１
２０とを接続する配管１２２内に設置され、真空チャン
バ１２０内の水分やガスをトラップするよう構成されて
いる。なお、各図において、１２３は真空チャンバ１２
０の開閉扉、１２４は真空チャンバ１２０と配管１２２
との連通路を開閉自在に遮断するゲートバルブである。As shown in FIG. 5 and FIG. 6, the evaporator 112 of the cooling device 101 is installed in the vacuum chamber 120 such as a load lock chamber or the vacuum pump 121 and the vacuum chamber 1.
It is installed in a pipe 122 connecting with 20 and is configured to trap water and gas in the vacuum chamber 120. In each figure, 123 is the vacuum chamber 12.
0 open / close door, 124 is vacuum chamber 120 and piping 122
It is a gate valve that opens and closes the communication path with and.
【００１１】[0011]
【発明が解決しようとする課題】そして、蒸発器１１２
による水分等のトラップ量が増加すれば、デフロスト作
業が必要とされ、また、蒸発器１１２は超低温であるた
め、真空チャンバ１２０内へのウェーハ等の出し入れに
際し、真空チャンバ１２０を大気開放する場合は、図５
に示される如く、蒸発器１１２が真空チャンバ１２０内
にあればデフロスト作業終了後に、図６に示される如
く、蒸発器１１２が配管１２２内にあればゲートバルブ
１２４を閉じた後に開閉扉１２３を開放する必要があ
る。Then, the evaporator 112 is provided.
If the amount of trapped moisture or the like increases due to the defrosting work, and the evaporator 112 is at an extremely low temperature, when the vacuum chamber 120 is opened to the atmosphere when the wafer is taken in and out of the vacuum chamber 120, , Fig. 5
6, if the evaporator 112 is in the vacuum chamber 120, the defrosting work is completed. If the evaporator 112 is in the pipe 122, the gate valve 124 is closed and the opening / closing door 123 is opened, as shown in FIG. There is a need to.
【００１２】しかしながら、従来、この種の冷却装置１
０１における蒸発器１１２のデフロスト作業は、図７に
示される如く、蒸発器１１２に備えられたヒータ１２６
の加熱による方法であり、デフロスト作業に長時間を要
し、非常に効率が悪いという問題があった。また、第１
ないし３のキャピラリチューブ１０９、１１０、１１１
には、水分やオイルが蓄積し易く、冷媒の循環が悪くな
って、冷却効率が低下するという問題もあった。However, heretofore, this type of cooling device 1 has been used.
The defrosting operation of the evaporator 112 in 01 is performed by the heater 126 provided in the evaporator 112 as shown in FIG.
However, this method requires a long time for the defrosting work, and there is a problem that it is very inefficient. Also, the first
No. 3 to No. 3 capillary tubes 109, 110, 111
However, there is a problem that water and oil are likely to be accumulated, the circulation of the refrigerant is deteriorated, and the cooling efficiency is reduced.
【００１３】そこで、本発明は上記問題点に鑑み、デフ
ロスト作業を短時間で行うことができ、しかもその後に
所望の冷却温度に効率よく戻すことができる冷却装置を
提供することを目的とする。また、膨張手段（キャピラ
リチューブ）への水分やオイルの蓄積を容易に解除でき
る冷却装置を提供することを目的とする。Therefore, in view of the above problems, it is an object of the present invention to provide a cooling device capable of performing a defrosting operation in a short time and efficiently returning to a desired cooling temperature thereafter. Another object of the present invention is to provide a cooling device that can easily release the accumulation of water and oil in the expansion means (capillary tube).
【００１４】[0014]
【課題を解決するための手段】上記目的を達成するため
の第１の技術的手段は、沸点温度の異なる複数種類の冷
媒が混合されてなる冷媒を圧縮機で圧縮し、圧縮機から
吐出された冷媒を凝縮器で冷却し、凝縮器で冷却された
冷媒を高沸点の液相冷媒と気相冷媒に気液分離器で分離
し、分離された高沸点の液相冷媒は膨張手段で減圧して
カスケード熱交換器で前記気液分離器で分離された気相
冷媒を冷却すると共に圧縮機側に戻され、順次、気液分
離器で分離された気相冷媒を冷却して気液分離および冷
却を繰り返してより高沸点の冷媒を圧縮機側に戻すと共
に低沸点の冷媒を抽出して蒸発器に案内し、蒸発器で低
沸点の冷媒を蒸発させて冷却作用を行った後、カスケー
ド熱交換器を経由して圧縮機に戻す冷却装置において、
前記圧縮機の吐出側から凝縮器に至る冷媒供給管路途中
から分岐され、かつ蒸発器の入口側に接続された分岐供
給管と、蒸発器の出口側からカスケード熱交換器に至る
冷媒戻り管路途中から分岐され、かつ圧縮機の吸入側に
接続された分岐戻り管とが設けられると共に、前記分岐
供給管および分岐戻り管にその管路を開閉自在に遮断す
る開閉弁がそれぞれ備えられてなる点にある。A first technical means for achieving the above object is to compress a refrigerant, which is a mixture of plural kinds of refrigerants having different boiling points, with a compressor, and to discharge the refrigerant from the compressor. The refrigerant is cooled by a condenser, and the refrigerant cooled by the condenser is separated into a high-boiling-point liquid-phase refrigerant and a vapor-phase refrigerant by a gas-liquid separator, and the separated high-boiling-point liquid phase refrigerant is decompressed by an expansion means. Then, the cascade heat exchanger cools the gas-phase refrigerant separated by the gas-liquid separator and returns it to the compressor side, which in turn cools the gas-phase refrigerant separated by the gas-liquid separator to separate the gas-liquid. And cooling is repeated to return the higher boiling point refrigerant to the compressor side, extract the low boiling point refrigerant and guide it to the evaporator, evaporate the low boiling point refrigerant in the evaporator to perform the cooling action, and then cascade. In the cooling device that returns to the compressor via the heat exchanger,
A branch supply pipe branched from the middle of the refrigerant supply line from the discharge side of the compressor to the condenser and connected to the inlet side of the evaporator, and a refrigerant return pipe from the outlet side of the evaporator to the cascade heat exchanger. A branch return pipe that is branched from the middle of the passage and is connected to the suction side of the compressor is provided, and the branch supply pipe and the branch return pipe are respectively provided with open / close valves that open and close the pipe passages. There is a point.
【００１５】また、上記目的を達成するための第２の技
術的手段は、沸点温度の異なる複数種類の冷媒が混合さ
れてなる冷媒を圧縮機で圧縮し、圧縮機から吐出された
冷媒を凝縮器で冷却し、凝縮器で冷却された冷媒を高沸
点の液相冷媒と気相冷媒に気液分離器で分離し、分離さ
れた高沸点の液相冷媒は膨張手段で減圧してカスケード
熱交換器で前記気液分離器で分離された気相冷媒を冷却
すると共に圧縮機側に戻され、順次、気液分離器で分離
された気相冷媒を冷却して気液分離および冷却を繰り返
してより高沸点の冷媒を圧縮機側に戻すと共に低沸点の
冷媒を抽出して蒸発器に案内し、蒸発器で低沸点の冷媒
を蒸発させて冷却作用を行った後、カスケード熱交換器
を経由して圧縮機に戻す冷却装置において、前記圧縮機
の吐出側から凝縮器に至る冷媒供給管路途中から分岐さ
れ、かつ蒸発器の入口側に接続された分岐供給管が設け
られると共に、該分岐供給管の管路を開閉自在に遮断す
る開閉弁が備えられ、蒸発器の出口側からカスケード熱
交換器に至る冷媒戻り管路途中から分岐され、かつ前記
圧縮機の吐出側から凝縮器に至る冷媒供給管路の前記分
岐供給管分岐位置と凝縮器との間に接続された分岐戻り
管が設けられると共に、該分岐戻り管の管路を開閉自在
に遮断する開閉弁が備えられ、前記分岐供給管分岐位置
と分岐戻り管の接続位置との間で前記冷媒供給管路を開
閉自在に遮断する開閉弁が備えられると共に、前記蒸発
器の出口側からカスケード熱交換器に至る冷媒戻り管路
の前記分岐戻り管分岐位置とカスケード熱交換器との間
で前記冷媒戻り管路を開閉自在に遮断する開閉弁が備え
られてなる点にある。A second technical means for achieving the above object is to compress a refrigerant, which is a mixture of plural kinds of refrigerants having different boiling points, with a compressor, and to condense the refrigerant discharged from the compressor. The refrigerant cooled in the condenser and the refrigerant cooled in the condenser are separated into the high boiling liquid phase refrigerant and the vapor phase refrigerant by the gas-liquid separator, and the separated high boiling liquid phase refrigerant is decompressed by the expansion means to generate the cascade heat. The exchanger cools the gas-phase refrigerant separated by the gas-liquid separator and returns to the compressor side, and sequentially cools the gas-phase refrigerant separated by the gas-liquid separator to repeat gas-liquid separation and cooling. The higher boiling point refrigerant is returned to the compressor side, the low boiling point refrigerant is extracted and guided to the evaporator, and the low boiling point refrigerant is evaporated in the evaporator to perform the cooling operation, and then the cascade heat exchanger is set. In the cooling device that returns to the compressor via the condenser from the discharge side of the compressor Is provided with a branch supply pipe that is branched from the middle of the refrigerant supply pipe and that is connected to the inlet side of the evaporator, and an on-off valve that opens and closes the pipe of the branch supply pipe is provided. Connected from the branch supply pipe branching position of the refrigerant supply pipe from the discharge side of the compressor to the condenser and between the condenser and the refrigerant return pipe from the outlet side of the compressor to the cascade heat exchanger. Is provided with an opening / closing valve that opens and closes the pipe line of the branch return pipe, and the refrigerant supply pipe is provided between the branch supply pipe branch position and the connection position of the branch return pipe. An on-off valve that opens and closes the passage is provided, and the refrigerant return pipe between the branch return pipe branch position of the refrigerant return pipe passage from the outlet side of the evaporator to the cascade heat exchanger and the cascade heat exchanger. Open and close the pipeline freely Off valve lies in is provided for.
【００１６】さらに、上記目的を達成するための第３の
技術的手段は、沸点温度の異なる複数種類の冷媒が混合
されてなる冷媒を圧縮機で圧縮し、圧縮機から吐出され
た冷媒を凝縮器で冷却し、凝縮器で冷却された冷媒を高
沸点の液相冷媒と気相冷媒に気液分離器で分離し、分離
された高沸点の液相冷媒は膨張手段で減圧してカスケー
ド熱交換器で前記気液分離器で分離された気相冷媒を冷
却すると共に圧縮機側に戻され、順次、気液分離器で分
離された気相冷媒を冷却して気液分離および冷却を繰り
返してより高沸点の冷媒を圧縮機側に戻すと共に低沸点
の冷媒を抽出し、該低沸点の冷媒を膨張手段で減圧して
蒸発器に案内し、蒸発器で低沸点の冷媒を蒸発させて冷
却作用を行った後、カスケード熱交換器を経由して圧縮
機に戻す冷却装置において、前記圧縮機の吐出側から凝
縮器に至る冷媒供給管路途中から分岐され、かつ蒸発器
の入口側に接続された分岐供給管と、蒸発器の出口側か
らカスケード熱交換器に至る冷媒戻り管路途中から分岐
され、かつ圧縮機の吸入側に接続された分岐戻り管とが
設けられると共に、前記分岐供給管および分岐戻り管に
その管路を開閉自在に遮断する開閉弁がそれぞれ備えら
れ、前記膨張手段はキャピラリチューブからなり、前記
分岐供給管がキャピラリチューブに対して熱的接触状に
配設されてなる点にある。Further, a third technical means for achieving the above object is to compress a refrigerant, which is a mixture of plural kinds of refrigerants having different boiling points, with a compressor, and to condense the refrigerant discharged from the compressor. The refrigerant cooled in the condenser and the refrigerant cooled in the condenser are separated into the high boiling liquid phase refrigerant and the vapor phase refrigerant by the gas-liquid separator, and the separated high boiling liquid phase refrigerant is decompressed by the expansion means to generate the cascade heat. The exchanger cools the gas-phase refrigerant separated by the gas-liquid separator and returns to the compressor side, and sequentially cools the gas-phase refrigerant separated by the gas-liquid separator to repeat gas-liquid separation and cooling. The higher boiling point refrigerant is returned to the compressor side and the low boiling point refrigerant is extracted, the low boiling point refrigerant is decompressed by the expansion means and guided to the evaporator, and the low boiling point refrigerant is evaporated by the evaporator. Cooling device that returns to the compressor via the cascade heat exchanger after cooling. In the above, a branch supply pipe branched from a refrigerant supply pipe halfway from the discharge side of the compressor to the condenser and connected to the inlet side of the evaporator, and a cascade heat exchanger from the outlet side of the evaporator A branch return pipe that is branched from the middle of the refrigerant return pipe and is connected to the suction side of the compressor is provided, and an on-off valve that opens and closes the pipes in the branch supply pipe and the branch return pipe, respectively. The expansion means comprises a capillary tube, and the branch supply pipe is arranged in thermal contact with the capillary tube.
【００１７】また、上記目的を達成するための第４の技
術的手段は、沸点温度の異なる複数種類の冷媒が混合さ
れてなる冷媒を圧縮機で圧縮し、圧縮機から吐出された
冷媒を凝縮器で冷却し、凝縮器で冷却された冷媒を高沸
点の液相冷媒と気相冷媒に気液分離器で分離し、分離さ
れた高沸点の液相冷媒は膨張手段で減圧してカスケード
熱交換器で前記気液分離器で分離された気相冷媒を冷却
すると共に圧縮機側に戻され、順次、気液分離器で分離
された気相冷媒を冷却して気液分離および冷却を繰り返
してより高沸点の冷媒を圧縮機側に戻すと共に低沸点の
冷媒を抽出し、該低沸点の冷媒を膨張手段で減圧して蒸
発器に案内し、蒸発器で低沸点の冷媒を蒸発させて冷却
作用を行った後、カスケード熱交換器を経由して圧縮機
に戻す冷却装置において、前記圧縮機の吐出側から凝縮
器に至る冷媒供給管路途中から分岐され、かつ蒸発器の
入口側に接続された分岐供給管が設けられると共に、該
分岐供給管の管路を開閉自在に遮断する開閉弁が備えら
れ、蒸発器の出口側からカスケード熱交換器に至る冷媒
戻り管路途中から分岐され、かつ前記圧縮機の吐出側か
ら凝縮器に至る冷媒供給管路の前記分岐供給管分岐位置
と凝縮器との間に接続された分岐戻り管が設けられると
共に、該分岐戻り管の管路を開閉自在に遮断する開閉弁
が備えられ、前記分岐供給管分岐位置と分岐戻り管の接
続位置との間で前記冷媒供給管路を開閉自在に遮断する
開閉弁が備えられると共に、前記蒸発器の出口側からカ
スケード熱交換器に至る冷媒戻り管路の前記分岐戻り管
分岐位置とカスケード熱交換器との間で前記冷媒戻り管
路を開閉自在に遮断する開閉弁が備えられ、前記膨張手
段はキャピラリチューブからなり、前記分岐供給管がキ
ャピラリチューブに対して熱的接触状に配設されてなる
点にある。A fourth technical means for achieving the above object is to compress a refrigerant, which is a mixture of plural kinds of refrigerants having different boiling points, with a compressor, and to condense the refrigerant discharged from the compressor. The refrigerant cooled in the condenser and the refrigerant cooled in the condenser are separated into the high boiling liquid phase refrigerant and the vapor phase refrigerant by the gas-liquid separator, and the separated high boiling liquid phase refrigerant is decompressed by the expansion means to generate the cascade heat. The exchanger cools the gas-phase refrigerant separated by the gas-liquid separator and returns to the compressor side, and sequentially cools the gas-phase refrigerant separated by the gas-liquid separator to repeat gas-liquid separation and cooling. The higher boiling point refrigerant is returned to the compressor side and the low boiling point refrigerant is extracted, the low boiling point refrigerant is decompressed by the expansion means and guided to the evaporator, and the low boiling point refrigerant is evaporated by the evaporator. After cooling, the cooling device is returned to the compressor via the cascade heat exchanger. A branch supply pipe that is branched from the middle of the refrigerant supply pipe from the discharge side of the compressor to the condenser and is connected to the inlet side of the evaporator is provided, and the pipe line of the branch supply pipe can be freely opened and closed. Is provided with an on-off valve for shutting off the refrigerant, the refrigerant is branched from the refrigerant return line from the outlet side of the evaporator to the cascade heat exchanger, and the branched supply of the refrigerant supply line from the discharge side of the compressor to the condenser. A branch return pipe connected between the pipe branch position and the condenser is provided, and an opening / closing valve for opening and closing the pipe line of the branch return pipe is provided. The branch supply pipe branch position and the branch return pipe And a branching return pipe branching position of the refrigerant return pipe from the outlet side of the evaporator to the cascade heat exchanger, the opening and closing valve for opening and closing the refrigerant supply pipe to and from the connection position of the evaporator. With cascade heat exchanger Is provided with an opening / closing valve that opens and closes the refrigerant return pipe line, the expansion means is formed of a capillary tube, and the branch supply pipe is arranged in thermal contact with the capillary tube. .
【００１８】[0018]
【作用】第１発明によれば、通常の冷却運転時には、分
岐供給管および分岐戻り管に備えられた各開閉弁は閉鎖
されて各管路を遮断状態としており、冷媒供給管路およ
び冷媒戻り管路を通じて従来同様の冷凍サイクルにより
所望の冷却機能が発揮される。According to the first aspect of the invention, during the normal cooling operation, the on-off valves provided in the branch supply pipe and the branch return pipe are closed to shut off the respective pipe lines, and the refrigerant supply pipe line and the refrigerant return pipe are closed. A desired cooling function is exerted by the same refrigeration cycle as the conventional one through the pipeline.
【００１９】そして、蒸発器のデフロスト作業を実行す
る場合には、分岐供給管および分岐戻り管に備えられた
各開閉弁は開放され、この状態で冷却装置が運転され
る。このデフロスト運転時にあっては、圧縮機から吐出
された高温、高圧の冷媒は大部分が管路抵抗の少ない分
岐供給管側に流れ、若干分が管路抵抗の大きい通常の冷
媒供給管路側に流れる。When performing the defrosting work of the evaporator, the on-off valves provided in the branch supply pipe and the branch return pipe are opened, and the cooling device is operated in this state. During this defrost operation, most of the high-temperature, high-pressure refrigerant discharged from the compressor flows to the branch supply pipe side where the pipeline resistance is low, and some of it flows to the normal refrigerant supply pipeline side where the pipeline resistance is high. Flowing.
【００２０】従って、圧縮機から吐出された高温、高圧
の冷媒の大部分が分岐供給管を通じて直接、蒸発器に案
内されるため、蒸発器が短時間で昇温され、ここに、短
時間で蒸発器にトラップされた水分やガスをデフロスト
でき、またベーキングすることができる。Therefore, most of the high-temperature, high-pressure refrigerant discharged from the compressor is directly guided to the evaporator through the branch supply pipe, so that the temperature of the evaporator is raised in a short time and the temperature of the evaporator is increased in a short time. The moisture and gas trapped in the evaporator can be defrosted and can be baked.
【００２１】一方、このデフロスト運転時においても、
若干分の冷媒は冷媒供給管路側を流れるため、冷却運転
時の冷凍サイクルを形成することができ、ここに、予備
冷却機能が発揮できる。従って、デフロスト作業終了後
に冷却運転に切り換えた際、蒸発器を短時間で容易に所
望の冷却温度に戻すことができる。On the other hand, even during this defrosting operation,
Since a small amount of the refrigerant flows on the refrigerant supply pipe side, a refrigeration cycle during the cooling operation can be formed, and the preliminary cooling function can be exhibited here. Therefore, when the cooling operation is switched to after the defrosting operation is completed, the evaporator can be easily returned to the desired cooling temperature in a short time.
【００２２】第２発明によれば、通常の冷却運転時に
は、分岐供給管および分岐戻り管に備えられた各開閉弁
は閉鎖されて各管路を遮断状態とし、冷媒供給管路およ
び冷媒戻り管路に備えられた各開閉弁は開放されて各管
路を開放状態としており、冷媒供給管路および冷媒戻り
管路を通じて従来同様の冷凍サイクルにより所望の冷却
機能が発揮される。According to the second aspect of the invention, during the normal cooling operation, the on-off valves provided in the branch supply pipe and the branch return pipe are closed to shut off the respective pipe lines, and the refrigerant supply pipe line and the refrigerant return pipe are provided. The respective on-off valves provided in the passage are opened to open the respective pipelines, and the desired cooling function is exhibited by the refrigeration cycle similar to the conventional one through the refrigerant supply pipeline and the refrigerant return pipeline.
【００２３】そして、蒸発器のデフロスト作業を実行す
る場合には、分岐供給管および分岐戻り管に備えられた
各開閉弁は開放されると共に、冷媒供給管路および冷媒
戻り管路に備えられた各開閉弁は閉鎖され、この状態で
冷却装置が運転される。このデフロスト運転時にあって
は、圧縮機から吐出された高温、高圧の冷媒は全て分岐
供給管側に流れる。When performing the defrosting operation of the evaporator, the opening / closing valves provided in the branch supply pipe and the branch return pipe are opened, and the refrigerant supply pipe and the refrigerant return pipe are provided. Each on-off valve is closed, and the cooling device is operated in this state. During the defrost operation, all the high temperature and high pressure refrigerant discharged from the compressor flows to the branch supply pipe side.
【００２４】従って、圧縮機から吐出された高温、高圧
の冷媒の全てが分岐供給管を通じて直接、蒸発器に案内
されるため、蒸発器が短時間で昇温され、ここに、短時
間で蒸発器にトラップされた水分やガスをデフロストで
き、あるいはベーキングすることができる。Therefore, all of the high-temperature and high-pressure refrigerant discharged from the compressor is directly guided to the evaporator through the branch supply pipe, so that the temperature of the evaporator is raised in a short time, and the evaporation is performed in a short time. Moisture and gas trapped in the vessel can be defrosted or baked.
【００２５】そして、蒸発器を出た冷媒は分岐戻り管を
通じて凝縮器に戻され、ここに、このデフロスト運転時
においても、冷却運転時の冷凍サイクルを形成すること
ができ、予備冷却機能が発揮できる。従って、デフロス
ト作業終了後に冷却運転に切り換えた際、蒸発器を短時
間で容易に所望の冷却温度に戻すことができる。Then, the refrigerant discharged from the evaporator is returned to the condenser through the branch return pipe, and even during the defrost operation, a refrigeration cycle during the cooling operation can be formed, and the preliminary cooling function is exerted. it can. Therefore, when the cooling operation is switched to after the defrosting operation is completed, the evaporator can be easily returned to the desired cooling temperature in a short time.
【００２６】第３発明によれば、通常の冷却運転時に
は、分岐供給管および分岐戻り管に備えられた各開閉弁
は閉鎖されて各管路を遮断状態としており、冷媒供給管
路および冷媒戻り管路を通じて従来同様の冷凍サイクル
により所望の冷却機能が発揮される。According to the third aspect of the invention, during the normal cooling operation, the on-off valves provided in the branch supply pipe and the branch return pipe are closed to shut off the respective pipe lines, and the refrigerant supply pipe line and the refrigerant return pipe are closed. A desired cooling function is exerted by the same refrigeration cycle as the conventional one through the pipeline.
【００２７】そして、蒸発器のデフロスト作業を実行す
る場合には、分岐供給管および分岐戻り管に備えられた
各開閉弁は開放され、この状態で冷却装置が運転され
る。このデフロスト運転時にあっては、圧縮機から吐出
された高温、高圧の冷媒は大部分が管路抵抗の少ない分
岐供給管側に流れ、若干分が管路抵抗の大きい通常の冷
媒供給管路側に流れる。When performing the defrosting work of the evaporator, the on-off valves provided in the branch supply pipe and the branch return pipe are opened, and the cooling device is operated in this state. During this defrost operation, most of the high-temperature, high-pressure refrigerant discharged from the compressor flows to the branch supply pipe side where the pipeline resistance is low, and some of it flows to the normal refrigerant supply pipeline side where the pipeline resistance is high. Flowing.
【００２８】従って、圧縮機から吐出された高温、高圧
の冷媒の大部分が分岐供給管を通じて直接、蒸発器に案
内されるため、蒸発器が短時間で昇温され、ここに、短
時間で蒸発器にトラップされた水分やガスをデフロスト
でき、またベーキングすることができる。Therefore, most of the high-temperature and high-pressure refrigerant discharged from the compressor is directly guided to the evaporator through the branch supply pipe, so that the temperature of the evaporator is raised in a short time and the temperature of the evaporator is increased in a short time. The moisture and gas trapped in the evaporator can be defrosted and can be baked.
【００２９】また、分岐供給管がキャピラリチューブに
対して熱的接触状に配設されているため、デフロスト運
転時に分岐供給管内を流れる高温、高圧の冷媒によって
キャピラリチューブが加熱され、キャピラリチューブ内
に蓄積された水分やオイル成分が溶解されて除去でき、
ここに、冷媒の循環がスムーズに行われることとなり、
冷却能力の低下が防止でき、デフロスト作業終了後に冷
却運転に切り換えた際、蒸発器を所望の冷却温度に効率
よく戻すことができる。Further, since the branch supply pipe is arranged in thermal contact with the capillary tube, the capillary tube is heated by the high-temperature and high-pressure refrigerant flowing in the branch supply pipe during the defrosting operation, and the capillary tube is heated. The accumulated water and oil components can be dissolved and removed,
Here, the circulation of the refrigerant will be performed smoothly,
The cooling capacity can be prevented from lowering, and when the cooling operation is switched to after the defrosting operation is completed, the evaporator can be efficiently returned to a desired cooling temperature.
【００３０】第４発明によれば、通常の冷却運転時に
は、分岐供給管および分岐戻り管に備えられた各開閉弁
は閉鎖されて各管路を遮断状態とし、冷媒供給管路およ
び冷媒戻り管路に備えられた各開閉弁は開放されて各管
路を開放状態としており、冷媒供給管路および冷媒戻り
管路を通じて従来同様の冷凍サイクルにより所望の冷却
機能が発揮される。According to the fourth aspect of the invention, during the normal cooling operation, the on-off valves provided in the branch supply pipe and the branch return pipe are closed to shut off the respective pipe lines, and the refrigerant supply pipe line and the refrigerant return pipe are closed. The respective on-off valves provided in the passage are opened to open the respective pipelines, and the desired cooling function is exhibited by the refrigeration cycle similar to the conventional one through the refrigerant supply pipeline and the refrigerant return pipeline.
【００３１】そして、蒸発器のデフロスト作業を実行す
る場合には、分岐供給管および分岐戻り管に備えられた
各開閉弁は開放されると共に、冷媒供給管路および冷媒
戻り管路に備えられた各開閉弁は閉鎖され、この状態で
冷却装置が運転される。このデフロスト運転時にあって
は、圧縮機から吐出された高温、高圧の冷媒は全て分岐
供給管側に流れる。When performing the defrosting operation of the evaporator, the opening / closing valves provided in the branch supply pipe and the branch return pipe are opened, and the refrigerant supply pipe and the refrigerant return pipe are provided. Each on-off valve is closed, and the cooling device is operated in this state. During the defrost operation, all the high temperature and high pressure refrigerant discharged from the compressor flows to the branch supply pipe side.
【００３２】従って、圧縮機から吐出された高温、高圧
の冷媒の全てが分岐供給管を通じて直接、蒸発器に案内
されるため、蒸発器が短時間で昇温され、ここに、短時
間で蒸発器にトラップされた水分やガスをデフロストで
き、あるいはベーキングすることができる。Therefore, all of the high-temperature and high-pressure refrigerant discharged from the compressor is directly guided to the evaporator through the branch supply pipe, so that the temperature of the evaporator is raised in a short time, and the vaporization occurs in a short time. Moisture and gas trapped in the vessel can be defrosted or baked.
【００３３】また、分岐供給管がキャピラリチューブに
対して熱的接触状に配設されているため、デフロスト運
転時に分岐供給管内を流れる高温、高圧の冷媒によって
キャピラリチューブが加熱され、キャピラリチューブ内
に蓄積された水分やオイル成分が溶解されて除去でき、
ここに、冷媒の循環がスムーズに行われることとなり、
冷却能力の低下が防止でき、デフロスト作業終了後に冷
却運転に切り換えた際、蒸発器を所望の冷却温度に効率
よく戻すことができる。Further, since the branch supply pipe is arranged in thermal contact with the capillary tube, the capillary tube is heated by the high-temperature, high-pressure refrigerant flowing in the branch supply pipe during the defrost operation, and the capillary tube is heated inside the capillary tube. The accumulated water and oil components can be dissolved and removed,
Here, the circulation of the refrigerant will be performed smoothly,
The cooling capacity can be prevented from lowering, and when the cooling operation is switched to after the defrosting operation is completed, the evaporator can be efficiently returned to a desired cooling temperature.
【００３４】[0034]
【実施例】以下、第１発明の実施例を図面に基づいて説
明すると、図１は冷却装置１の回路図を示し、前述同様
構成の圧縮機２と、凝縮器３と、第１および第２の気液
分離器４、５と、第１ないし第３のカスケード熱交換器
６、７、８と、第１ないし第３のキャピラリチュ−ブ
（膨張手段）９、１０、１１と、蒸発器１２とが備えら
れ、これらが冷媒供給管路１３と冷媒戻り管路１４によ
り適宜配管接続され、冷凍サイクルの循環経路が構成さ
れている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the first invention will be described below with reference to the drawings. FIG. 1 shows a circuit diagram of a cooling device 1, a compressor 2 having the same construction as described above, a condenser 3, and first and second cooling devices. 2 gas-liquid separators 4 and 5, first to third cascade heat exchangers 6, 7 and 8, first to third capillary tubes (expansion means) 9, 10 and 11, and evaporation The container 12 is provided, and these are appropriately pipe-connected by the refrigerant supply pipeline 13 and the refrigerant return pipeline 14 to form a circulation path of the refrigeration cycle.
【００３５】そして、この冷凍サイクル内に沸点温度の
異なる複数種類（本実施例では高沸点、中沸点、低沸点
の３種類）の成分の冷媒が混合されて封入されている。In this refrigeration cycle, refrigerants of a plurality of types (three types of high boiling point, medium boiling point, and low boiling point in this embodiment) having different boiling points are mixed and sealed.
【００３６】また、圧縮機２の吐出側から凝縮器３に至
る冷媒供給管路１３途中から分岐する分岐供給管１６が
設けられており、分岐供給管１６の他端側は蒸発器１２
の入口側に接続された冷媒供給管路１３に接続されてい
る。そして、分岐供給管１６にはその管路を開閉自在に
遮断する開閉弁としてのデフロスト側第１電磁弁１７が
備えられている。Further, a branch supply pipe 16 is provided which branches from the refrigerant supply pipe line 13 from the discharge side of the compressor 2 to the condenser 3, and the other end side of the branch supply pipe 16 is the evaporator 12.
Is connected to the refrigerant supply line 13 connected to the inlet side of the. The branch supply pipe 16 is provided with a defrost-side first electromagnetic valve 17 as an opening / closing valve that opens and closes the pipe line.
【００３７】さらに、蒸発器１２の出口側から第３のカ
スケード熱交換器８に至る冷媒戻り管路１４途中から分
岐する分岐戻り管１８が設けられており、分岐戻り管１
８の他端側は圧縮機２の吸入側に接続された冷媒戻り管
路１４に接続されている。そして、分岐戻り管１８には
その管路を開閉自在に遮断する開閉弁としてのデフロス
ト側第２電磁弁１９が備えられている。Further, a branch return pipe 18 is provided which branches off from the middle of the refrigerant return pipe 14 from the outlet side of the evaporator 12 to the third cascade heat exchanger 8.
The other end side of 8 is connected to the refrigerant return line 14 connected to the suction side of the compressor 2. Further, the branch return pipe 18 is provided with a second defrost-side solenoid valve 19 as an opening / closing valve that opens and closes the pipe line.
【００３８】第１発明の実施例は以上のように構成され
ており、通常の冷却運転時には、各電磁弁１７、１９は
閉じられて分岐供給管１６および分岐戻り管１８はそれ
ぞれその管路が遮断状態とされている。そして、圧縮機
２から吐出された高温、高圧の混合ガス冷媒は凝縮器３
で水または空気によって冷却され、一部が凝縮されて気
液混相の冷媒となり第１の気液分離器４に送り込まれ
る。ここで、気液混相の冷媒は気相冷媒と液相冷媒とに
分離されて、液相冷媒は第１のキャピラリチュ−ブ９で
減圧膨張された後、冷媒戻り管路１４の戻り冷媒と合流
する。The embodiment of the first invention is configured as described above, and during the normal cooling operation, the solenoid valves 17 and 19 are closed and the branch supply pipe 16 and the branch return pipe 18 have their respective pipelines. It is shut off. The high temperature, high pressure mixed gas refrigerant discharged from the compressor 2 is transferred to the condenser 3
Is cooled by water or air, and a part of it is condensed to become a gas-liquid mixed phase refrigerant and sent to the first gas-liquid separator 4. Here, the gas-liquid mixed-phase refrigerant is separated into a gas-phase refrigerant and a liquid-phase refrigerant, and the liquid-phase refrigerant is decompressed and expanded by the first capillary tube 9 and then returned to the refrigerant return line 14. Join.
【００３９】一方、気相冷媒は第１のカスケード熱交換
器６に送り込まれ、そこで冷媒戻り管路１４の戻り冷媒
との熱交換により冷却されて、一部が凝縮液化して気液
混相の冷媒となり、第２の気液分離器５に送り込まれ
る。On the other hand, the gas-phase refrigerant is sent to the first cascade heat exchanger 6, where it is cooled by heat exchange with the return refrigerant in the refrigerant return line 14, and part of it is condensed and liquefied to form a gas-liquid mixed phase. It becomes a refrigerant and is sent to the second gas-liquid separator 5.
【００４０】第２の気液分離器５、第２のカスケード熱
交換器７、および第２のキャピラリチュ−ブ１０におい
ても上記と同様な動作が繰り返される。The same operation as described above is repeated in the second gas-liquid separator 5, the second cascade heat exchanger 7, and the second capillary tube 10.
【００４１】以上のようにして、混合冷媒のうち沸点の
高い成分の冷媒から順に、本実施例にあっては高沸点の
冷媒、続いて中沸点の冷媒の順に冷媒戻り管路１４を通
じて圧縮機２側に戻され、最も沸点の低い低沸点の冷媒
が気相状態で第２のカスケード熱交換器７に送り込ま
れ、そこで冷却されて凝縮され、さらに第３のカスケー
ド熱交換器８で冷却された後、蒸発器１２入口側の第３
のキャピラリチューブ１１に送り込まれる。As described above, the refrigerant having the higher boiling point in the mixed refrigerant is sequentially arranged, in this embodiment, the high boiling point refrigerant and then the medium boiling point refrigerant in this order through the refrigerant return pipe 14. The low-boiling-point refrigerant having the lowest boiling point is sent to the second side in the vapor phase state to the second cascade heat exchanger 7, where it is cooled and condensed, and further cooled in the third cascade heat exchanger 8. And then the third on the inlet side of the evaporator 12
It is sent to the capillary tube 11.
【００４２】そして、液相状態の冷媒は第３のキャピラ
リチュ−ブ１１で減圧膨張されて気液混相状態となり、
蒸発器１２に送り込まれる。蒸発器１２に送り込まれた
冷媒は、蒸発器１２で熱を吸収して蒸発し、ここに蒸発
器１２を超低温に冷却する。The liquid-phase refrigerant is decompressed and expanded by the third capillary tube 11 into a gas-liquid mixed phase,
It is sent to the evaporator 12. The refrigerant sent to the evaporator 12 absorbs heat in the evaporator 12 and evaporates, whereupon the evaporator 12 is cooled to an ultralow temperature.
【００４３】また、蒸発器１２から冷媒戻り管路１４に
流出した気相状態の戻り冷媒は第３ないし第１のカスケ
ード熱交換器８、７、６を順次経由して自身の温度を次
第に上昇させながら、最終的に常温の低圧ガスとなって
圧縮機２に戻る。Further, the return refrigerant in the vapor phase flowing out from the evaporator 12 to the refrigerant return pipe 14 gradually passes through the third to first cascade heat exchangers 8, 7, 6 to gradually increase its temperature. While being carried out, it finally becomes low temperature gas at room temperature and returns to the compressor 2.
【００４４】次に、蒸発器１２のデフロスト作業を実行
する場合のデフロスト運転時には、各電磁弁１７、１９
は開放されて分岐供給管１６および分岐戻り管１８はそ
れぞれその管路が開放状態とされる。この状態で冷却装
置１が運転されると、圧縮機２から吐出された高温、高
圧の混合ガス冷媒は大部分が管路抵抗の少ない分岐供給
管１６側に流れ、若干分が管路抵抗の大きい通常の冷媒
供給管路１３側に流れる。Next, at the time of defrost operation when the defrost operation of the evaporator 12 is performed, the solenoid valves 17 and 19 are operated.
Is opened and the branch supply pipe 16 and the branch return pipe 18 are opened. When the cooling device 1 is operated in this state, most of the high-temperature, high-pressure mixed gas refrigerant discharged from the compressor 2 flows to the side of the branch supply pipe 16 having a small line resistance, and a small amount of the line resistance is generated. It flows to the large normal refrigerant supply line 13 side.
【００４５】従って、圧縮機２から吐出された高温、高
圧の混合ガス冷媒の大部分が分岐供給管１６を通じて直
接、蒸発器１２に案内されるため、蒸発器１２が短時間
で昇温され、ここに、短時間で蒸発器１２にトラップさ
れた水分やガスをデフロストでき、またベーキングする
ことができる。Therefore, most of the high-temperature, high-pressure mixed gas refrigerant discharged from the compressor 2 is directly guided to the evaporator 12 through the branch supply pipe 16, so that the temperature of the evaporator 12 is raised in a short time. Here, the water and gas trapped in the evaporator 12 can be defrosted and baked in a short time.
【００４６】一方、このデフロスト運転時においても、
若干分の混合ガス冷媒は冷媒供給管路１３側を流れるた
め、冷却運転時の冷凍サイクルを形成することができ、
ここに、予備冷却機能が発揮できる。従って、デフロス
ト作業終了後に冷却運転に切り換えた際、蒸発器１２を
短時間で容易に所望の冷却温度に戻すことができる。On the other hand, even during this defrost operation,
Since some of the mixed gas refrigerant flows on the refrigerant supply line 13 side, it is possible to form a refrigeration cycle during the cooling operation,
The pre-cooling function can be demonstrated here. Therefore, when the cooling operation is switched to after the defrosting operation is completed, the evaporator 12 can be easily returned to the desired cooling temperature in a short time.
【００４７】以上のように、デフロスト作業を短時間で
行うことができ、しかもその後に所望の冷却温度に効率
よく戻すことができ、図５や図６に示される如く、冷却
装置１の蒸発器１２をロードロック室等の真空チャンバ
１２０内や配管１２２内に設置した場合、冷却運転時に
おいては超低温冷媒を直接、蒸発器１２に供給するた
め、短時間で超低温を得ることができる。従って、真空
チャンバ１２０の大気開放から真空引きの工程におい
て、短時間で真空チャンバ１２０内の水分やガスのトラ
ップを開始するため、排気時間の短縮化が図れる。As described above, the defrosting work can be performed in a short time, and thereafter, the desired cooling temperature can be returned efficiently, and as shown in FIGS. 5 and 6, the evaporator of the cooling device 1 can be used. When 12 is installed in the vacuum chamber 120 such as a load lock chamber or in the pipe 122, the ultra low temperature refrigerant is directly supplied to the evaporator 12 during the cooling operation, so that the ultra low temperature can be obtained in a short time. Therefore, in the process of evacuating the vacuum chamber 120 from the atmosphere to vacuuming, the trapping of moisture and gas in the vacuum chamber 120 is started in a short time, and the exhaust time can be shortened.
【００４８】また、真空状態から大気開放の工程におい
て、短時間で蒸発器１２のデフロストおよび昇温が行え
るため、蒸発器１２を真空チャンバ１２０内に設置した
構造にあっては短時間で大気圧に戻すことができる。In the process of opening from the vacuum state to the atmosphere, the evaporator 12 can be defrosted and heated in a short time. Therefore, in the structure in which the evaporator 12 is installed in the vacuum chamber 120, the atmospheric pressure can be obtained in a short time. Can be returned to.
【００４９】以上のことから、真空チャンバ１２０の真
空引き、大気開放が短時間に行えるため、真空引き、大
気開放の繰り返しが激しい装置、例えばロードロック室
等にあっては生産性の向上が図れる利点がある。From the above, since the vacuum chamber 120 can be evacuated and opened to the atmosphere in a short time, the productivity can be improved in a device in which the evacuation and the atmosphere are repeatedly repeated, such as a load lock chamber. There are advantages.
【００５０】図２は第２発明の実施例を示しており、図
中、第１発明の実施例と同様構成は同一符号を付しその
説明を省略する。FIG. 2 shows an embodiment of the second invention. In the figure, the same components as those of the embodiment of the first invention are designated by the same reference numerals and the description thereof will be omitted.
【００５１】冷却装置１は圧縮機２の吐出側から凝縮器
３に至る冷媒供給管路１３途中から分岐する分岐供給管
２６が設けられており、分岐供給管２６の他端側は蒸発
器１２の入口側に接続された冷媒供給管路１３に接続さ
れている。そして、分岐供給管２６にはその管路を開閉
自在に遮断する開閉弁としてのデフロスト側第１電磁弁
２７が備えられている。The cooling device 1 is provided with a branch supply pipe 26 that branches from the middle of the refrigerant supply pipe line 13 from the discharge side of the compressor 2 to the condenser 3, and the other end side of the branch supply pipe 26 is the evaporator 12. Is connected to the refrigerant supply line 13 connected to the inlet side of the. The branch supply pipe 26 is provided with a defrost-side first electromagnetic valve 27 as an opening / closing valve that opens and closes the pipe line.
【００５２】また、蒸発器１２の出口側から第３のカス
ケード熱交換器８に至る冷媒戻り管路１４途中から分岐
する分岐戻り管２８が設けられており、分岐戻り管２８
の他端側は圧縮機２の吐出側から凝縮器３に至る冷媒供
給管路１３の分岐供給管２６分岐位置Ａと凝縮器３との
間に接続されている。そして、分岐戻り管２８にはその
管路を開閉自在に遮断する開閉弁としてのデフロスト側
第２電磁弁２９が備えられている。Further, a branch return pipe 28 is provided which branches from the middle of the refrigerant return pipe line 14 from the outlet side of the evaporator 12 to the third cascade heat exchanger 8, and the branch return pipe 28 is provided.
The other end of is connected between the condenser 3 and the branch position A of the branch supply pipe 26 of the refrigerant supply pipe 13 extending from the discharge side of the compressor 2 to the condenser 3. The branch return pipe 28 is provided with a second defrost-side solenoid valve 29 as an opening / closing valve that opens and closes the pipe line.
【００５３】さらに、分岐供給管２６分岐位置Ａと分岐
戻り管２８の接続位置Ｂとの間で冷媒供給管路１３を開
閉自在に遮断する開閉弁としての冷凍サイクル側第１電
磁弁３０が備えられ、蒸発器１２の出口側から第３のカ
スケード熱交換器８に至る冷媒戻り管路１４の分岐戻り
管２８分岐位置Ｃと第３のカスケード熱交換器８との間
で冷媒戻り管路１４を開閉自在に遮断する開閉弁として
の冷凍サイクル側第２電磁弁３１が備えられている。Further, the refrigerating cycle side first solenoid valve 30 is provided as an opening / closing valve for opening / closing the refrigerant supply pipe 13 between the branch position A of the branch supply pipe 26 and the connection position B of the branch return pipe 28. The refrigerant return pipe line 14 is provided between the branch return pipe 28 of the refrigerant return pipe line 14 extending from the outlet side of the evaporator 12 to the third cascade heat exchanger 8 and the third cascade heat exchanger 8. A second solenoid valve 31 on the refrigeration cycle side is provided as an on-off valve for opening and closing the valve.
【００５４】第２発明の実施例は以上のように構成され
ており、通常の冷却運転時には、デフロスト側の各電磁
弁２７、２９は閉じられて分岐供給管２６および分岐戻
り管２８はそれぞれその管路が遮断状態とされており、
冷凍サイクル側の各電磁弁３０、３１は開放されて冷媒
供給管路１３および冷媒戻り管路１４はそれぞれその管
路を開放状態とされている。そして、第１発明の実施例
と同様に冷却装置１の冷凍サイクルにより所望の冷却機
能が発揮される。The embodiment of the second aspect of the invention is configured as described above, and during the normal cooling operation, the electromagnetic valves 27, 29 on the defrost side are closed and the branch supply pipe 26 and the branch return pipe 28 are respectively closed. The pipeline is blocked,
The solenoid valves 30 and 31 on the refrigeration cycle side are opened, and the refrigerant supply pipeline 13 and the refrigerant return pipeline 14 are open. Then, the desired cooling function is exhibited by the refrigeration cycle of the cooling device 1 as in the first embodiment.
【００５５】次に、蒸発器１２のデフロスト作業を実行
する場合のデフロスト運転時には、デフロスト側の各電
磁弁２７、２９は開放されて分岐供給管２６および分岐
戻り管２８はそれぞれその管路が開放状態とされると共
に、冷凍サイクル側の各電磁弁３０、３１は閉じられて
冷媒供給管路１３の分岐位置Ａと接続位置Ｂとの間の管
路、および分岐位置Ｃと第３のカスケード熱交換器８と
の間の管路がそれぞれ遮断状態とされる。この状態で冷
却装置１が運転されると、圧縮機２から吐出された高
温、高圧の混合ガス冷媒は全て分岐供給管２６側に流れ
る。Next, during the defrosting operation when the defrosting operation of the evaporator 12 is executed, the electromagnetic valves 27 and 29 on the defrosting side are opened and the branch supply pipe 26 and the branch return pipe 28 are opened. The solenoid valves 30 and 31 on the refrigeration cycle side are closed while being in the state, and the pipeline between the branch position A and the connection position B of the refrigerant supply pipeline 13, and the branch position C and the third cascade heat. Each of the conduits with the exchanger 8 is cut off. When the cooling device 1 is operated in this state, all the high-temperature and high-pressure mixed gas refrigerant discharged from the compressor 2 flows to the branch supply pipe 26 side.
【００５６】従って、圧縮機２から吐出された高温、高
圧の混合ガス冷媒の全てが分岐供給管２６を通じて直
接、蒸発器１２に案内されるため、蒸発器１２が短時間
で昇温され、ここに、短時間で蒸発器１２にトラップさ
れた水分やガスをデフロストでき、あるいはベーキング
することができる。Therefore, all of the high-temperature, high-pressure mixed gas refrigerant discharged from the compressor 2 is directly guided to the evaporator 12 through the branch supply pipe 26, so that the temperature of the evaporator 12 is raised in a short time. In addition, the moisture or gas trapped in the evaporator 12 can be defrosted or baked in a short time.
【００５７】そして、蒸発器１２を出た冷媒は分岐戻り
管２８を通じて凝縮器３に戻され、ここに、このデフロ
スト運転時においても冷却運転時の冷凍サイクルを形成
することができ、予備冷却機能が発揮できる。従って、
デフロスト作業終了後に冷却運転に切り換えた際、蒸発
器１２を短時間で容易に所望の冷却温度に戻すことがで
きる。Then, the refrigerant discharged from the evaporator 12 is returned to the condenser 3 through the branch return pipe 28, and a refrigerating cycle during the cooling operation can be formed there even during the defrost operation, and the preliminary cooling function is provided. Can be demonstrated. Therefore,
When the cooling operation is switched to after the defrosting operation is completed, the evaporator 12 can be easily returned to the desired cooling temperature in a short time.
【００５８】以上のように、デフロスト作業を短時間で
行うことができ、しかもその後に所望の冷却温度に効率
よく戻すことができ、第１発明の実施例同様、図５や図
６に示される如く、冷却装置１の蒸発器１２をロードロ
ック室等の真空チャンバ１２０内や配管１２２内に設置
した場合、冷却運転時においては超低温冷媒を直接、蒸
発器１２に供給するため、短時間で超低温を得ることが
でき、真空チャンバ１２０の大気開放から真空引きの工
程において、排気時間の短縮化が図れる。また、真空状
態から大気開放の工程において、短時間で蒸発器１２の
デフロストおよび昇温が行えるため、蒸発器１２を真空
チャンバ１２０内に設置した構造にあっては短時間で大
気圧に戻すことができ、真空チャンバ１２０の真空引
き、大気開放が短時間に行えるため、真空引き、大気開
放の繰り返しが激しい装置、例えばロードロック室等に
あっては生産性の向上が図れる利点がある。As described above, the defrosting work can be carried out in a short time, and after that, the desired cooling temperature can be returned efficiently, and as in the first embodiment of the invention, it is shown in FIGS. 5 and 6. As described above, when the evaporator 12 of the cooling device 1 is installed in the vacuum chamber 120 such as a load lock chamber or in the pipe 122, the ultra low temperature refrigerant is directly supplied to the evaporator 12 during the cooling operation, so that the ultra low temperature is quickly achieved. Therefore, in the process of opening the vacuum chamber 120 from the atmosphere to evacuation, the exhaust time can be shortened. Further, in the process of opening from the vacuum state to the atmosphere, the evaporator 12 can be defrosted and heated in a short time. Therefore, in the structure in which the evaporator 12 is installed in the vacuum chamber 120, the atmospheric pressure must be restored in a short time. Since the vacuum chamber 120 can be evacuated and opened to the atmosphere in a short time, there is an advantage that productivity can be improved in a device in which the evacuation and the atmospheric release are frequently repeated, such as a load lock chamber.
【００５９】さらに、この第２発明の実施例にあって
は、デフロスト終了後、あるいは冷却装置１立ち上げ時
にデフロスト側の各電磁弁２７、２９および冷凍サイク
ル側第２電磁弁３１を閉じ、冷凍サイクル側第１電磁弁
３０を開放することにより、蒸発器１２を常温に保持し
た状態で冷却運転時の冷凍サイクルを形成することがで
きるので、予備冷却機能をより有効に発揮できる。Further, in the embodiment of the second invention, after the defrosting is completed or when the cooling device 1 is started up, the electromagnetic valves 27 and 29 on the defrosting side and the second electromagnetic valve 31 on the refrigeration cycle side are closed to freeze. By opening the cycle-side first electromagnetic valve 30, the refrigeration cycle during the cooling operation can be formed while the evaporator 12 is kept at room temperature, so that the preliminary cooling function can be more effectively exhibited.
【００６０】図３は第３発明の実施例を示しており、図
中、第１発明の実施例と同様構成は同一符号を付しその
説明を省略する。FIG. 3 shows an embodiment of the third invention. In the figure, the same components as those of the embodiment of the first invention are designated by the same reference numerals and the description thereof will be omitted.
【００６１】即ち、本実施例においては、第１発明の実
施例における分岐供給管１６が、各キャピラリチュ−ブ
９、１０、１１に対して熱的接触状に配設された構造と
されている。That is, in the present embodiment, the branch supply pipe 16 in the embodiment of the first invention is arranged so as to be in thermal contact with each capillary tube 9, 10, 11. There is.
【００６２】なお、熱的接触状に配設とは、分岐供給管
１６と各キャピラリチュ−ブ９、１０、１１とが直接的
に接触して配設され、分岐供給管１６側の熱を各キャピ
ラリチュ−ブ９、１０、１１側に伝導可能とされた場合
だけに限られず、分岐供給管１６と各キャピラリチュ−
ブ９、１０、１１とが近接状に配設され、分岐供給管１
６側の熱を各キャピラリチュ−ブ９、１０、１１側に伝
導可能とされた場合や、分岐供給管１６と各キャピラリ
チュ−ブ９、１０、１１とが他の部品を介して間接的に
接触して配設され、分岐供給管１６側の熱を各キャピラ
リチュ−ブ９、１０、１１側に伝導可能とされた場合等
が含まれる。The term "arranged in thermal contact" means that the branch supply pipe 16 and the respective capillary tubes 9, 10, 11 are arranged in direct contact with each other, and the heat on the side of the branch supply pipe 16 is transferred. The present invention is not limited to the case where the capillaries can be conducted to the respective capillary tubes 9, 10 and 11, and the branch supply pipe 16 and the respective capillary tubes.
And the branch supply pipe 1
When the heat on the 6 side can be conducted to the respective capillary tubes 9, 10 and 11, or the branch supply pipe 16 and the respective capillary tubes 9, 10 and 11 are indirectly connected via other parts. And the case where the heat on the side of the branch supply pipe 16 can be conducted to the side of each capillary tube 9, 10, 11 is included.
【００６３】第３発明の実施例は以上のように構成され
ており、通常の冷却運転時には、第１発明の実施例と同
様にして冷却装置１の冷凍サイクルにより所望の冷却機
能が発揮される。The embodiment of the third invention is constructed as described above, and in the normal cooling operation, the desired cooling function is exhibited by the refrigeration cycle of the cooling device 1 in the same manner as the embodiment of the first invention. .
【００６４】また、蒸発器１２のデフロスト作業を実行
する場合のデフロスト運転時にも、第１発明の実施例と
同様にして実行され、圧縮機２から吐出された高温、高
圧の混合ガス冷媒の大部分が分岐供給管１６を通じて直
接、蒸発器１２に案内されるため、蒸発器１２が短時間
で昇温され、ここに、短時間で蒸発器１２にトラップさ
れた水分やガスをデフロストでき、またベーキングする
ことができる。Also, during the defrosting operation when the defrosting operation of the evaporator 12 is carried out, it is carried out in the same manner as the embodiment of the first invention, and a large amount of the high temperature and high pressure mixed gas refrigerant discharged from the compressor 2 is discharged. Since the part is directly guided to the evaporator 12 through the branch supply pipe 16, the temperature of the evaporator 12 is raised in a short time, and the water and gas trapped in the evaporator 12 can be defrosted there in a short time. It can be baked.
【００６５】一方、冷凍サイクル内には、圧縮機２等の
潤滑用のオイルや、そのオイルおよび冷媒中に溶け込ん
だ水分や圧縮機２、カスケード熱交換器６、７、８、各
管路１３、１４、各管１６、１８等に付着した水分が内
在している。そして、このオイルや水分は冷却運転時
に、内径が最も小さくて流路が狭く、温度も低くなるキ
ャピラリチューブ９、１０、１１を詰まらせて冷却能力
の低下を引き起こすおそれがある。On the other hand, in the refrigeration cycle, oil for lubricating the compressor 2 and the like, water dissolved in the oil and the refrigerant, the compressor 2, the cascade heat exchangers 6, 7, 8 and each pipe 13 are provided. , 14, and the water adhered to the tubes 16, 18 and the like are inherent. Then, during the cooling operation, this oil or water may clog the capillary tubes 9, 10 and 11 having the smallest inner diameter, the narrow flow path, and the low temperature to cause a decrease in cooling capacity.
【００６６】従来この種の冷却装置においては、キャピ
ラリチューブ内に蓄積された水分やオイル成分を除去す
る方法として、ヒータによりキャピラリチューブを加熱
する方式が採用されていたが、過熱や断線等の問題があ
った。Conventionally, in this type of cooling device, a method of heating the capillary tube with a heater has been adopted as a method of removing water and oil components accumulated in the capillary tube, but there is a problem such as overheating and disconnection. was there.
【００６７】これに対し、第３発明の実施例によれば、
分岐供給管１６が各キャピラリチューブ９、１０、１１
に対して熱的接触状に配設されているため、デフロスト
運転時に分岐供給管１６内を流れる高温、高圧の混合ガ
ス冷媒によって各キャピラリチューブ９、１０、１１が
加熱され、各キャピラリチューブ９、１０、１１内に蓄
積された水分やオイル成分が溶解されて除去することが
できる。この際、冷媒供給管路１３側へは分岐供給管１
６へ流れなかった若干分の混合ガス冷媒が循環するだけ
であり、分岐供給管１６を流れる高温、高圧の冷媒量で
十分に０゜Ｃ以上に加熱できる。On the other hand, according to the embodiment of the third invention,
The branch supply pipe 16 is used for each of the capillary tubes 9, 10, 11
Since they are arranged in thermal contact with each other, each capillary tube 9, 10, 11 is heated by the high-temperature and high-pressure mixed gas refrigerant flowing in the branch supply pipe 16 during the defrosting operation, and each capillary tube 9, Moisture and oil components accumulated in 10 and 11 can be dissolved and removed. At this time, the branch supply pipe 1 is connected to the refrigerant supply pipe line 13 side.
Only some of the mixed gas refrigerant that did not flow to No. 6 circulates, and it is possible to sufficiently heat it to 0 ° C or higher with the amount of high-temperature and high-pressure refrigerant flowing through the branch supply pipe 16.
【００６８】以上のように、簡単な構造で、デフロスト
運転毎に各キャピラリチューブ９、１０、１１内に蓄積
された水分やオイル成分を溶解させて除去することがで
き、各キャピラリチューブ９、１０、１１を安全にリフ
レッシュできて冷媒の循環がスムーズに行われることと
なり、冷却能力の低下を未然に防止できる。そして、デ
フロスト作業終了後に冷却運転に切り換えた際、蒸発器
１２を所望の冷却温度に効率よく戻すことができる。As described above, the water and oil components accumulated in the capillary tubes 9, 10 and 11 can be dissolved and removed with a simple structure every defrosting operation, and the capillary tubes 9 and 10 can be removed. , 11 can be safely refreshed and the refrigerant can be circulated smoothly, so that the cooling capacity can be prevented from lowering. When the cooling operation is switched to after the defrosting operation is completed, the evaporator 12 can be efficiently returned to the desired cooling temperature.
【００６９】図４は第４発明の実施例を示しており、図
中、第２発明の実施例と同様構成は同一符号を付しその
説明を省略する。FIG. 4 shows an embodiment of the fourth invention. In the figure, the same components as those of the embodiment of the second invention are designated by the same reference numerals and the description thereof will be omitted.
【００７０】即ち、本実施例においては、第２発明の実
施例における分岐供給管２６が、各キャピラリチュ−ブ
９、１０、１１に対して熱的接触状に配設された構造と
されている。That is, in this embodiment, the branch supply pipe 26 in the embodiment of the second invention is arranged so as to be in thermal contact with each capillary tube 9, 10, 11. There is.
【００７１】第４発明の実施例は以上のように構成され
ており、通常の冷却運転時には、第２発明の実施例と同
様にして冷却装置１の冷凍サイクルにより所望の冷却機
能が発揮される。The embodiment of the fourth aspect of the invention is configured as described above, and during the normal cooling operation, the desired cooling function is exerted by the refrigeration cycle of the cooling device 1 in the same manner as the embodiment of the second aspect of the invention. .
【００７２】また、蒸発器１２のデフロスト作業を実行
する場合のデフロスト運転時にも、第２発明の実施例と
同様にして実行され、圧縮機２から吐出された高温、高
圧の混合ガス冷媒の全てが分岐供給管２６を通じて直
接、蒸発器１２に案内されるため、蒸発器１２が短時間
で昇温され、ここに、短時間で蒸発器１２にトラップさ
れた水分やガスをデフロストでき、またベーキングする
ことができる。Also, during the defrosting operation when the defrosting operation of the evaporator 12 is performed, the operation is performed in the same manner as the embodiment of the second invention, and all of the high temperature and high pressure mixed gas refrigerant discharged from the compressor 2 is discharged. Is directly guided to the evaporator 12 through the branch supply pipe 26, so that the temperature of the evaporator 12 is raised in a short time, and the water and gas trapped in the evaporator 12 can be defrosted there in a short time, and baking is performed. can do.
【００７３】また、分岐供給管２６が各キャピラリチュ
ーブ９、１０、１１に対して熱的接触状に配設されてい
るため、デフロスト運転時に分岐供給管２６内を流れる
高温、高圧の混合ガス冷媒によって各キャピラリチュー
ブ９、１０、１１が加熱され、各キャピラリチューブ
９、１０、１１内に蓄積された水分やオイル成分が溶解
されて除去することができる。Further, since the branch supply pipe 26 is arranged in thermal contact with each of the capillary tubes 9, 10, 11, the high temperature, high pressure mixed gas refrigerant flowing in the branch supply pipe 26 during defrosting operation. The respective capillary tubes 9, 10, 11 are heated by the above, and the water and oil components accumulated in the respective capillary tubes 9, 10, 11 can be dissolved and removed.
【００７４】以上のように、簡単な構造で、デフロスト
運転毎に各キャピラリチューブ９、１０、１１内に蓄積
された水分やオイル成分を溶解させて除去することがで
き、各キャピラリチューブ９、１０、１１を安全にリフ
レッシュできて冷媒の循環がスムーズに行われることと
なり、冷却能力の低下を未然に防止できる。そして、デ
フロスト作業終了後に冷却運転に切り換えた際、蒸発器
１２を所望の冷却温度に効率よく戻すことができる。As described above, with a simple structure, it is possible to dissolve and remove the water and oil components accumulated in the respective capillary tubes 9, 10 and 11 for each defrosting operation, and to remove the respective capillary tubes 9 and 10. , 11 can be safely refreshed and the refrigerant can be circulated smoothly, so that the cooling capacity can be prevented from lowering. When the cooling operation is switched to after the defrosting operation is completed, the evaporator 12 can be efficiently returned to the desired cooling temperature.
【００７５】なお、前記真空ポンプ１２１としてターボ
分子ポンプを用いれば、特に水分の排出に効果があり、
より排気時間の短縮化が図れる。また、上記の各実施例
において、気液分離器４、５やカスケード熱交換器６、
７、８やキャピラリチューブ９、１０、１１の数は混合
冷媒の種類や目的とする冷却温度等に応じて適宜決定す
ればよい。If a turbo molecular pump is used as the vacuum pump 121, it is particularly effective in draining water,
The exhaust time can be further shortened. Further, in each of the above embodiments, the gas-liquid separators 4 and 5 and the cascade heat exchanger 6,
The numbers of 7, 8 and the capillary tubes 9, 10, 11 may be appropriately determined according to the type of mixed refrigerant, the target cooling temperature, and the like.
【００７６】また、第３発明や第４発明の実施例におい
て、冷媒の特性等で水分やオイル成分が蓄積されるキャ
ピラリチューブ９、１０、１１やその他の配管が特定で
きる場合には、その部分のみに対して分岐供給管１６、
２６を熱的接触状に配設する構造としてもよい。In the embodiments of the third invention and the fourth invention, if the capillary tubes 9, 10, 11 and other pipes in which water and oil components are accumulated can be specified due to the characteristics of the refrigerant, etc., that portion can be specified. Branch supply pipe 16, for only
26 may be arranged so as to be in thermal contact with each other.
【００７７】[0077]
【発明の効果】以上のように、第１発明の冷却装置によ
れば、圧縮機の吐出側から凝縮器に至る冷媒供給管路途
中から分岐され、かつ蒸発器の入口側に接続された分岐
供給管と、蒸発器の出口側からカスケード熱交換器に至
る冷媒戻り管路途中から分岐され、かつ圧縮機の吸入側
に接続された分岐戻り管とが設けられると共に、前記分
岐供給管および分岐戻り管にその管路を開閉自在に遮断
する開閉弁がそれぞれ備えられてなるものであり、圧縮
機から吐出された高温、高圧の冷媒の大部分が分岐供給
管を通じて直接、蒸発器に案内されるため、蒸発器が短
時間で昇温され、短時間で蒸発器にトラップされた水分
やガスをデフロストでき、また、このデフロスト運転時
においても、若干分の冷媒は冷媒供給管路側を流れるた
め、冷却運転時の冷凍サイクルを形成することができ、
ここに、予備冷却機能が発揮できる。従って、デフロス
ト作業終了後に冷却運転に切り換えた際、蒸発器を短時
間で容易に所望の冷却温度に効率よく戻すことができる
利点がある。As described above, according to the cooling device of the first aspect of the invention, the branch is branched from the middle of the refrigerant supply line from the discharge side of the compressor to the condenser and is connected to the inlet side of the evaporator. A supply pipe and a branch return pipe branched from the refrigerant return pipe from the outlet side of the evaporator to the cascade heat exchanger and connected to the suction side of the compressor are provided, and the branch supply pipe and the branch are provided. Each of the return pipes is provided with an on-off valve that opens and closes the pipe so that most of the high-temperature and high-pressure refrigerant discharged from the compressor is directly guided to the evaporator through the branch supply pipe. Therefore, the temperature of the evaporator is raised in a short time, and the water and gas trapped in the evaporator can be defrosted in a short time. Also, during this defrosting operation, some of the refrigerant flows through the refrigerant supply pipe side. , During cooling operation It is possible to form a freezing cycle,
The pre-cooling function can be demonstrated here. Therefore, when the cooling operation is switched to after the defrosting operation is completed, there is an advantage that the evaporator can be easily and efficiently returned to a desired cooling temperature in a short time.
【００７８】また、第２発明の冷却装置によれば、圧縮
機の吐出側から凝縮器に至る冷媒供給管路途中から分岐
され、かつ蒸発器の入口側に接続された分岐供給管が設
けられると共に、該分岐供給管の管路を開閉自在に遮断
する開閉弁が備えられ、蒸発器の出口側からカスケード
熱交換器に至る冷媒戻り管路途中から分岐され、かつ前
記圧縮機の吐出側から凝縮器に至る冷媒供給管路の前記
分岐供給管分岐位置と凝縮器との間に接続された分岐戻
り管が設けられると共に、該分岐戻り管の管路を開閉自
在に遮断する開閉弁が備えられ、前記分岐供給管分岐位
置と分岐戻り管の接続位置との間で前記冷媒供給管路を
開閉自在に遮断する開閉弁が備えられると共に、前記蒸
発器の出口側からカスケード熱交換器に至る冷媒戻り管
路の前記分岐戻り管分岐位置とカスケード熱交換器との
間で前記冷媒戻り管路を開閉自在に遮断する開閉弁が備
えられてなるものであり、圧縮機から吐出された高温、
高圧の冷媒の全てが分岐供給管を通じて直接、蒸発器に
案内されるため、蒸発器が短時間で昇温され、短時間で
蒸発器にトラップされた水分やガスをデフロストでき
る。また、蒸発器を出た冷媒は分岐戻り管を通じて凝縮
器に戻され、デフロスト運転時においても、冷却運転時
の冷凍サイクルを形成することができ、予備冷却機能が
発揮できる。従って、デフロスト作業終了後に冷却運転
に切り換えた際、蒸発器を短時間で容易に所望の冷却温
度に効率よく戻すことができる利点がある。Further, according to the cooling device of the second aspect of the present invention, the branch supply pipe is provided which is branched from the refrigerant supply pipe from the discharge side of the compressor to the condenser and is connected to the inlet side of the evaporator. Along with this, an on-off valve that shuts off the pipeline of the branch supply pipe is provided so as to open and close, is branched from the refrigerant return pipeline from the outlet side of the evaporator to the cascade heat exchanger, and from the discharge side of the compressor. A branch return pipe connected between the branch supply pipe branch position of the refrigerant supply pipe leading to the condenser and the condenser is provided, and an on-off valve is provided to open / close the pipe line of the branch return pipe. An opening / closing valve for opening and closing the refrigerant supply pipe between the branch supply pipe branch position and the branch return pipe connection position is provided, and the outlet side of the evaporator reaches the cascade heat exchanger. Refrigerant return line branch return It is those off valve for interrupting the coolant return line to freely open and close between the branch positions and the cascade heat exchanger is provided, discharged from the compressor high-temperature,
Since all the high-pressure refrigerant is directly guided to the evaporator through the branch supply pipe, the temperature of the evaporator is raised in a short time, and the moisture and gas trapped in the evaporator can be defrosted in a short time. Further, the refrigerant discharged from the evaporator is returned to the condenser through the branch return pipe, and even during the defrost operation, the refrigeration cycle during the cooling operation can be formed and the preliminary cooling function can be exerted. Therefore, when the cooling operation is switched to after the defrosting operation is completed, there is an advantage that the evaporator can be easily and efficiently returned to a desired cooling temperature in a short time.
【００７９】さらに、第３発明の冷却装置によれば、圧
縮機の吐出側から凝縮器に至る冷媒供給管路途中から分
岐され、かつ蒸発器の入口側に接続された分岐供給管
と、蒸発器の出口側からカスケード熱交換器に至る冷媒
戻り管路途中から分岐され、かつ圧縮機の吸入側に接続
された分岐戻り管とが設けられると共に、前記分岐供給
管および分岐戻り管にその管路を開閉自在に遮断する開
閉弁がそれぞれ備えられ、膨張手段はキャピラリチュー
ブからなり、前記分岐供給管がキャピラリチューブに対
して熱的接触状に配設されてなるものであり、圧縮機か
ら吐出された高温、高圧の冷媒の大部分が分岐供給管を
通じて直接、蒸発器に案内されるため、蒸発器が短時間
で昇温され、短時間で蒸発器にトラップされた水分やガ
スをデフロストでき、また、このデフロスト運転時にお
いては、分岐供給管内を流れる高温、高圧の冷媒によっ
てキャピラリチューブが加熱され、キャピラリチューブ
内に蓄積された水分やオイル成分が溶解されて除去で
き、ここに、冷媒の循環がスムーズに行われることとな
り、冷却能力の低下が防止でき、デフロスト作業終了後
に冷却運転に切り換えた際、蒸発器を所望の冷却温度に
効率よく戻すことができる利点がある。Furthermore, according to the cooling device of the third aspect of the invention, the branch supply pipe branched from the refrigerant supply pipe from the discharge side of the compressor to the condenser and connected to the inlet side of the evaporator, A branch return pipe that is branched from the middle of the refrigerant return pipe from the outlet side of the compressor to the cascade heat exchanger and that is connected to the suction side of the compressor is provided, and the pipes are provided in the branch supply pipe and the branch return pipe. The expansion means comprises a capillary tube, and the branch supply pipe is arranged in thermal contact with the capillary tube. Most of the high-temperature, high-pressure refrigerant that has been stored is guided directly to the evaporator through the branch supply pipe, so the temperature of the evaporator is raised in a short time and the moisture and gas trapped in the evaporator can be defrosted in a short time. Also, during this defrost operation, the capillary tube is heated by the high-temperature, high-pressure refrigerant flowing in the branch supply pipe, and the water and oil components accumulated in the capillary tube can be dissolved and removed. This has the advantage that the cooling capacity can be prevented from decreasing and that the evaporator can be efficiently returned to the desired cooling temperature when switching to the cooling operation after the completion of the defrosting work.
【００８０】また、第４発明の冷却装置によれば、圧縮
機の吐出側から凝縮器に至る冷媒供給管路途中から分岐
され、かつ蒸発器の入口側に接続された分岐供給管が設
けられると共に、該分岐供給管の管路を開閉自在に遮断
する開閉弁が備えられ、蒸発器の出口側からカスケード
熱交換器に至る冷媒戻り管路途中から分岐され、かつ前
記圧縮機の吐出側から凝縮器に至る冷媒供給管路の前記
分岐供給管分岐位置と凝縮器との間に接続された分岐戻
り管が設けられると共に、該分岐戻り管の管路を開閉自
在に遮断する開閉弁が備えられ、前記分岐供給管分岐位
置と分岐戻り管の接続位置との間で前記冷媒供給管路を
開閉自在に遮断する開閉弁が備えられると共に、前記蒸
発器の出口側からカスケード熱交換器に至る冷媒戻り管
路の前記分岐戻り管分岐位置とカスケード熱交換器との
間で前記冷媒戻り管路を開閉自在に遮断する開閉弁が備
えられ、膨張手段はキャピラリチューブからなり、前記
分岐供給管がキャピラリチューブに対して熱的接触状に
配設されてなるものであり、圧縮機から吐出された高
温、高圧の冷媒の全てが分岐供給管を通じて直接、蒸発
器に案内されるため、蒸発器が短時間で昇温され、短時
間で蒸発器にトラップされた水分やガスをデフロストで
きる。また、デフロスト運転時に分岐供給管内を流れる
高温、高圧の冷媒によってキャピラリチューブが加熱さ
れ、キャピラリチューブ内に蓄積された水分やオイル成
分が溶解されて除去でき、ここに、冷媒の循環がスムー
ズに行われることとなり、冷却能力の低下が防止でき、
デフロスト作業終了後に冷却運転に切り換えた際、蒸発
器を所望の冷却温度に効率よく戻すことができる。Further, according to the cooling device of the fourth aspect of the present invention, a branch supply pipe is provided which is branched from the refrigerant supply pipe from the discharge side of the compressor to the condenser and which is connected to the inlet side of the evaporator. Along with this, an on-off valve that shuts off the pipeline of the branch supply pipe is provided so as to open and close, is branched from the refrigerant return pipeline from the outlet side of the evaporator to the cascade heat exchanger, and from the discharge side of the compressor. A branch return pipe connected between the branch supply pipe branch position of the refrigerant supply pipe leading to the condenser and the condenser is provided, and an on-off valve is provided to open / close the pipe line of the branch return pipe. An opening / closing valve for opening and closing the refrigerant supply pipe between the branch supply pipe branch position and the branch return pipe connection position is provided, and the outlet side of the evaporator reaches the cascade heat exchanger. Refrigerant return line branch return An opening / closing valve for opening and closing the refrigerant return pipe between the branch position and the cascade heat exchanger is provided, the expansion means is a capillary tube, and the branch supply pipe is in thermal contact with the capillary tube. The high-temperature, high-pressure refrigerant discharged from the compressor is directly guided to the evaporator through the branch supply pipe, so that the temperature of the evaporator is raised in a short time, Can defrost water and gas trapped in the evaporator. In addition, the capillary tube is heated by the high-temperature, high-pressure refrigerant flowing in the branch supply pipe during the defrost operation, and the water and oil components accumulated in the capillary tube can be dissolved and removed, and the refrigerant can circulate smoothly there. It is possible to prevent the deterioration of the cooling capacity,
When the cooling operation is switched to after the defrosting operation is completed, the evaporator can be efficiently returned to a desired cooling temperature.
【図１】第１発明の実施例にかかる冷却装置を示す回路
図である。FIG. 1 is a circuit diagram showing a cooling device according to an embodiment of the first invention.
【図２】第２発明の実施例にかかる冷却装置を示す回路
図である。FIG. 2 is a circuit diagram showing a cooling device according to an embodiment of the second invention.
【図３】第３発明の実施例にかかる冷却装置を示す回路
図である。FIG. 3 is a circuit diagram showing a cooling device according to an example of a third invention.
【図４】第４発明の実施例にかかる冷却装置を示す回路
図である。FIG. 4 is a circuit diagram showing a cooling device according to an embodiment of the fourth invention.
【図５】冷却装置を利用した装置の概略説明図である。FIG. 5 is a schematic explanatory view of an apparatus using a cooling device.
【図６】冷却装置を利用した装置の概略説明図である。FIG. 6 is a schematic explanatory view of an apparatus using a cooling device.
【図７】従来例を示す回路図である。FIG. 7 is a circuit diagram showing a conventional example.
１ 冷却装置 ２ 圧縮機 ３ 凝縮器 ４ 第１の気液分離器 ５ 第２の気液分離器 ６ 第１のカスケード熱交換器 ７ 第２のカスケード熱交換器 ８ 第３のカスケード熱交換器 ９ 第１のキャピラリチューブ １０ 第２のキャピラリチューブ １１ 第３のキャピラリチューブ １２ 蒸発器 １３ 冷媒供給管路 １４ 冷媒戻り管路 １６ 分岐供給管 １７ デフロスト側第１電磁弁 １８ 分岐戻り管 １９ デフロスト側第２電磁弁 ２６ 分岐供給管 ２７ デフロスト側第１電磁弁 ２８ 分岐戻り管 ２９ デフロスト側第２電磁弁 ３０ 冷凍サイクル側第１電磁弁 ３１ 冷凍サイクル側第２電磁弁 1 Cooling Device 2 Compressor 3 Condenser 4 First Gas-Liquid Separator 5 Second Gas-Liquid Separator 6 First Cascade Heat Exchanger 7 Second Cascade Heat Exchanger 8 Third Cascade Heat Exchanger 9 First Capillary Tube 10 Second Capillary Tube 11 Third Capillary Tube 12 Evaporator 13 Refrigerant Supply Pipeline 14 Refrigerant Return Pipeline 16 Branch Supply Pipe 17 Defrost Side First Solenoid Valve 18 Branch Return Pipe 19 Defrost Side Second Solenoid valve 26 Branch supply pipe 27 Defrost side first solenoid valve 28 Branch return pipe 29 Defrost side second solenoid valve 30 Refrigeration cycle side first solenoid valve 31 Refrigeration cycle side second solenoid valve
Claims (4)
されてなる冷媒を圧縮機で圧縮し、圧縮機から吐出され
た冷媒を凝縮器で冷却し、凝縮器で冷却された冷媒を高
沸点の液相冷媒と気相冷媒に気液分離器で分離し、分離
された高沸点の液相冷媒は膨張手段で減圧してカスケー
ド熱交換器で前記気液分離器で分離された気相冷媒を冷
却すると共に圧縮機側に戻され、順次、気液分離器で分
離された気相冷媒を冷却して気液分離および冷却を繰り
返してより高沸点の冷媒を圧縮機側に戻すと共に低沸点
の冷媒を抽出して蒸発器に案内し、蒸発器で低沸点の冷
媒を蒸発させて冷却作用を行った後、カスケード熱交換
器を経由して圧縮機に戻す冷却装置において、 前記圧縮機の吐出側から凝縮器に至る冷媒供給管路途中
から分岐され、かつ蒸発器の入口側に接続された分岐供
給管と、蒸発器の出口側からカスケード熱交換器に至る
冷媒戻り管路途中から分岐され、かつ圧縮機の吸入側に
接続された分岐戻り管とが設けられると共に、前記分岐
供給管および分岐戻り管にその管路を開閉自在に遮断す
る開閉弁がそれぞれ備えられてなることを特徴とする冷
却装置。1. A refrigerant in which a plurality of kinds of refrigerants having different boiling points are mixed is compressed by a compressor, the refrigerant discharged from the compressor is cooled by a condenser, and the refrigerant cooled by the condenser has a high boiling point. Is separated into a liquid-phase refrigerant and a gas-phase refrigerant by a gas-liquid separator, and the separated high-boiling-point liquid-phase refrigerant is decompressed by expansion means and separated by the cascade heat exchanger in the gas-liquid separator. Is cooled and returned to the compressor side, and the gas-phase refrigerant separated in the gas-liquid separator is sequentially cooled, and gas-liquid separation and cooling are repeated to return the higher boiling point refrigerant to the compressor side and lower boiling point. The refrigerant is extracted and guided to the evaporator, and after performing a cooling action by evaporating the low boiling point refrigerant in the evaporator, in the cooling device that returns to the compressor via the cascade heat exchanger, The refrigerant is branched from the middle of the refrigerant supply line from the discharge side to the condenser, and the evaporator A branch supply pipe connected to the inlet side and a branch return pipe branched from the middle of the refrigerant return pipe from the outlet side of the evaporator to the cascade heat exchanger and connected to the suction side of the compressor are provided. A cooling device, wherein each of the branch supply pipe and the branch return pipe is provided with an on-off valve that opens and closes its pipeline.
されてなる冷媒を圧縮機で圧縮し、圧縮機から吐出され
た冷媒を凝縮器で冷却し、凝縮器で冷却された冷媒を高
沸点の液相冷媒と気相冷媒に気液分離器で分離し、分離
された高沸点の液相冷媒は膨張手段で減圧してカスケー
ド熱交換器で前記気液分離器で分離された気相冷媒を冷
却すると共に圧縮機側に戻され、順次、気液分離器で分
離された気相冷媒を冷却して気液分離および冷却を繰り
返してより高沸点の冷媒を圧縮機側に戻すと共に低沸点
の冷媒を抽出して蒸発器に案内し、蒸発器で低沸点の冷
媒を蒸発させて冷却作用を行った後、カスケード熱交換
器を経由して圧縮機に戻す冷却装置において、 前記圧縮機の吐出側から凝縮器に至る冷媒供給管路途中
から分岐され、かつ蒸発器の入口側に接続された分岐供
給管が設けられると共に、該分岐供給管の管路を開閉自
在に遮断する開閉弁が備えられ、蒸発器の出口側からカ
スケード熱交換器に至る冷媒戻り管路途中から分岐さ
れ、かつ前記圧縮機の吐出側から凝縮器に至る冷媒供給
管路の前記分岐供給管分岐位置と凝縮器との間に接続さ
れた分岐戻り管が設けられると共に、該分岐戻り管の管
路を開閉自在に遮断する開閉弁が備えられ、前記分岐供
給管分岐位置と分岐戻り管の接続位置との間で前記冷媒
供給管路を開閉自在に遮断する開閉弁が備えられると共
に、前記蒸発器の出口側からカスケード熱交換器に至る
冷媒戻り管路の前記分岐戻り管分岐位置とカスケード熱
交換器との間で前記冷媒戻り管路を開閉自在に遮断する
開閉弁が備えられてなることを特徴とする冷却装置。2. A refrigerant in which a plurality of kinds of refrigerants having different boiling points are mixed is compressed by a compressor, a refrigerant discharged from the compressor is cooled by a condenser, and a refrigerant cooled by the condenser has a high boiling point. Is separated into a liquid-phase refrigerant and a gas-phase refrigerant by a gas-liquid separator, and the separated high-boiling-point liquid-phase refrigerant is decompressed by expansion means and separated by the cascade heat exchanger in the gas-liquid separator. Is cooled and returned to the compressor side, and the gas-phase refrigerant separated in the gas-liquid separator is sequentially cooled, and gas-liquid separation and cooling are repeated to return the higher boiling point refrigerant to the compressor side and lower boiling point. The refrigerant is extracted and guided to the evaporator, and after performing a cooling action by evaporating the low boiling point refrigerant in the evaporator, in the cooling device that returns to the compressor via the cascade heat exchanger, The refrigerant is branched from the middle of the refrigerant supply line from the discharge side to the condenser, and the evaporator A branch supply pipe connected to the inlet side is provided, and an opening / closing valve that opens and closes the pipe line of the branch supply pipe is provided, and a refrigerant return pipe line from the outlet side of the evaporator to the cascade heat exchanger is provided. And a branch return pipe connected between the branch supply pipe branching position of the refrigerant supply pipe from the discharge side of the compressor to the condenser and the condenser, and the branch return pipe An on-off valve that opens and closes the pipeline is provided, and an on-off valve that opens and closes the refrigerant supply pipeline between the branch supply pipe branch position and the connection position of the branch return pipe is provided. An opening / closing valve is provided to open / close the refrigerant return pipe between the branch return pipe branch position of the refrigerant return pipe from the outlet side of the evaporator to the cascade heat exchanger and the cascade heat exchanger. Cooling equipment characterized by Place
されてなる冷媒を圧縮機で圧縮し、圧縮機から吐出され
た冷媒を凝縮器で冷却し、凝縮器で冷却された冷媒を高
沸点の液相冷媒と気相冷媒に気液分離器で分離し、分離
された高沸点の液相冷媒は膨張手段で減圧してカスケー
ド熱交換器で前記気液分離器で分離された気相冷媒を冷
却すると共に圧縮機側に戻され、順次、気液分離器で分
離された気相冷媒を冷却して気液分離および冷却を繰り
返してより高沸点の冷媒を圧縮機側に戻すと共に低沸点
の冷媒を抽出し、該低沸点の冷媒を膨張手段で減圧して
蒸発器に案内し、蒸発器で低沸点の冷媒を蒸発させて冷
却作用を行った後、カスケード熱交換器を経由して圧縮
機に戻す冷却装置において、 前記圧縮機の吐出側から凝縮器に至る冷媒供給管路途中
から分岐され、かつ蒸発器の入口側に接続された分岐供
給管と、蒸発器の出口側からカスケード熱交換器に至る
冷媒戻り管路途中から分岐され、かつ圧縮機の吸入側に
接続された分岐戻り管とが設けられると共に、前記分岐
供給管および分岐戻り管にその管路を開閉自在に遮断す
る開閉弁がそれぞれ備えられ、 前記膨張手段はキャピラリチューブからなり、前記分岐
供給管がキャピラリチューブに対して熱的接触状に配設
されてなることを特徴とする冷却装置。3. A refrigerant in which a plurality of kinds of refrigerants having different boiling points are mixed is compressed by a compressor, the refrigerant discharged from the compressor is cooled by a condenser, and the refrigerant cooled by the condenser has a high boiling point. Is separated into a liquid-phase refrigerant and a gas-phase refrigerant by a gas-liquid separator, and the separated high-boiling-point liquid-phase refrigerant is decompressed by expansion means and separated by the cascade heat exchanger in the gas-liquid separator. Is cooled and returned to the compressor side, and the gas-phase refrigerant separated in the gas-liquid separator is sequentially cooled, and gas-liquid separation and cooling are repeated to return the higher boiling point refrigerant to the compressor side and lower boiling point. The refrigerant having a low boiling point is decompressed by the expansion means and guided to the evaporator, and the refrigerant having a low boiling point is evaporated by the evaporator to perform a cooling function, and then the cascade heat exchanger is used. In the cooling device returning to the compressor, the refrigerant supply from the discharge side of the compressor to the condenser is A branch supply pipe branched from the middle of the pipeline and connected to the inlet side of the evaporator, and a refrigerant return pipeline from the outlet side of the evaporator to the cascade heat exchanger, branched from the middle and connected to the suction side of the compressor. A branch return pipe connected to the branch supply pipe, and the branch supply pipe and the branch return pipe each provided with an on-off valve for opening and closing the pipe line, and the expansion means includes a capillary tube. Is arranged in thermal contact with the capillary tube.
されてなる冷媒を圧縮機で圧縮し、圧縮機から吐出され
た冷媒を凝縮器で冷却し、凝縮器で冷却された冷媒を高
沸点の液相冷媒と気相冷媒に気液分離器で分離し、分離
された高沸点の液相冷媒は膨張手段で減圧してカスケー
ド熱交換器で前記気液分離器で分離された気相冷媒を冷
却すると共に圧縮機側に戻され、順次、気液分離器で分
離された気相冷媒を冷却して気液分離および冷却を繰り
返してより高沸点の冷媒を圧縮機側に戻すと共に低沸点
の冷媒を抽出し、該低沸点の冷媒を膨張手段で減圧して
蒸発器に案内し、蒸発器で低沸点の冷媒を蒸発させて冷
却作用を行った後、カスケード熱交換器を経由して圧縮
機に戻す冷却装置において、 前記圧縮機の吐出側から凝縮器に至る冷媒供給管路途中
から分岐され、かつ蒸発器の入口側に接続された分岐供
給管が設けられると共に、該分岐供給管の管路を開閉自
在に遮断する開閉弁が備えられ、蒸発器の出口側からカ
スケード熱交換器に至る冷媒戻り管路途中から分岐さ
れ、かつ前記圧縮機の吐出側から凝縮器に至る冷媒供給
管路の前記分岐供給管分岐位置と凝縮器との間に接続さ
れた分岐戻り管が設けられると共に、該分岐戻り管の管
路を開閉自在に遮断する開閉弁が備えられ、前記分岐供
給管分岐位置と分岐戻り管の接続位置との間で前記冷媒
供給管路を開閉自在に遮断する開閉弁が備えられると共
に、前記蒸発器の出口側からカスケード熱交換器に至る
冷媒戻り管路の前記分岐戻り管分岐位置とカスケード熱
交換器との間で前記冷媒戻り管路を開閉自在に遮断する
開閉弁が備えられ、 前記膨張手段はキャピラリチューブからなり、前記分岐
供給管がキャピラリチューブに対して熱的接触状に配設
されてなることを特徴とする冷却装置。4. A refrigerant in which a plurality of kinds of refrigerants having different boiling points are mixed is compressed by a compressor, the refrigerant discharged from the compressor is cooled by a condenser, and the refrigerant cooled by the condenser has a high boiling point. Is separated into a liquid-phase refrigerant and a gas-phase refrigerant by a gas-liquid separator, and the separated high-boiling-point liquid-phase refrigerant is decompressed by expansion means and separated by the cascade heat exchanger in the gas-liquid separator. Is cooled and returned to the compressor side, and the gas-phase refrigerant separated in the gas-liquid separator is sequentially cooled, and gas-liquid separation and cooling are repeated to return the higher boiling point refrigerant to the compressor side and lower boiling point. The refrigerant having a low boiling point is decompressed by the expansion means and guided to the evaporator, and the refrigerant having a low boiling point is evaporated by the evaporator to perform a cooling function, and then the cascade heat exchanger is used. In the cooling device returning to the compressor, the refrigerant supply from the discharge side of the compressor to the condenser is A branch supply pipe is provided that is branched from the middle of the pipe and is connected to the inlet side of the evaporator, and an opening / closing valve that opens and closes the pipe of the branch supply pipe is provided. A branch return connected between the branch supply pipe branch position and the condenser of the refrigerant supply line from the discharge side of the compressor to the condenser and branched from the middle of the refrigerant return line to the cascade heat exchanger. A pipe is provided, and an on-off valve that opens and closes the branch return pipe line is provided so that the refrigerant supply line can be opened and closed between the branch supply pipe branch position and the branch return pipe connection position. And an opening / closing valve for shutting off the refrigerant return pipe between the outlet side of the evaporator and the cascade heat exchanger. Provided with an on-off valve that shuts off freely The expansion device is formed of a capillary tube, and the branch supply pipe is arranged in thermal contact with the capillary tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2053094A JPH06347112A (en) | 1993-04-15 | 1994-02-17 | Cooling device |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5-113657 | 1993-04-15 | ||
| JP11365793 | 1993-04-15 | ||
| JP2053094A JPH06347112A (en) | 1993-04-15 | 1994-02-17 | Cooling device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06347112A true JPH06347112A (en) | 1994-12-20 |
Family
ID=26357496
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2053094A Pending JPH06347112A (en) | 1993-04-15 | 1994-02-17 | Cooling device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06347112A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005066554A1 (en) * | 2004-01-07 | 2005-07-21 | Shinmaywa Industries, Ltd. | Ultralow temperature refrigerator, refrigerating system, and vacuum apparatus |
| JP2005207662A (en) * | 2004-01-22 | 2005-08-04 | Shin Meiwa Ind Co Ltd | Extremely low temperature refrigerating device |
-
1994
- 1994-02-17 JP JP2053094A patent/JPH06347112A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005066554A1 (en) * | 2004-01-07 | 2005-07-21 | Shinmaywa Industries, Ltd. | Ultralow temperature refrigerator, refrigerating system, and vacuum apparatus |
| JP2005207662A (en) * | 2004-01-22 | 2005-08-04 | Shin Meiwa Ind Co Ltd | Extremely low temperature refrigerating device |
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