TW200525228A - Cassette - Google Patents
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- TW200525228A TW200525228A TW93101414A TW93101414A TW200525228A TW 200525228 A TW200525228 A TW 200525228A TW 93101414 A TW93101414 A TW 93101414A TW 93101414 A TW93101414 A TW 93101414A TW 200525228 A TW200525228 A TW 200525228A
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- 239000000758 substrate Substances 0.000 claims abstract description 137
- 239000011521 glass Substances 0.000 claims description 72
- 230000004888 barrier function Effects 0.000 claims description 11
- 230000000903 blocking effect Effects 0.000 claims description 5
- 239000004809 Teflon Substances 0.000 claims description 3
- 229920006362 Teflon® Polymers 0.000 claims description 3
- 239000002952 polymeric resin Substances 0.000 claims description 2
- 229910001220 stainless steel Inorganic materials 0.000 claims description 2
- 239000010935 stainless steel Substances 0.000 claims description 2
- 229920003002 synthetic resin Polymers 0.000 claims description 2
- 238000005452 bending Methods 0.000 abstract description 9
- 238000006748 scratching Methods 0.000 abstract description 3
- 230000002393 scratching effect Effects 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 10
- 239000004973 liquid crystal related substance Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 230000005484 gravity Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- JJCFRYNCJDLXIK-UHFFFAOYSA-N cyproheptadine Chemical compound C1CN(C)CCC1=C1C2=CC=CC=C2C=CC2=CC=CC=C21 JJCFRYNCJDLXIK-UHFFFAOYSA-N 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000033764 rhythmic process Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
Abstract
Description
200525228 五、發明說明（1) 【發明所屬之技術領域】 本發明係關於一種基板匣，特別是指一種用來放置複數 璃基板之基板匣，並且該基板g係可避免各該玻 J板產生過度彎曲之情形，並可防止各該玻璃基板被刮 【先 前技術 由於液晶 污染等特 位助理等 上型電腦 通常包含 基板之間 璃基板所 坡螭基板 搬運多片 到損傷。 顯示面板具有外型輕薄、耗電量少以及無輻 性，因此被廣泛地應用在筆記型電腦、個^壑 攜帶式資訊產品上，甚至已有逐漸取代傳 之CRT監視器的趨勢。一般而言，液晶顯示^ 有一上基板、一下基板以及填充於上基板與吸 的液晶材料，其中上基板與下基板通常係/由 構成，並且於液晶顯示面板的製造過程中， 係裝載於一基板匣之内，以方便操作人員同日 玻璃基板，並避免各玻璃基板於搬運過程中f 請參考 一圖一，圖一係為習知之一基板匣的前視圖 所不，一基板匣1 〇包含有一頂板丨2，一與頂板丨 Tn 〒行 之 如圖 間、對之底板14，以及複數個連接於頂板12與底板14 、側板1 6。此外，各側板1 6係包含有複數個支律物200525228 V. Description of the invention (1) [Technical field to which the invention belongs] The present invention relates to a substrate cassette, particularly to a substrate cassette for placing a plurality of glass substrates, and the substrate g can avoid the generation of each glass J plate. Excessive bending can prevent each of the glass substrates from being scratched. [Prior art, personal computers such as special assistants due to liquid crystal contamination and the like usually include multiple pieces of glass substrates between the substrates and damaged substrates. The display panel is thin and light, consumes less power, and is non-radiative, so it is widely used in notebook computers, personal information products, and even the trend of replacing traditional CRT monitors. Generally speaking, a liquid crystal display has an upper substrate, a lower substrate, and a liquid crystal material filled in the upper substrate and the substrate. The upper substrate and the lower substrate are usually / consisted of, and are mounted in a liquid crystal display panel during the manufacturing process. In the substrate box, it is convenient for the operator to have glass substrates on the same day, and to avoid the glass substrates during transportation. Please refer to Figure 1. Figure 1 is a front view of a conventional substrate box. A substrate box 1 contains There is a top plate 丨 2, and a top plate 丨 Tn as shown in the figure, the opposite bottom plate 14, and a plurality of side plates 16 connected to the top plate 12 and the bottom plate 14, and the side plate 16. In addition, each side plate 16 series contains a plurality of rhythm objects
200525228 五、發明說明（2) 18，各支撐物18的長度大約是5毫米，其係用來支撐各玻 璃基板2 0的邊緣部分，並將基板匣1 〇内的各個玻璃基板 2 0分隔開。 必須注意的是，由於各玻璃基板2 0均具有重量，所以當 各玻璃基板2 0平放於基板匣1〇之内時，各玻璃基板2〇會 因受有重力而產生彎曲（bending)現象。並且，因為各玻 璃基板20通常具有較大的尺寸’例如：680mmx 880mm，而 基板匣10之各支撐物18的長度只有5毫米，因此各玻璃基 板20的長度係遠大於各支撐物18的長度，所以各玻璃基 板2 0的重心與各支撐點a之間的距離較長，因而使得各玻 璃基板2 0更容易產生彎曲現象。此外，當各玻璃基板2 〇 的面積越大或厚度越薄，則各玻璃基板2 〇的彎曲量d便會 越大，尤其是隨著玻璃製造技術的進步，目前玻璃基板 2 0的厚度已經減少至〇. 4毫米，當此種超薄玻璃基板被放 置於習知基板匣1 〇之内時，各玻璃基板2 〇所產生的彎曲 量d更是可觀。 另一方面，於液晶顯示面板的製造過程中，各玻璃基板 2 0必須經過許多道薄膜沉積製程、黃光製程、以及蝕刻 製私4，以於各玻璃基板2〇上形成必要之電子元件或光 學元件，例如·薄膜電晶體與彩色濾光鏡等，進而經過 組裝程序而完成液晶顯示面板。因此，在液晶顯示面板 的製造過程中’操作人員或傳送機器必須將基板匣丨〇搬200525228 V. Description of the invention (2) 18, the length of each support 18 is about 5 mm, which is used to support the edge portion of each glass substrate 20, and separates each glass substrate 20 in the substrate cassette 10 open. It must be noted that, because each glass substrate 20 has a weight, when each glass substrate 20 is placed flat within the substrate cassette 10, each glass substrate 20 will be bent due to gravity. . Moreover, because each glass substrate 20 generally has a larger size, for example: 680mm × 880mm, and the length of each support 18 of the substrate cassette 10 is only 5 mm, the length of each glass substrate 20 is much longer than the length of each support 18 Therefore, the distance between the center of gravity of each glass substrate 20 and each support point a is long, so that each glass substrate 20 is more prone to bending. In addition, when the area or thickness of each glass substrate 20 is larger, the bending amount d of each glass substrate 20 will be larger, especially with the advancement of glass manufacturing technology, the current thickness of the glass substrate 20 has already It is reduced to 0.4 mm. When such an ultra-thin glass substrate is placed in the conventional substrate cassette 10, the amount of bending d produced by each glass substrate 20 is even more considerable. On the other hand, in the manufacturing process of the liquid crystal display panel, each glass substrate 20 must go through many thin film deposition processes, yellow light processes, and etching processes 4 to form the necessary electronic components or components on each glass substrate 20. Optical elements, such as thin-film transistors and color filters, are then assembled to complete the liquid crystal display panel. Therefore, in the manufacturing process of the liquid crystal display panel, the operator or the transfer machine must move the substrate cassette.
第10頁 200525228 五、發明說明（3) 運於各，製程機/台之間，例如：化學氣相沉積機台或曝 光機台等’以進行前述之各種製程。 般而言，各製程 (mapp i 内的所 基板20 chambe 中，當 位感測 置，並 臂便會 板20自 内。然 則容易 所在位 板20 ， ng sensor J 在位置，一 自基板匣1 0 r)，用來進 基板匣1 0被 器會先偵測 將測得的位 依據定位感 基板匣1 0取 而，若基板 造成各製程 置，進而導 並使得玻璃 機台通常包含有一定位感測器 ’用來判別各玻璃基板2 〇於基板匣1 〇 機械手臂（robot arm)，用來將各玻璃 取出’以及一反應腔體（reacti〇n 行一預定製程於各玻璃基板2〇上。其 載入各製程機台時，各製程機台之定 基板匣1 0内之各玻璃基板2 〇的所在位 置訊號傳送給機械手臂，然後機械手 測器所測得之位置訊號，將各玻璃基 出’並將各玻璃基板20送入反應腔體 匣10内之玻璃基板20的彎曲量d過大， 機台之定位感測器誤判玻璃基板2 0的 致機械手臂撞上基板匣10内的玻璃基 基板2 0破裂而降低製程良率。 發明内容】 本發明的目的是提供一種基板匣，以解決前述問題 依據本發明之目的，本發明的較佳實施例係提供一種用 來放置複數片基板之基板g，該基板匣包含有一中空之Page 10 200525228 V. Description of the invention (3) It is transported between process machines / stations, for example: chemical vapor deposition machine or exposure machine, etc. 'to perform the aforementioned various processes. In general, in each process (in the substrate 20 chambe in mapp i), the position sensing is set, and the arm will be plate 20 inside. However, it is easy to locate the plate 20, ng sensor J is in position, and the substrate box 1 0 r), which is used to enter the substrate box 1 0. The device will first detect and take the measured position according to the positioning sense substrate box 10. If the substrate is caused by each process, the glass machine usually includes a positioning. The sensor 'is used to identify each glass substrate 2 0 in the substrate cassette 10 and a robot arm is used to take out each glass' and a reaction chamber (reactin) is prepared for each glass substrate 2 in a predetermined process. When it is loaded into each process machine, the position signals of the glass substrates 20 in the fixed substrate box 10 of each process machine are transmitted to the robot arm, and then the position signals measured by the manipulator are transmitted Each glass substrate is out ', and the bending amount d of the glass substrate 20 is too large and the glass substrate 20 is sent into the reaction chamber box 10. The positioning sensor of the machine misjudges the glass substrate 20 and the robot arm hits the substrate box 10 Inside the glass-based substrate The content of the invention is to provide a substrate cassette to solve the aforementioned problems. According to the purpose of the present invention, a preferred embodiment of the present invention provides a substrate g for placing a plurality of substrates. Contains a hollow one
200525228200525228
五、發明說明（4) 結構體’以及複數個支禮矣士 上並係用以支樓各該基板， 一支撐架、以及至少一緩衝 接於該結構體之側壁的第— 之弟一端’而遠緩衝構件俾 放各該基板，以避免各該其 傷，其中各該支撐結構均^ 基板產生彎曲。 ^ 構，設置於該結構體之側壁 並且各該支撐結構均包含有 構件，該支撐架係具有一連 端、以及一相對於該第一端 設置於該第二端並係用來承 板碰觸到該支撐架而被刮 有一第一長度，以避免各該 由於本發明之各該 之支撐架、以及至 因此可避免各該基 該基板。 支撐結構係包含有 少一用以承放各該 板產生彎曲，並避 一具有一第一長度 基板的緩衝構件， 免該支撐架刮傷各 【實施方式】 請參考圖二至圖五 之一基板匣的示意 構的細部結構圖， 圖。如圖二所示， 板32平行且相對之 3 4之間的側板3 6， 間的側板38。其中 係組成一中空之結 ，圖二至圖五係為 圖，其中圖三係為 圖四係為圖二所示 一基板匣30包含有 底板3 4，複數個連 以及複數個連接於 ，頂板32、底板34 構體4 0，用來容納 本發明第一實施例 圖二所示之支撐結 之基板£的前視 一頂板32，一與頂 接於頂板32與底板 頂板32與底板34之 、以及側板36與38 圖四所示之複數片V. Description of the invention (4) The structure 'and a plurality of supporters are used to support each of the base plate, a support frame, and at least one end of the first-brother that is buffered to the side wall of the structure' The remote buffer member holds each of the substrates to avoid injuries, and each of the supporting structures deflects the substrates. ^ The structure is disposed on the side wall of the structural body and each of the supporting structures includes a component. The supporting frame has a continuous end, and is disposed at the second end with respect to the first end and is used for bearing board contact. The support frame is scraped with a first length to avoid the support frames due to the present invention and to avoid the substrates. The support structure includes at least one for supporting the plates to be bent, and avoiding a buffer member having a first length substrate, so that the support frame does not scratch each of the embodiments. [Embodiment] Please refer to one of FIGS. 2 to 5 Schematic and detailed structural diagram of the substrate cassette. As shown in FIG. 2, the plates 32 are parallel and opposite to each other between the side plates 3 6 and 3 and the side plates 38. Among them, a hollow knot is formed, and FIGS. 2 to 5 are diagrams, and FIG. 3 is a figure 4; FIG. 4 is a substrate box 30 shown in FIG. 2. A substrate box 30 includes a bottom plate 3 4, a plurality of connections and a plurality of connections to the top plate. 32. Base plate 34 The structure 40 is used for accommodating the base plate of the support knot shown in FIG. 2 of the first embodiment of the present invention. A front plate 32 is a front view, and one is connected to the top plate 32 and the bottom plate. And the plurality of side plates 36 and 38 as shown in FIG.
五、發明說明（5) 玻璃基板48，而且結構體40之兩端分別具有—開口4〇a盥 一開口40b，各玻璃基板48係可經由開口4〇3或開口4〇/而 進出基板E30。此外，基板！£30另包含有兩個把手46， 分別設置於頂板3 2的表面，以方便操作人員或機器搬運 基板E 3 0。 ° 如圖二與圖四所示，基板E30另包含有複數個連 ΐ 支ί ΐ構42，以及複數個連接於各側板38的支 撐、、Ό構44，各支撐結構4 2與44均係用來支撐各玻璃 48，以避免各玻璃基板48產生彎曲。其中，如二 不，各支撐結構42係包含有一支撐架42a，複數"個緩 件42b，設置於支撐架42a表面並係璃 48:以及-阻隔構件42c，設置於支撐架基； 本發明之第一實施例t，支擇架42 底' 二 並Λ?狀結一 ^ 裝置（例如·螺絲或插於U、 夂孢Κ禾顯不）而固定於各側板3 6 ^。此外，各緩衝構件42b係為一接觸墊，用來 架42a而被刮傷’而阻隔構件仏則 疋2末使各支撐架42a與其下方的玻璃基板48保 距離，以避免各支#架仏下方的因上 ^ 構造另一方面，各支撐結構44的細部 有一板^钍谨^ °構42相同，亦即各支撐結構44也包含 4板狀、，Ό構443、複數個接觸墊44b、以及一阻隔結構 200525228V. Description of the invention (5) Glass substrate 48, and both ends of the structure 40 have an opening 40a and an opening 40b. Each glass substrate 48 can enter and exit the substrate E30 through the opening 403 or the opening 40 /. . Also, the substrate! £ 30 also includes two handles 46, which are respectively arranged on the surface of the top plate 32 to facilitate the operator or the machine to handle the substrate E3 0. ° As shown in Figures 2 and 4, the base plate E30 also includes a plurality of support structures 42 and a plurality of supports 44 and 44 connected to each side plate 38. Each support structure 42 and 44 are all It is used to support each glass 48 so as to avoid bending of each glass substrate 48. Among them, if not, each support structure 42 includes a support frame 42a, a plurality of "relief pieces 42b", which are arranged on the surface of the support frame 42a and tie the glass 48: and-a blocking member 42c, which is provided on the support frame base; In the first embodiment t, the support frame 42 is fixed at the bottom of the support frame 42 with two Λ-shaped knots (for example, screws or inserted in the U, spores, and spores), and is fixed to each side plate 3 6 ^. In addition, each cushioning member 42b is a contact pad for scratching the frame 42a, and the blocking member 仏 2 does not keep each support frame 42a from the glass substrate 48 below to avoid each support # 架 仏Because of the upper structure below, on the other hand, the details of each support structure 44 have a plate ^ ^ ^ structure 42 is the same, that is, each support structure 44 also includes 4 plates, 443 structure, a plurality of contact pads 44b, And a barrier structure 200525228
值得注意的是，如圖二與圖三所示，本發明之板狀結構 4 2a與44a的長度L係增加至大約45毫米，以縮短各玻璃基 板48的重心與各支撐點b之間的距離，因而可避免各玻璃 基=48產生彎曲現象，並可有效減少各玻璃基板48的彎 曲量。此外’由於本發明係增加各支撐結構42與44之長 度’所以本發明之各支撐結構42與44便可能延伸至各玻 璃基板48上的主動區域（active region)，而由於各玻璃 基板4 8的主動區域係設有許多的電子元件或光學元件， 所以為了避免各板狀結構42a與44a刮傷玻璃基板48的主 動區域’本發明係於各板狀結構42a與44a上設有小面積 的接觸塾42b與44b ’並且各玻璃基板48係放置於接觸墊 42b與44b之上’以減少各個玻璃基板48與各支撐結構42It is worth noting that, as shown in FIGS. 2 and 3, the length L of the plate-like structures 42a and 44a of the present invention is increased to about 45 mm, so as to shorten the distance between the center of gravity of each glass substrate 48 and each support point b. Distance, thereby avoiding the bending phenomenon of each glass substrate = 48, and effectively reducing the bending amount of each glass substrate 48. In addition, 'because the present invention increases the length of each support structure 42 and 44', each support structure 42 and 44 of the present invention may extend to the active region on each glass substrate 48, and since each glass substrate 48 There are many electronic or optical components in the active area, so in order to prevent the plate-like structures 42a and 44a from scratching the active area of the glass substrate 48, the present invention is provided with a small area on each of the plate-like structures 42a and 44a. Contact 塾 42b and 44b 'and each glass substrate 48 is placed on contact pads 42b and 44b' to reduce each glass substrate 48 and each support structure 42
第14頁 200525228 五、發明說明（7) 與44的接觸面積’進而降低各玻璃基板48之主動區域被 刮傷的機率。另一方面，如圖五所示，若將基板匣3 〇放 置於地板或其它平台之上，並使基板匣3〇的開口4〇b朝下 擺置時’各玻璃基板48便可能沿著雙箭頭cc，所示之方向 擺動’因此’為了避免各玻璃基板4 8於擺動時碰撞到板 狀結構42a與44a而被刮傷，本發明之支撐結構42與44係 包含有阻隔結構4 2 c與44c，以使各玻璃基板48與各板狀 結構42a、44a之間得以維持一適當距離，進而避免各玻 璃基板48在擺動時碰撞到板狀結構42 a與44a而被到傷。 除此 於圖 而改 參考 體示 下的 示， 間的 52 〇 支撐 即各 52b、 至少 係可 變側板3 6與38的數目 圖六，圖六係為本發 意圖與其相對應之上 說明係以相同的標號 基板匣30另包含有至 側板5 0，以及複數個 其中，側板5 0係位於 結構52的細部構造係 支撐結構5 2也包含有 •以及一阻隔結構5 2C 一個側板50於側板3 6 利用側板50來防止玻 之外，側板3 6與3 8的 二所示，本發明係可 依據各種產品規格或客戶需求 、形狀與相對位置。例如，請 明第一實施例之一基板匣的立 視圖，並且為了方便說明，以 來表示相同的元件。如圖六所 少一連接於頂板32與底板34之 連接至各側板5 〇的支撐結構 側板36與側板38之間，並且各 與各支撐結構42與44相同，亦 一板狀結構52a、複數個接觸考 。並且，由於本實施例係提 與側板38之間，因此本實施例 璃基板48於搬運過程中滑出基Page 14 200525228 V. Description of the invention (7) The contact area with 44 'further reduces the probability that the active area of each glass substrate 48 will be scratched. On the other hand, as shown in FIG. 5, if the substrate cassette 30 is placed on a floor or other platform, and the opening 40b of the substrate cassette 30 is placed downward, each glass substrate 48 may The arrow cc is swinging in the direction shown. Therefore, in order to prevent the glass substrates 48 from being struck by the plate-shaped structures 42a and 44a during swinging, the support structures 42 and 44 of the present invention include a barrier structure 4 2 c. And 44c so as to maintain a proper distance between each glass substrate 48 and each of the plate-like structures 42a and 44a, thereby preventing each glass substrate 48 from colliding with the plate-like structures 42a and 44a during the swing and being injured. In addition to the illustration shown in the figure, the reference is shown below. The 52 bolsters are 52b each, at least the number of variable side plates 3 6 and 38. Figure 6 is a description of the intention of the present invention and its corresponding system. With the same reference number, the substrate box 30 further includes a side plate 50, and a plurality of the side plates 50, which are located in the detailed structural support structure 52 of the structure 52. The side plate 50 also includes a barrier structure 5 2C, and a side plate 50 on the side plate. 3 6 The side plate 50 is used to prevent glass. As shown by the two of the side plates 36 and 38, the present invention can be based on various product specifications or customer requirements, shapes and relative positions. For example, please show an elevation view of the substrate cassette of one of the first embodiments, and for convenience of explanation, the same components are shown. As shown in FIG. 6, one of the support structures connected to the top plate 32 and the bottom plate 34 and connected to each side plate 50 is between the side plates 36 and 38, and each is the same as each of the support structures 42 and 44. Contact test. Moreover, since this embodiment is lifted between the side plate 38 and the glass substrate 48 in this embodiment,
200525228 五、發明說明（8) 板匣30之外 必須注意的是’圖二至圖六所示之 並非本發明唯一的實施方式，以下 施例，並且為了方便說明，以下的戈明毛月之八匕貝 士表示相同的元件。請參考圖七的===?號 7施例之支撐結構示意圖。如圖七所示:、各必^二 係包含有一長度為L的支撐架54a，複二: 隔構二t ΐ 1 、以及一設置於支撐架54a底側的阻 板4 8，it #八中，各緩衝構件5 4b係用來承放各玻璃基 並？以可拆卸的方式設置於支撐架5“上。在本發 各ί Ϊ : 2例中，各支^架5“係為—板狀結構，並且 im 之一端通常是藉由一固定裝置（例如：螺 顯示）而固定於各側板36上。此外，各緩衝 ?m 接觸用來避免玻璃基板48直接接觸到 叉得木54a而被刮傷，而阻隔構件54c則是 = 54a與其下方的玻璃基板48保持一適當距離，以避免牙玻 $基板48因上下擺動而碰觸到各支撐架54a。此外，板狀 結構5 4a與阻隔結構54c均係由結構強度大且不易變形之 f才料所構成，例如··聚合樹酯，而各接觸墊5 4 b是由可撓 ^材料所構成，例如··鐵氟龍。值得注意是，由於接觸 塾5 4b係以可拆卸的方式設置於板狀結構54a上，所以當 接觸塾5 4 b因多次接觸玻璃基板4 8而有損壞時，本實施例 係可更換接觸墊5 4 b，以增加各支撐結構5 4的使用壽命。200525228 V. Description of the invention (8) Beside the box 30, it must be noted that 'Figures 2 to 6 are not the only embodiment of the present invention. The following examples, and for convenience of explanation, the following Goming Maoyuezhi Eight daggers represent the same elements. Please refer to the schematic diagram of the support structure of the ===? No. 7 embodiment in FIG. As shown in Fig. 7, each of the two series includes a support frame 54a having a length L, and the second one: a partition structure t t 1, and a resist plate 4 8, it # 八 provided on the bottom side of the support frame 54a. In the above, each buffer member 5 4b is used to support each glass substrate. It is detachably provided on the supporting frame 5 ". In the present invention, in each case, each supporting frame 5" is a plate-like structure, and one end of im is usually fixed by a fixing device (such as (Screw display) and fixed to each side plate 36. In addition, each buffer contact is used to prevent the glass substrate 48 from being scratched by directly contacting the forkwood 54a, and the blocking member 54c is 54a to maintain an appropriate distance from the glass substrate 48 below it to avoid dental glass substrates. 48 hits each support frame 54a by swinging up and down. In addition, the plate-like structure 54a and the barrier structure 54c are both composed of a material having a high structural strength and are not easily deformed, such as a polymer resin, and each contact pad 5 4b is composed of a flexible material. For example ... Teflon. It is worth noting that, since the contact 塾 5 4b is detachably provided on the plate-like structure 54a, when the contact 塾 5 4b is damaged due to multiple contact with the glass substrate 48, this embodiment is a replaceable contact Pads 5 4 b to increase the service life of each support structure 54.
200525228 五、發明說明（9) 請參考圖八’圖八係為本發明第三實施例之支撐結構示 意圖。如圖八所示，各支撐結構56係包含有_長度為L的 支撐架56a，一緩衝構件5 6b，設置於支撐架56a之一端並 係用來承放各玻璃基板4 8，以及一阻隔構件5 6 c，設置於 支撐架56a之另一端，並且阻隔結構56c係藉由一固定 置（例如··螺絲一或插栓）（未顯示）而固定於各側板36上: 在本發明之第三實施例中，各支撐架56a係 結構，並且各u形管狀結構56a之一端係u 56c之内。此，，各緩衝構件56b係為 =3構： 設於U形管狀結構5 6 a之一端，用來避备士，欧套吕，套 接觸到支#架5 6 a而姑4丨皮 玻璃基板48直接 後賙y叉保木b b a而被刮傷，而阻隔構垵 各支撐架56a與其下方的玻璃基板48保一、合疋〜使 以 ，免玻璃/板48因上T擺動而碰觸到各支/力/56離 外，U形官狀結構5 6 a係由不鑛鋼所構成，二二a。此 5 6b則是由可撓性材料所構成，例如：鐵氟龍可。撓性套管 於習知技術，本發明之基板匣係利用 來f撐玻璃基板，並且本發明係藉由增加 ^撐結 構=長度，以縮短各玻璃基板之重心盘‘ =支撐結 距離，進而避免各玻璃基板產 現 ，^之間的 可減少 ΪΪ;ί 板;Πί 用 因 承放各玻璃某柘，光A々m. μ U、友衝結構，田& 此 %200525228 V. Description of the invention (9) Please refer to FIG. 8 ′ FIG. 8 is a schematic view showing a supporting structure of the third embodiment of the present invention. As shown in FIG. 8, each support structure 56 includes a support frame 56a with a length L, a buffer member 56b, which is disposed at one end of the support frame 56a and is used to receive the glass substrates 48 and a barrier. The member 5 6 c is provided at the other end of the supporting frame 56 a, and the blocking structure 56 c is fixed to each side plate 36 by a fixing (for example, a screw or a plug) (not shown): In the present invention, In the third embodiment, each support frame 56a is a structure, and one end of each u-shaped tubular structure 56a is inside u 56c. Therefore, each of the buffer members 56b has a structure of = 3: It is provided at one end of the U-shaped tubular structure 5 6 a, and is used to avoid the warrior, Otto, and the cover contacting the support # 6 5 a and the skin 4 丨The substrate 48 is directly scratched by the back fork yoke bba, and the support structure 56a and the glass substrate 48 below it are held together, so as to prevent the glass / plate 48 from touching due to the upper T swing. To each branch / force / 56 away, the U-shaped official structure 5 6 a is composed of stainless steel, 22 a. The 5 6b is made of flexible materials, such as Teflon. The flexible sleeve is based on the conventional technology. The substrate box of the present invention is used to support the glass substrate, and the present invention shortens the center of gravity of each glass substrate by increasing the support structure = length. To avoid the occurrence of each glass substrate, the number of ^ can be reduced; ί the plate; Π ί used to hold a certain 柘 of each glass, light A々m. Μ U, Youchong structure, Tian & this%
200525228 五、發明說明（ίο) 而降低各玻璃基板被刮傷的機率。另外，由於本發明之 各該支撐結構係包含有一阻隔結構，用來避免各玻璃基 板於擺動時碰撞到各該支撐結構，以降低各玻璃基板被 刮傷的機率。 以上所述僅為本發明之較佳實施例，凡依本發明申請專 利範圍所做之均等變化與修飾，皆應屬本發明專利之涵 蓋範圍。200525228 V. Description of the invention (ίο) and reduce the probability of each glass substrate being scratched. In addition, since each of the supporting structures of the present invention includes a barrier structure, it is used to prevent the glass substrates from colliding with each of the supporting structures when swinging, so as to reduce the probability of each glass substrate being scratched. The above description is only a preferred embodiment of the present invention, and all equivalent changes and modifications made in accordance with the scope of the patent application for the present invention shall fall within the scope of the patent of the present invention.
第18頁 200525228 圖式簡單說明 圖式之簡單說明 圖一係為習知之一基板匣的前視圖。 圖二至圖五係為本發明第一實施例之一基板匣的示意 圖。 圖六係為本發明第二實施例之一基板匣的立體示意圖與 其相對應之上視圖。 圖七係為本發明第二實施例之支撐結構示意圖。 圖八係為本發明第三實施例之支撐結構示意圖。 圖式之符號說明 10 基 板 匣 12 頂 板 14 底 板 16 側 板 18 支 撐 物 20 玻 璃 基 板 30 基 板 匣 32 頂 板 34 底 板 36 側 板 38 側 板 40 結 構 體 4 0a 開 口 40b 開 口 42 支 撐 結 構 42a 支 撐 架 42b 緩 衝 構 件 42c 阻 隔 構 件 44 支 撐 結 構 44a 支 撐 架 44b 緩 衝 構 件 44c 阻 隔 構 件 46 把 手 48 玻 璃 基 板Page 18 200525228 Brief description of the drawings Brief description of the drawings Figure 1 is a front view of one of the conventional substrate cassettes. 2 to 5 are schematic views of a substrate cassette according to a first embodiment of the present invention. Fig. 6 is a schematic perspective view of a substrate cassette according to a second embodiment of the present invention and a corresponding top view thereof. FIG. 7 is a schematic view of a supporting structure of the second embodiment of the present invention. FIG. 8 is a schematic diagram of a supporting structure according to a third embodiment of the present invention. Description of the symbols 10 substrate box 12 top plate 14 bottom plate 16 side plate 18 support 20 glass substrate 30 substrate box 32 top plate 34 bottom plate 36 side plate 38 side plate 40 structure 4 0a opening 40b opening 42 support structure 42a support frame 42b buffer member 42c barrier Member 44 support structure 44a support frame 44b buffer member 44c barrier member 46 handle 48 glass substrate
第19頁 200525228 圖式簡單說明 50 側 板 52 支 撐 結 構 5 2a 支 撐 架 52b 緩 衝 構 件 52c 阻 隔 構 件 54 支 撐 結 構 54a 支 撐 架 54b 緩 衝 構 件 54c 阻 隔 構 件 56 支 撐 結 構 5 6a 支 撐 架 56b 緩 衝 構 件 56c 阻 隔 構 件Page 19 200525228 Brief description of the drawing 50 side plate 52 support structure 5 2a support structure 52b cushion structure 52c barrier structure 54 support structure 54a support structure 54b cushion structure 54c barrier structure 56 support structure 56c structure 6a
第20頁Page 20
Claims (1)
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| TW93101414A TWI257504B (en) | 2004-01-19 | 2004-01-19 | Cassette |
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| TW93101414A TWI257504B (en) | 2004-01-19 | 2004-01-19 | Cassette |
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| TWI257504B TWI257504B (en) | 2006-07-01 |
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