TWI260062B - Substrate carrier device - Google Patents

Substrate carrier device Download PDF

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Publication number
TWI260062B
TWI260062B TW091105647A TW91105647A TWI260062B TW I260062 B TWI260062 B TW I260062B TW 091105647 A TW091105647 A TW 091105647A TW 91105647 A TW91105647 A TW 91105647A TW I260062 B TWI260062 B TW I260062B
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TW
Taiwan
Prior art keywords
substrate
holding portion
absorbing
glass substrate
holding
Prior art date
Application number
TW091105647A
Other languages
Chinese (zh)
Inventor
Hidenori Miyamoto
Shigeru Hayakawa
Original Assignee
Tokyo Ohka Kogyo Co Ltd
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Publication of TWI260062B publication Critical patent/TWI260062B/en

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/14—Wafer cassette transporting

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Nonlinear Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Chemical & Material Sciences (AREA)
  • Robotics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
  • Warehouses Or Storage Devices (AREA)

Abstract

One object of the invention is to reduce the amount of deflection when carrying a large square substrate. Retention sections 3, 4, and 5 that extend in parallel with a carrier direction are provided at even intervals in a carrier arm 2, each of the retention sections 3, 4, and 5 is composed by a pair of rods 6 and 6, suction sections 7 and so on whose position can be adjusted along the longitudinal direction of the retention section are provided at tip and base edge sections in the retention sections 3, 4, and 5, and, furthermore, a fixed suction section 13 is provided in the middle of the retention section 4.

Description

1260062 A7 ~— _______ B7 五、發明説明（1) 【發明所屬之技術領域】 本發明爲用來連送例如液晶顯不裝置用之玻璃基板等 方形基板的裝置。 (請先閲讀背面之注意事項再填寫本頁) 【習知技術】 液晶顯不裝置用的玻璃基板，是對一塊大尺寸的玻璃 基板塗布光阻劑後加以乾燥，再施以曝光、顯像等處理， 最後裁切成最終製品之尺寸的玻璃基板。 對大尺寸的玻璃基板所實施的各項處理中，是在各個 處理的工作站完成加工後，再利用運送裝置將大尺寸的玻 璃基板運往其他的工作站。 但是，因爲液晶顯不裝置用玻璃基板的厚度爲〇 . 了 mm左右且面積又大，故在運送的過程中基板的外緣部及中 央部因本身的重量形成撓曲而大量下垂，在與支撐夾具產 生干涉後變得無法運送，或發生玻璃基板的破裂。 經濟部智慧財產局員工消費合作社印製 因此，本案發明人於先前的日本特開2 0 0 0 -2 0 8 5 8 7號公報中，揭示一種可減少基板撓曲的運送 裝置。該運送裝置如第5圖所示，分別於可在水平方向上 開閉，並可滑行移動於水平方向上之一對運送臂1 〇 〇、 2〇0上設有平行於運送方向的第1保持部1 〇 1、 2〇1及第2保持部1 0 2 、2〇2 ，結束在工作站s 1 的處理後由銷1 0 3來昇起玻璃基板W，在這種狀態下使 一對的運送臂1 0 0、2 0 0相互接近並進入基板W的下 方，使玻璃基板W下降後，再由第1保持部1 〇 1、 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） -4- 1260062 A7 _ _ B7 五、發明説明（2) (請先閱讀背面之注意事項再填寫本頁) 2 0 1及第2保持部1 0 2、2 0 2支承玻璃基板W的4 個角落，並在保持這種狀態下藉由運送裝置將玻璃基板W 移動至工作站S 2之銷1 0 3的上方，最後使銷1 0 3上 升以承托玻璃基板W。 【發明欲解決的課題】 根據上述運送裝置，雖然可抑制玻璃基板中央部的撓 曲量，並防止與其他構件產生干涉及基板的破裂，但是當 玻璃基板更大型化時（單邊達1 m以上），將使基板中央 部的撓曲變得更大。甚至，當玻璃基板從運送裝置凸出的 尺寸變大時，不僅是中央部分，連同外緣的撓曲更是不能 輕忽。 此外，上述的運送裝置，不僅無法適用大型化的玻璃 基板，更不能充分對應基板形狀的變化。 【用以解決課題之手段】 經濟部智慧財產局員工消費合作社印製 可完全解決上述課題之本發明的基板運送裝置係形成 :至少平行地配置有3根保持部，各保持部上至少設有2 個可沿著長軸方向調整位置的吸著部，並在位於中央的保 持部之長軸方向的中央部固定有吸著部。 因爲形成這種結構，故能抑止基板中央部的撓曲量， 並防止與其他構件之間的干涉及基板的破裂。 在上述的基板運送裝置中，因爲保持部係由一對平行 延伸的棒所構成，可同時兼顧保持部的輕量化及剛性，更 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） 一 1260062 A7 _B7 __ 五、發明説明（3) 能輕易地將吸著部安裝成具有移動性。 (請先閱讀背面之注意事項再填寫本頁) 此外，因上述基板裝置形成上下2段，且上段保持部 與下段保持部可獨立驅動，故可在同一工作站內接收譬如 已完成處理的玻璃基板，以及傳遞未處理的玻璃基板。 而，因前述吸著部係由：連結於真空幫浦之類減壓源 的可撓式軟管、及包覆該可撓式軟管的襯墊所構成，故可 在不損傷玻璃基板的狀態下確實地吸著。此外，襯墊的材 質以 P P S ( Polyphenylene sulfide)等爲宜。 再者，藉由在長軸方向上將量尺設成緊鄰著可調整位 置的吸著部，可使微調變的容易。 【發明的實施形態】 以下就根據附圖來說明本發明的實施型態。在本案說 明書中，第1圖爲表示本發明一實施例的整體側視圖，第 2圖是同一基板運送裝置的平面圖，第3圖爲同一基板運 送裝置的側視圖，第4圖爲吸著部的分解斜視圖。 經濟部智慧財產局員工消費合作社印製 實施例中運送裝置的結構，是沿著處理站S 1、S 2 設置導軌1 ，並在該導軌1上將運送臂2、2安裝在垂直 於運送方向的方向上。此外，因爲實施例的運送裝置設有 上下2段相同的機構，故僅針對上段部分作說明而省略下 段部分的說明。 運送臂2係採相同的距離設有3個與運送方向平行延 伸的保持部3、4、5。各保持部3、4、5係分別形成 於一對棒材6、6，且在保持部3、4、5的前端部及根 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） -6- 1260062 A7 __ B7 五、發明説明（4) 部設有可沿著保持部之長軸方向調整位置的吸著部7 · · (表複數個之意）。 吸著部7係如第4圖所示，在可滑動地架設於棒材6 、6之間的板8上形成開口 9 ，該開口 9處固定著連結於 真空幫浦等之撓管1 0的前端部，此外，該前端部係覆蓋 著P P S製的襯墊1 1。 面對棒材6 ，雖然板8可爲任意形式的移動機構，但 倘若如圖面所示地利用板8的彈力作用將其安裝於棒材6 時，將使結構變得簡單。 此外，將量尺1 2安裝於吸著部7的側方，作爲吸著 部7在微調時標準，再者，保持部4的中央部設有固定吸 著部1 3。 針對使用上述運送裝置的運送方法進行說明，首先由 處理站S 1的銷1 4上升形成第1圖中待機的狀態開始， 然後運送臂2朝圖面中的左方移動，使保持部3、4、5 進入玻璃基板W的下方。 接下來，銷1 4下降並將玻璃基板W移載至保持部3 、4、5。再藉由吸著部7、1 3吸著固定於玻璃基板W 的4個角落及中央部。而吸著部7的位置可以配合基板W 的尺寸預先進行微調。 然後，運送裝置在保持吸附著玻璃基板W的狀態下， 移動到工作站2之銷1 5的上方後停止。接下來銷1 5上 升，由保持部3、4、5支承玻璃基板W。此時，解除由 吸著部7、1 3所產生的吸著狀態。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） (請先閱讀背面之注意事項再填寫本頁) -裝. 、11 經濟部智慧財產局員工消費合作社印製 -7- 1260062 A7 ___ B7 五、發明説明（句 圖面所示的運送裝置因爲形成上下2段，故坡璃基板 w可固定於各段，當完成了對處理站S 2的玻璃基板之運 送後，也可以將殘留的玻璃基板運送至圖面中未顯示的其 他處理站。 【發明的效果】 倘若根據上述本發明之用來運送方形基板的基板運送 _置時，因爲本案之基板運送裝置平行地配置有3個保持 部’並在各保持部的前端及根部設有可沿著長軸方向調整 位置的吸著部，且在位於中央的保持部之長軸方向的中央 部固定有吸著部，故不管基板的尺寸及形狀，都可抑制運 送中之基板中央部及外緣部的撓曲量，並防止與其他構件 之間的干涉及基板的破裂。 【圖面之簡單說明】 第1圖：表示本發明基板運送裝置之待機狀態的斜視 圖。 第2圖：同一基板運送裝置的平面圖。 弟3圖·冋一基板運送裝置的側視圖。 桌4圖：吸著部的分解斜視圖。 第5圖：傳統運送裝置的斜視圖。 【圖號s兌明】 1 :導軌 本紙張尺度適用中國國家標準（CNS ) A4規格（21〇X 297公董） (請先閱讀背面之注意事項再填寫本頁) -裝· 訂 經濟部智慧財產局員工消費合作社印製 -8- 1260062 A7 B7 五、發明説明（ β· 咅持保 臂 5送、 |,一區 ΊΗ 違 4 • . Λ 2 3 6 7 8 9 咅著吸式材調 棒可板 □開 站 YJ Π1 二音 理 著銷處 吸：：板管墊.尺定 5 CX1 基 撓襯量固 1 S 璃 • · · · ·· · · f f nw CXI CO 4* : 1± 1± 1± 1± IX CO w l·—--U------裝-- (請先閱讀背面之注意事項再填寫本頁)1260062 A7 ~ - _______ B7 V. EMBODIMENT OF THE INVENTION (1) Field of the Invention The present invention relates to a device for continuously feeding a square substrate such as a glass substrate for a liquid crystal display device. (Please read the precautions on the back and fill out this page.) [Practical Technology] The glass substrate for liquid crystal display is coated with a photoresist on a large-sized glass substrate, dried, and exposed and imaged. After processing, the glass substrate is finally cut into the size of the final product. In the various processes performed on a large-sized glass substrate, after processing is completed at each processing workstation, the large-sized glass substrate is transported to another workstation by the transport device. However, since the thickness of the glass substrate for liquid crystal display device is 〇. mm or so and the area is large, the outer edge portion and the central portion of the substrate are deflected by the weight of the substrate during transport, and a large amount of sagging is caused. When the support jig interferes, it becomes impossible to transport, or the glass substrate is broken. In the prior art, the inventor of the present invention discloses a transport device that can reduce the deflection of the substrate. As shown in FIG. 5, the transport device is openable and closable in the horizontal direction, and is slidably movable in one of the horizontal directions. The transport arm 1 〇〇, 2〇0 is provided with a first hold parallel to the transport direction. The parts 1 〇1, 2〇1 and the second holding parts 1 0 2 and 2〇2 terminate the glass substrate W by the pin 1 0 3 after the processing of the workstation s 1 , and the pair is made in this state. The transport arms 1 0 0 and 2 0 0 approach each other and enter the lower side of the substrate W, and after the glass substrate W is lowered, the first holding portion 1 〇1 and the paper scale are applied to the Chinese National Standard (CNS) A4 specification (210X 297). )) -4- 1260062 A7 _ _ B7 V. Invention description (2) (Please read the note on the back and fill in this page) 2 0 1 and 2nd holding part 1 0 2, 2 0 2 Support glass substrate W In the four corners, and while maintaining this state, the glass substrate W is moved to the upper side of the pin 110 of the workstation S 2 by the transport device, and finally the pin 110 is raised to support the glass substrate W. [Problem to be Solved by the Invention] According to the above-described transport device, the amount of deflection in the central portion of the glass substrate can be suppressed, and cracking of the substrate can be prevented from occurring in other members. However, when the glass substrate is larger (1 m on one side) The above) will make the deflection of the central portion of the substrate larger. Even when the size of the glass substrate protruding from the conveying means becomes large, not only the central portion but also the deflection of the outer edge cannot be ignored. Further, the above-described transport device is not limited to a large-sized glass substrate, and cannot sufficiently correspond to changes in the shape of the substrate. [Means for Solving the Problem] The substrate transportation device of the present invention which can completely solve the above-described problems is formed by the Intellectual Property Office of the Intellectual Property Office of the Ministry of Economic Affairs. The substrate transportation device is configured such that at least three holding portions are arranged in parallel, and each of the holding portions is provided at least Two absorbing portions that can be adjusted in the long axis direction are fixed, and a absorbing portion is fixed to a central portion of the central portion of the holding portion in the longitudinal direction. Since such a structure is formed, it is possible to suppress the amount of deflection of the central portion of the substrate and prevent the crack between the substrate and the other members from being broken. In the above-described substrate transfer device, since the holding portion is composed of a pair of rods extending in parallel, the weight and rigidity of the holding portion can be simultaneously considered, and the paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X 297 mm). PCT) A 1260062 A7 _B7 __ V. Description of the invention (3) The absorbing portion can be easily installed to be mobile. (Please read the precautions on the back and fill in this page.) In addition, since the above-mentioned substrate device is formed in two upper and lower stages, and the upper holding portion and the lower holding portion can be independently driven, the glass substrate which has been processed, for example, can be received in the same workstation. And pass the untreated glass substrate. Further, since the absorbing portion is composed of a flexible hose connected to a pressure reducing source such as a vacuum pump and a gasket covering the flexible hose, the glass substrate can be prevented from being damaged. I am really sucking in the state. Further, the material of the gasket is preferably P P S (Polyphenylene sulfide) or the like. Further, by setting the scale to the absorbing portion adjacent to the adjustable position in the long axis direction, fine adjustment can be made easier. [Embodiment of the Invention] Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the present specification, Fig. 1 is a side view showing an entire embodiment of the present invention, Fig. 2 is a plan view of the same substrate transfer device, Fig. 3 is a side view of the same substrate transfer device, and Fig. 4 is a absorbing portion. Exploded oblique view. The structure of the transport device in the printed embodiment of the Intellectual Property Office of the Intellectual Property Office of the Ministry of Economic Affairs is to provide the guide rail 1 along the processing stations S 1 , S 2 and to mount the transport arms 2, 2 on the guide rail 1 perpendicular to the transport direction. In the direction. Further, since the transporting apparatus of the embodiment is provided with the same mechanism as the upper and lower sections, the description of the upper section is omitted, and the description of the lower section is omitted. The transport arm 2 is provided with three holding portions 3, 4, and 5 extending in parallel with the transport direction at the same distance. Each of the holding portions 3, 4, and 5 is formed on a pair of bars 6, 6 respectively, and the Chinese National Standard (CNS) A4 specification (210X 297 mm) is applied to the front end portions of the holding portions 3, 4, and 5 and the basic paper scale. -6- 1260062 A7 __ B7 V. INSTRUCTION OF THE INVENTION (4) The absorbing portion 7 can be adjusted in the longitudinal direction of the holding portion (many of the plurality). As shown in FIG. 4, the absorbing portion 7 is formed with an opening 9 in a plate 8 slidably mounted between the bars 6 and 6, and the opening 9 is fixed to a flexible tube 10 connected to a vacuum pump or the like. In addition, the front end portion is covered with a gasket 1 made of PPS. Facing the bar 6, although the plate 8 can be any type of moving mechanism, the structure will be simplified if it is attached to the bar 6 by the elastic force of the plate 8 as shown in the figure. Further, the scale 1 2 is attached to the side of the absorbing portion 7, and the absorbing portion 7 is standard for fine adjustment. Further, the central portion of the holding portion 4 is provided with a fixed absorbing portion 13 . The transport method using the above-described transport device will be described. First, the pin 14 of the processing station S 1 is raised to form a state in which it stands by in the first drawing, and then the transport arm 2 is moved to the left in the drawing, and the holding portion 3 is moved. 4, 5 Enter the bottom of the glass substrate W. Next, the pin 14 is lowered and the glass substrate W is transferred to the holding portions 3, 4, 5. Further, the suction portions 7 and 13 are affixed to the four corners and the central portion of the glass substrate W. The position of the absorbing portion 7 can be finely adjusted in advance in accordance with the size of the substrate W. Then, the transport device is moved to the upper side of the pin 15 of the workstation 2 while the glass substrate W is held, and then stopped. Next, the pin 15 is lifted up, and the glass substrate W is supported by the holding portions 3, 4, 5. At this time, the absorbing state by the absorbing portions 7, 13 is released. This paper scale applies to China National Standard (CNS) A4 specification (210X 297 mm) (please read the note on the back and fill out this page) - Installed. 11 Ministry of Economic Affairs Intellectual Property Bureau Staff Consumer Cooperative Printed -7-1260062 A7 ___ B7 V. Description of the Invention (The transport device shown in the sentence picture is formed by the upper and lower stages, so the glass substrate w can be fixed to each stage. After the glass substrate of the processing station S 2 is completed, it can also be The remaining glass substrate is transported to another processing station not shown in the drawing. [Effects of the Invention] According to the above-described substrate transporting method for transporting a square substrate, the substrate transporting apparatus of the present invention is arranged in parallel. The three holding portions ′ are provided with a absorbing portion that can adjust the position in the longitudinal direction of the distal end of each of the holding portions, and a absorbing portion is fixed to a central portion of the central portion of the holding portion in the longitudinal direction. Regardless of the size and shape of the substrate, it is possible to suppress the amount of deflection of the central portion and the outer edge portion of the substrate during transportation, and to prevent cracking of the substrate involved with other members. Fig. 1 is a perspective view showing a standby state of the substrate transfer device of the present invention. Fig. 2 is a plan view of the same substrate transfer device. Fig. 4 is a side view of the substrate transfer device. Table 4: Decomposition of the absorbing portion Oblique view. Figure 5: Oblique view of the traditional transport device. [Figure No. s = 1] 1 : Guide rail This paper scale applies to China National Standard (CNS) A4 specification (21〇X 297 DON) (Please read the back Precautions and then fill out this page) - Installed and subscribed to the Ministry of Economic Affairs Intellectual Property Bureau employee consumption cooperative printing -8-1260062 A7 B7 V. Invention description (β· 咅 保 保 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 Λ 2 3 6 7 8 9 吸 吸 调 调 调 □ Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y ·· · · ff nw CXI CO 4* : 1± 1± 1± 1± IX CO wl·—--U------ Loading -- (Please read the notes on the back and fill out this page)

、1T 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -9-1T Ministry of Economic Affairs Intellectual Property Bureau employee consumption cooperative printing This paper scale applies to China National Standard (CNS) A4 specification (210X297 mm) -9-

Claims (1)

1260062 A8 B8 C8 D8 六、申請專利範圍 彳 1 . 一種基板運送裝置，是用來運送方形基板的基板 運送裝置，其特徵爲：至少平行地配置有3根保持部，各 保持部上至少設有2個可沿著長軸方向調整位置的吸著部 ，並在位於中央的保持部之長軸方向的中央部固定有吸著 部。。 2 _如申請專利範圍第1項之基板運送裝置，其中前 述保持部係由一對平行延伸的棒所構成。 3 .如申請專利範圍第1項之基板運送裝置，其中前 述基板裝置係形成上下2段，且上段保持部與下段保持部 均可獨立驅動。 4 ·如申請專利範圍第1項之基板運送裝置，其中前 述吸著部係由：連結於真空幫浦之類減壓源的撓管、及包 覆該撓管的襯墊所構成。 5 ·如申請專利範圍第1項之基板運送裝置，其中， 在前述長軸方向上將量尺設成緊鄰著可調整位置的吸著部 (請先閲讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -10-1260062 A8 B8 C8 D8 VI. Patent Application No. 1. A substrate transporting apparatus is a substrate transporting apparatus for transporting a square substrate, characterized in that at least three holding portions are arranged in parallel, and at least each holding portion is provided Two absorbing portions that can be adjusted in the long axis direction are fixed, and a absorbing portion is fixed to a central portion of the central portion of the holding portion in the longitudinal direction. . The substrate transporting device of claim 1, wherein the holding portion is formed by a pair of rods extending in parallel. 3. The substrate transfer device of claim 1, wherein the substrate device is formed in two upper and lower stages, and the upper stage holding portion and the lower stage holding portion are independently driven. The substrate transporting apparatus according to claim 1, wherein the absorbing portion is constituted by a flexible tube connected to a pressure reducing source such as a vacuum pump, and a gasket covering the flexible tube. 5. The substrate transport device of claim 1, wherein the measuring unit is disposed in the longitudinal direction of the absorbing portion adjacent to the adjustable position (please read the back of the back sheet and fill in the page). Ministry of Intellectual Property Bureau employee consumption cooperative printed this paper scale applicable to China National Standard (CNS) A4 specification (210X297 mm) -10-
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI602257B (en) * 2015-11-03 2017-10-11 亞智科技股份有限公司 Absorption conveying device and method for conveying and carrying substrate

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101023729B1 (en) * 2004-06-30 2011-03-25 엘지디스플레이 주식회사 Shuttle and Transferring Method to transfer Large size plate for LCD manufacturing
KR100780718B1 (en) 2004-12-28 2007-12-26 엘지.필립스 엘시디 주식회사 Slit coater having apparatus of supplying coating fluid
KR100675643B1 (en) 2004-12-31 2007-02-02 엘지.필립스 엘시디 주식회사 Slit coater
KR100700181B1 (en) 2004-12-31 2007-03-27 엘지.필립스 엘시디 주식회사 Slit coater having standby unit of nozzle and method of coating using thereof
KR100700180B1 (en) 2004-12-31 2007-03-27 엘지.필립스 엘시디 주식회사 Slit coater having pre-spreading unit and method of coating using thereof
JP4765365B2 (en) * 2005-03-25 2011-09-07 凸版印刷株式会社 Substrate transfer device
KR100971288B1 (en) * 2008-08-22 2010-07-20 주식회사 탑 엔지니어링 An array tester
JP6186124B2 (en) 2012-12-14 2017-08-23 東京応化工業株式会社 Transfer arm, transfer device, and transfer method
CN107883773A (en) * 2017-11-06 2018-04-06 武汉华星光电半导体显示技术有限公司 Substrate bearing device and roasting plant
CN111791255B (en) * 2020-08-14 2022-01-25 维信诺科技股份有限公司 Mechanical arm

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5593515U (en) * 1978-09-08 1980-06-28
JPH0644155Y2 (en) * 1988-09-12 1994-11-14 新電元工業株式会社 Printed circuit board component insertion device
JPH0466129U (en) * 1990-10-08 1992-06-10
JP3095512B2 (en) * 1992-01-21 2000-10-03 シチズン時計株式会社 Electronic component automatic mounting device
JPH0677244U (en) * 1993-04-06 1994-10-28 神鋼電機株式会社 Wafer transfer pencil replacement jig
JPH08139153A (en) * 1994-11-10 1996-05-31 Dainippon Screen Mfg Co Ltd Single wafer processing system, wafer transfer system and cassette
JPH08297279A (en) * 1995-04-25 1996-11-12 Dainippon Screen Mfg Co Ltd Device and method for transferring substrate
JP3563851B2 (en) * 1995-12-05 2004-09-08 大日本スクリーン製造株式会社 Substrate transfer device
JPH09167750A (en) * 1995-12-14 1997-06-24 Tokyo Ohka Kogyo Co Ltd Method and equipment for cleaning fringe part of substrate
JPH10146784A (en) * 1996-11-19 1998-06-02 Dainippon Printing Co Ltd Board carrying robot hand
JP4087925B2 (en) * 1997-06-12 2008-05-21 大日本印刷株式会社 Substrate transfer system
JPH11188681A (en) * 1997-12-24 1999-07-13 Canon Inc Hand for carrying substrate, and its adsorptive mechanism

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI602257B (en) * 2015-11-03 2017-10-11 亞智科技股份有限公司 Absorption conveying device and method for conveying and carrying substrate

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