TW200518154A - X-ray tube - Google Patents

X-ray tube

Info

Publication number
TW200518154A
TW200518154A TW093127957A TW93127957A TW200518154A TW 200518154 A TW200518154 A TW 200518154A TW 093127957 A TW093127957 A TW 093127957A TW 93127957 A TW93127957 A TW 93127957A TW 200518154 A TW200518154 A TW 200518154A
Authority
TW
Taiwan
Prior art keywords
ray tube
silicon foil
enclosed container
container
functioned
Prior art date
Application number
TW093127957A
Other languages
English (en)
Other versions
TWI354307B (en
Inventor
Tatsuya Matsumura
Tomoyuki Okada
Tooru Yamamoto
Hidetsugu Takaoka
Tetsuro Endo
Original Assignee
Hamamatsu Photonics Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics Kk filed Critical Hamamatsu Photonics Kk
Publication of TW200518154A publication Critical patent/TW200518154A/zh
Application granted granted Critical
Publication of TWI354307B publication Critical patent/TWI354307B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith
    • H01J35/18—Windows
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith
    • H01J35/18—Windows
    • H01J35/186—Windows used as targets or X-ray converters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • H01J35/116—Transmissive anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/081—Target material

Landscapes

  • X-Ray Techniques (AREA)
  • Measurement Of Radiation (AREA)
  • Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
TW093127957A 2003-09-16 2004-09-16 X-ray tube and static eliminator TWI354307B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003323461 2003-09-16
JP2003323534 2003-09-16

Publications (2)

Publication Number Publication Date
TW200518154A true TW200518154A (en) 2005-06-01
TWI354307B TWI354307B (en) 2011-12-11

Family

ID=34380301

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093127957A TWI354307B (en) 2003-09-16 2004-09-16 X-ray tube and static eliminator

Country Status (6)

Country Link
US (1) US7526069B2 (zh)
JP (1) JP4969851B2 (zh)
KR (1) KR101096338B1 (zh)
CN (1) CN1853252B (zh)
TW (1) TWI354307B (zh)
WO (1) WO2005029531A1 (zh)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI427666B (zh) * 2005-10-07 2014-02-21 Hamamatsu Photonics Kk An X-ray tube and an X-ray source comprising the X-ray tube
TWI427667B (zh) * 2005-10-07 2014-02-21 Hamamatsu Photonics Kk X-ray tube and non-destructive inspection device
TWI427664B (zh) * 2005-10-07 2014-02-21 Hamamatsu Photonics Kk X-ray tube and X-ray source containing it
TWI488210B (zh) * 2012-10-02 2015-06-11 Futaba Denshi Kogyo Kk Ｘ射線管
TWI490907B (zh) * 2012-10-02 2015-07-01 雙葉電子工業股份有限公司 Ｘ射線管
TWI666973B (zh) * 2014-07-18 2019-07-21 日商佳能股份有限公司 陽極、以及ｘ射線產生管、ｘ射線產生設備與使用其的放射線攝影系統

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1683175B1 (en) * 2003-10-07 2009-06-03 Koninklijke Philips Electronics N.V. Method of manufacturing a window transparent for electrons of an electron beam, in particular of an x-ray source
JP5221215B2 (ja) * 2008-06-13 2013-06-26 浜松ホトニクス株式会社 Ｘ線発生装置
MX2012008598A (es) 2010-02-08 2012-08-15 Tetra Laval Holdings & Finance Ensamblaje y metodo para reducir arrugas en una lamina metalica en un arreglo circular.
JP5730497B2 (ja) * 2010-04-28 2015-06-10 浜松ホトニクス株式会社 Ｘ線発生装置
GB2480451A (en) * 2010-05-18 2011-11-23 E2V Tech Electron tube rf output window
JP5787626B2 (ja) * 2011-06-07 2015-09-30 キヤノン株式会社 Ｘ線管
KR101818681B1 (ko) * 2011-07-25 2018-01-16 한국전자통신연구원 게터 내장형 전계방출 엑스선관 장치
JP5875297B2 (ja) * 2011-08-31 2016-03-02 キヤノン株式会社 放射線発生管及びそれを用いた放射線発生装置、放射線撮影システム
WO2013185827A1 (de) * 2012-06-14 2013-12-19 Siemens Aktiengesellschaft Röntgenstrahlungsquelle, verfahren zum erzeugen von röntgenstrahlung sowie verwendung einer monochromatischen röntgenstrahlung aussendenden röntgenstrahlungsquelle
JP6063273B2 (ja) * 2013-01-29 2017-01-18 双葉電子工業株式会社 Ｘ線照射源
JP6063272B2 (ja) * 2013-01-29 2017-01-18 双葉電子工業株式会社 Ｘ線照射源及びｘ線管
CN103219212B (zh) * 2013-05-08 2015-06-10 重庆启越涌阳微电子科技发展有限公司 石墨烯作为x射线管阴极及其x射线管
JP6552289B2 (ja) * 2014-07-18 2019-07-31 キヤノン株式会社 Ｘ線発生管、ｘ線発生装置、ｘ線撮影システム
US9779847B2 (en) * 2014-07-23 2017-10-03 Moxtek, Inc. Spark gap X-ray source
JP6429602B2 (ja) * 2014-11-12 2018-11-28 キヤノン株式会社 陽極及びこれを用いたｘ線発生管、ｘ線発生装置、ｘ線撮影システム
JP2016134251A (ja) * 2015-01-16 2016-07-25 双葉電子工業株式会社 Ｘ線管
JP6867224B2 (ja) * 2017-04-28 2021-04-28 浜松ホトニクス株式会社 Ｘ線管及びｘ線発生装置
KR101966794B1 (ko) * 2017-07-12 2019-08-27 (주)선재하이테크 전자 집속 개선용 엑스선관
US20180061608A1 (en) * 2017-09-28 2018-03-01 Oxford Instruments X-ray Technology Inc. Window member for an x-ray device
US10734187B2 (en) 2017-11-16 2020-08-04 Uih-Rt Us Llc Target assembly, apparatus incorporating same, and method for manufacturing same
JP6580231B2 (ja) * 2018-10-04 2019-09-25 キヤノン株式会社 Ｘ線発生管、ｘ線発生装置及びｘ線撮影システム
EP3933881A1 (en) 2020-06-30 2022-01-05 VEC Imaging GmbH & Co. KG X-ray source with multiple grids
JP2022139731A (ja) * 2021-03-12 2022-09-26 日本電子株式会社 Ｘ線検出器及び窓部製造方法
KR102384833B1 (ko) * 2021-09-16 2022-04-08 주식회사 이레이 시료에 대한 열 전달을 방지하는 타겟부를 가진 x선 발생 장치 및 그 제조 방법
US20230243762A1 (en) * 2022-01-28 2023-08-03 National Technology & Engineering Solutions Of Sandia, Llc Multi-material patterned anode systems

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US4119855A (en) * 1977-07-08 1978-10-10 Massachusetts Institute Of Technology Non vacuum soft x-ray lithographic source
US4632871A (en) * 1984-02-16 1986-12-30 Varian Associates, Inc. Anodic bonding method and apparatus for X-ray masks
CN85106786B (zh) * 1985-09-07 1988-11-30 株式会社东芝 X射线管
US4862490A (en) * 1986-10-23 1989-08-29 Hewlett-Packard Company Vacuum windows for soft x-ray machines
JPH01276550A (ja) * 1988-04-27 1989-11-07 Nec Corp 軟ｘ線取出し窓の構造およびその製造方法
US5111493A (en) * 1988-11-25 1992-05-05 Wisconsin Alumni Research Foundation Portable X-ray system with ceramic tube
JPH02208601A (ja) * 1989-02-08 1990-08-20 Seiko Instr Inc 光学用窓材及びその製造方法
JPH03105300A (ja) * 1989-09-20 1991-05-02 Mitsubishi Electric Corp 軟ｘ線透過窓
US5161179A (en) * 1990-03-01 1992-11-03 Yamaha Corporation Beryllium window incorporated in X-ray radiation system and process of fabrication thereof
JP2951477B2 (ja) 1992-05-13 1999-09-20 浜松ホトニクス株式会社 物体の電位を変化させる方法、および所定帯電物体の除電方法
JPH0745223A (ja) * 1993-06-17 1995-02-14 Hamamatsu Photonics Kk Ｘ線管
GB9407073D0 (en) * 1994-04-09 1994-06-01 Atomic Energy Authority Uk X-Ray windows
JP3594716B2 (ja) * 1995-12-25 2004-12-02 浜松ホトニクス株式会社 透過型ｘ線管
JPH1187088A (ja) 1997-09-05 1999-03-30 Takasago Thermal Eng Co Ltd 不可視光照射装置
JP2000306533A (ja) * 1999-02-19 2000-11-02 Toshiba Corp 透過放射型ｘ線管およびその製造方法
JP2001059900A (ja) 1999-08-24 2001-03-06 Ushio Inc 電子ビーム管
JP2001307669A (ja) * 2000-04-21 2001-11-02 Shimadzu Corp 軟ｘ線発生装置及びｘ線検査装置
JP4374727B2 (ja) 2000-05-12 2009-12-02 株式会社島津製作所 Ｘ線管及びｘ線発生装置
JP2003131000A (ja) 2001-10-26 2003-05-08 Japan Science & Technology Corp 投影型ｘ線顕微鏡

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI427666B (zh) * 2005-10-07 2014-02-21 Hamamatsu Photonics Kk An X-ray tube and an X-ray source comprising the X-ray tube
TWI427667B (zh) * 2005-10-07 2014-02-21 Hamamatsu Photonics Kk X-ray tube and non-destructive inspection device
TWI427664B (zh) * 2005-10-07 2014-02-21 Hamamatsu Photonics Kk X-ray tube and X-ray source containing it
TWI488210B (zh) * 2012-10-02 2015-06-11 Futaba Denshi Kogyo Kk Ｘ射線管
TWI490907B (zh) * 2012-10-02 2015-07-01 雙葉電子工業股份有限公司 Ｘ射線管
US9263227B2 (en) 2012-10-02 2016-02-16 Futaba Corporation X-ray tube
TWI666973B (zh) * 2014-07-18 2019-07-21 日商佳能股份有限公司 陽極、以及ｘ射線產生管、ｘ射線產生設備與使用其的放射線攝影系統
US10998161B2 (en) 2014-07-18 2021-05-04 Canon Kabushiki Kaisha Anode, and x-ray generating tube, x-ray generating apparatus, and radiography system using the same

Also Published As

Publication number Publication date
US20060280290A1 (en) 2006-12-14
CN1853252B (zh) 2010-12-22
US7526069B2 (en) 2009-04-28
TWI354307B (en) 2011-12-11
KR20060064607A (ko) 2006-06-13
CN1853252A (zh) 2006-10-25
JPWO2005029531A1 (ja) 2007-11-15
WO2005029531A1 (ja) 2005-03-31
JP4969851B2 (ja) 2012-07-04
KR101096338B1 (ko) 2011-12-20

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees