TW200505776A - Transport system having shared load-lock front-end assembly - Google Patents
Transport system having shared load-lock front-end assemblyInfo
- Publication number
- TW200505776A TW200505776A TW093102021A TW93102021A TW200505776A TW 200505776 A TW200505776 A TW 200505776A TW 093102021 A TW093102021 A TW 093102021A TW 93102021 A TW93102021 A TW 93102021A TW 200505776 A TW200505776 A TW 200505776A
- Authority
- TW
- Taiwan
- Prior art keywords
- transport system
- end assembly
- shared load
- lock front
- provides
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67201—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the load-lock chamber
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US44396903P | 2003-01-31 | 2003-01-31 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200505776A true TW200505776A (en) | 2005-02-16 |
Family
ID=32850814
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW093102021A TW200505776A (en) | 2003-01-31 | 2004-01-29 | Transport system having shared load-lock front-end assembly |
Country Status (2)
Country | Link |
---|---|
TW (1) | TW200505776A (fr) |
WO (1) | WO2004069698A2 (fr) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102004058557A1 (de) * | 2004-12-03 | 2006-06-08 | Asys Automatic Systems Gmbh & Co. Kg | Transfervorrichtung für die Handhabung von flächigen Substraten |
DE102005039453B4 (de) | 2005-08-18 | 2007-06-28 | Asys Automatic Systems Gmbh & Co. Kg | Bearbeitungsanlage modularen Aufbaus für flächige Substrate |
JP4959457B2 (ja) | 2007-07-26 | 2012-06-20 | 東京エレクトロン株式会社 | 基板搬送モジュール及び基板処理システム |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5202716A (en) * | 1988-02-12 | 1993-04-13 | Tokyo Electron Limited | Resist process system |
JPH0756879B2 (ja) * | 1988-03-31 | 1995-06-14 | 日鉄セミコンダクター株式会社 | 半導体の無塵化製造装置 |
US4923584A (en) * | 1988-10-31 | 1990-05-08 | Eaton Corporation | Sealing apparatus for a vacuum processing system |
JPH081923B2 (ja) * | 1991-06-24 | 1996-01-10 | ティーディーケイ株式会社 | クリーン搬送方法及び装置 |
JPH0697258A (ja) * | 1992-09-17 | 1994-04-08 | Hitachi Ltd | 連続真空処理装置 |
JP3202929B2 (ja) * | 1996-09-13 | 2001-08-27 | 東京エレクトロン株式会社 | 処理システム |
US6752585B2 (en) * | 2001-06-13 | 2004-06-22 | Applied Materials Inc | Method and apparatus for transferring a semiconductor substrate |
-
2004
- 2004-01-29 TW TW093102021A patent/TW200505776A/zh unknown
- 2004-02-02 WO PCT/US2004/002859 patent/WO2004069698A2/fr active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2004069698A2 (fr) | 2004-08-19 |
WO2004069698A3 (fr) | 2005-03-24 |
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