TW200503037A - High mass resolution magnet for ribbon beam ion implanters - Google Patents

High mass resolution magnet for ribbon beam ion implanters

Info

Publication number
TW200503037A
TW200503037A TW093113647A TW93113647A TW200503037A TW 200503037 A TW200503037 A TW 200503037A TW 093113647 A TW093113647 A TW 093113647A TW 93113647 A TW93113647 A TW 93113647A TW 200503037 A TW200503037 A TW 200503037A
Authority
TW
Taiwan
Prior art keywords
mass analyzer
high mass
ribbon beam
mass resolution
ion implanters
Prior art date
Application number
TW093113647A
Other languages
English (en)
Inventor
Victor M Benveniste
yong-zhang Huang
Original Assignee
Axcelis Tech Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/606,087 external-priority patent/US6770888B1/en
Application filed by Axcelis Tech Inc filed Critical Axcelis Tech Inc
Publication of TW200503037A publication Critical patent/TW200503037A/zh

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
TW093113647A 2003-06-25 2004-05-14 High mass resolution magnet for ribbon beam ion implanters TW200503037A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/606,087 US6770888B1 (en) 2003-05-15 2003-06-25 High mass resolution magnet for ribbon beam ion implanters

Publications (1)

Publication Number Publication Date
TW200503037A true TW200503037A (en) 2005-01-16

Family

ID=57798098

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093113647A TW200503037A (en) 2003-06-25 2004-05-14 High mass resolution magnet for ribbon beam ion implanters

Country Status (1)

Country Link
TW (1) TW200503037A (zh)

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