TW200409987A - Optical lighting device, test device for solid-state imaging device and repeater - Google Patents

Abstract

The invention provides an optical lighting device capable of improving the photoelectric conversion characteristics and the test efficiency of a solid-state imaging element, and easily and accurately regulating the characteristics of a light applied to the solid-state imaging element. The optical lighting device comprises a light source 2 for emitting light; a splitting optical fiber bundle having a plurality of optical fibers bundled into one group at the input end thereof and into a plurality of groups at the output end thereof, and splitting a light entered via the input end from the light source into a plurality of lights at the output end; and an optical system unit 30 incorporating a plurality of independent optical systems for independently regulating light fluxes output from the output end of the splitting optical fiber bundle 20 and introducing them to a solid-state imaging element.

Description

200409987 V. Description of the invention (1) [Technical field to which the invention belongs]

The invention relates to a light irradiation device, which will be used to inspect C C D (Charge Coupled Device) and CMOS (Complementary

Light is used to inspect the characteristics of solid-state imaging elements such as metal oxide semiconductors. [Prior art] In the manufacturing process of photographic elements such as CCDs and CMOS, it is necessary to irradiate light with various conditions to the photographic elements and check their photoelectric conversion characteristics.

Photographic elements such as CCDs and CMOSs have a plurality of light-receiving elements arranged two-dimensionally. In order to check whether the characteristics of these light-receiving elements are maintained within the required ranges', it is necessary to irradiate the light-receiving elements with light having a uniform illumination distribution. If the illuminance of the light irradiated to each light-receiving element is uneven, scattered unevenness occurs during inspection ', which is also the cause of the decrease in yield. Therefore, in the inspection of the imaging element, the irradiation of light that holds the average illuminance distribution is important. Then, in order to improve the inspection efficiency of the imaging element, multiple imaging elements must be inspected at the same time. When measuring a plurality of imaging devices at the same time, for example, the radiation is extended to a wide area including light that does not need to come from a light source, and a plurality of imaging elements are arranged in the area to perform inspection.

In this case, it is necessary to expand the use of light from a light source to a predetermined optical system to equalize the illuminance distribution, so that the illuminance of the irradiated light is reduced, and it is impossible to make the light of sufficient illuminance correspond to a required place. In addition, since the light is irradiated to a plurality of imaging elements together, the light cannot be made.

2197-5965-PF (Nl); Chentf.ptd Page 5 200409987 V. Description of the Invention (2) The F value of the department corresponds to the independent adjustment of a plurality of photographic elements, and the plurality of photographic elements are performed with independent light patterns. Irradiation. Therefore, it is difficult to make the illuminances of the light irradiated to a plurality of 7L pieces of photography simultaneously correct and average. [Disclosure of the Invention] An object of the present invention is to provide a light irradiation device that can improve the photoelectric conversion characteristics of a solid-state imaging element, and can easily and accurately adjust the characteristics of light irradiated by the solid-state imaging element. Another object of the present invention is to provide a test device and a relay device for a solid-state imaging device, which can improve the photoelectric conversion characteristics of the solid-state imaging device, and can easily and accurately adjust the characteristics of light irradiated by the solid-state imaging device. '' This hair moon light irradiating device is a radon irradiating device that can irradiate light to a body imaging element at the same time. The light from the source is divided into a plurality of light at the output end, and the light output technique is used to separate the light output from the output end of the optical fiber bundle for splitting: Plural independent optical systems. Preferably, the light irradiation device of the present invention is the light irradiation device described in item 1 of the scope of patent application, 1i female u 2 + FREE, +, #, / 5 π /, more common optical system Together adjust the light from the light source: the light incident on the splitting fiber bundle. In addition, the car's KK 'has more optical components, so that the department is equipped with J at a position centered on a predetermined axis, and the above two can be used as center to turn, and the structure of the plurality of independent optical systems can be changed.

2197-5965-PF (Nl); Chentf.ptd

Page 6 200409987 V. Description of the invention (3) In addition, the light irradiation device of the present invention further guides the guide to the above-mentioned division fiber bundle, = the light from the above-mentioned light source uses the fiber bundle and the division beam to make optical, The optical fiber bundle cited above is movable relative to the above-mentioned splitting & fiber coupling device, at least the test device of the solid-state imaging element of the present invention. Testing photoelectric conversion on solid-state photographic elements = The test device for illuminating the photographic element with test light has: measuring device = device, the solid element is electrically connected to the above-mentioned test head, "Transfer :: There are The test of the photoelectric conversion characteristics is necessary to apply the above-mentioned solid-state imaging light source; to penetrate the above-mentioned test head, and to guide the light-sensing solid-state imaging element that is electrically connected to the device from the light source. -Guide, ^ one optical fiber is integrated at the input end and integrated at the output end = at: the light from the above-mentioned guide fiber bundle incident at the wheel-in end is divided into a plurality of light at the output end, and is directed to the relay The device makes a solid-state imaging element that is sexually connected. In addition, the test device of the solid-state imaging element of the present invention has the above-mentioned combining device for optically combining the lead optical fiber bundle and the split optical fiber bundle; the test head, light source, and lead optical fiber bundle may be The relay device moves. The relay device of the present invention is to irradiate the test light to the solid-state imaging element, and to electrically connect the test head of the test device for testing the photoelectric conversion characteristics to the above-mentioned solid-state imaging element, and transmit the photoelectric change to the above-mentioned solid-state imaging element.

2197-5965-PF (Nl); Chentf.ptd 200409987 A plurality of solid-state photons necessary for the test are illuminated with light to each of the above-mentioned input terminals and a beam of light from the light source is directed to the above-mentioned five, Description of the invention (4) At the measurement position of the switching characteristic, a plurality of optical fibers for the above-mentioned test enter the light at the input end and pass through the fiber bundle. Incident at the origin, at light. From the whole, and the irradiation is effectively equalized. In addition, a predetermined axis is used as a learning component, and a conditional light is the same as in the [Embodiment]. The light from the light output end corresponding to the output end is irradiated to the position of the center in the present invention and changed when the plural is changed. The output of the complex source is in the complex number through the solid state of each photographic element, and the number of independent photographic relay devices can be provided with: a connection device positioned at the existing electrical connection; the opening of the solid-state imaging element; the complex output A plurality of beams are integrated at the end, and the light of the splitting light for each solid-state imaging element is divided into a plurality of lanes from the top of the wheel. The light beams from the division optical fiber bundle are divided into a number of independent optical systems to make independent adjustments. / With this, the light output from the light source has a flat illuminance distribution of the light. The arrangement of a plurality of independent optical systems on the optical optical system that rotates around a predetermined axis will change various shadow elements. Hereinafter, the first embodiment of the present invention will be described in detail with reference to the drawings. Made. Number! The figure shows a schematic configuration of the light irradiation device according to an embodiment of the present invention. The light irradiation device i according to this embodiment is widely used in the following examples, such as "CCD", "CCD", and CMOS (charge coupled device) and CMOS. Du Yan

Inspection of electrical characteristics

2197-5965-PF (Nl); Chentf.ptd page 8 200409987 5. In the description of the invention (5), the light receiving surface of the photographic element is illuminated with light. The light irradiation device 1 of this embodiment mode includes a light source 2, a condenser lens 10, a mechanical slit 11, an ND filter turntable 12, a color filter turntable 13, a Frier lens 15, a splitting fiber bundle 20, and an optical device.系 Unit 30. Furthermore, the light source 2, the condenser lens 10, the mechanical slit 11 ', the ND filter dial 12, the color filter dial 13, and the Frier lens 15 are housed in a cabinet 0B, which constitutes one embodiment of the common optical system of the present invention. state. The optical system unit 30 includes an optical system corresponding to a plurality of independent optical systems, as described later. The light source 2 is, for example, a halogen lamp, a xenon lamp, or a metal light lamp. The light source 2 has a reflector (not shown) which reflects the emitted light in a predetermined direction and collects the light. The condenser lens 10 focuses the light from the light source 2 to the mechanical slit 11. As shown in Fig. 1, the mechanical slit 11 is composed of two movable plates 11A and 11B, and the area of the opening 11C formed therebetween is adjusted by adjusting the movement of the movable plates 11A and 11B. By adjusting the area of the opening 11, the amount of light collected by the light collecting lens 10 is adjusted.

The ND filter dial 12 is rotatably supported around a support shaft 14. The ND filter dial 12 holds plural types of ND (Neutral Density) filters in the circumferential direction. The ND filter will pass the light from the light source through the mechanical slit to reduce the light in a predetermined ratio without changing its spectral composition. The ND filter dial 12 is rotated to estimate and select a desired amount of light reduction. Furthermore, the ND filter dial 12 has a single opening, and passes through this opening without dimming.

2197-5965-PF (Nl); Chentf.ptd Page 9 200409987 V. Description of the Invention (6) The color filter turntable 1 3 is supported by the support, and the Ding Fu glaze 14 is rotatably supported as the center. The color filter dial 1 3 protects the surname along the circumferential direction. Seven a 1 π 〇 h 1. The manta sentence holds plural kinds of filters. The light from the light source 2 passes through a color filter and a light having a wavelength of a calender. With the color dome sheet dial, you can respond to the changes; y calculate the color selection; the desired color dope sheet. In addition, the color doppler sheet has a single opening, through which the opening can still be passed without a long distance being selected. The F r i e r lens 15 is an optical element in which a single-transparent lens is arranged in a matrix shape. The F r 1 e r lens 1 5 series A τ occupant & t Lema is provided by averaging the illuminance distribution of light from the light source 2. F r 丨 is similar to rrier mirror 15 and has a rectangular shape.

The above-mentioned common optical system has a function of adjusting the light amount, illuminance, illuminance distribution, wavelength, and the like of light from the light source 2. Here, 'FIG. 2' shows the structure of a split optical fiber bundle 20. As shown in FIG. Figure 28 is a side view, and Figure 2B is a cross-sectional view taken along line A_A in Figure 2A. The division optical fiber bundle 20 is composed of a bundle of a plurality of optical fibers. Segmentation First, the -end of the bundle 20 is supported by the support member 21. The supporting member 21 bundles optical fibers having a diameter of 50 / ZΠ1 into a rectangular shape having a cross-sectional size of 20 mm × 20 mm. Further, the supporting member 2 is provided on the chassis OB. The optical fiber bundle 20 for division is divided into a plurality of (4) bundles 20a from the middle, and the ends of the multiple optical bundles 20a that have been separated are optical components.

The light guide 23 is connected to the optical system unit 3m: 2 to 3 described later, and the light output from the end of the plurality of optical fiber bundles 20a is guided to the optical system unit 30. The number of optical fibers constituting each optical fiber bundle 20A is equal to each other. ^ The input end of the cutting fiber bundle 20 is rectangular as described above. The shape of the input end roughly matches the shape of the Frier lens 15 described above.

200409987 V. Description of the invention (7) ~ 'In the case where the cross section of the input end of the fiber bundle 20 for splitting is round, the combining efficiency with the Frier lens 15 can be improved. . As shown in Fig. 1, the optical system unit 30 independently adjusts the characteristics of the amount of light, the illuminance, and the illuminance distribution 'from each output end of the split optical fiber bundle 20 to output a plurality of independent rays RL. These light rays RL are respectively irradiated on the light receiving surfaces of a plurality of solid-state imaging elements to be inspected, which are arranged at predetermined positions below the optical system unit 30 as described later. ^. The third figure shows the internal structure of the optical system unit 30. Fig. 3B shows the constituent elements of the optical chirp unit 30. As shown in FIG. 3B, ‘a platform is provided below the optical system unit’ and the photographic element to be inspected is arranged at a predetermined position on the platform. These photographic elements 101 are connected to a test device (not shown). A plurality of independent optical systems 31 are provided inside the optical system unit 30. The optical system 31 is composed of a lens 32, a frier lens 33, a lens 34, a diffuser 35, a central light sheet 36, imaging lenses 37, 38, and an iris turret 39. Further, while the optical system 31 is provided corresponding to the four output ends of the split optical fiber bundle 20, the variable aperture dial 39 is commonly provided in the four optical systems.

The Frier lens 33, the diffusion plate 35, and the center filter 36 are provided to equalize the illuminance of light incident from each of the output ends of the split optical fiber bundle 20 through the light guide 23. In addition, the central filter 36 is a filter that gradually reduces the degree of light reduction to the center of the cross section in order to prevent the illuminance distribution of light from gradually decreasing toward the peripheral portion of the light cross section and to average the entire area of the cross section.

200409987 V. Description of the invention (8) In addition, each of the four diffuser plates 35 and each of the four water-repellent filters 36, which are selected in order to make the final rotation, has independent selection and illumination distribution. For example, two: keep the desired amount of light, irradiance, illuminance, and irreducible light, and the four lights RL of the temple are equal to each other. The knife can also choose the diffuser plate 35 and the central filter variable aperture dial 39, which are different from each other in the area of the third circle. ~ OP3. Each of the opening-type 3 blades is provided corresponding to the four optical systems 31. Sayu Shinta: "It rotates around the shaft 40. The rotating shaft 40 is rotated by a horse driving device. To calculate the variable aperture dial 39, for ===

One of the openings OP1 ~ OP3 is selected as the light 31, and the value is selected by the same needle. Then, the F of the four optical systems 31 is changed. Next, an example of an inspection using the above structure will be described. First, the imaging element of the device 1 is irradiated. First, the optical system unit 30 is irradiated with light from the light source 2 while being arranged at a predetermined position. The light from the m light source 2 passes through the condenser lens 10, and the mechanical slit n, nd filters. Plate 12, shirt color filter turntable 13, and lens

After making desired adjustments to the illuminance, illuminance distribution, wavelength, etc., the optical fiber bundle 20 is used. ”, Knife edge 丨 J In the splitting optical fiber bundle 20, the light incident from the support member side is divided into several numbers and is outputted from the light guide 23. At this time, since the number of optical fibers connected to the respective output ends of the splitting optical fiber bundle 20 of the guide 23 is at noon 2197-5965-PF (Nl); Chenf.ptd page 12 200409987 V. Description of the invention (9) The light amount and illuminance of the light on each light guide 23 are almost equal. The light rays that have been incident on the plurality of optical systems 30 through the splitting optical fiber bundle 20 are independently adjusted by the Frier lens 33, the diffuser 35, the central mirror sheet 36, and the variable aperture dial 39. And other characteristics. Thereby, each light output through the plurality of optical systems 30 is equal to each other in terms of light quantity, brightness, and the like, and the light rays are incident on the light receiving surfaces of a plurality of photographic elements arranged on the platform 〇〇〇. By this means, since the light having the same characteristics and adjusted are incident on the light-receiving surfaces of the plurality of solid-state imaging elements, the plurality of imaging elements can be inspected simultaneously under the same conditions. 'As described above' In the present embodiment, the splitting fiber bundle 20 is used to divide < »the light from a single light source 2 into equal plural light channels, and the divided light is used for independent optical adjustments of 3 0 for adjustment. 'And illuminate the corresponding solid-state imaging element. Therefore, the light of the light source 2 can be effectively used. In addition, even if the light incident on each optical system 30 has an illuminance difference, since each optical system 30 can be adjusted independently, it is possible to irradiate a plurality of solid-state imaging devices with light under the same conditions simultaneously. In addition, a plurality of optical systems 30 are arranged at positions symmetrical to the rotation axis 40, and with the rotation axis 40 as the center, optical members such as the variable aperture dial 39 are rotatably provided, and the variable aperture dial 3 9 — By changing the structure of the plurality of optical systems 30, the conditions of the light irradiated to the plurality of solid-state imaging elements can be changed at the same time. Furthermore, in this embodiment mode, although the characteristics of the light incident on each optical chirp 30 are adjusted using the diffusion plate 35 and the central filter 36, each of the optical lenses 30 is captured.

2197-5965-PF (Nl); Chentf.ptd p. 13 200409987

There is a difference in illuminance due to light, and it is necessary to adjust the output in this situation. For example, the anti-reflection film has a different degree of micro-optical system 30 and different conditions may be used for one condition. In addition, the light is irradiated in the second embodiment, and the filter on the glass is adjusted. In other words, in this embodiment, the light is irradiated to the copy. In this embodiment, the light irradiated to the copy is placed on each light to prevent the formation of light. Solid-state photography can also be applied to the optical path where the defense department 30 is formed on both or one side of the micro-substrate, and the number of light-passing sheets that reflect the reflection film can be fine-tuned for each illuminance difference. Although the light irradiating device 1 will be described in terms of the same imaging element, the structure of several solid-state imaging elements is also required in addition to the element, and the light irradiating device 1 needs to be properly adjusted.

Fig. 4 shows the structure of a test apparatus for a solid-state imaging element suitable for a light irradiation device according to another embodiment of the present invention. In FIG. 4, the test device 200 checks, for example, the photoelectric conversion characteristics of a solid-state imaging element (for example, a CCD) formed on a wafer 400. The test device 200 is composed of a table top 101, a test head 2 01, a probe card 2 5 0, and a mobile platform 2 6 0. The tabletop 201 is an official test head 201, and the solid-state imaging element 401 is inspected based on the signal of the solid-state imaging element formed on the wafer 400 by the test head 001. on. The test head 2 0 1 is set by the rotation of the driving arm 202, and the test head 2 1 is moved from the base 2 5 5 as an example. The test head 2 0 1 is set on the base 2 5 and the base 20 5 The driving arm 202 is connected, and the test head 2 01 is moved from the base 2 05. Make test

2197-5965-PF (Nl); Chentf.ptd p. 14

Such as during cleaning and maintenance. The test head 201 is electrically connected to the 狳 and 狳. The test head needle plate 25G uses the wiring (not shown) as the imaging element 401 to apply electricity to the solid signal generation unit through the probe card 250, and passes the components of the generator 401 pattern generator and the like. The input of the signal is ^ to obtain the measured solid-state photography. ”W Λ is composed of an input unit and the like. W ί Γ 250 is set at a predetermined position below the test head 201. 25 = Probe protected by the solid-state imaging element 401 The ^ test head 201 is electrically connected to the solid-state imaging element. ^ 忒 The needle plate 250 is formed to form light for irradiating light to a plurality of solid-state imaging elements 4 (Π, and the opening 2 is provided on the opening 2_ It is described later = sub-fork group 30A. The optical module 30A is an implementation type of the modular independent optical system of the present invention. The mobile platform 260 holds the wafer 40,000 and is opposite to the probe. The plate 250 positions the wafer 400. The mobile platform 26o isolates the wafer 400 from the probe card 250 after the inspection is completed. The light irradiation device of this embodiment is composed of the light source 2 and the common optics. System 210, guide fiber bundle 220, couplers 221A, 221B, split fiber bundle 225, and optical module Group 30A. The light source 2 is provided on the test head 202, and has the same structure as the light source 2 of the first embodiment. The common optical system 2 10 is provided on the test head 200, and is the same as the first. The common optical system of the implementation type has the same function. The reference fiber bundle 2 2 0 is set on the test head 202, with a large number of optical fibers.

200409987 V. Description of the invention (12) Bundle configuration ′ For example, a bundle of optical fibers with a diameter of 50 // m is bundled into a rectangle with a cross-section size of 20_X 2Omm. The guide fiber bundle 220 guides the light from the light source 2 that has entered through the common optical system 21 to the fiber bundle 225 for division. The I coupler 2 2 1 A and 2 2 1 B are composed of optical elements such as a lens, and the optical fiber bundle 220 and the optical fiber bundle 225 for division are combined and introduced. The coupler 221A is provided on the guide fiber bundle 220 side. The coupler 221B is provided on the division optical fiber bundle 225 side. The handles 221A, 221B are an embodiment of the coupling device of the present invention. The splitting fiber bundle 2 2 5 is provided on the base 2 05 side and positioned relative to the probe card 250. This split optical fiber bundle 225 has the same structure as the split optical fiber bundle 20 of the first embodiment. The ends on the 1B side of the coupler 22 are gathered into a bundle, and the ends on the 2500 side of the probe card are divided into a plurality (four Root), and position the optical module 30A respectively. Fig. 5 is a sectional view of the structure of the optical module 30A. As shown in FIG. 5, the optical module 30A includes a flange 301, a light collecting lens 3 2, a diffusion plate 3 0 3, and a pin hole plate 3 0 4. Moreover, although a plurality of optical modules 30 A are provided, they all have the same optical characteristics. The flange 301 is composed of a cylindrical element and is fixed to the probe card 25. The flange 3 0 1 is formed of a material such as metal that cannot penetrate light. The light collecting mirror 302, the diffusion plate 303, and the pin hole plate 304 are held within the circumference of the flange 301. '' The light collecting mirror 302 extracts the light source 2

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The light L makes light collection. The diffuser plate 303 diffuses the light that has passed through the light-collecting mirror 302, and illuminance and illuminance are distributed. First, the pin hole plate 304 forms a pin hole 3 () 4ρ on the optical axis, and the light passing through 303 is irradiated through the pin hole 304ρ. Thereby, the inspection value is in contrast to the solid-state imaging element 401 positioned below the pin hole 304ρ. The diameter of the hole 3 04ρ defines the F value. Tian Weizheng In the test device 2000 with the above structure, when performing cleaning and maintenance, as shown in Fig. 6, the test head 200 was moved from the base 250 by rotating the driving arm.

In the present embodiment, the optical path 'from the light source 2 to the solid-state imaging element to be inspected is constituted by a guide fiber bundle 22 and a division fiber bundle 225', and the two are detachably coupled by the couplers 221A and 221B Therefore, the test head 202 can be moved. As in this embodiment, when a plurality of solid-state imaging elements 401 are inspected at the same time, from the viewpoint of uniformizing optical characteristics,

The positional relationship of the constituent elements of the light irradiation device is important. In particular, the position of the independent optical system and the splitting fiber bundle 2 2 5 with respect to the probe card 250 is important. In this embodiment, since the light collecting mirror 30 2, the diffuser plate 303, and the pin hole plate 304 constituting the independent optical system of the present invention are integrated, the optical module 30A and the probe plate 250 can be implemented with high accuracy. Position fit. Furthermore, in this embodiment, although the case where both the reference fiber bundle 220 and the splitting fiber bundle 225 are used is described, for example, a plurality of solid-state imaging elements 4 〇1 are not tested at the same time. In the case of using only the reference fiber bundle 220, the test light can also be introduced into a single unit.

2197-5965-PF (Nl); Chentf.ptd

200409987

A solid-state imaging element 401. As in the conventional embodiment, the light source 2 and the common optical system 2 10 are provided outside the test head 202, and the volume of the test head 202 is not enlarged. In addition, since the light source 2 serving as a heat source is disposed outside the test head 202, various substrates in the test head 202 are not affected by heat. Further progress, the guide fiber bundle 2 2 0 penetrates the test head 2 〇2, because the light of the source 2 is guided to the solid-state imaging element 4 by the guide fiber bundle 22 (). Attachment: 4η 1 can be two light At the same time that the utilization efficiency is improved, the adjustment range of the F value of the light emitted from each solid to 7L pieces 1 ..., can be expanded. The third embodiment A

Fig. 7 is a relay view of the present invention. In Fig. 7, the same symbols are used for the parts. The cross-section of the structure of one embodiment of the device. For the relay device 500, which is the same as the second embodiment, as shown in Fig. 7, it is released by the wind yz ~ knife edge. The output 钿 a is fixed to the hip part 250 a by the prior learning group 30A. From each of the wooden needle boards 2 5 0, it is clear that: the installed probe is the test of the relay device 5 0 0 of the building needle board 2 5 0 and the light used for division.

Instead of using the fiber bundle 225 of the test device 200 of the second embodiment, the @progress solid-state imaging element is placed in a group of 2 2 5 fibers in advance. The combination becomes easy, and the beam 225 and the probe card 250 will not be misaligned ... ^ ^ υ υ JL., Even in the test, the division is used 3 200409987 V. Description of the invention (15) Also, because the probe card 25 and the solid & A shadow element is positioned with the ordinary fiber bundle 225 for splitting, and the test light with stable solid-state imaging characteristics is placed in a solid-to-solid relationship. As a result, it is possible to irradiate the element At ~ to the element. In Bei Shi's sadness, although the fried end is fixed at 30A of the optical fiber bundle 225 for cutting through the optical module 30A, the optical fiber of the splitter is directly used for the needle board 250, without using an optical module. The structure of the group 250 is also possible. The outer end of the wheel is fixed to the probe card. Fourth embodiment Fig. 8 shows the test embodiment of the present invention. 2. Another practical application of the Zhongzhi coupling device ^ " Zhong 'is aimed at the optical fiber bundle 220 which is used as a guide and the = = = optical coupling device, and uses a coupler 221A composed of optical elements , 22 ^ 's situation will be explained. Du, Dao ^ Ξ i In order to irradiate the test light with uniform conditions, the optical axis 0a of the fiber bundle 22 () and the optical axis Ob of the splitting fiber bundle 225 must be precisely combined. However, since the test head 202 is movable, the optical axis 0 a of the optical fiber bundle 2 2 0 and the optical axis 0 b of the splitting optical fiber bundle 2 2 5 cannot be easily combined with each other. Therefore, in the present In the embodiment, a Frier lens 221C is used between the optical elements 2 2 1 A and 2 2 1 B. Since the Frier lens 2 21C has the function of averaging the intensity distribution of light, even if the optical axis Oa of the optical fiber bundle 220 and the optical axis Ob of the splitting optical fiber bundle 225 are slightly misaligned, it can absorb the misalignment caused influences. As a result, the optical axis 0a of the fiber bundle 22 0 guided by the guide can be suppressed.

2197-5965-PF (Nl); Chentf.ptd Page 19,200409987 V. Description of the invention (16) The characteristics of the light used for testing the solid-state imaging element caused by the misalignment with the optical axis 〇b of the splitting fiber bundle 225 confusion. In addition, the coupling device of the present invention is not limited to these implementation modes, and various changes can be made. The invention is not limited to the embodiments described above. In the above-mentioned embodiment, although the repeater and the relay device 'according to the present invention are described with reference to the state of the probe card 250, the present invention is not limited to this. For example, ‘check the use of solid photography tl packaged in a plug-in board (s oc ek e t b 〇 a r d)’ and a motherboard connected to the probe board and plug-in board =: in a relay device. In addition, the probe board, the plug-in board, and the motherboard T are connected as a repeater and a relay device. The split optical fiber bundle is fixed to the repeater device of the present invention. Furthermore, for example, a plug-in board is used as a relay device. The repeater is constituted by a socket. Under the condition of the home

—Recognize the implementation type of r, although

疋 In the condition of the needle plate 2 5 0, say that the knife edge J is used as the object for positioning by using the pre-defined beam C-body imaging element, and the f should be tested. (The probe is implemented with a probe plate and should be tested. [Solid] ^ Day: Round base 1), and the positioning of the solid camera shirt components after inspection and packaging :. With this structure, it is possible to accurately: two: the position of the optical fiber bundle used for the division of the heart, the volume photography element, and the test head of the invention, the test can be performed accurately. Again, there are

200409987 V. Description of the invention (17) On the head, the equivalent of these test heads has the same and similar functions. Industrial Applicability The present invention can be used for testing the photoelectric conversion characteristics of solid-state imaging elements. ΪΒ1Ι 2197-5965-PF (Nl); Chentf.ptd Page 21 200409987 Brief Description of Drawings Fig. 1 is a schematic diagram of a light irradiation device according to an embodiment of the present invention. Figures 2A to 2B show the structure of a split fiber bundle. 3A to 3B show the internal structure of the optical system unit and the constituent elements of the optical system unit. Fig. 4 shows the structure of a test device for a solid-state imaging element suitable for a light irradiation device in another embodiment. FIG. 5 is a cross-sectional view showing the structure of the optical module. Fig. 6 shows a state where the test head of the test device is moved. Fig. 7 is a sectional view showing the structure of one embodiment of the relay device of the present invention. Fig. 8 shows another embodiment of the combination device in the test device of the present invention. DESCRIPTION OF SYMBOLS 1 ~ light irradiation device; 10 ~ condenser lens; 11A, 11B ~ movable plate; 12 ~ ND filter turntable; 14 ~ support shaft; 20, 2 2 5 ~ division optical fiber 2 1 ~ support member; 3 0 ~ optical system unit; 3 1 ~ optical system; 2 ~ light source; 11 ~ mechanical slit; 11 C ~ opening; 1 ~ 3 ~ color filter turntable 15 ~ Frier lens; beam; 2 0 a ~ fiber bundle; 23 ~ light guide; 30A ~ optical module; 100 ~ platform;

2197-5965-PF (Nl); Chentf.ptd Page 22, 200409987 Schematic description of 32 ~ lens; 3 4 ~ lens; 3 6 ~ central filter; 3 9 ~ variable aperture dial; 1 0 1 ~ solid Photographic element; 201 ~ Desktop; 2 05 ~ Abutment; 220 ~ Guide fiber bundle; 221C ~ Frier lens; 2 50 ~ A opening; 2 60 ~ Mobile platform; 3 0 ~ 3 ~ Diffuse plate; 3 0 4 p ~ latch hole; 401 ~ solid imaging element; OP1 to OP3 ~ opening. 33 ~ Frier transparent; 3 5 ~ diffuser plate; 3 7, 3 8 ~ imaging lens; 40 ~ rotating shaft; 2 0 ~ test device; 2 2 ~ test head; 2 7 ~ drive arm; 221 A 221B ~ coupler; 250 ~ probe board; 2 51 ~ probe; 3101 ~ flange; 3304 ~ pin hole plate; 400 ~ wafer; 500 ~ relay device ;

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Claims (1)

200409987 VI. Scope of patent application1. A light irradiation device is a light irradiation device that can simultaneously irradiate light to a plurality of solid-state imaging elements, including: a light source emitting light; a splitting optical fiber bundle, and a plurality of optical fibers at an input end Integrate a beam and a plurality of beams at the output end, and the light from the light source incident from the input end is divided into a plurality of light at the output end; and a plurality of independent optical systems, the light output from the output end of the division fiber bundle is independent Make adjustments and import each of the above photographic elements. 2. The light irradiation device according to item 丨 of the patent application scope, further comprising a common optical system, which adjusts the light from the above-mentioned light source and the light emitted by a person to the optical fiber bundle for up-cutting. 3. The light irradiation device as described in item 丨 of the patent application scope, further comprising an optical component, so that the plurality of independent optical systems are arranged at a position centered on a predetermined axis, and can be rotated around the predetermined axis, and The structure of the plurality of independent optical systems can be changed at one time. • 4. The light irradiation device as described in item 丨 of the scope of the patent application, which further includes the above-mentioned partial beam as a light guide and a reference fiber bundle, and guides and cuts the optical fiber bundle from the light source; and a combination device, which The above-mentioned optical fiber bundle is combined with the science of division; at least the above-mentioned optical fiber bundle for the guide bow is movable relative to the above-mentioned optical fiber bundle for division. 5. The light irradiation device according to item 1 of the scope of patent application, wherein 200409987 6. Scope of patent application The combined device has a Frier lens. The illumination as described in the item [Scope of the patent application], the plurality of independent optical systems are respectively modularized. The test device for direct and solid-state solid-state photographic elements is a test device for testing the photo-reflective photographic element including: H "places" the solid and a test head; a relay device that takes all the solid-state photographs and makes electricity. The signal is necessary for testing the above-mentioned test heads; the first electrical conversion characteristic of the parts is a light source, which is set outside the above-mentioned test heads; and a guide quotes the optical fiber bundle and passes through the above-mentioned test heads. , Will guide the solid-state imaging device electrically connected to the relay device. ~, Test of the solid-state imaging device described in item 7 of the scope of interest 2-The first guide refers to the optical fiber bundle, and multiple optical fibers are on the input side. Set H integrates a plurality of beams at the output end, and the light from the reference fiber bundle incident from the wheel-in end is divided into a plurality of light at the output end and v is a solid-state imaging element electrically connected to the relay device. # 9 · The test clothing of the solid-state imaging device according to item 8 of the scope of the patent application, wherein the above-mentioned cutting optical fiber bundle is fixed to any position relative to the solid-state imaging device to be tested. 1 0 · The solid-state imaging device testing device according to item 9 of the patent application scope, wherein the optical fiber bundle for division is fixed to the relay device. 1 1 · as item 8 of the patent application scope Testing of said solid-state imaging elements 200409987 VI. Applicable patent range device 'It further includes a combination device that optically combines the above-mentioned splitting optical fiber bundles; the above measurement ^ 5 丨 The use of optical fiber bundles and the above-mentioned fiber bundles can be compared with the above-mentioned splitting optical devices = item, light source And guide light 12.-A relay device for moving the optical secondary device for testing. And test the optical-electrical conversion characteristics of the solid-state photo element, and make electrical connections, and pass; the solid state and the solid state include: the current relay device, the relay device package for electricity Sexual connection 4 & Μ% & put on and a plurality of solid-state imaging elements ;; Γ part 'for the above-mentioned test light to irradiate a fiber bundle for splitting each of the solid-state imaging elements, a plurality of optical fibers at the output Integrate a complex beam and split it into multiple channels from the above input / output at the above output: :: ί = 光 * solid-state imaging element. 1 opening 4 leads to each of the above pages 2197-5965-PF (Nl); Chentf.ptd