TW200303823A - Film laminating method and laminating apparatus - Google Patents

Film laminating method and laminating apparatus Download PDF

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Publication number
TW200303823A
TW200303823A TW091135668A TW91135668A TW200303823A TW 200303823 A TW200303823 A TW 200303823A TW 091135668 A TW091135668 A TW 091135668A TW 91135668 A TW91135668 A TW 91135668A TW 200303823 A TW200303823 A TW 200303823A
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TW
Taiwan
Prior art keywords
substrate
film
thin film
sound wave
laminated
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TW091135668A
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English (en)
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TWI239293B (en
Inventor
Katsunori Tsuchiya
Kyouko Ozawa
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Hitachi Chemical Co Ltd
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Publication of TW200303823A publication Critical patent/TW200303823A/zh
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Publication of TWI239293B publication Critical patent/TWI239293B/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/02—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
    • B29C65/06—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using friction, e.g. spin welding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/02—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
    • B29C65/08—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using ultrasonic vibrations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/02—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
    • B29C65/08—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using ultrasonic vibrations
    • B29C65/083—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using ultrasonic vibrations using a rotary sonotrode or a rotary anvil
    • B29C65/087—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using ultrasonic vibrations using a rotary sonotrode or a rotary anvil using both a rotary sonotrode and a rotary anvil
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/01—General aspects dealing with the joint area or with the area to be joined
    • B29C66/05—Particular design of joint configurations
    • B29C66/10—Particular design of joint configurations particular design of the joint cross-sections
    • B29C66/11—Joint cross-sections comprising a single joint-segment, i.e. one of the parts to be joined comprising a single joint-segment in the joint cross-section
    • B29C66/112—Single lapped joints
    • B29C66/1122—Single lap to lap joints, i.e. overlap joints
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/40—General aspects of joining substantially flat articles, e.g. plates, sheets or web-like materials; Making flat seams in tubular or hollow articles; Joining single elements to substantially flat surfaces
    • B29C66/41—Joining substantially flat articles ; Making flat seams in tubular or hollow articles
    • B29C66/45—Joining of substantially the whole surface of the articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
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    • B29C66/80—General aspects of machine operations or constructions and parts thereof
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    • B29C66/824—Actuating mechanisms
    • B29C66/8242—Pneumatic or hydraulic drives
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    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/80—General aspects of machine operations or constructions and parts thereof
    • B29C66/82—Pressure application arrangements, e.g. transmission or actuating mechanisms for joining tools or clamps
    • B29C66/826—Pressure application arrangements, e.g. transmission or actuating mechanisms for joining tools or clamps without using a separate pressure application tool, e.g. the own weight of the parts to be joined
    • B29C66/8266—Pressure application arrangements, e.g. transmission or actuating mechanisms for joining tools or clamps without using a separate pressure application tool, e.g. the own weight of the parts to be joined using fluid pressure directly acting on the parts to be joined
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/80—General aspects of machine operations or constructions and parts thereof
    • B29C66/83—General aspects of machine operations or constructions and parts thereof characterised by the movement of the joining or pressing tools
    • B29C66/834—General aspects of machine operations or constructions and parts thereof characterised by the movement of the joining or pressing tools moving with the parts to be joined
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    • B29C66/83411—Roller, cylinder or drum types
    • B29C66/83413—Roller, cylinder or drum types cooperating rollers, cylinders or drums
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/80—General aspects of machine operations or constructions and parts thereof
    • B29C66/83—General aspects of machine operations or constructions and parts thereof characterised by the movement of the joining or pressing tools
    • B29C66/836—Moving relative to and tangentially to the parts to be joined, e.g. transversely to the displacement of the parts to be joined, e.g. using a X-Y table
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/80—General aspects of machine operations or constructions and parts thereof
    • B29C66/83—General aspects of machine operations or constructions and parts thereof characterised by the movement of the joining or pressing tools
    • B29C66/836—Moving relative to and tangentially to the parts to be joined, e.g. transversely to the displacement of the parts to be joined, e.g. using a X-Y table
    • B29C66/8362—Rollers, cylinders or drums moving relative to and tangentially to the parts to be joined
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/90—Measuring or controlling the joining process
    • B29C66/95—Measuring or controlling the joining process by measuring or controlling specific variables not covered by groups B29C66/91 - B29C66/94
    • B29C66/951—Measuring or controlling the joining process by measuring or controlling specific variables not covered by groups B29C66/91 - B29C66/94 by measuring or controlling the vibration frequency and/or the vibration amplitude of vibrating joining tools, e.g. of ultrasonic welding tools
    • B29C66/9512—Measuring or controlling the joining process by measuring or controlling specific variables not covered by groups B29C66/91 - B29C66/94 by measuring or controlling the vibration frequency and/or the vibration amplitude of vibrating joining tools, e.g. of ultrasonic welding tools by controlling their vibration frequency
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/90—Measuring or controlling the joining process
    • B29C66/95—Measuring or controlling the joining process by measuring or controlling specific variables not covered by groups B29C66/91 - B29C66/94
    • B29C66/951—Measuring or controlling the joining process by measuring or controlling specific variables not covered by groups B29C66/91 - B29C66/94 by measuring or controlling the vibration frequency and/or the vibration amplitude of vibrating joining tools, e.g. of ultrasonic welding tools
    • B29C66/9513—Measuring or controlling the joining process by measuring or controlling specific variables not covered by groups B29C66/91 - B29C66/94 by measuring or controlling the vibration frequency and/or the vibration amplitude of vibrating joining tools, e.g. of ultrasonic welding tools characterised by specific vibration frequency values or ranges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C63/00—Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor
    • B29C2063/006—Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor of surfaces having irregularities or roughness
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C63/00—Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor
    • B29C63/02—Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor using sheet or web-like material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/01—General aspects dealing with the joint area or with the area to be joined
    • B29C66/05—Particular design of joint configurations
    • B29C66/303—Particular design of joint configurations the joint involving an anchoring effect
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/40—General aspects of joining substantially flat articles, e.g. plates, sheets or web-like materials; Making flat seams in tubular or hollow articles; Joining single elements to substantially flat surfaces
    • B29C66/41—Joining substantially flat articles ; Making flat seams in tubular or hollow articles
    • B29C66/43—Joining a relatively small portion of the surface of said articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/70—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material
    • B29C66/71—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the composition of the plastics material of the parts to be joined
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/70—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material
    • B29C66/73—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset
    • B29C66/739—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the material of the parts to be joined being a thermoplastic or a thermoset
    • B29C66/7392—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the material of at least one of the parts being a thermoplastic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/70—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material
    • B29C66/73—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset
    • B29C66/739—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the material of the parts to be joined being a thermoplastic or a thermoset
    • B29C66/7394—General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the material of at least one of the parts being a thermoset
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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    • Y10T428/00—Stock material or miscellaneous articles
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Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Laminated Bodies (AREA)
  • Lining Or Joining Of Plastics Or The Like (AREA)

Description

(i) (i)200303823 玖、發明說_ 胃iiiit敘明：發明所屬之技術領域、先前技術、内容、實施方式及圖式簡單說明) 技術領域 本發明係關於一種於基板上積層薄膜狀組合物之方法 及積層裝置。 先前技術 以往，於印刷基板積層光阻膜之方法已知有在加熱下將 基板與薄膜朝厚度方向加塵而貼合之方法。在此方法中， 藉由加熱之薄膜的黏度降低與加壓，可謀求薄膜在基板的 密著性提昇、及、當被覆基板上之凹凸時，於基板一薄膜 間為不混入氣泡的凹凸被覆性之提昇。 ^ 在上述方法中之加熱條件係受基板或薄膜的材質限 制’無法只進行用以使薄膜黏度充分降低之加熱時，要得 到充刀的積層效率乃很困難。尤其，薄膜含有反應性物質 時有關加熱溫度或加熱時間之限制乃很嚴，在基板之密 著性或基板上之凹凸被覆性乃不易充分。又，在實際之作 業中，為得到上述之加熱效果，必須預先使基板或積層裝 置：熱至特定的溫度，藉此，有時基板或薄膜會劣化。 、 為解決上述 < 問題，研究未必加熱薄膜之積層方 —裝置例如在特開昭55448486號公報中，係揭示一種 板與薄膜 < 積層方法而搖動加壓裝置之薄膜積層 士 在特開昭62_6〇645號公報中，係揭示一種積層 裝置’其係藉電磁式振動 甘 勒器等使積層滚輪振動而除去存在 於基板-薄膜間之空氣。 發明之說明 200303823
(2) 因此，即使為上述習知之積層裝置，要達成高水準之密 著性及凹凸被覆性未必容易，薄膜不會進入基板之凹凸部 而常會產生密著不良。 本發明係鑑於上述習知技術所具有之課題者，目的在於 提供一種於基板上積層薄膜時，可充分提高薄膜在基板之 密著性及凹凸被覆性，並可以高水準達成薄膜在基板之凹 凸部的埋入性之薄膜積層方法及積層裝置。 亦即，本發明之薄膜積層方法，係於基板上積層薄膜 時，對前述基板或前述薄膜之至少一者賦予具有特定頻率 之晋波。 在本發明之薄膜積層方法巾，係藉由於基板上積層薄膜 時’對前述基板或前述薄膜之至少一者賦予具有特定頻率 《骨波，而受音響振動能量作用會產&薄膜之彈性變形、 2性邊形、基板_薄膜間之原子間接纟摩擦熱等，故可 薄膜在基板之密著性及凹凸被覆性，並可以高水 卞達成薄膜在基板之凹凸部的埋入性。 述薄膜積層方法中，係宜於前述基板上配置前 者職予度方向加愿’同時並對基板或薄膜之至少- <辦予具有特定頻皐立 由加壓Α音塑振動处胃/。同時進行加壓與賦予音波， ! 曰響振動能量作 基板之密著性及凹凸被覆性。j ’可更提高薄膜在 又’本發明之薄膜積層方法 步驟，其係於基板上配w 1 了/、有如下步驟：加壓 係對加壓步驟後之基& < 1 賦T骨波步驟，其 基板或薄膜之至少予具有特定 * 7 - (3) 200303823
音波步騾，亦可得 ’可更提高薄膜在 喪、率之^波。藉由加壓步驟後進行賤予 到加壓與骨響振動能量作用之综效敖果 基板之密著性及凹凸被覆性。 又’本發明之薄膜積 W # „ 4如下步騾：赋予音 疋步驟，其係於基板上配置薄膜而對 ^ , 签板或薄膜之至少一 者賦予具有特定頻率之音波；加壓步 y 步W夕A 4 "'’其係對賦予音波 夕鄉I基板與薄膜朝厚度方向加壓。笋 進妒^两止 错由賦予音波步騾後 订加壓步騾，亦可得到加壓與音響振 兮I 银勒把I作用之综效 ，果’可更提高薄膜在基板之密著性及凹凸被覆性。 又，本發明之薄膜積層方法，I波之頻率宜為16服以 :“使用頻率16kHZ以上之音波，可更提高薄膜在基 '^贫著性及凹凸被覆性。 居若依本發明之薄膜積層方法，當基板為具備導電性金屬 者，且薄膜為具備由感光性樹脂組成物或熱硬化性樹脂 2成物所構成之層時，可充分達成高水準之埋入性。又， 、任當於具備導電性金屬層之基板上積層由感光性樹脂 厅構成之薄膜時，受加熱條件之限制等，密著性及凹 &被覆性易不充分。 板本發明<薄膜積層裝置，係具備可對基板或配置於該基 上之薄膜的至少一者賦予具特定頻率之音波的音波產 生 I W , ★夏。精此，而受音響振動能量作用會有效且確實地產 八薄膜 < 彈性變形、塑性變形、基板_薄膜間之原子間接 h ★摩擦熱等’可具有高水準之密著性及凹凸被覆性而進 于薄膜在基板上之積層。 200303823
又，本發明之薄膜積層裝置，宜進一步具備可對基板與 薄膜朝厚度方向加壓之加壓裝置。藉由如此之加壓裝置與 音波產生裝置，可得到加壓與音響振動能量作用之综效效 果，更提高薄膜在基板之密著性及凹凸被覆性。 圖面之簡單說明 圖1係表示本發明之第1實施形態之薄膜積層裝置的概 略構成圖。 圖2係表示本發明之第2實施形態之薄膜積層裝置的概 略構成圖。 圖3係表示本發明之第3實施形態之薄膜積層裝置的概 略構成圖。 圖4係表示本發明之第4實施形態之薄膜積層裝置的概 略構成圖。 圖5係表示本發明之第5實施形態之薄膜積層裝置的概 略構成圖。 圖6係表示本發明之第6實施形態之薄膜積層裝置的概 略構成圖。 圖7係在實施例4所得到之積層體的電子顯微鏡照片。 圖8係在實施例5所得到之積層體的電子顯微鏡照片。 圖9係在實施例6所得到之積層體的電子顯微鏡照片。 圖10係在實施例7所得到之積層體的電子顯微鏡照片。 圖1 1係在實施例8所得到之積層體的電子顯微鏡照片。 圖12係在比較例4所得到之積層體的電子顯微鏡照片。 圖1 3係在比較例5所得到之積層體的電子顯微鏡照片。
200303823 (5) 圖1 4係在比較例6所得到之積層體的電子顯微鏡照片。 用以實施發明之最佳形態 以下，參照圖面，並說明有關本發明之最佳實施形態。 又，圖面中，在同一或相當部分賦予同一符號，省略重複 說明。
本發明之薄膜積層方法及裝置，係對基板或薄膜賦予音 波，藉由其音響振動能量作用可提高薄膜對基板之密著性 及凹凸被覆性，即使不加熱薄膜等亦可達成充分的積層效 率。因此，本發明之基板或薄膜，係只要藉上述之音響振 動能量作用可提高密著性及凹凸被覆性即可，並無特別限 制。 例如基板係可使用具備銅箔等之導電性金屬層、並於該 導電性金屬層形成凹凸之印刷基板、或進一步之玻璃基板 等。 又，薄膜係可使用一具有由感光性樹脂組合物或熱可塑 性樹脂組合物所構成之層者。尤其，即使當使用一具有如 由調配光聚合性化合物等之感光性樹脂組合物所構成的 薄膜般具有加熱條件之限制等時，亦可適當地於該薄膜的 基板上進行積層。如此之樹脂可舉例如··丙婦酸系樹脂、 醯胺基環氧系樹脂、醇酸系樹脂、酚系樹脂、聚酯系樹脂、 胺基甲酸酯系樹脂等。又，光聚合性化合物可舉例如：在 分子内具有至少一個可聚合的乙晞性不飽和键之化合 物、更具體地，於多價醇與a，yS _不飽和羧酸反應而所得 到的化合物、雙酚系（甲基）丙烯酸酯化合物、於分子内具 -10- 200303823
有胺基甲酸酯鍵之（甲基）丙烯酸酯化合物、（甲基）丙烯酸 烷基酸等。 ' 圖1係表示本發明第1實施形態之薄膜積層裝置的概略 構成圖。圖1所示之薄膜積層裝置係在支撐基板1及薄膜2 ‘ I支撐台5的上面侧具備音波產生裝置4。音波產生裝置4 . 之構成係包括：具有可產生特定頻率之音波的振動子4 1、 以及可使發自振動子4 1之音波朝向薄膜2而集音之喇叭 4 2並可治支撐台5之上面移動至特定的方向（例如圖中之 前號方向）。 使用具有上述構成之薄膜積層裝置而於基板1上積層薄 膜2時’在支撐台5上以薄膜2積層於基板1上之方式配置， 使青波產生裝置4沿支撐台5之上面移動同時並對薄膜2賦 予具有特定頻率之音波。藉此，受音響振動能量作用可充 分提而基板1與薄膜2之密著性及凹凸被覆性。 此處’本發明所使用之音波的頻率宜為16 kHz以上，更 立為20 kHz以上。若該頻率為前述下限值以下，密著性及 凹凸被覆性有降低之傾向。又，音波的頻率宜為1 GHz以 _ 上’更宜為10 MHz以下，最宜為300 kHz以下。 圖2係表示本發明第2實施形態之薄膜積層裝置的概略 、· 構成圖。圖2所示之裝置係在支撐基板1及薄膜2之支撐台5 % 的上面侧配置一具備加壓構件3丨及空壓唧筒3 2之加壓裝 置3°加壓構件31係可藉由來自空壓唧筒32之壓力朝與支 撐台5之上面垂直的方向移動。藉此，當朝厚度方向對基 板1及薄膜2加壓時，即使於基板丨上形成凹凸時，亦可沿 -11 - 200303823 ⑺
其起伏而保持特定 壓力同時並進行加壓。 t |, 、 置3。以振動子41:音波產生裝置4被鄰設配置於加壓襞 件31。子41產生之音波係藉由^八42而賦予加壓構 使用具有上述構成之薄膜積層裝置而 膜2時，在支擋么 傲"上和層薄 "上以薄膜2積層於基板1上之方式配¥ 精空壓唧筒32壓 飞配置， 方向加上#定Μ 裝置31，而朝基板1及薄膜2之厚度 31賦予—且有以而，當如此加壓時，可對加蜃構件 曰波產生裝置4產生之特定頻率的音波 Γ 口構件31而傳達至薄膜2，藉由加壓盥立 著性及凹凸被覆性。* 基板1與薄膜2之密 又广由加壓構件3 1而傳達音波至薄膜2，可對加壓搛 件31接觸之基板1與薄膜2之積声部位有1 R ^ 4 該音波，故可達成p、 有效且確實地賦予 建成非吊馬水準之積層效率。 薄膜2被加壓裝置3所施 淡刀且為〇·1〜1 MPa。若該壓 力為則述下限值以下’即使對薄膜2等賦予音纟，薄膜2 :基板1疋密著性及凹ΰ被覆性有降低之傾向。另外，若 *亥壓力超過前述上限信 $ 、上限值，施加於基板丨之負荷會過剩太 而恐造成基板1損傷等之問題。 圖3係表不本發明第3實施形態之薄膜積層裝置的概略 構成圖。圖3所示之裝置中，2個音波產生裝置4係…八 42朝加壓構件3 i與基板5之間的積層部位配置，來自音波 產生裝置4之音波會直接施予在薄膜2的方式。 -12- (8) 200303823
在第3實施形態中，來自音波產生裝置4之音波會直接施 予在薄膜2之點乃與圖2所示之裝置相異，藉由加壓盘音塑 振動能量作用之综效效果，可得到基板丨與薄膜2之密著 及凹凸被覆性被提高之效果，此係與第2實施形態相同。 又如此，不藉由加壓構件31而對薄膜2直接施予音波， 可降低空氣唧筒31之軸部等的損傷，並謀求裝置之長壽命 化。 又，音波產生裝置4之數目係只要可對基板丨與薄膜2之 積層部位賦予充分的音波即可，並無特別限制，可為工個 亦可為3個以上。 圖4係表示本發明第4實施形態之薄膜積層裝置的概略 構成圖。圖4所示之裝置係具備對向之加壓輥33a、3 3b作 為加壓構件’加壓輥3 3 a、3 3 b係可分別以旋轉軸3 4 a、3 4b 為中、、而旋轉。又’支撐加壓輥33a(旋轉軸34a)之支撐 把3 5上’係以振動子4 1產生，並傳達以喇叭4 2集音之音 波°琢裝置係具備複數之移送輥6，可使所積層之基板1 及薄膜2移送至加壓輥3 3 a、3 3 b之間。 在第4實施形態中，係配置薄膜2之基板1藉移送輥6移送 至加壓輕33a、33b之間，再藉空氣唧筒32押下加壓輥33a， 朝厚度万向加壓基板1及薄膜2。此時，來自音波產生裝置 骨波可藉由支撐體35、加壓輥33a而傳達至薄膜2,故， 藉加懕與音響；te & 微動能量作用之综效效果，可提高基板1與 薄膜2之密著性另 及凹凸被覆性。 又，如此
使用加壓輥33a、33b及移送輥6，而來自空 -13 - 200303823
(9) 氣唧筒31之壓力及來自音波產生裝置4之音波可均一地傳 達至垂直於加壓輥間之薄膜2的移送方向之抵接部位。 又，如此之積層步騾係連績地進行，故可更提高積層效率。 圖5係表示本發明第5實施形態之薄膜積層装置的概略 構成圖。圖5所示之裝置係在基板1及支撐薄膜2之支撐台5 的上面侧具備加壓裝置3及音波產生裝置4。加壓裳置3係 具備對向配置於支撐台5的上面之加壓輥33，以支撐體35 支撐加壓輥33的旋轉軸34,俾加壓輥33可旋轉。音波產生 農置4係與上述實施形態相同，含有振動子4 1及制队4 2而 構成的。加壓裝置3及音波產生裝置4係可沿著支撐台5的 上面而移動至特定方向（例如圖中之箭號方向）。 在第5實施形態中，係於基板1上配置薄膜2後，藉加壓 裴置3朝基板i及薄膜2之厚度方向加壓，進一步藉音波產 生裝置4賦予骨波。如此，當加壓步騾之後進行賦予音波 步驟時’亦藉由加壓與音響振動能量作用之相乘效果，可 提高基板1與薄膜2之密著性及凹凸被覆性。 圖6係表示本發明第6實施形態之薄膜積層裝置的概略 構成圖。圖6所示之裝置，係只在加壓裝置3及音波產生裝 置4之配置相對於其等之移動方向為相反之點相異，其以 外具有與圖5所示之裝置同樣之構成。 在第6實施形態中’係於基板1上配置薄膜2後，賦予來 自曰波產生裝置4之賦予，進一步藉加壓裝置3朝基板1及 薄膜厚度方向加壓。如此，當賦予音波步騾之後進行 加壓步騾時，亦藉由加壓與音響振動能量作用之相乘效 -14- 200303823
(ίο) 果’可提高基W與薄膜2之密著性及凹凸被覆性。 本發明係不限於上述實施形態。例如圖卜6所示之 一者係使音波施予在薄膜2而進行與基板1之積層 可對基板1騎予音波，亦可對基板1、薄膜2之兩 者賦予音波。谁一牛 + •，㊣對基板賦予音波時，可個別地設 f對支撐台5賦予音波之音波產生裳置，藉由支撐台5可對 基板1賦予音波。 在上述實施形態之任一者中，可使用移送輥6代替 支撐台5’或，使用支撐台5代替移送輥6。 [實施例] ^ I據實施例及比較例而更具體地說明本發明 但，本發明不限於以下之實施例。 (實施例1) 使用具有圖2所示構成之裝— 、 风'^裝置於銅箔上刻上深度5〜9 /m
刻痕之銅箔積層板（商品名· M MLL E_679、日立化成工業（股） 社IL)上積層感光性膜（商品么· w。π 丨朕（两 口口名· ph〇tech ry_3〇25、日立化 成工業（股）社製）。亦即，左23V nr at人 ^ ^ _ 在c下贴合鋼簿積層板與感光 薄膜之感光性樹脂組合物層，朝、 两 , 曰朝厚度万向以0.4 MPa加 壓，同時並賦予頻率2S kHz之音湓而俨糾拉& 曰，反而侍到積層體。 依據以下之基準： A :薄膜充分埋入5〜9 //m之刻痕全部 B :薄膜埋入至5〜7 之刻痕 c :薄膜埋入於5 /zm之刻痕或 以評估薄膜在所得到積層體中 未全部埋入 之鋼箔積層板的刻 痕之埋 -15- 200303823 ⑼ 入性。所得到之評估处 卞佑結果表示於表1中。 (實施例2) ’、皮之須率為40 kHz以上，其餘與實施例1同樣做 法而在銅箱積層板上積層感光性薄膜，進行埋入性評估。 所得到之評估結果表示於表ι。 (實施例3 ) 除使音波之頻阜為1 ’、為 kHz以上，其餘與實施例1同樣做 法而在銅箔積層板上積芦 /、曰感光性薄膜，進行埋入性評估。 所得到之評估結果表示於表1。 (比較例1) 使用南溫常壓積層劈著 、 置 站合與實施例1同樣的銅箔積 層板與感光性薄膜貼合，將蒗 、、 肝潯膜加熱至110 C同時並朝厚 度方向以0.4 MPa加壓而得到積層體。 :關所得到之積層體，與實二"同樣做法 性的評估。所得到之評估結果表示於^中。 入 (比較例2) 使用振動積層器（大成積層器（股）社製）， 同樣之銅箔積層板與感光性薄膜，朝厚度方向她例 加壓同時並對薄膜賦予25,〇〇〇 c/min之振/以〇·4 勒而得到 目豆。如此之積層步騾係在2yc下進行。 碩, 有關所得到之積層體，與實施例1同樣做法、、 性的砰估。所得到之評估結果表示於表1中。 ' ' ’坡> (比較例3 ) 除將薄膜加熱至11(TC以外，其餘與比較彳 乂例3同樣做法β -16- (12) 200303823 進行銅落積層板與感光性薄膜之積層。 有關所得到之積層體，與實祐彳 貝苑例1同樣做法而進行埋入 性之評估。所得到之評估結果表示於表i中。 表
使用具有圖2所示構成之裝置 在厚度18 //m銅箔上刻上 上積層感光性 製、流動性： 深度7 /zm、幅寬1〇〇 //m之刻痕的鋼箔積層板 薄膜（商品名：H-W425、曰立化成工業（股）社 HO/zm)。亦即，在23t下貼合銅落積層板與感光性薄膜之 感光性樹脂组合物層，朝厚度方向以〇 4 Mpa加壓，同時 並賦予頻率28 kHz之音波而得到積層體。此時之積層、、w产 為80°C、積層速度為1.5 m/分。當積層銅箔積 又 只屬扳與感光性 薄膜時，基板未加熱。所得到之積層體的電 丁衫微鏡捋片 (倍率：1，500,000倍，以下同樣）表示於圖7中。 '、” (實施例5) 其餘與實施例 膜。所得到之 除使刻於銅箔之刻痕幅度為200 /zm以外， 4同樣做法而在銅箔積層板上積層感光性薄 積層體的電子影微鏡照片表示於圖8。 (實施例6) 17· 200303823 (13) 除使刻於銅箔之刻痕幅度為400 //m以外，其餘與實施例 4同樣做法而在銅箔積層板上積層感光性薄膜。所得到之 積層體的電子影微鏡照片表示於圖9。 (實施例7) 除使刻於銅箔之刻痕幅度為300 /zm，並使用FR-5025 (日 ‘ 立化成工業（股）公司製）以外，其餘與實施例4同樣做法而 在銅绪積層板上積層感光性薄膜。所得到之積層體的電子 影微鏡照片表示於圖1 0。 (實施例8) 除使銅邊之厚度為35 /zm，刻痕之輻度為400 /zm以外， …餘」、只施例7同樣做法而在銅箔積層板上積層感光性薄 膜°所得到之積層體的電子影微鏡照片表示於圖1 1。 (比較例4 ) 除未進行賦予音波以外，其餘與實施例4同樣做法而在 銅名％層板上積層感光性薄膜。所得到之積層體的電子顯 械鏡照片表示於圖12。 (比較例5) φ 除未進行賦予骨波以外，其餘與實施例5同樣做法而在 銅vl %層板上積層感光性薄膜。所得到之積層體的電子顯 微鏡照片表示於圖〖3。 (比較例6) 除未進行賦予音波以外，其餘與實施例6同樣做法而在 銅箔積層板上積層感光性薄膜。所得到之積層體的電子顯 微鏡照片表示於圖14。 -18 - 200303823
(14) 如圖7〜圖1 1所示般，實施例4〜8可確認薄膜在刻痕之埋 入性良好。另外，如圖12〜圖14所示般，比較例4〜6之情 形，係銅箔積層板與薄膜之間會產生空隙，或，在薄膜之 埋入性部分會產生參差不齊，而無法得到充分之埋入性。 產業上之利用可能性
如以上說明般，若依本發明之薄膜積層方法及裝置，於 基板上積層薄膜時，對基板或薄膜之至少一者賦予具有特 定頻率之音波。而受音響振動能量作用，可充分提高薄膜 在基板之密著性及凹凸被覆性，並達成高水準之埋入性。 圖式代表符號說明
1 基板 2 薄膜 4 音波產生裝置 5 支撐台 6 移送輥 3 1 加壓構件 32 空氣唧筒 33a 、 33b 加壓輥 34a、34b 旋轉軸 35 支撐體 41 振動子 42 峰!J队 -19-

Claims (1)

  1. 200303823 拾、申請專利範園 1. 一種薄膜積層方法，係於基板上積層薄膜時，對前述 基板或前述薄膜之至少一者賦予具有特定頻率之音 波。 2. 根據申請專利範圍第1項之薄膜積層方法，其中於前述 基板上配置前述薄膜而朝厚度方向加壓，同時並對前 述基板或前述薄膜之至少一者賦予具有特定頻率之音 波。 3. 根據申請專利範圍第1項之薄膜積層方法，其中具有如 下步騾： 加壓步驟，其係前述基板上配置前述薄膜而加塾； 賦予音波步騾，其係對前述加壓步騾後之前述基板 上或前述薄膜之至少一者賦予具有特定頻率之晋波。 4. 根據申請專利範圍第1項之薄膜積層方法，其中具有如 下步騾： 賦予音波步騾，其係於對前述基板上配置前述薄膜 而對前述基板或前述薄膜之至少一者賦予具有特定頻 率之音波； 加壓步騾，其係對前述賦予音波步騾後之前述基板 與前述薄膜朝厚度方向加塵。 5. 根據申請專利範圍第1項之薄膜積層方法，其中前述音 波之頻率為16 kHz以上。 6. 根據申請專利範圍第1項之薄膜積層方法，其中前述基 板為具備導電性金屬層者，且前述薄膜為具備由感光 200303823
    性樹脂組成物或熱硬化性樹脂組成物所構成之層。 7. —種薄膜積層裝置，係具備可對基板或配置於該基板 上之薄膜的至少一者赋予具特定頻率之音波的音波產 生裝置。 8. 根據申請專利範圍第7項之薄膜積層裝置，其中進一步 具備可對配置於基板上之前述薄膜朝厚度方向加壓的 加壓裝置。
    -2-
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