TW200302343A - Scanning probe data storage and microscopy - Google Patents

Abstract

A cantilever device (30, 50, 70) for scanning a surface comprises a support (32, 52, 72), a tip platform (31, 51, 71) and a flexible arm arrangement (33, 53, 73). The tip platform (31, 51 ,71) has a plurality of tips. These comprise at least two contact tips (34; 55a - 55c; 74, 75) providing points of contact with a surface to be scanned, and a scanning tip (36; 55a, 55b; 75) for scanning the surface, where the scanning tip may be one of the two or more contact tips provided on the platform. The flexible arm arrangement (33, 53, 73) connects the tip platform to the support and allows orientation of the platform, via flexing of the arm arrangement, to bring the contact tips into contact with a surface to be scanned. The platform (31, 51, 71) is then at a well-defined orientation relative to the scan surface, and the scanning tip (36; 55a, 55b; 75) is appropriately positioned for the scanning operation. Scanning probe microscopes and data storage devices incorporating such cantilever devices are also provided.

Description

2UU3UZJ4J 玖 发明, description of the invention (the description of the invention should state: the technical field to which the invention belongs, & the invention is generally described with the scanning probe information, implementation methods and diagrams briefly). The special and f, micro, and micro-magnification systems of the present invention are related to the provision of the Longyan beam device and the cantilever two-heart #beam device used in this' 7 system for scanning and exploration. Storage device.軚 Needle magnification and scanning probe micromagnification are devices such as AF STM (Scanning Tunnel Proton Force Magnification), where the operation system is ^ M (Scanning Extended Field Optical Microscopy) needle interaction Function, two sample surface and micro-fabrication probe. For example, in AF] V [, Jun uses stand-up, main, and boom ends to load rolls, and s 2 is used in trial manufacturing. I end, scan the surface of the sample to sense the sample, and this is in nanometers. The original + force interaction between the entire tip and the sample surface causes the pivot of the cantilever beam to deflect during scanning and the topography of the sample is determined by detecting the deflection method. I,, 疋, and basic principles can be used in many modes of operation The eight cakes can be held in contact with the surface of the sample, or the top can be brought to a position adjacent to the "mountain" in the "on-off mode (uppping mode), and the operation is under the operation one / brother" The application of the voltage between the cantilever and the sample in a sweeping force is sufficient. The deflection of the cantilever can be a number of ways, such as using piezoelectric or proximity sensors or using optical detection methods such as laser interference. AFM technology has been applied to the field of data storage to provide a new generation of governance, storage, and data rate storage devices for large-scale memory applications. Taking AFM as the king, "Data storage is detailed in the IBM R & D Journal, Volume 44, Volume 3 May 2000, pages 323-340 Vettiger et al., "Arthropods-Tuo-6- 200302343 (2) Issue: Explaining performance pages at a thousand tops in future AFM data storage", and this reference is cited here. Here, a cantilever beam is used -The loaded tip scans the surface of the data storage medium. In the write-scan mode, the tip is used to write data to the surface by creating pits or bit notches in the surface. To write a data bit , Activate a heater on the cantilever beam to heat the surface at the point of contact with the tip, which causes the tip to cross the surface to create a cavity. Such a cavity represents a one-bit value "1" and a bit value " "0" is indicated by the absence of a hole in the bit position. In the reading scan mode, when the tip moves past the pattern of bit notches, the tip is used to read the data by detecting the deflection of the cantilever beam. Here, a cantilever heater operating at a lower temperature can be conveniently used as a proximity sensor because more heat is lost to the storage medium when the tip enters the bit notch than when no bit notch is present. Therefore When the top moves past When the bit position is detected, the temperature-dependent resistance change of the heater can be detected to determine the bit pattern. Although the basic data read / write operation can be implemented in this way using a single cantilever, it can actually be performed as The cantilever beam using an integrated array discussed in the above referenced paper. Many cantilever beam designs have been proposed for use in scanning probe microscopy and data storage applications. For example, U.S. Patent No. 6,079,255 discloses many cantilever beam designs, among which More than one top end is provided on a cantilever beam. Basically these designs include two or more mechanically connected cantilever beams: a main, larger cantilever beam carrying a top end; and one or more smaller cantilever beams, Each has its own tip, which is provided within the body of the main cantilever beam. These design goals are to provide a degree of fine-tuning, for example, the main, larger cantilever beam system is used for low resolution scanning and the smaller cantilever beam 200302343 (3) Description of the invention The continuation page is selectively used for higher resolution scanning . The mechanical connection of these cantilever beams also provides some degree of route position control to the smaller cantilever beams because the cantilever beams are connected to the main, larger cantilever beams, and therefore follow the movement of the larger cantilever beams. Generally, in scanning probe-based devices, some form of alignment procedure is needed to ensure proper alignment of the cantilever beam, in particular to achieve the desired orientation of the cantilever beam and proper positioning of the scanning tip relative to the scanning surface. In many cases, for example, where laser interference is used to detect the movement of the cantilever beam or a voltage is applied to the cantilever beam, the angle of the cantilever beam should be clearly defined in the detection optical beam or scanning surface. Also, depending on the particular application and mode of operation, the tip must be in slight contact with the scanning surface or in close proximity to the surface. The alignment procedures required to achieve these goals can be complex and time-consuming, and often require the use of feedback mechanisms to maintain alignment within system parameters. The problem of alignment is particularly troublesome, in which a plurality of cantilever beams operate together in parallel with the data storage array mentioned above. Here, the plane of the top of all cantilever beams should be parallel to the scanning surface, but the integrated array is aligned parallel to the surface without leaving further space for adjusting the orientation of the individual cantilever beams. According to an aspect of the present invention, a cantilever device for providing a scanning surface is provided. The device includes: a support; a top platform having a plurality of tops, including two tops for providing a point of contact with a surface to be scanned and a top for Scanning surface; and a flexible arm arrangement, which connects the top platform to the support and allows flat 200302343 (4) I invention explains the orientation of the page table, the contact top is brought into contact with the surface to be scanned by the extension of the arm. Therefore, in a specific embodiment of the present invention, the cantilever beam is formed by a top platform, which is connected to the support by a flexible arm arrangement, and (at least) two contact tops are provided on the top platform. These contact tips provide points for contact with the surface to be scanned. When the platform is brought into contact with the surface to be scanned, the arms are arranged to extend and contract to allow the platform to orient itself so that the contact tip touches the scanning surface. The platform is then in a well-defined orientation relative to the scanning surface, and the scanning tip provided on the platform for scanning operations is appropriately positioned. This design therefore provides a self-aligning cantilever device that significantly alleviates the alignment difficulties presented by the previous devices discussed above. The use of the device implementing the present invention allows the feedback mechanism to be eliminated, and when these mechanisms are used, it provides greater accuracy in the control operation. In some embodiments of the invention, there may be only two contact tips. This provides the platform to orient itself around an axis perpendicular to the line connecting the two contact tips. Although orientation around the axis may be sufficient for some applications, in other applications it may be necessary to orient around two orthogonal axes. So in some embodiments, the top platform has three misaligned contact tops, which provide contact points with the scanning surface. Because the three contact tips are not aligned, the free endpoints of these tips basically define a plane relative to the direction of the known platform. When the platform is brought into engagement with the contact surface, the telescopic arrangement of the arms allows the platform to orient itself around the two axes, with all three contact tips touching the scanning surface, so the platform is properly aligned. Although the use of only three contact tips here reduces wear on the scanning surface, some 200302343 (5) invention descriptions are continued

It is appropriate to use more than three contact endpoints in a specific embodiment. In these cases, the arrangement allows the free ends of the contact tips to be approximately in the same plane, as these tips provide points for contact with the scanning surface and therefore determine the alignment of the platform in operation. The platform itself may include any suitable structure for carrying the top end, but ideally includes a generally planar structure, the orientation of the plane of the platform, relative to the contact plane defined by the free end points of these contacting tops, to give in operation Orientation relative to the platform of the scanning surface. Specific embodiments can be envisaged where the platform is required to be positioned at an angle to the scanning surface during operation. However, in the following preferred embodiment, the plane of the platform is substantially parallel to the contact plane defined by the contact tip, whereby the platform is substantially in a direction substantially parallel to the scanning surface during operation. This provides a simple, compact construction and allows a well-defined force to be applied in the application, where the platform is utilized as an electrode.

In addition to the contact tip, the scan tip may be provided in addition or the scan tip itself may be one of two, three or more contact tips provided on the tip platform. For example, in some applications scanning is performed with the scanning tip approaching but not touching the scanning surface. For those applications in which a scanning tip is provided in addition to the contact tip, the arrangement is such that the scanning tip is appropriately spaced from the scanning surface when the contact tips engage the surface. In other applications, scanning is performed with the scanning tip touching the scanning surface. Here, a scanning tip may be additionally provided in addition to the contact tips, but in this case the scanning tip itself may be one of the contact tips. And, in general, one or more scan tips, each of which can be one of such contact tips, are available on the platform. So under this limitation, for applications that require -10- 200302343 (6) invention page alignment around one axis, there can be only two tops on the platform and for applications that require alignment around two axes, in There can be only three tips on the platform, in each case all of these tips can be tied to contact the tips and one or more tips can be scanned tips. In operation, the or each scan tip interacts with the scan surface and detects the interaction to obtain a scan readout. This can be achieved in a number of ways in different specific embodiments. For example, a specific embodiment is conceivable in which the scanning tip is subjected to a fixed amplitude vibration and a variation in the vibration frequency caused by the interaction with the scanning surface is detected to obtain a scanning readout. As another example, a feedback mechanism can be used to maintain a fixed interval between the scanning tip and the scanning surface to counteract the interaction of forces, and measure the adjustment needed to reflect the interaction force to obtain the scan output. However, in other cases, these scan tips are only mounted on a platform that moves generally perpendicular to the extent of the scan surface to allow the tips to follow the surface topography (eg, AFM surface scan or read scan in data storage applications). ) And / or penetrate the surface where appropriate (for write scans in data storage applications). Here, only one of the components described by the scanning tip for all movement needs to be generally perpendicular to the range of the scanning surface. This point is the point at which the scanning tip can be oriented in some way or away from the general surface of the surface in order to carry out this requirement. Scan function. The scan tip can be loaded in such a vertical movement in many ways. As a simple example, a specific embodiment can be envisaged, in which there are three contact tips, one of which is to scan the tips individually and to provide scan end point movement by the platform tilting around the axis between the two remaining scan tips. However, in a preferred embodiment, the or each scan tip is mounted on a platform for general 200302343 (7) inventions to say independent movement of a range of vertical surfaces. In these specific embodiments, the scanning tip has at least some degree of freedom of movement, and its vertical scanning plane is independent of the entire platform. For example, the movement may be provided by bending or extending parts of the platform, but in a particularly preferred embodiment as described hereafter, the (or each) scan tip is connected by a plurality of flexible connecting parts To the platform, this part is provided at the scanning tip moving towards or away from the scanning surface.

As long as there are more than three contacting tips, one or more of them are mounted on the independent movements just described, and the free ends of these tips are in substantially the same plane, within the scanning freedom of the scanning tips. It will be understood that in specific embodiments where the scanning tip is one of only three contacting tips, for example, the vertical movement of the scanning tip in operation has some effect on the overall orientation of the platform. In some specific embodiments, it may not be relevant and may even be required, for example, the movement is exactly these direction changes of the scan output detected in the inclined platform suggested above. However, when it is desired to maintain the orientation of the platform as constant as possible, the interval between the contact tops and the range of vertical movement of the scanning top should be large, especially so that the platform movement generated from the scanning top movement is at Within acceptable system limits, for example, is the level of system noise. Generally, in a specific embodiment of the present invention, it is desired to make the interval between the contact tips larger than the scanning tip size. This comparatively large contact tip spacing improves good platform stability and improves torque efficiency. It engages the slightly misaligned cantilever beam to a reliable alignment during engagement with the scanning surface, and appropriately reduces the number of required platforms. -12-200302343 on Orientation and / or Scan Top Positioning ⑻ The invention explains the effect of continuum scan tip movement. Clearly, the relative size can be selected here according to the parameters of a particular system, but in a preferred embodiment, the contact tip spacing is at least about ten times the height of the scanning tip and more preferably about 100 times the height of the scanning tip. Times. In the case where the scan output is obtained by detecting movement at the top of the scan, many detection mechanisms can be utilized. Some embodiments use optical detection or other technologies that do not require a specific sensor mechanism on the body such as a cantilever beam. In other embodiments, and particularly in the case of loading the scanning tip to some degree of independent movement, the cantilever may include a sensor associated with the (or each) scanning tip to sense the scanning tip movement. Such a sensor may include more than one sensor element, e.g. one element is associated with each of the flexible connection sections provided above. In the case where the inductor must be connected directly in the electronic circuit, a current path can be provided via the platform of the cantilever beam and the flexible arm arrangement for the sensor connection between a pair of support wires on the support. Such a current path may be provided by a conductive track, but is preferably provided by forming the platform and arm arrangement or part thereof from a conductive material. It is the telescoping of the arm arrangement that allows the platform to be oriented to bring the contact endpoints into contact with the scanning surface, the flexible arrangement thus providing the required bending and / or rotation motion. Although an arrangement with a single flexible arm is conceivable, a particularly efficient arrangement has a plurality of flexible arms extending between the platform and the support. In such a preferred embodiment, in which the scanning tip is mounted for independent movement, for example, via the flexible connection part as mentioned above, the scanning tip itself can be connected by the arranged flexible arms. 13- 200302343 () Invention Explain that continued tribute is connected to the support to provide i product 1 "~~~ ', & improved stability in operation. In any case, otherwise better specific will be >, ^?

Form of lattice structure. g B ^ ^ P 疋, the arm includes an open structure. For example, the p dagger has other open structures with vertical elements connected by staggered ^ Bai Qiaonu. The lattice structure is highly efficient for bending and / or rotating, and has the advantage of increasing strength in the longitudinal direction. In this case, you need to align yourself. In this example, the or each flexible arm includes _ 此 ^ _U ', u EJ 44? AI_ ^ The ladder or arm includes an open structure, such as @ / 、 有 在 横 度The advantage of increased directional strength. It is necessary to move in self-alignment, and to keep the exact position in the vertical position. In addition to contact and sweeping, the cantilever beam that realizes the present invention is equipped with a plurality of guard tops and ends, and the forest is arranged adjacent to the edge of the platform to allow more than the edge of the second side and the end of the sweep during the insertion period. Exploited, no matter what: 8 ^ list ... Such a security #. There is a danger that the side or corners of the device "grasp," on the surface of the mind during operation. Some further shots of the present invention include: See the point provided to provide scanning probe microscopy, a sample support,用 士 #; _h as described in the "thirsty sample"-the cantilever device is described here, the cantilever device can be relatively used to scan the surface of the sample being supported: Two:: Used to select the top and surface of each or each scan during the tracing: As described above, the cantilever device of the present invention can be stored and displayed "A 丄 tm ~ for Beco, as in: large applications. Because Alas, the cantilever device described in the table of the specific embodiment of the present invention is used to scan the f-side of the information storage medium to take or write the data on the surface, where: or each -14- (10) The top of the drawing is arranged in contact with the table in use. The heater related to the top of the drawing is used to :; the device includes a contact with each of the scanning surfaces to allow the penetration of the top of the scan; Upper-two rooms for electrical supply ': the platform and arms are arranged in Support gas connection. Here, it is better to choose: a current path between the electric fetching of the heater and the writing and inserting of the heater. The heater used for taking and feeding materials is used between the storage media interfaces in use: should be. In order to provide a swipe tip and a contact tip as described above. However, the contact, the scan tip is preferably as- The implementing agency will provide sweeping in other specific embodiments when necessary. 'Providing a clear-advance-step approach to provide two tops to contact with the surface. The data storage medium and storage device of the present invention, the device includes: an A f value As the it beam device can move relative to the storage medium: the cantilever beam device interpolated, the cantilever: the device is used to describe the surface during the scan; and / 、, generally scan the vertical range of the surface with the surface Move. | 平平 3 # of the present invention provides a scanning device, which includes:-the suspension of the array _ I 柃 device each cantilever device is a device described before; and support Supported on each cantilever Placement and internal connection—children cantilever devices to form an integrated array. The present invention further advances separately. The viewpoint provides a data storage device and a scanning probe microscopic magnification, which include such a scanning device. It is better to describe in detail Before specific embodiments, briefly consider the basic design and operation of known cantilever beam devices in scanning probe applications, in which the cantilever beam devices that implement the present invention can be similarly utilized and are useful. -15-200302343 Invention Panming continued sheet storage system⑼ Considering the first data storage application, a known so-called fetch / write device 1 based on AFM is schematically shown in Figure 1. The device i includes a general u-type microfabrication A cantilever beam 2 connected to the support structure 3 (only partially shown in the figure). A read / write scan tip 4 is provided at the end of the cantilever beam 2 on the heater 5 and is highly doped silicon The cantilever beam legs 2a, 2b define the current path of the heater 5 connected to the support 3 between a pair of electrical supply lines (not shown). In operation, the read / write tip 4 is shifted from the surface of the data storage medium indicated schematically at 6 and is shown here in section. Here, the storage medium includes a silicon substrate 6a and a 40 nm-thick polymer surface layer 6b. The cantilever beam 2 foot 2a and Shan's telescoping provide a cantilever beam that rotates around the pivot p, meaning that the movement of the top 4 is usually perpendicular to the fan garden on the surface of the storage medium. In the write scan mode, the heater 5 can be heated to a write temperature by applying a voltage between the supply lines. Subsequent heating of the tip 4 causes local melting of the polymer surface layer 6a to allow the tip 4 to penetrate the surface layer to form a recess or bit score 7. Such a notch represents a bit value of "1", and a bit value is represented by the absence of a cavity. During a write scan, the storage medium 6 can be moved relative to the garment 1 to allow the scan tip 4 to write data in an area of the surface or a '' storage field '. In the read scan mode, the heater 5 is used as a thermal sensor by utilizing its temperature-dependent resistance. A voltage is applied between the supply lines to heat the heater to a read temperature that is less than the write temperature and high but not sufficient to melt the polymer. When the storage field is swept by the top end 4, the pivot position of the cantilever beam 2 is different for each bit position according to the presence or absence of the recess 7. In the absence of a cavity, the distance between the heater -16-200302343 (12) invention sheet 5 and the storage medium 6 is greater than the relative distance when the cavity is present and the tip enters the cavity. When a recess has a one-dimensional position and the temperature of the heater 5 and therefore its resistance will decrease thereafter, the heat transfer across the air gap between the heater 5 and the storage medium 6 is therefore more efficient. Therefore, when scanning the storage field, the data bits are detected by the temperature-dependent change in the impedance of the heater 5 which is moved by the monitoring instruction to the scanning tip.

In practice, in data storage applications, the array of such read / write devices is utilized as shown schematically in FIG. 2. Here, a data storage device 10 includes a data storage medium 11 and a read / write scanning device in the form of a read / write device 1 of an integrated array 12 as described above. Each read / write device 1 is connected to two supply lines, one row of supply lines R and one row of supply lines C, as shown schematically in the figure. All devices 1 in the same column of the array share the same column supply line R, and all devices 1 in the same row of the array share the same row supply line C. As shown in the driving mechanism outlined in 13, affecting the relative movement of the array and the storage medium, the array can be located in an operating position against the storage medium and during operation, each device 1 can scan its individual storage field . The columns and row lines R, C of the array 12 are connected to a power supply and read detector circuit indicated generally at 14. The circuit 14 operates to supply power to the device 1 for write and read scans, individual devices addressed by its columns and row lines, one column at a time, via the columns and row multiplexers of the circuit 14 (not shown separately). The read detector circuit of the block 14 operates during the read scan to conveniently detect the voltage measured by the device 1 as described above by measuring the voltage on both sides of the series resistor connected in the row C of the array 12. The bit value indicated by the thermal sensor 5. -17- 200302343 (13) Summary page of the invention Now considering the application of microscopic magnification, Figure 3 is a schematic representation of AFM 15, which illustrates the three basic detection mechanisms used in the art in the same figure. The AFM scanning device 16 includes a microfabricated cantilever beam 17 connected to a support structure 18 for substantial rotational movement about a pivot axis P, which movement is provided by the telescoping of the cantilever beam body as before. The scanning tip 9 is arranged at the end of a cantilever beam which is far away from the support 18. In operation, the sample 20 to be analyzed is placed on the sample support 21. The driving mechanism, as indicated schematically in 2 2 affects the relative movement of the device 16 and the sample support 21 so that the sample is scanned by the top end 19. During scanning, due to the general vertical movement of the tip, the interaction of the atomic force between the tip and the sample surface affects the rotational movement of the cantilever beam 17, and the topography of the sample is revealed by detecting the movement. These two basic detector systems are generally indicated at 23, 24, and 25, although in practice Ueda uses only one of these systems. The first system utilizes a photon technique such as laser interference to detect a cantilever beam < private movement as indicated schematically at 23.涊 The second system utilizes a piezoelectric sensor 24 which senses the pressure caused by the cantilever == rotation deflection and is connected to the appropriate detection state circuit 26 via the support. The third system uses capacitive sensing, and the cantilever beam 17 is used as an electrode, which is mounted on the cantilever beam together with the coaxial electrode 25, and a suitable soil detector circuit 26 is connected. The electrode 25 therefore acts as a proximity sensor for the cantilever beam 17. The distance between the cantilever beam and the coaxial electrode 25 is due to the voltage drop detected by%, 30, and the cantilever caused by the movement of the scanning tip. The beam deflected and changed. A preferred embodiment of a cantilever device which can be used as a scanning or reading / writing device in a wind-up system will now be described with reference to FIGS. 4 to 9 (here -18- 200302343 (14) Invention Description Sheet On the one hand, although AFM has been described above as a special example of scanning probe microscopy, it will be understood that specific embodiments of the present invention can be equally used in other scanning probe microscopy, such as in STM and SNOM). Referring first to FIG. 4, the cantilever beam device 30 of this embodiment includes a top platform 31 which is connected to a support 32 by a flexible arm arrangement generally indicated at 3 3 (only partially shown in the figure) . In this specific embodiment, the platform 31 has a generally flat, plate-like structure. Three contact tips 34

Spaced symmetrically around the circumference of the platform, each contact tip 34 sits on an extension 35 of the platform to increase the relative spacing of the tips. A scanning tip 36 is loaded on the substantial center of the platform 31, and the scanning tip 36 is connected to the main body of the platform through three symmetrically arranged, flexible connection portions 37. These connecting portions 37 are formed by narrow strips of the platform structure, which have sufficient inherent flexibility to allow the scanning tips 36 to be limited in mutual movement, which are independent of the main body of the platform and extend beyond the plane of the figure. A sensor is provided on the platform to sense the movement of the scanning tip as discussed further below. In this particular embodiment, the sensor is implemented by three sensor elements, indicated generally at 38. These components are seated tightly to the scan tip 36, one formed on each connection portion 37. A plurality of guard tops 39 are also provided on the platform 31. These tips are arranged adjacent to the edges of the platform structure and particularly the outer corners, although not sufficiently close to scanning and touching the tips to possibly interfere with these functions as described below. The flexible arm arrangement here includes three flexible arms, a pair of external flexible arms 40a, 40b, and a central flexible arm 41. Each outer arm 40a, 40b is between the respective sides of the support 32 and the platform 31 -19-200302343 Description of the invention The page support is extended as shown (15), while the central arm 41 connects the scanning top 36 to the support of. Each of the arms 40a, 40b, 41 is formed of a lattice structure or a longitudinal member connected by a staggered portion. For the central arm 41, the lattice structure is generally in the form of a step, while for the outer arms 40a, 40b, the lattice structure is formed with a main triangular open section given an angled staggered portion. Many of the components of the cantilever device 30 are manufactured using semiconductor processing technology in a generally known form. The platform and the arm arrangement here are formed by highly doped stone to provide a conductive path through the connecting portion 37 of the central arm 4, the sensor element 38, the platform 31, and the external flexible arms 40, 40b. Here, on the support 32, the central arm 41 and the outer arm 40a are connected to the electrical supply lines S1, S2, respectively, whereby the sensor can be connected to the power supply and detector circuits in the circuit, for example, in FIG. 2 and FIG. The elements 14 and 26 of 3 are connected. Fig. 5 is a schematic side elevation view illustrating the platform terminals of the many top-end cantilever devices 30 in more detail. The contact tips 34 are all the same size and have blunt, rounded ends to reduce wear on the scanning surface. The scanning tip 36 is nanometer-sized and in this particular example is shorter than the contact tips 34 for operations close to the scanning surface but spaced apart. These guard tips 39 are small, blunt tips that generally do not engage the scanning surface. These tops serve to protect the scanning surface by preventing the adjacent sides or corners of the platform 31 from coming into contact with the scanning surface when the platform is brought to its operating position. In particular 'when the platform is brought into engagement with the scanning surface, one or more contact tips 34 will first engage the surface. The extension of the arm arrangement 33 then provides the required bending and rotation movements to allow the platform to rotate around the joint tip with a torque of -20-200302343 (^ 16). The description sheet orientates the platform until all three contact tips 34 are on the surface Join. The platform is then aligned parallel to the scanning surface and the scanning tip is correctly seated in the scanning operation. The symmetrical arrangement and large spacing of the contact tips here provide a highly stable operating position with reduced sensitivity to vibrations. (Although the dimensions are not shown to scale in this figure for ease of representation, in this specific embodiment, the distance between the contact tips is close to 100 times the height of the scanning tips, and the height of the scanning tips is about 500 nm and the contact tips are About 50 microns). In addition, the lattice structure of the arms 40a, 40b, and 41 constitutes a simple but efficient mechanism that provides the required flexibility of platform orientation while maintaining good overall stability and rigidity in the longitudinal direction, the latter quality ensuring operation Scan the top for precise longitudinal positioning. In addition, the self-aligning operation of the cantilever beam means that the loading force between the platform and the scanning surface is less sensitive to thermal drift. Previous devices often required a feedback mechanism to control the loading force, which in this design was defined essentially internally and was largely independent of thermal drift. The feedback mechanism can therefore be operated with higher precision or completely exempted in some cases. The scan tip 36 is shorter than the contact tip 34, and the arrangement shown here is particularly applicable to microscopy applications where the scan is performed without maintaining the scan tip in contact with the sample surface. When scanning a surface, the interaction between the surface and the top end of the scan causes the top end to move, and through the extension of the connection portion 37, it is generally perpendicular to the extent of the surface. Three symmetrically arranged connection sections 37 and a connection to the central flexible arm 41 are provided to ensure good stability here and the arrangement allows scanning to be performed with very small overall movements. The sensor element 38 can be any suitable element, such as a piezo element, for sensing the movement of the scanning tip and being located adjacent to the scanning tip due to the sensitivity of the scanning tip. Here we use three-21-200302343 (Π) _ sensor elements in the overall flat ^ P month said to the appropriate detector circuit last name f # 疋 度 'When the supply line S2 S2 is connected to the above specific implementation Examples are also as described before W. Fetch / write device. However, it is necessary to scan both the top end 36 and the storage medium for both reading and writer scanning in a shell material storage application. The nuclear scanning scans the g-end # surface contact. Therefore, for this application, the cup Le Dina will be the same length as the top, making the scanning tip contact the surface in the grip position. l, Μ + s #, for the driving operation, an offset force f can be applied to the entire cantilever beam for a slight contact pressure or the scanning tip can be made slightly longer than the contact tops w,, and To provide contact pressure. In any case, the scan tops " politically form a fourth contact tip, the four contact tips lying substantially in the same plane in the known position. For the write scan, the heater required for the write operation can be provided separately from the sensor element 38 (for example, in FIG. 4, the direct view is at the scan tip 36), and If the same circuit of the file 38 is provided by the appropriate supply circuit 14 (Figure 2), the source in this case 'may use any suitable sensor element as before,: ,,, and more appropriately' These components 38 series It is a thermal resistance element, which is formed by low doping of these regions to give high resistance, and it is also used as heating for the write scan situation and as an inductor for the read scan. These are then operated by the circuit 14 at the first temperature for the A write aggressiveness and at the T shirt for the read detection. In any case, in addition to the advantages discussed above, the small scan tip movements of the arrangement allow bits to be written at particularly high speeds.隹 ;;,: The specific examples above represent a highly efficient design, but many modifications to the basic design are conceivable. Fig. 6 shows the modification of one of the cantilever beam devices. The platform here is generally similar to the platform 31 in Figure 4 and the same parts are marked accordingly. However, here, a plurality of ridges 45 are arranged in a grid pattern and formed on the load surface at the top end of the platform. The cross section of the ridge 45 is generally triangular. As shown in the enlarged area, the height of the ridge 45 is less than the height of scanning and contacting the tops 36, 34 to avoid interference with the functions of the tops. These ridges serve to reinforce the platform, which is properly formed during the same etch processing stage as scanning the tip 36, providing rigidity and stability for a given platform thickness. This then makes it possible to reduce the overall thickness of the platform. The above design can also be modified for use with many other detection agencies, such as optical detection for AFM applications. Here, the platform or a part thereof can be used as a reflector for optical detection. As a special example, a design is conceivable, in which the scanning tip is located at one end of the micro-cantilever structure, formed in the main body of the platform and angled downward relative to the main body of the platform. Optical methods such as laser interference can then be used to detect the rotational movement of the smaller cantilever beam due to the interaction between the scanning tip and the sample surface. In other embodiments, ' the tip movement can be capacitively sensed. For example, the scanning tip can be mounted directly on a flat platform such as one of the capacitors, and other "flats" can be provided by the scanning surface. Later scanning of the top movement can be provided by the platform's own extension and contraction and the variation in voltage drop across the capacitor detected by the appropriate circuit. Other embodiments may utilize a similar technique to provide the required force between the platform and the scanning surface, set the voltage between the platform and the sample to provide the required force, and control the distance between the scan tip and the sample. In this way, a non-contact, switch mode, or fixed force measurement can be performed by piezoelectrically detecting the extension or contraction of the platform or detecting the movement of the scanning tip during operation. -23- 200302343 (19) Description of the invention. In other specific embodiments, the platform can be captured in the potential of the sample simply by the effect of attracted electromagnetic force or in some cases by the force of a water film. Referring now to FIG. 7, the cantilever device 50 of this embodiment again includes a top platform 51, which is supported by a flexible arm arrangement 52 generally indicated at 53. The platform 51 again has a substantially planar structure, but in this embodiment, the platform is formed in two platform sections labeled 54a and 54b. Three contact tips 55a, 55b, 55c are provided on the platform in a symmetrical arrangement. The contact tips 55c are blunt contact tips like the tip 34 in the first embodiment described above. However, the contact tips 55a and 55b are also scanning tips, and are therefore nanometer tips with the same length as the contact tips 5 5 c. These scan tips 55a, 55b are loaded substantially in the center of the platform sections 54a, 54b, respectively, and are substantially equidistant from the support 52. Each scanning tip 55a, 55b is connected to a section of the platform by three symmetrically arranged, flexible connecting portions 57 equivalent to three of the connecting portions 37 in the first embodiment. As in the first embodiment, a sensor is associated with each scanning tip 5 5 a, 5 5 b to sense the scanning tip movement. Here, each sensor is again formed of three sensor elements 58 equivalent to the element 38 in the first embodiment. The flexible arm arrangement 53 includes five flexible arms having the advantageous lattice structure described above. A pair of outer arms 60a, 60b extend between the support 52 and the outer sides of the platform sections 54a, 54b, respectively. The arm 61a, 6lb can be connected step by step to scan the top ends 55a, 55b to the support 52, respectively. In addition, a central flexible arm 62 is connected to contact the tip 55c -24- 200302343 (20) Description of the invention to the support shown in the figure. The arm 62 extends between and outside the platform sections 54a, 54b such that the contact tip 55c is offset further from the support than the tips 55a, 55b. The platform sections 54a, 54b are connected via the central arm 62 by means of an insulating portion 63, which is formed by the low doping of these areas to provide the required high resistance, whereby the two platform areas can be connected to each other Electrically isolated. The platform areas of the arm arrangement and at least the arms 60a, 60b, 61a, 61b are formed of highly doped silicon, whereby each scanning tip sensor is connected via an externally flexible arm 60a, 60b, and a sensing element 58 The parts 57, the respective platform sections 54a, 54b, and the respective top connecting arms 6 1 a, 6 1 b are connected in a current path. Therefore, when the arm pairs 60a, 61a and 60b, 6 lb are connected to appropriate power supply and detection circuits (such as elements 14 and 26 of Figures 2 and 3), the two scanning tips can be operated independently. In the general example shown here, the external flexible arms 60a, 60b are connected to the respective electronic supply lines R1, R2 on the support 52 and the arms 61a, 61b are connected to the respective supply lines S1, S2 on the support, to Connect to the detector circuit. This special arrangement allows the two tops to operate simultaneously as desired in some applications, but other arrangements are also conceivable. For example, both of these arms 61a, 61b can be connected to a single supply line S or both of these arms 60a, 60b can be connected to a single supply line R. By connecting the supply line to the detector circuit appropriately, the Wait for selective operation at the top of the scan. Indeed, by adding diodes of opposite configuration to the two scanning tips in the current path, and applying different polar voltages to the two tips, the two tips can be selectively passed through a single pair of supply lines R and S In operation, the line R is connected to both the external arms 60a, 60b and the line S is connected to both the arms 61a, 61b. Reduced number of supply lines -25- 200302343 (21) On and off continuation pages are particularly needed when more than one device is operated in parallel, especially for operation in the integrated array 12 as shown in FIG. 2 . The self-aligning operation of the cantilever device 50 is equivalent to that described in the first embodiment above, and the corresponding comments and operational advantages are applicable. Of course, here, these scanning tips 55a, 55b also touch the tips, but the degree of free vertical movement of these tips has a negligible effect on the overall platform alignment. In this embodiment, the length of the connecting portion 57 is on the scale of 1 micrometer, and the tip pitch is on the scale of 100 micrometers. In the overall alignment, the effect of the movement of the top of each scan and the readings of the other tops are therefore well within the system noise level. The specific embodiment of Fig. 7 can be used for both AFM and data storage applications, and corresponding sensing techniques and modifications can be used as discussed in the first specific embodiment above. However, the embodiment of FIG. 7 is particularly advantageous for use in data storage applications, where two data lines can be read simultaneously. In this case, where the two scan tops are selectively operated, the read scan output is of course digital rather than continuous, the scan top moves and therefore the data value, which is obtained by reading the separation sensor at each bit position And detect. In fact, in the integrated data storage array 12 (Fig. 2), the reading is of course digital in any case, and the devices are activated one row at a time at a subsequent bit position in the storage field at a time. Specific embodiments are also conceivable in which more than two scanning tips are provided by the proper formation of electrically isolating the areas and conductive paths on the cantilever device. For example, with appropriate modification of the specific embodiment of FIG. 7, the contact tip 55c can also be used as a scanning tip. The defending apex 39 and / or the reinforcing ridge 45 described with the first specific embodiment can also be used in the specific embodiment of FIG. 7 in -26- 200302343 (22). Many modifications to the above specific embodiments are conceivable. For example, in order to provide flexibility in platform orientation, only some of the flexible arm arrangements 33, 53 can be made flexible, for example, by forming isolated lattice structure sections along the length of individual arms. The embodiment of Figures 4 and 7 utilizes three contact tips to align the platform about two axes. For applications aligned around a single axis, a cantilever device with only two contact tips can be used. Fig. 8 is a simplified schematic diagram of such a device. The device 70 has a platform 71 connected to the support 72 by a flexible arm arrangement indicated generally at 73. The flexible arm arrangement 73 is preferably formed by one or more flexible arms having a lattice structure as described in the earlier embodiments. In this example, the platform has two contact tips 74, 75, which are arranged along a line L-L substantially perpendicular to the longitudinal extent of the arm arrangement 73. Therefore, when the device 70 is brought into engagement with a scanning surface, the telescoping of the arm arrangement allows the platform 71 to be oriented around axis A-A, which is perpendicular to the line L-L, bringing the tips 74, 75 into contact with the surface. In this general arrangement, in addition to the contact tips 74, 75, for example, a scanned tip (not shown) may be provided halfway between the two contact tips. Alternatively, one of these two connecting tips can be used as the scanning tip. For example, the contact tip 74 may be a blunt tip and the contact tip 75 may be a sharp tip as a scanning tip. Here, the motion of the two tops caused by the tilt of the platform during scanning can be detected by a suitable sensor, although only scanning the top 75 will detect small surface details. The difference between the two sensor outputs can be obtained to obtain the final scan output. Of course, other arrangements are also conceivable. For example, the platforms are arranged at an angle or parallel to the longitudinal range of the arm arrangement. -27- 200302343 (23) Description of the Invention Continued As suggested earlier, for some applications, it may be desirable to operate a plurality of cantilever beam devices in parallel, for example, in an array. Fig. 9 is a schematic display diagram of a scanning device having a cantilever device such as an array 80 of one of the devices 30, 50, and 70 described above. The devices 30, 50, 70 are arranged in columns and rows on the integrated support structure 81. Supports 32, 52, 72 for each cantilever device are therefore provided by an integrated support structure. The monolithic array is fabricated as a integrated circuit using semiconductor processing techniques of a generally known form. This support structure 81 carries electrical supply lines to connect the device to the appropriate power supply and detector circuit, as described above. Although the use of such an array in micro-magnification applications is conceivable, the array 80 is particularly suitable for use with the array 12 as in the data storage device of FIG. 2, and the cantilever device has specific details as in FIGS. 4 and 7. Three of the examples touch the tip. In any case, the self-aligned design of the cantilever device is particularly advantageous in such an array because the array can all be properly positioned relative to the scanning surface and any slight misalignment of the individual cantilever can be achieved by the self described above The alignment operation is corrected. Although particularly preferred embodiments and modifications have been described in detail above, it will be apparent to those skilled in the art that many further variations and modifications may be made to the above specific embodiments without departing from the scope of the invention. The drawings briefly illustrate the preferred embodiment of the present invention by way of example and with reference to the accompanying drawings, in which: Figure 1 shows the general structure of a known cantilever beam used in data storage applications; Figure 2 is a A schematic diagram of a known data storage device; FIG. 3 is a schematic diagram illustrating the microscopic magnification of the sheet force of the basic description of the atomic detection mechanism used in a known system. 28- 200302343 (24) Fig. 5 is a partial side view of the device of Fig. 4; Fig. 6 is a modification of the device of Fig. 4; Fig. 7 is one of the implementation of the invention A schematic diagram of a second cantilever beam device; FIG. 8 is a schematic diagram of a third cantilever beam device implementing the present invention; and FIG. 9 is a schematic diagram of a cantilever beam implementing an array of the present invention. Description of Symbols of the Drawings 1 > 70 device 2, 17 cantilever 3 > 18 support structure 4, 19, 36, 55a, 55b, 75 scan top 5 heater 2a, 2b cantilever foot 6, 11 data storage medium 6a Shi Xi substrate 6b Polymer surface layer 7-bit notch 10 Data storage device 12, 80 Integrated array 13, 22 Driving mechanism 14, 30 Circuit 15 Atomic force microscopy 16 Scanning device-29- 200302343 Invention description sheet (25 ) 20 Sample 21 Sample support 22, 23, 24 Basic detector system 26 Detection as circuit 25 Coaxial electrode 3 Bu 51, 71 Top platform 32, 52, 72 Support 34, 55a, 55b, 55c, 74, 75 contact the top 35 Extends 30, 50, Cantilever device 33, 53, 73 Flexible arm arrangement 37, 57 Flexible connection part 39 Guards the top 40a, 40b, 60a, 60b External flexible arm 4 62 Central flexible arm 38, 58 Sensing Components S2 S2 electronic supply line 33 arm arrangement 54a, 54b platform section 61a, 61b flexible arm 63 insulation part 81 support structure -30-

Claims (1)

200302343 Patent application scope 1. A cantilever device (30, 50, 70) for scanning a surface, the device includes: a support (32, 52, 72); a top platform (31, 51, 71) having A plurality of tips, including two contact tips (34, 55a-55c; 74, 75), providing contact points with the surface being scanned and a scanning tip (36; 55a, 55b; 75) for scanning the surface; and A flexible arm arrangement (33, 53, 73) that connects the top platform to the support and the telescoping via the arm arrangement allows the orientation of the platform to bring these contact tops (34; 55a-55c; 74, 75) to Make contact with the surface being scanned. 2. The device according to item 1 of the patent application scope, wherein the platform (31, 51) has three misaligned contact tops (34; 55a-55c), which provide contact points with the surface, and the arms are arranged (33, 53, 73) telescoping allows the platform to be oriented to contact the three contact tips with the surface. 3. The device according to item 1 or item 2 of the patent application scope, wherein the tip platform (51) has a plurality of scanning tips (55a, 55b). 4. The device according to any one of the foregoing patent applications, wherein the or each scanning tip (55a, 55b, 75) is one of the contact tips. 5. The device according to any one of the foregoing patent applications, wherein the top platform has more than three contact tops, and the free ends of the contact tops are substantially in the same plane. 200302343 Application for the annual Lifan t Park continuation page-'; _ 6. The device according to any one of the aforementioned patent application scopes, wherein the or each contact tip (36, 55a, 55b) is loaded on the platform (31, 51) Independent independent movement generally perpendicular to the range of the surface during scanning. 7. The device according to item 6 of the patent application scope, wherein the or each scanning tip (36, 55a, 55b) is connected to the platform by a plurality of flexible connecting portions (37, 57). 8. The device according to item 6 or item 7 of the patent application scope, including a sensor (38, 58) associated with the or each scanning tip (36, 55a, 55b) for sensing the movement during scanning . 9. The device according to item 8 of the scope of patent application, wherein the platform (31, 51) and the flexible arm arrangement (33, 53) provide a pair of electrical supply lines (SI, S2; Rl) on the support (32, 52) , SI; R2, S2) is a current path for the electrical connection of the inductors (38, 58). 10. The device according to any one of the aforementioned patent applications, wherein the flexible arm arrangement (33, 53, 73) includes a plurality of flexible arms (40a, 40b, 41; 60a, 60b, 61a, 61b, 62) 'Extending between the platform and the support ο 11_ The device of the scope of patent application 10, wherein the or each scanning tip (36, 55a, 55b) is a flexible arm (41, 53) arranged by an arm (33, 53) 61a, 61b) are connected to the support (32, 52). 12. The device (30) of the second patent application range, wherein: at least three contact tops (34) are spaced around the circumference of the platform (3 丨); the scanning top (36) is located on the platform (31) It is essentially centrally loaded and the dream is connected to it by a plurality of flexible connecting portions (37) to allow the scanning tip to move relatively generally perpendicular to the scanning range during the scanning period-200302343 patent application Fanyuan page reading; The flexible arm arrangement (33) includes a pair of external flexible arms (40a, 40b) 'which extend between the platform (31) and the support (32) and a central flexible arm (41), between the external arms (40a, ⑽ ... configured to connect the scanning tip (36) to the support (32); the device (30) includes a sensor (38) associated with the scanning tip (36) for sensing during scanning Should move; and a current path to electrically connect the inductor (38) between the pair of electrical supply lines (SI, S2) on the support, via the central flexible arm (41), the inductor (38) and -This external flexible arm (40a, 40b) is provided. The device (50) of the second scope of the patent, wherein: the first and second scanning tips (55a, 55b) are on the platform (51) in the first and second sections (54a, 54b) and the support (52) Loaded substantially equidistantly, each scanning tip (55a, 55b) is connected to a separate section of the platform by a plurality of flexible connecting portions (57) to allow the scanning tip to move generally perpendicular to the scanning range during scanning; One of the contact tips (55c) is arranged between the first and second scanning tips (55a, 55b), which is offset more from the support (52) than the scanning tips (55a, 55b). The flexible arm arrangement (53) Including first and second flexible arms (61a, 61b), respectively connecting the first and second scanning tips to the support (52) and a centrally disposed one between the first and second flexible arms The flexible arm (62) and the contact tip (55c) are connected to the support (52) and a pair of external flexible arms (60a, 60b) respectively apply for the special model on the support (52) and the platform (50) 200302343 : National performance page fiber: Talking about the smashing arts and mines _ 丨 111 Love Crane! 1 !! || The first and second sections (54a, 54b) extend. The first and second sections (54a, 54b) of the platform are internally connected via a central flexible arm (62) such that the first and second sections The sections are electrically isolated from each other. The device (50) includes a separate sensor (58) associated with each scan tip (55a, 5513) to sense the movement during the scan; and for each sensor ( 58), one of the external flexible arm (60a, 60b), the sensor (58) and the flexible arm (61a, 61b) is connected to one of the supports by connecting the top of the relevant scan to the support. The electrical connection of the inductors between the supply lines (R1, S1; R2, S2) provides a current path. 14. The device as claimed in claim 13 wherein the first and second scanning tips (55a, 55b) are contacting tips. 15. The device as claimed in any one of claims 10 to 14, wherein each of the flexible arms (40a, 40b, 41; 60a, 60b, 61b, 02) includes a lattice structure. 16. For the device (70) of the scope of application for patent, only two of the contact tips (74, 75) are provided on the tip platform (71), and the two contact tips are substantially along the The vertical range (LL) of the vertical range of the arm arrangement (73) can be changed and configured, whereby the expansion and contraction of the arm arrangement (73) allows the platform (71) to be oriented around the axis (AA) perpendicular to the line (LL). 17. The device according to item 16 of the patent application, wherein the flexible arm arrangement (73) includes a plurality of flexible arms, and each flexible arm includes a lattice structure. ZUUJUZJ4J μ · As stated above, "^ A plurality of devices of security and protection-^ Zhong Zuo-item, in which the cutting platform has a defensive system also" is arranged on its adjacent edge to be in the insertion period 19. As the first two: the edge and the Sweep contact between surfaces. One fact: top: any-item device in the patent fan garden, where the platform has (45). Plane and structure 'which has a reinforcing ridge formed on its surface 20. As previously mentioned, the data is stored therein: The cantilever beam device of any of the patent scopes is used to sweep the surface of the red body (11) to read and The information written on it, the or each scanning top (36, 55a, 55b) is arranged to contact the surface in use; _ clothing set includes association with the scanning top (36, 55a, 55b) The heating is (38, < 5 parent, two) 'to heat the surface at the point in contact with the scanning tip to allow the scanning tip to pass through; and ^ (31, 51) and arm arrangement (33, 53) On the support (32, 52), a current path is provided for the electrical connection between the electrical supply lines (SI, S2; R1, SI; R2, S2), (3, 8, 58). The device of claim 20 of the patent claims, wherein the scanning tip (36, 55 & 55b) is a contact tip. 22 · —A kind of data storage device (10), which includes: a data storage medium (11); — if the cantilever device (30, 50) of the scope of application for the patent item 20 or 21, the cantilever device It can be moved relative to the data storage medium (ιι) to scan the surface; and 200302343 Application for a special page of Fanyuan Fanyuan a detector (14) to detect a ^ and table during the scan; ^ perpendicular to the Wait until the top (36, 55a, 5 ^) of the scan is moved. 23. — A microscopic magnification of a scanning probe (15), including: a sample support (21) to support the sample being scanned (20);-such as the cantilever beam of the scope of application for item i or item 19 Device (30, 50, 70), the cantilever device (30, 50, 7G) can be moved relative to the sample support (21), thereby scanning the surface of the supported sample (2); and * -Detector (26) 'is used to detect the interaction of the or each tip (36, 55a, 55b, 75) with the surface during scanning. 24. A scanning device, comprising:-cantilever beam devices (30, 50, 70) of the array (80), each cantilever beam set includes, for example, item i to the first support structure ⑻, This option is provided (32, 52, = two-arm kneading device 0, 50, 70) and these cantilever beam devices are interconnected to form an integrated array. 25 · —A kind of data storage device (10), comprising: a data storage medium (11); such as the scanning device of the scope of application for patent No. 24, wherein each cantilever device of the array ⑽ includes The device (30, 50) of item 20 or item 2, the scanning device can be moved relative to the data storage medium (11) to scan its surface; and-the detector (14) 'is used to detect the scanning insertion During the movement of each scanning tip (36, ..., 55b) of the array (80) which is generally perpendicular to the surface fan garden during the period. 26 · —A kind of scanning probe microscopic magnification (15), which includes: 200302343 Shen Ningzhuan Hao Fanyuan title sheet sample support (21) to support the sample being scanned (20); such as the scope of application for patent 24 The scanning device, wherein each cantilever device (30, 50, 70) of the array (80) includes a device such as the item i to item 19 of the patent application range, and the scanning device can be supported relative to the sample (2l ) To move to scan the surface of the supported sample (20); and-a detector (26) to detect each woman & tip (36, 55a, 55b, 75) Interaction with the surface. • 放大 Scanning probe microscopic magnification of patent application No. 23 or No. 26, where the detector (26) is arranged to detect during the scanning, which is generally perpendicular to the surface of the surface. The scanning tip (36, 55a) , 55b, 75). 28. The scanning probe of the patent scope of item M,% or item 27 of the patent list shows κ million, where the scanning probe micro-magnification is a pre-forced micro-magnification (15) .