TR200000750T2 - Yüklü parçacık ışınları ile ilgili gelişmeler. - Google Patents
Yüklü parçacık ışınları ile ilgili gelişmeler.Info
- Publication number
- TR200000750T2 TR200000750T2 TR2000/00750T TR200000750T TR200000750T2 TR 200000750 T2 TR200000750 T2 TR 200000750T2 TR 2000/00750 T TR2000/00750 T TR 2000/00750T TR 200000750 T TR200000750 T TR 200000750T TR 200000750 T2 TR200000750 T2 TR 200000750T2
- Authority
- TR
- Turkey
- Prior art keywords
- charged particle
- particle beam
- chamber
- advances
- pressure
- Prior art date
Links
- 239000002245 particle Substances 0.000 title abstract 4
- 238000011144 upstream manufacturing Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/075—Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/063—Geometrical arrangement of electrodes for beam-forming
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/065—Construction of guns or parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/301—Arrangements enabling beams to pass between regions of different pressure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/31—Processing objects on a macro-scale
- H01J2237/3104—Welding
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Optics & Photonics (AREA)
- Physics & Mathematics (AREA)
- Electron Sources, Ion Sources (AREA)
- Radiation-Therapy Devices (AREA)
- Particle Accelerators (AREA)
- Electrostatic Spraying Apparatus (AREA)
- Secondary Cells (AREA)
- Cold Cathode And The Manufacture (AREA)
- Cookers (AREA)
- Electrophonic Musical Instruments (AREA)
- Electroluminescent Light Sources (AREA)
- Lining Or Joining Of Plastics Or The Like (AREA)
- Luminescent Compositions (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Polyurethanes Or Polyureas (AREA)
- Polymerisation Methods In General (AREA)
- Generation Of Surge Voltage And Current (AREA)
Abstract
Bir yüklü parçacik yayici düzenek, bir kutupta yüklü parçacik yayinlamak için bir yayici eleman (5) içerir. Bir borumsu kalkan elektrotu (6) yayici elemani çevreler ve kullanim sirasinda yüklü parçaciklarla ayni kutupta tutulur. Bir borumsu ivmelendirici elektrot (7) kalkan elektrotu (6) ile büyük ölçüde eseksenli olarak yerlestirilir ve kullanimda kalkan elektrotunun ters kutbunda tutulur. Düzenleme, yüklü parçaciklarin baslangiçta yayici elemandan (5) yanal olarak disa dogru yayilacak ve daha sonra borumsu ivmelendirici elektrottan (7) geçen bir isin haline odaklanacak sekildedir.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB9720350.9A GB9720350D0 (en) | 1997-09-24 | 1997-09-24 | Improvements relating to charged particle beams |
Publications (1)
Publication Number | Publication Date |
---|---|
TR200000750T2 true TR200000750T2 (tr) | 2000-06-21 |
Family
ID=10819590
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TR2000/00750T TR200000750T2 (tr) | 1997-09-24 | 1998-09-24 | Yüklü parçacık ışınları ile ilgili gelişmeler. |
Country Status (21)
Country | Link |
---|---|
US (1) | US6404115B1 (tr) |
EP (3) | EP1587129B1 (tr) |
JP (1) | JP4200656B2 (tr) |
KR (1) | KR100586050B1 (tr) |
CN (1) | CN1205646C (tr) |
AT (3) | ATE430375T1 (tr) |
AU (1) | AU730293B2 (tr) |
BR (1) | BR9812505B1 (tr) |
CA (1) | CA2303148C (tr) |
CZ (1) | CZ294249B6 (tr) |
DE (3) | DE69839952D1 (tr) |
EE (1) | EE04694B1 (tr) |
ES (1) | ES2244081T3 (tr) |
GB (1) | GB9720350D0 (tr) |
NO (1) | NO326142B1 (tr) |
NZ (1) | NZ503060A (tr) |
PT (1) | PT1018137E (tr) |
RU (1) | RU2201006C2 (tr) |
TR (1) | TR200000750T2 (tr) |
UA (1) | UA69394C2 (tr) |
WO (1) | WO1999016101A2 (tr) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6630774B2 (en) * | 2001-03-21 | 2003-10-07 | Advanced Electron Beams, Inc. | Electron beam emitter |
US7147900B2 (en) * | 2003-08-14 | 2006-12-12 | Asm Japan K.K. | Method for forming silicon-containing insulation film having low dielectric constant treated with electron beam radiation |
US8159118B2 (en) | 2005-11-02 | 2012-04-17 | United Technologies Corporation | Electron gun |
ES2444784T3 (es) | 2006-10-02 | 2014-02-26 | Nippon Steel & Sumitomo Metal Corporation | Junta soldada mediante haz de electrones con excelente resistencia a la fractura frágil |
JP5011383B2 (ja) * | 2007-05-16 | 2012-08-29 | 電気化学工業株式会社 | 電子源 |
JP4636082B2 (ja) * | 2007-12-27 | 2011-02-23 | 日新イオン機器株式会社 | カソード保持構造およびそれを備えるイオン源 |
ES2631979T3 (es) | 2009-12-04 | 2017-09-07 | Nippon Steel & Sumitomo Metal Corporation | Junta de soldadura a tope formada usando un haz de electrones |
US8992109B2 (en) | 2009-12-04 | 2015-03-31 | Nippon Steel & Sumitomo Metal Corporation | Butt-welded joint of welded structure, and method for manufacturing the same |
US8653403B2 (en) | 2009-12-04 | 2014-02-18 | Nippon Steel & Sumitomo Metal Corporation | Butt-welded joint and method for manufacturing same |
JP5471380B2 (ja) * | 2009-12-04 | 2014-04-16 | 新日鐵住金株式会社 | 洋上風力発電塔用大型溶接鋼管の高能率製造方法 |
JP2011246804A (ja) | 2010-04-30 | 2011-12-08 | Nippon Steel Corp | 電子ビーム溶接継手及び電子ビーム溶接用鋼材とその製造方法 |
JP2011246805A (ja) | 2010-04-30 | 2011-12-08 | Nippon Steel Corp | 電子ビーム溶接継手及び電子ビーム溶接用鋼材とその製造方法 |
US20110294071A1 (en) * | 2010-05-28 | 2011-12-01 | Canon Kabushiki Kaisha | Electron gun, lithography apparatus, method of manufacturing article, and electron beam apparatus |
EP2644733B1 (en) | 2010-11-22 | 2016-05-25 | Nippon Steel & Sumitomo Metal Corporation | Electron-beam welded joint, steel material for electron-beam welding, and manufacturing method therefor |
KR101850571B1 (ko) | 2010-11-22 | 2018-04-19 | 신닛테츠스미킨 카부시키카이샤 | 전자 빔 용접 조인트 및 전자 빔 용접용 강재와 그의 제조 방법 |
KR101346961B1 (ko) | 2010-11-22 | 2014-01-02 | 신닛테츠스미킨 카부시키카이샤 | 전자 빔 용접 조인트 및 전자 빔 용접용 강재와 그 제조 방법 |
KR101867111B1 (ko) | 2010-11-22 | 2018-06-12 | 신닛테츠스미킨 카부시키카이샤 | 전자 빔 용접 조인트 및 전자 빔 용접용 강재와 그 제조 방법 |
JP5135560B2 (ja) | 2010-11-22 | 2013-02-06 | 新日鐵住金株式会社 | 電子ビーム溶接継手及び電子ビーム溶接用鋼材とその製造方法 |
RU2478974C2 (ru) * | 2011-05-31 | 2013-04-10 | Федеральное государственное унитарное предприятие "Всероссийский научно-исследовательский институт метрологии им. Д.И. Менделеева" (ФГУП "ВНИИМ им. Д.И. Менделеева") | Способ воспроизведения единицы силы постоянного электрического тока и устройство для его осуществления |
WO2013122633A1 (en) * | 2011-10-18 | 2013-08-22 | Baldwin David A | Arc devices and moving arc couples |
EA019817B1 (ru) * | 2011-12-29 | 2014-06-30 | Федеральное Государственное Бюджетное Образовательное Учреждение Высшего Профессионального Образования "Национальный Исследовательский Томский Политехнический Университет" (Фгбоу Впо Ни Тпу) | Ионный диод с магнитной самоизоляцией |
RU2680150C1 (ru) * | 2017-12-27 | 2019-02-18 | федеральное государственное бюджетное образовательное учреждение высшего образования "Национальный исследовательский университет "МЭИ" (ФГБОУ ВО "НИУ "МЭИ") | Катодный блок сварочной электронной пушки |
US12062518B2 (en) | 2018-03-23 | 2024-08-13 | Freemelt Ab | Cathode assembly for electron gun |
RU183913U1 (ru) * | 2018-05-07 | 2018-10-09 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Саратовский государственный технический университет имени Гагарина Ю.А." (СГТУ имени Гагарина Ю.А.) | Триодная электронная пушка с автокатодом |
GB2583359A (en) * | 2019-04-25 | 2020-10-28 | Aquasium Tech Limited | Electron beam emitting assembly |
JP7294754B2 (ja) * | 2019-09-23 | 2023-06-20 | フリーメルト エービー | 金属3dプリンタ |
US11965494B2 (en) | 2021-02-17 | 2024-04-23 | Accion Systems, Inc. | Electrospray emission apparatus |
GB202102555D0 (en) | 2021-02-23 | 2021-04-07 | Twi Ltd | An electron gun cathode mount |
WO2024059296A1 (en) * | 2022-09-15 | 2024-03-21 | Elve Inc. | Cathode heater assembly for vacuum electronic devices and methods of manufacture |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1599106A (tr) | 1968-11-29 | 1970-07-15 | ||
US4041316A (en) | 1974-09-20 | 1977-08-09 | Hitachi, Ltd. | Field emission electron gun with an evaporation source |
GB1549127A (en) | 1977-05-11 | 1979-08-01 | Inst Elektroswarki Patona | Electron beam welding guns |
US4333214A (en) | 1980-03-31 | 1982-06-08 | Western Electric Company, Inc. | Wire weldment deflashing tool |
DE3031839C2 (de) | 1980-08-23 | 1983-10-20 | Dynamit Nobel Ag, 5210 Troisdorf | Verfahren zum kontinuierlichen Herstellen einer gemusterten Bahn aus thermoplastischem Kunststoff |
DE3227974A1 (de) | 1982-07-27 | 1984-02-09 | Messer Griesheim Gmbh, 6000 Frankfurt | Elektronenstrahlerzeuger, insbesondere zweielektroden-elektronenstrahlerzeuger |
JPS6139976A (ja) | 1984-07-31 | 1986-02-26 | Nippon Gakki Seizo Kk | 記録信号の再生装置におけるジツタ吸収回路 |
US4792688A (en) | 1987-06-15 | 1988-12-20 | The Perkin-Elmer Corporation | Differentially pumped seal apparatus |
JP2732961B2 (ja) | 1991-07-18 | 1998-03-30 | 株式会社日立製作所 | 荷電粒子線装置 |
GB9224602D0 (en) | 1992-11-24 | 1993-01-13 | Welding Inst | Charged particle generation |
US5623183A (en) | 1995-03-22 | 1997-04-22 | Litton Systems, Inc. | Diverging beam electron gun for a toxic remediation device with a dome-shaped focusing electrode |
-
1997
- 1997-09-24 GB GBGB9720350.9A patent/GB9720350D0/en not_active Ceased
-
1998
- 1998-09-24 DE DE69839952T patent/DE69839952D1/de not_active Expired - Lifetime
- 1998-09-24 AT AT05009210T patent/ATE430375T1/de not_active IP Right Cessation
- 1998-09-24 DE DE69830664T patent/DE69830664T2/de not_active Expired - Lifetime
- 1998-09-24 AT AT05009209T patent/ATE406666T1/de not_active IP Right Cessation
- 1998-09-24 EP EP05009210A patent/EP1587129B1/en not_active Expired - Lifetime
- 1998-09-24 ES ES98944099T patent/ES2244081T3/es not_active Expired - Lifetime
- 1998-09-24 JP JP2000513304A patent/JP4200656B2/ja not_active Expired - Lifetime
- 1998-09-24 RU RU2000110116/09A patent/RU2201006C2/ru active
- 1998-09-24 EE EEP200000153A patent/EE04694B1/xx unknown
- 1998-09-24 WO PCT/GB1998/002882 patent/WO1999016101A2/en active IP Right Grant
- 1998-09-24 BR BRPI9812505-2A patent/BR9812505B1/pt not_active IP Right Cessation
- 1998-09-24 UA UA2000042306A patent/UA69394C2/uk unknown
- 1998-09-24 KR KR1020007003112A patent/KR100586050B1/ko not_active IP Right Cessation
- 1998-09-24 NZ NZ503060A patent/NZ503060A/en not_active IP Right Cessation
- 1998-09-24 AT AT98944099T patent/ATE298462T1/de not_active IP Right Cessation
- 1998-09-24 PT PT98944099T patent/PT1018137E/pt unknown
- 1998-09-24 EP EP05009209A patent/EP1587130B1/en not_active Expired - Lifetime
- 1998-09-24 DE DE69840801T patent/DE69840801D1/de not_active Expired - Lifetime
- 1998-09-24 CZ CZ2000749A patent/CZ294249B6/cs not_active IP Right Cessation
- 1998-09-24 CA CA002303148A patent/CA2303148C/en not_active Expired - Lifetime
- 1998-09-24 CN CNB988094827A patent/CN1205646C/zh not_active Expired - Lifetime
- 1998-09-24 US US09/508,914 patent/US6404115B1/en not_active Expired - Lifetime
- 1998-09-24 EP EP98944099A patent/EP1018137B1/en not_active Expired - Lifetime
- 1998-09-24 TR TR2000/00750T patent/TR200000750T2/tr unknown
- 1998-09-24 AU AU91765/98A patent/AU730293B2/en not_active Expired
-
2000
- 2000-03-23 NO NO20001513A patent/NO326142B1/no not_active IP Right Cessation
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