DE69830664D1 - Vorrichtung zum emittieren eines geladenen teichenstrahls - Google Patents

Vorrichtung zum emittieren eines geladenen teichenstrahls

Info

Publication number
DE69830664D1
DE69830664D1 DE69830664T DE69830664T DE69830664D1 DE 69830664 D1 DE69830664 D1 DE 69830664D1 DE 69830664 T DE69830664 T DE 69830664T DE 69830664 T DE69830664 T DE 69830664T DE 69830664 D1 DE69830664 D1 DE 69830664D1
Authority
DE
Germany
Prior art keywords
charged particle
particle beam
chamber
pressure
assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69830664T
Other languages
English (en)
Other versions
DE69830664T2 (de
Inventor
Allan Sanderson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Welding Institute England
Original Assignee
Welding Institute England
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Welding Institute England filed Critical Welding Institute England
Publication of DE69830664D1 publication Critical patent/DE69830664D1/de
Application granted granted Critical
Publication of DE69830664T2 publication Critical patent/DE69830664T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/075—Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/063—Geometrical arrangement of electrodes for beam-forming
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/301—Arrangements enabling beams to pass between regions of different pressure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/31—Processing objects on a macro-scale
    • H01J2237/3104—Welding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Radiation-Therapy Devices (AREA)
  • Particle Accelerators (AREA)
  • Electrostatic Spraying Apparatus (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Secondary Cells (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Luminescent Compositions (AREA)
  • Cookers (AREA)
  • Electrophonic Musical Instruments (AREA)
  • Polyurethanes Or Polyureas (AREA)
  • Polymerisation Methods In General (AREA)
  • Electroluminescent Light Sources (AREA)
  • Generation Of Surge Voltage And Current (AREA)
  • Lining Or Joining Of Plastics Or The Like (AREA)
DE69830664T 1997-09-24 1998-09-24 Vorrichtung zum emittieren eines geladenen teilchenstrahls Expired - Lifetime DE69830664T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GBGB9720350.9A GB9720350D0 (en) 1997-09-24 1997-09-24 Improvements relating to charged particle beams
GB9720350 1997-09-24
PCT/GB1998/002882 WO1999016101A2 (en) 1997-09-24 1998-09-24 Charged particle beam emitting assembly

Publications (2)

Publication Number Publication Date
DE69830664D1 true DE69830664D1 (de) 2005-07-28
DE69830664T2 DE69830664T2 (de) 2005-12-01

Family

ID=10819590

Family Applications (3)

Application Number Title Priority Date Filing Date
DE69840801T Expired - Lifetime DE69840801D1 (de) 1997-09-24 1998-09-24 Ladungsträgerteilchenstrahl Emittiervorrichtung
DE69830664T Expired - Lifetime DE69830664T2 (de) 1997-09-24 1998-09-24 Vorrichtung zum emittieren eines geladenen teilchenstrahls
DE69839952T Expired - Lifetime DE69839952D1 (de) 1997-09-24 1998-09-24 Säulenvorrichtung für Strahl aus geladenen Teilchen

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69840801T Expired - Lifetime DE69840801D1 (de) 1997-09-24 1998-09-24 Ladungsträgerteilchenstrahl Emittiervorrichtung

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE69839952T Expired - Lifetime DE69839952D1 (de) 1997-09-24 1998-09-24 Säulenvorrichtung für Strahl aus geladenen Teilchen

Country Status (21)

Country Link
US (1) US6404115B1 (de)
EP (3) EP1587129B1 (de)
JP (1) JP4200656B2 (de)
KR (1) KR100586050B1 (de)
CN (1) CN1205646C (de)
AT (3) ATE430375T1 (de)
AU (1) AU730293B2 (de)
BR (1) BR9812505B1 (de)
CA (1) CA2303148C (de)
CZ (1) CZ294249B6 (de)
DE (3) DE69840801D1 (de)
EE (1) EE04694B1 (de)
ES (1) ES2244081T3 (de)
GB (1) GB9720350D0 (de)
NO (1) NO326142B1 (de)
NZ (1) NZ503060A (de)
PT (1) PT1018137E (de)
RU (1) RU2201006C2 (de)
TR (1) TR200000750T2 (de)
UA (1) UA69394C2 (de)
WO (1) WO1999016101A2 (de)

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US6630774B2 (en) * 2001-03-21 2003-10-07 Advanced Electron Beams, Inc. Electron beam emitter
US7147900B2 (en) * 2003-08-14 2006-12-12 Asm Japan K.K. Method for forming silicon-containing insulation film having low dielectric constant treated with electron beam radiation
US8159118B2 (en) 2005-11-02 2012-04-17 United Technologies Corporation Electron gun
EP2422912B1 (de) 2006-10-02 2013-12-25 Nippon Steel & Sumitomo Metal Corporation Mit Elektronstrahlen geschweißte Fuge mit hervorragender Sprödbruchfestigkeit
JP5011383B2 (ja) * 2007-05-16 2012-08-29 電気化学工業株式会社 電子源
JP4636082B2 (ja) * 2007-12-27 2011-02-23 日新イオン機器株式会社 カソード保持構造およびそれを備えるイオン源
EP2508290B1 (de) 2009-12-04 2017-02-08 Nippon Steel & Sumitomo Metal Corporation Stumpfgeschweisstes gelenk und verfahren zu seiner herstellung
CN102639277B (zh) 2009-12-04 2015-08-19 新日铁住金株式会社 使用了高能密度束的对接焊接接头
JP5471380B2 (ja) * 2009-12-04 2014-04-16 新日鐵住金株式会社 洋上風力発電塔用大型溶接鋼管の高能率製造方法
US8992109B2 (en) 2009-12-04 2015-03-31 Nippon Steel & Sumitomo Metal Corporation Butt-welded joint of welded structure, and method for manufacturing the same
JP2011246805A (ja) 2010-04-30 2011-12-08 Nippon Steel Corp 電子ビーム溶接継手及び電子ビーム溶接用鋼材とその製造方法
JP2011246804A (ja) 2010-04-30 2011-12-08 Nippon Steel Corp 電子ビーム溶接継手及び電子ビーム溶接用鋼材とその製造方法
US20110294071A1 (en) * 2010-05-28 2011-12-01 Canon Kabushiki Kaisha Electron gun, lithography apparatus, method of manufacturing article, and electron beam apparatus
KR20150127304A (ko) 2010-11-22 2015-11-16 신닛테츠스미킨 카부시키카이샤 전자 빔 용접 조인트 및 전자 빔 용접용 강재와 그의 제조 방법
JP5135560B2 (ja) 2010-11-22 2013-02-06 新日鐵住金株式会社 電子ビーム溶接継手及び電子ビーム溶接用鋼材とその製造方法
KR101425761B1 (ko) 2010-11-22 2014-08-01 신닛테츠스미킨 카부시키카이샤 전자빔 용접 조인트 및 전자빔 용접용 강재와 그 제조 방법
KR101346961B1 (ko) 2010-11-22 2014-01-02 신닛테츠스미킨 카부시키카이샤 전자 빔 용접 조인트 및 전자 빔 용접용 강재와 그 제조 방법
JP5273299B2 (ja) 2010-11-22 2013-08-28 新日鐵住金株式会社 電子ビーム溶接継手及び電子ビーム溶接用鋼材
RU2478974C2 (ru) * 2011-05-31 2013-04-10 Федеральное государственное унитарное предприятие "Всероссийский научно-исследовательский институт метрологии им. Д.И. Менделеева" (ФГУП "ВНИИМ им. Д.И. Менделеева") Способ воспроизведения единицы силы постоянного электрического тока и устройство для его осуществления
WO2013122633A1 (en) * 2011-10-18 2013-08-22 Baldwin David A Arc devices and moving arc couples
EA019817B1 (ru) * 2011-12-29 2014-06-30 Федеральное Государственное Бюджетное Образовательное Учреждение Высшего Профессионального Образования "Национальный Исследовательский Томский Политехнический Университет" (Фгбоу Впо Ни Тпу) Ионный диод с магнитной самоизоляцией
RU2680150C1 (ru) * 2017-12-27 2019-02-18 федеральное государственное бюджетное образовательное учреждение высшего образования "Национальный исследовательский университет "МЭИ" (ФГБОУ ВО "НИУ "МЭИ") Катодный блок сварочной электронной пушки
US20210050174A1 (en) 2018-03-23 2021-02-18 Freemelt Ab Cathode assembly for electron gun
RU183913U1 (ru) * 2018-05-07 2018-10-09 Федеральное государственное бюджетное образовательное учреждение высшего образования "Саратовский государственный технический университет имени Гагарина Ю.А." (СГТУ имени Гагарина Ю.А.) Триодная электронная пушка с автокатодом
GB2583359A (en) * 2019-04-25 2020-10-28 Aquasium Tech Limited Electron beam emitting assembly
CN118180416A (zh) * 2019-09-23 2024-06-14 弗里曼特有限公司 电子枪阴极技术
US11965494B2 (en) 2021-02-17 2024-04-23 Accion Systems, Inc. Electrospray emission apparatus
GB202102555D0 (en) 2021-02-23 2021-04-07 Twi Ltd An electron gun cathode mount
WO2024059296A1 (en) * 2022-09-15 2024-03-21 Elve Inc. Cathode heater assembly for vacuum electronic devices and methods of manufacture

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FR1599106A (de) * 1968-11-29 1970-07-15
US4041316A (en) 1974-09-20 1977-08-09 Hitachi, Ltd. Field emission electron gun with an evaporation source
GB1549127A (en) * 1977-05-11 1979-08-01 Inst Elektroswarki Patona Electron beam welding guns
US4333214A (en) 1980-03-31 1982-06-08 Western Electric Company, Inc. Wire weldment deflashing tool
DE3031839C2 (de) 1980-08-23 1983-10-20 Dynamit Nobel Ag, 5210 Troisdorf Verfahren zum kontinuierlichen Herstellen einer gemusterten Bahn aus thermoplastischem Kunststoff
DE3227974A1 (de) * 1982-07-27 1984-02-09 Messer Griesheim Gmbh, 6000 Frankfurt Elektronenstrahlerzeuger, insbesondere zweielektroden-elektronenstrahlerzeuger
JPS6139976A (ja) 1984-07-31 1986-02-26 Nippon Gakki Seizo Kk 記録信号の再生装置におけるジツタ吸収回路
US4792688A (en) * 1987-06-15 1988-12-20 The Perkin-Elmer Corporation Differentially pumped seal apparatus
JP2732961B2 (ja) * 1991-07-18 1998-03-30 株式会社日立製作所 荷電粒子線装置
GB9224602D0 (en) * 1992-11-24 1993-01-13 Welding Inst Charged particle generation
US5623183A (en) * 1995-03-22 1997-04-22 Litton Systems, Inc. Diverging beam electron gun for a toxic remediation device with a dome-shaped focusing electrode

Also Published As

Publication number Publication date
NO326142B1 (no) 2008-10-06
CN1271460A (zh) 2000-10-25
EE04694B1 (et) 2006-08-15
WO1999016101A2 (en) 1999-04-01
AU9176598A (en) 1999-04-12
JP2001517857A (ja) 2001-10-09
EP1587130A1 (de) 2005-10-19
CZ2000749A3 (cs) 2004-07-14
AU730293B2 (en) 2001-03-01
TR200000750T2 (tr) 2000-06-21
ES2244081T3 (es) 2005-12-01
EP1587129B1 (de) 2009-04-29
NO20001513D0 (no) 2000-03-23
EP1587129A1 (de) 2005-10-19
CA2303148A1 (en) 1999-04-01
NZ503060A (en) 2001-11-30
DE69830664T2 (de) 2005-12-01
PT1018137E (pt) 2005-10-31
CZ294249B6 (cs) 2004-11-10
EP1018137B1 (de) 2005-06-22
DE69839952D1 (de) 2008-10-09
UA69394C2 (uk) 2004-09-15
ATE406666T1 (de) 2008-09-15
ATE430375T1 (de) 2009-05-15
CN1205646C (zh) 2005-06-08
WO1999016101A3 (en) 1999-06-17
US6404115B1 (en) 2002-06-11
EE200000153A (et) 2001-02-15
BR9812505A (pt) 2000-07-25
BR9812505B1 (pt) 2009-12-01
KR20010015610A (ko) 2001-02-26
EP1587130B1 (de) 2008-08-27
KR100586050B1 (ko) 2006-06-07
GB9720350D0 (en) 1997-11-26
ATE298462T1 (de) 2005-07-15
JP4200656B2 (ja) 2008-12-24
EP1018137A2 (de) 2000-07-12
RU2201006C2 (ru) 2003-03-20
NO20001513L (no) 2000-03-23
CA2303148C (en) 2008-06-03
DE69840801D1 (de) 2009-06-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition