SU927763A1 - Apparatus for blowing quaptz products - Google Patents

Description

I

The invention relates to devices for expanding glassware and can be used in all enterprises of the country in which semiconductor materials are produced.

A device for blowing quartz products used in enterprises producing semiconductor materials, consisting of a burner and a device for hanging a two-arm boom tool, is known to rotate the pneumatic cylinder with a rod around its vertical axis. A shaft is mounted perpendicular to it on the rod, on which the burner fl is mounted. The burner fastening on the fixture makes it possible to orient the burner flame in the right direction by moving the quartz piece itself, which allows

How much increase process productivity.

The closest to the invention in technical essence and the achieved effect is a device for blowing quartz products, comprising a housing, a burner, pipelines with valves and a gas supply control mechanism 2J.

A disadvantage of devices for blowing quartz products is that the regulation of the amount of gases supplied to the burner is performed manually by opening and closing the valves on the gas supply lines to the burner. This does not allow to maintain the optimal ratio of the amount of gases in the period of blowing up quartz products and leads to a large consumption of process gases, and during the period when the device is put into operation it causes claps

Claims (2)

and gas mixture explosions in the burner. The purpose of the invention is to increase the safety and performance of the bulge. This goal is achieved by the fact that in a device for blowing up quartz products, comprising a housing, a burner, pipelines with valves and a gas supply control mechanism, the latter is made in the form of chambers connected to the burner connected through a container with a pneumatic valve membrane, Each chamber is equipped with a slide valve with a stem. In addition, the device is additionally equipped with bellows, each of which is mounted on the stem. The drawing shows a device for blowing quartz products, a plan view. A device for blowing quartz products consists of a body 1 with a bracket 2 on which burner 3 is fixed for blowing a quartz product + and a gas supply control mechanism made in the form of two chambers 5 on the body 1 of which are made up of gold nick 6 and a cap nut 7 spring 8, bellows 9 and rod 10. To chambers 5 process gases are supplied from pipelines 11 through valves 12. Burner 3 is connected to the chambers through pipelines 13) on which control valves I and gas metering devices 15 are located. In the lower part of the device case 1, a container 16 with a membrane 17 and a calibrated opening 18 is placed under the chambers 5. there is a pneumatic valve 22 with a pedal 23 that serves to regulate the supply of compressed air to the tank 16. The pneumatic valve 22 is connected to the tank 1b by means of a flexible hose 2, and to the pneumatic system by a pipe 2 Before switching the device into operation 5, through which combustible gas is supplied to the burner 3, the regulating screw 21, the stem 10 is pressed so that there is no gap between the rod 10 and the spool 6 and between the rod 10 and the screw 21. The chamber 5, the cut which is supplied to the burner 3 is gas oxidizer, screw 21 set the gap between the rod 10 and the valve 6. The device is put into operation as follows. The opening of the valves 12 serves process gases (combustible gas such as hydrogen, and an oxidizing gas, such as oxygen) to the chambers 5 of the device. Then, by pressing the foot on the pedal 23 of the valve 22, compressed air is supplied to the container, which moves the diaphragm up, and with it the screws 21 through the post 19 and the bar 20. Since the valve 10 between the valve 6 and the the adjusting screw is positioned without clearance, then moving the screw upwards immediately moves up and the stem, which (1 lifts the spool and combustible gas through chamber 5 under the spool through conduit 13 through metering device 15 enters the burner. The required amount of combustible gas that is needed It can be supplied to the burner, taking into account its optimal ratio to the oxidizing gas, is controlled by valve 14. The supply of combustible gas to burner 3 prevents clapping and explosions of the gas mixture to it, since between the rod 10 and the spool in chamber 5 through which oxidant gas flows to burner, there is a gap, then the rod begins to lift up the spool 6 when the combustible gas through the second chamber 5 goes to the burner.When the spool is raised in this chamber, the oxidant gas under the spool 6 goes through the metering device 13 to the burner. The required amount of oxidant gas that must be supplied to the burner, taking into account its relationship to the combustible gas, is controlled by valve} k. Increasing the amount of gas per burner at a predetermined ratio is made by gently pressing the foot on the pedal of the valve 22. Reducing the amount of gas per burner is performed by gently releasing the pedal. Stopping the supply of gas to the burner is done by removing the feet from the pedal. A calibrated orifice 18 in the tank 16 serves to regulate the release of compressed air. The burner flame in the right direction is oriented by moving the quartz article itself. The proposed device for the separation of quartz products makes it possible to significantly increase the productivity of the process, reduce by 2-3 the unit cost of technological life for expanding products, improve the quality of regulation and ensure safe working conditions. Claim 1. Device for blowing up quartz products, comprising a housing, a burner, a pipeline with valves and a gas supply control mechanism, characterized in that, in order to increase the safety and blowing performance, the gas supply control mechanism is designed as connected to a burner. chambers connected through a container with a membrane with a pneumatic valve, each chamber being provided with a slide valve with a stem. 2. A device according to claim 1, characterized in that it is provided with bellows, each of which is mounted on a rod. Sources of information taken into account during the examination 1. USSR Author's Certificate No. 307982, cl. From 03 to 9/02, 1970. 2. USSR author's certificate No. 191751, cl. C 03 B 9/02, 19b5.