SU823846A2 - Two-beam interferometer for measuring linear displasements - Google Patents

Two-beam interferometer for measuring linear displasements Download PDF

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Publication number
SU823846A2
SU823846A2 SU792790735A SU2790735A SU823846A2 SU 823846 A2 SU823846 A2 SU 823846A2 SU 792790735 A SU792790735 A SU 792790735A SU 2790735 A SU2790735 A SU 2790735A SU 823846 A2 SU823846 A2 SU 823846A2
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SU
USSR - Soviet Union
Prior art keywords
measuring linear
displasements
interferometer
beam interferometer
measuring
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SU792790735A
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Russian (ru)
Inventor
Юрий Николаевич Биенко
Евгений Казимирович Чехович
Юрий Георгиевич Буров
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Институт электроники АН Белорусской ССР
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Priority to SU792790735A priority Critical patent/SU823846A2/en
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Publication of SU823846A2 publication Critical patent/SU823846A2/en

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Description

(54) ДВУХЛУЧЕВОЙ ИНТЕРФЕРОМЕТР ДЛЯ ИЗМЕРЕНИЯ ЛИНЕЙНЬК ПЕРЕМЕЩЕНИЙ(54) DOUBLE-BELTED INTERFEROMETER FOR MEASURING LINES OF DISPLACEMENTS

.    .

Изобретение относитс  к измерительной технике и может быть исиол зовдно дл  измерени  линейных перемещений с высокой степенью точности в большом диапазоне измерительных величин.. ,The invention relates to a measurement technique and may be used for measuring linear displacements with a high degree of accuracy over a wide range of measurement values ..,

Известен интерферометрМайкельсона дл  измерени  линейных перемещений , содержащий основание/ источник света, зеркала,светоделитель и наб- людательную систему 111.A Michelson interferometer for measuring linear displacements is known, comprising a base / light source, mirrors, a beam splitter, and an observing system 111.

Недостатком интерферометра  вл етс  низка  точность измерений, ограниченна  двойным прохождением лучей в ветв х интерферометра, а также чувствительностью интерференционной картины к угловым перемещени м зер-, кала, св занного с измерительным объектом.The disadvantage of the interferometer is the low accuracy of measurements, limited by the double passage of the rays in the branches of the interferometer, as well as the sensitivity of the interference pattern to the angular displacements of the grain and scale associated with the measuring object.

По основному авт. св. 284306 известен также двух-лучевой интерферометр дл  измерени  линейных перемещений , содержащий основание, источник света, зеркала, полупрозрачную пластину, две пары регулируемых между собой блоков отражательных призм, расположенных на основании во взаимно перпендикул рных направлени х , плоское зеркало с отверстием, установленное в одной из ветвей интерферометра и наблюдательную систему 2 .According to the main author. St. 284306 is also known as a two-beam interferometer for measuring linear displacements, comprising a base, a light source, mirrors, a translucent plate, two pairs of adjustable prism blocks arranged on the base in mutually perpendicular directions, a flat mirror with an aperture mounted in one from the branches of the interferometer and the observation system 2.

Недостатком этого интерферометра  вл етс  сравнительно низка  точность измерений, ограниченна  числом отражений световых пучков в ветв х интерферометра, при котором не возникает значительных световых потерь, а также чувствительностью интерференционной картины к угловым перемещени м блоков отражательных призм в процессе измерени  линейных перемещений .The disadvantage of this interferometer is the comparatively low accuracy of measurements, limited by the number of reflections of light beams in branches x of the interferometer, which do not cause significant light losses, as well as the sensitivity of the interference pattern to angular displacements of blocks of reflective prisms in the process of measuring linear displacements.

Цель изобретени  - повышение точности измерений.The purpose of the invention is to improve the measurement accuracy.

Claims (2)

1.Коломийцев Ю.В. Интерферометры. М, Машиностроение, 1976, с.53-55.1. Kolomiytsev Yu.V. Interferometers M, Mechanical Engineering, 1976, pp.53-55. OO 2.Авторское свидетельство СССР2. USSR author's certificate 1 284306, кл. G 01 В (прототип ) .1 284306, class G 01 B (prototype). /,/, чиchi
SU792790735A 1979-07-02 1979-07-02 Two-beam interferometer for measuring linear displasements SU823846A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SU792790735A SU823846A2 (en) 1979-07-02 1979-07-02 Two-beam interferometer for measuring linear displasements

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU792790735A SU823846A2 (en) 1979-07-02 1979-07-02 Two-beam interferometer for measuring linear displasements

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SU823846A2 true SU823846A2 (en) 1981-04-23

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