SU636709A1 - Устройство дл поворота луча - Google Patents
Устройство дл поворота лучаInfo
- Publication number
- SU636709A1 SU636709A1 SU752193954A SU2193954A SU636709A1 SU 636709 A1 SU636709 A1 SU 636709A1 SU 752193954 A SU752193954 A SU 752193954A SU 2193954 A SU2193954 A SU 2193954A SU 636709 A1 SU636709 A1 SU 636709A1
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- magnetic
- pole tips
- electron beam
- rotating device
- coils
- Prior art date
Links
- 238000010894 electron beam technology Methods 0.000 description 7
- 239000000696 magnetic material Substances 0.000 description 4
- 238000005452 bending Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Toxicology (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Electron Sources, Ion Sources (AREA)
- Electron Beam Exposure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD18340974A DD120729A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-12-24 | 1974-12-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SU636709A1 true SU636709A1 (ru) | 1978-12-05 |
Family
ID=5498701
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SU752193954A SU636709A1 (ru) | 1974-12-24 | 1975-11-24 | Устройство дл поворота луча |
Country Status (7)
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS624862A (ja) * | 1985-06-29 | 1987-01-10 | Anelva Corp | 真空蒸着用電子銃 |
-
1974
- 1974-12-24 DD DD18340974A patent/DD120729A1/xx unknown
-
1975
- 1975-10-20 DE DE19752546902 patent/DE2546902A1/de not_active Withdrawn
- 1975-10-30 IT IT5201075A patent/IT1048044B/it active
- 1975-11-24 SU SU752193954A patent/SU636709A1/ru active
- 1975-12-12 JP JP50148339A patent/JPS5187180A/ja active Pending
- 1975-12-22 LU LU74084A patent/LU74084A1/xx unknown
- 1975-12-24 BE BE163098A patent/BE837062A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5187180A (en) | 1976-07-30 |
| LU74084A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1976-07-20 |
| DE2546902A1 (de) | 1976-07-08 |
| IT1048044B (it) | 1980-11-20 |
| DD120729A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1976-06-20 |
| BE837062A (fr) | 1976-04-16 |
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