SU618331A1 - Устройство дл перемещени изделий - Google Patents

Устройство дл перемещени изделий

Info

Publication number
SU618331A1
SU618331A1 SU762322601A SU2322601A SU618331A1 SU 618331 A1 SU618331 A1 SU 618331A1 SU 762322601 A SU762322601 A SU 762322601A SU 2322601 A SU2322601 A SU 2322601A SU 618331 A1 SU618331 A1 SU 618331A1
Authority
SU
USSR - Soviet Union
Prior art keywords
lever
vacuum
article
semiconductor
moving device
Prior art date
Application number
SU762322601A
Other languages
English (en)
Russian (ru)
Inventor
Шварц Куно
Зауэрбай Пауль
Кох Курт
Зауэр Эберхард
Original Assignee
Феб Электромат (Инопредприятие)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Феб Электромат (Инопредприятие) filed Critical Феб Электромат (Инопредприятие)
Application granted granted Critical
Publication of SU618331A1 publication Critical patent/SU618331A1/ru

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
  • Specific Conveyance Elements (AREA)
SU762322601A 1975-02-04 1976-01-26 Устройство дл перемещени изделий SU618331A1 (ru)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD183985A DD120400A1 (https=) 1975-02-04 1975-02-04

Publications (1)

Publication Number Publication Date
SU618331A1 true SU618331A1 (ru) 1978-08-05

Family

ID=5499041

Family Applications (1)

Application Number Title Priority Date Filing Date
SU762322601A SU618331A1 (ru) 1975-02-04 1976-01-26 Устройство дл перемещени изделий

Country Status (6)

Country Link
CS (1) CS181534B1 (https=)
DD (1) DD120400A1 (https=)
DE (1) DE2557273A1 (https=)
FR (1) FR2300025A1 (https=)
GB (1) GB1508748A (https=)
SU (1) SU618331A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4603897A (en) * 1983-05-20 1986-08-05 Poconics International, Inc. Vacuum pickup apparatus
GB2194500B (en) * 1986-07-04 1991-01-23 Canon Kk A wafer handling apparatus
DE19907210A1 (de) * 1999-02-23 2000-08-31 Krauss Maffei Kunststofftech Vorrichtung zum Transportieren und gleichzeitigen Kühlen von Substraten für Informationsträgerscheiben wie CD, DVD oder dergleichen

Also Published As

Publication number Publication date
DD120400A1 (https=) 1976-06-12
CS181534B1 (en) 1978-03-31
FR2300025B3 (https=) 1978-10-06
DE2557273A1 (de) 1976-08-05
FR2300025A1 (fr) 1976-09-03
GB1508748A (en) 1978-04-26

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