DD120400A1 - - Google Patents
Info
- Publication number
- DD120400A1 DD120400A1 DD183985A DD18398575A DD120400A1 DD 120400 A1 DD120400 A1 DD 120400A1 DD 183985 A DD183985 A DD 183985A DD 18398575 A DD18398575 A DD 18398575A DD 120400 A1 DD120400 A1 DD 120400A1
- Authority
- DD
- German Democratic Republic
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
- Specific Conveyance Elements (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD183985A DD120400A1 (https=) | 1975-02-04 | 1975-02-04 | |
| DE19752557273 DE2557273A1 (de) | 1975-02-04 | 1975-12-19 | Einrichtung zur uebernahme, zum transport und zur uebergabe von scheiben, insbesondere von halbleiterscheiben |
| FR7600863A FR2300025A1 (fr) | 1975-02-04 | 1976-01-14 | Dispositif pou |
| SU762322601A SU618331A1 (ru) | 1975-02-04 | 1976-01-26 | Устройство дл перемещени изделий |
| CS7600000675A CS181534B1 (en) | 1975-02-04 | 1976-02-03 | Transporting and transfering equipment for plates esp.for semiconducting ones |
| GB4348/76A GB1508748A (en) | 1975-02-04 | 1976-02-04 | Arrangement for picking up transferring and delivering disc-shaped objects |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD183985A DD120400A1 (https=) | 1975-02-04 | 1975-02-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DD120400A1 true DD120400A1 (https=) | 1976-06-12 |
Family
ID=5499041
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DD183985A DD120400A1 (https=) | 1975-02-04 | 1975-02-04 |
Country Status (6)
| Country | Link |
|---|---|
| CS (1) | CS181534B1 (https=) |
| DD (1) | DD120400A1 (https=) |
| DE (1) | DE2557273A1 (https=) |
| FR (1) | FR2300025A1 (https=) |
| GB (1) | GB1508748A (https=) |
| SU (1) | SU618331A1 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4603897A (en) * | 1983-05-20 | 1986-08-05 | Poconics International, Inc. | Vacuum pickup apparatus |
| GB2194500B (en) * | 1986-07-04 | 1991-01-23 | Canon Kk | A wafer handling apparatus |
| DE19907210A1 (de) * | 1999-02-23 | 2000-08-31 | Krauss Maffei Kunststofftech | Vorrichtung zum Transportieren und gleichzeitigen Kühlen von Substraten für Informationsträgerscheiben wie CD, DVD oder dergleichen |
-
1975
- 1975-02-04 DD DD183985A patent/DD120400A1/xx unknown
- 1975-12-19 DE DE19752557273 patent/DE2557273A1/de not_active Withdrawn
-
1976
- 1976-01-14 FR FR7600863A patent/FR2300025A1/fr active Granted
- 1976-01-26 SU SU762322601A patent/SU618331A1/ru active
- 1976-02-03 CS CS7600000675A patent/CS181534B1/cs unknown
- 1976-02-04 GB GB4348/76A patent/GB1508748A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| SU618331A1 (ru) | 1978-08-05 |
| CS181534B1 (en) | 1978-03-31 |
| FR2300025B3 (https=) | 1978-10-06 |
| DE2557273A1 (de) | 1976-08-05 |
| FR2300025A1 (fr) | 1976-09-03 |
| GB1508748A (en) | 1978-04-26 |