SU1830229A3 - Method for producing silicon structures - Google Patents
Method for producing silicon structuresInfo
- Publication number
- SU1830229A3 SU1830229A3 SU4850478/25A SU4850478A SU1830229A3 SU 1830229 A3 SU1830229 A3 SU 1830229A3 SU 4850478/25 A SU4850478/25 A SU 4850478/25A SU 4850478 A SU4850478 A SU 4850478A SU 1830229 A3 SU1830229 A3 SU 1830229A3
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- plates
- deionized
- filtered water
- treatment
- heat
- Prior art date
Links
Landscapes
- Silicon Compounds (AREA)
Abstract
FIELD: heavy-current electronic and microelectronic engineering. SUBSTANCE: method involves hydrophilic treatment of silicon plates, dipping these plates in solution containing at least 1 volume percent of hydrofluoric acid dissolved in deionized and filtered water, rinsing plates in deionized and filtered water, their joining in pairs and removing from water in joined condition, drying out at 100-130 C for at least 4 h while applying pressure of 3•10Pa uniformly distributed over their mating surface, their heating to heat-treatment temperature at maximum rate of 10 deg/min starting from 200 C followed by heat treatment at minimum 1000 C. EFFECT: improved quality of plates. 2 tbl
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU4850478/25A SU1830229A3 (en) | 1990-07-20 | 1990-07-20 | Method for producing silicon structures |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU4850478/25A SU1830229A3 (en) | 1990-07-20 | 1990-07-20 | Method for producing silicon structures |
Publications (1)
Publication Number | Publication Date |
---|---|
SU1830229A3 true SU1830229A3 (en) | 1996-12-10 |
Family
ID=60541463
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SU4850478/25A SU1830229A3 (en) | 1990-07-20 | 1990-07-20 | Method for producing silicon structures |
Country Status (1)
Country | Link |
---|---|
SU (1) | SU1830229A3 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2586266C2 (en) * | 2014-07-04 | 2016-06-10 | Федеральное Государственное Бюджетное Образовательное Учреждение Высшего Профессионального Образования "Дагестанский Государственный Технический Университет" (Дгту) | Processing plate surface for fabrication of solar cells |
-
1990
- 1990-07-20 SU SU4850478/25A patent/SU1830229A3/en active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2586266C2 (en) * | 2014-07-04 | 2016-06-10 | Федеральное Государственное Бюджетное Образовательное Учреждение Высшего Профессионального Образования "Дагестанский Государственный Технический Университет" (Дгту) | Processing plate surface for fabrication of solar cells |
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