SU1830229A3 - Method for producing silicon structures - Google Patents

Method for producing silicon structures

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Publication number
SU1830229A3
SU1830229A3 SU4850478/25A SU4850478A SU1830229A3 SU 1830229 A3 SU1830229 A3 SU 1830229A3 SU 4850478/25 A SU4850478/25 A SU 4850478/25A SU 4850478 A SU4850478 A SU 4850478A SU 1830229 A3 SU1830229 A3 SU 1830229A3
Authority
SU
USSR - Soviet Union
Prior art keywords
plates
deionized
filtered water
treatment
heat
Prior art date
Application number
SU4850478/25A
Other languages
Russian (ru)
Inventor
В.М. Волле
В.Б. Воронков
И.В. Грехов
В.А. Козлов
Original Assignee
Физико-технический институт им.А.Ф.Иоффе РАН
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Физико-технический институт им.А.Ф.Иоффе РАН filed Critical Физико-технический институт им.А.Ф.Иоффе РАН
Priority to SU4850478/25A priority Critical patent/SU1830229A3/en
Application granted granted Critical
Publication of SU1830229A3 publication Critical patent/SU1830229A3/en

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Abstract

FIELD: heavy-current electronic and microelectronic engineering. SUBSTANCE: method involves hydrophilic treatment of silicon plates, dipping these plates in solution containing at least 1 volume percent of hydrofluoric acid dissolved in deionized and filtered water, rinsing plates in deionized and filtered water, their joining in pairs and removing from water in joined condition, drying out at 100-130 C for at least 4 h while applying pressure of 3•10Pa uniformly distributed over their mating surface, their heating to heat-treatment temperature at maximum rate of 10 deg/min starting from 200 C followed by heat treatment at minimum 1000 C. EFFECT: improved quality of plates. 2 tbl
SU4850478/25A 1990-07-20 1990-07-20 Method for producing silicon structures SU1830229A3 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SU4850478/25A SU1830229A3 (en) 1990-07-20 1990-07-20 Method for producing silicon structures

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU4850478/25A SU1830229A3 (en) 1990-07-20 1990-07-20 Method for producing silicon structures

Publications (1)

Publication Number Publication Date
SU1830229A3 true SU1830229A3 (en) 1996-12-10

Family

ID=60541463

Family Applications (1)

Application Number Title Priority Date Filing Date
SU4850478/25A SU1830229A3 (en) 1990-07-20 1990-07-20 Method for producing silicon structures

Country Status (1)

Country Link
SU (1) SU1830229A3 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2586266C2 (en) * 2014-07-04 2016-06-10 Федеральное Государственное Бюджетное Образовательное Учреждение Высшего Профессионального Образования "Дагестанский Государственный Технический Университет" (Дгту) Processing plate surface for fabrication of solar cells

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2586266C2 (en) * 2014-07-04 2016-06-10 Федеральное Государственное Бюджетное Образовательное Учреждение Высшего Профессионального Образования "Дагестанский Государственный Технический Университет" (Дгту) Processing plate surface for fabrication of solar cells

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