SU1817659A1 - Device for matching and exposing - Google Patents
Device for matching and exposingInfo
- Publication number
- SU1817659A1 SU1817659A1 SU4914986/21A SU4914986A SU1817659A1 SU 1817659 A1 SU1817659 A1 SU 1817659A1 SU 4914986/21 A SU4914986/21 A SU 4914986/21A SU 4914986 A SU4914986 A SU 4914986A SU 1817659 A1 SU1817659 A1 SU 1817659A1
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- desk
- socket
- substrate
- mask
- sealed
- Prior art date
Links
Landscapes
- Multi-Conductor Connections (AREA)
Abstract
FIELD: microelectronics. SUBSTANCE: when substrate 9 is positioned on desk 3 and mask 10 is fixed, are between mask and desk is sealed and is connected to exhausting unit. Desk has socket 4 for mounting substrate. Said socket is connected through hole 56 in desk 3 to air. Upper side of socket 4 is sealed by flexible diaphragm 5, which is rigidly attached in side walls along perimeter of socket 4 in desk 3. Distance between side walls of socket 4 of desk 3 and side surface of substrate 9 is at least 2t, where t is thickness of flexible diaphragm 5. EFFECT: increased quality of exposition. 2 dwg
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU4914986/21A SU1817659A1 (en) | 1991-02-28 | 1991-02-28 | Device for matching and exposing |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU4914986/21A SU1817659A1 (en) | 1991-02-28 | 1991-02-28 | Device for matching and exposing |
Publications (1)
Publication Number | Publication Date |
---|---|
SU1817659A1 true SU1817659A1 (en) | 1996-03-27 |
Family
ID=60537108
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SU4914986/21A SU1817659A1 (en) | 1991-02-28 | 1991-02-28 | Device for matching and exposing |
Country Status (1)
Country | Link |
---|---|
SU (1) | SU1817659A1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EA014277B1 (en) * | 2008-12-02 | 2010-10-29 | Александр Иванович Таран | Method of aligning elements of multichip modules for capillary assembly and installation for the realization thereof |
RU2674405C1 (en) * | 2018-01-09 | 2018-12-07 | Публичное акционерное общество "Сатурн" (ПАО "Сатурн") | Device for contact photolithography on semiconductor wafer with base cut |
-
1991
- 1991-02-28 SU SU4914986/21A patent/SU1817659A1/en active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EA014277B1 (en) * | 2008-12-02 | 2010-10-29 | Александр Иванович Таран | Method of aligning elements of multichip modules for capillary assembly and installation for the realization thereof |
RU2674405C1 (en) * | 2018-01-09 | 2018-12-07 | Публичное акционерное общество "Сатурн" (ПАО "Сатурн") | Device for contact photolithography on semiconductor wafer with base cut |
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