SU1817659A1 - Device for matching and exposing - Google Patents

Device for matching and exposing

Info

Publication number
SU1817659A1
SU1817659A1 SU4914986/21A SU4914986A SU1817659A1 SU 1817659 A1 SU1817659 A1 SU 1817659A1 SU 4914986/21 A SU4914986/21 A SU 4914986/21A SU 4914986 A SU4914986 A SU 4914986A SU 1817659 A1 SU1817659 A1 SU 1817659A1
Authority
SU
USSR - Soviet Union
Prior art keywords
desk
socket
substrate
mask
sealed
Prior art date
Application number
SU4914986/21A
Other languages
Russian (ru)
Inventor
А.И. Чиркунов
А.Н. Витовтова
Original Assignee
Центральный научно-исследовательский институт "Гранит"
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Центральный научно-исследовательский институт "Гранит" filed Critical Центральный научно-исследовательский институт "Гранит"
Priority to SU4914986/21A priority Critical patent/SU1817659A1/en
Application granted granted Critical
Publication of SU1817659A1 publication Critical patent/SU1817659A1/en

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  • Multi-Conductor Connections (AREA)

Abstract

FIELD: microelectronics. SUBSTANCE: when substrate 9 is positioned on desk 3 and mask 10 is fixed, are between mask and desk is sealed and is connected to exhausting unit. Desk has socket 4 for mounting substrate. Said socket is connected through hole 56 in desk 3 to air. Upper side of socket 4 is sealed by flexible diaphragm 5, which is rigidly attached in side walls along perimeter of socket 4 in desk 3. Distance between side walls of socket 4 of desk 3 and side surface of substrate 9 is at least 2t, where t is thickness of flexible diaphragm 5. EFFECT: increased quality of exposition. 2 dwg
SU4914986/21A 1991-02-28 1991-02-28 Device for matching and exposing SU1817659A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SU4914986/21A SU1817659A1 (en) 1991-02-28 1991-02-28 Device for matching and exposing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU4914986/21A SU1817659A1 (en) 1991-02-28 1991-02-28 Device for matching and exposing

Publications (1)

Publication Number Publication Date
SU1817659A1 true SU1817659A1 (en) 1996-03-27

Family

ID=60537108

Family Applications (1)

Application Number Title Priority Date Filing Date
SU4914986/21A SU1817659A1 (en) 1991-02-28 1991-02-28 Device for matching and exposing

Country Status (1)

Country Link
SU (1) SU1817659A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EA014277B1 (en) * 2008-12-02 2010-10-29 Александр Иванович Таран Method of aligning elements of multichip modules for capillary assembly and installation for the realization thereof
RU2674405C1 (en) * 2018-01-09 2018-12-07 Публичное акционерное общество "Сатурн" (ПАО "Сатурн") Device for contact photolithography on semiconductor wafer with base cut

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EA014277B1 (en) * 2008-12-02 2010-10-29 Александр Иванович Таран Method of aligning elements of multichip modules for capillary assembly and installation for the realization thereof
RU2674405C1 (en) * 2018-01-09 2018-12-07 Публичное акционерное общество "Сатурн" (ПАО "Сатурн") Device for contact photolithography on semiconductor wafer with base cut

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