JPS648619A - Vacuum chuck jig for x-ray mask - Google Patents
Vacuum chuck jig for x-ray maskInfo
- Publication number
- JPS648619A JPS648619A JP16447987A JP16447987A JPS648619A JP S648619 A JPS648619 A JP S648619A JP 16447987 A JP16447987 A JP 16447987A JP 16447987 A JP16447987 A JP 16447987A JP S648619 A JPS648619 A JP S648619A
- Authority
- JP
- Japan
- Prior art keywords
- ray mask
- pressure difference
- membrane
- fixing base
- vacuum chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
PURPOSE:To eliminate pressure difference on the front and rear sides of film and fix the X-ray mask through absorption by providing an attracting port to attract an X-ray mask supporting frame, fixing this supporting frame and providing an opening part to the atmospheric air at the lower part of X-ray transmitting film. CONSTITUTION:A groove 1 for vacuum chuck formed on the surface of resist coating disk 5 is provided only to the external frame of wafer (X-ray mask) and the X-ray mask 3 is fixed only with external frame. At the center of rotating disk 5, a hollow region 7 is formed between a membrane 8 and fixing base 5 and pressure difference is generated at the upper and lower portions of membrane 8. A hole 2 is provided at the center of fixing base 5 in order to prevent generation of such pressure difference and thereby the hollow region 7 is connected to the atmospheric air through the hole (pressure difference adjusting hole) 2 formed to the fixing base 5. Thereby, the membrane 8 for X-ray mask can be fixed to the rotating disk 5 without distortion.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16447987A JPS648619A (en) | 1987-06-30 | 1987-06-30 | Vacuum chuck jig for x-ray mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16447987A JPS648619A (en) | 1987-06-30 | 1987-06-30 | Vacuum chuck jig for x-ray mask |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS648619A true JPS648619A (en) | 1989-01-12 |
Family
ID=15793955
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16447987A Pending JPS648619A (en) | 1987-06-30 | 1987-06-30 | Vacuum chuck jig for x-ray mask |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS648619A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20200043074A (en) | 2018-10-17 | 2020-04-27 | 중앙제어 주식회사 | Charging Cable Reel Device |
CN111077748A (en) * | 2018-10-19 | 2020-04-28 | 东芝泰格有限公司 | Image forming apparatus and image forming method |
-
1987
- 1987-06-30 JP JP16447987A patent/JPS648619A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20200043074A (en) | 2018-10-17 | 2020-04-27 | 중앙제어 주식회사 | Charging Cable Reel Device |
CN111077748A (en) * | 2018-10-19 | 2020-04-28 | 东芝泰格有限公司 | Image forming apparatus and image forming method |
US20200218186A1 (en) * | 2018-10-19 | 2020-07-09 | Toshiba Tec Kabushiki Kaisha | Image forming apparatus and image forming method |
CN111077748B (en) * | 2018-10-19 | 2024-04-19 | 东芝泰格有限公司 | Image forming apparatus and image forming method |
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