SU1675709A2 - Method of measuring rarefied gas pressure - Google Patents
Method of measuring rarefied gas pressure Download PDFInfo
- Publication number
- SU1675709A2 SU1675709A2 SU894721586A SU4721586A SU1675709A2 SU 1675709 A2 SU1675709 A2 SU 1675709A2 SU 894721586 A SU894721586 A SU 894721586A SU 4721586 A SU4721586 A SU 4721586A SU 1675709 A2 SU1675709 A2 SU 1675709A2
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- vacuum
- measuring
- gas pressure
- rarefied gas
- inlet
- Prior art date
Links
Abstract
Изобретение относитс к измерительной вакуумной технике. Цель изоберетени - повышение точности измерени путем снижени газовыделени в вакуумной системе в процессе измерений. Снижени газовыделени добиваютс проведением предварительной вакуумной температурной тренировки входных элементов вакуумной измерительной системы: входного клапана 8 и входной части молекул рного насоса 3, дл чего перед отбором пробы газа в камеру отбора подключают выход молекул рного насоса 3 к входу форвакуумного насоса 4. 2 ил.This invention relates to vacuum measurement technology. The purpose of the invention is to improve the measurement accuracy by reducing the gas evolution in the vacuum system during the measurement process. The gas emission reduction is achieved by conducting a preliminary vacuum temperature training of the input elements of the vacuum measuring system: the inlet valve 8 and the inlet part of the molecular pump 3;
Description
Фиг. 2FIG. 2
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU894721586A SU1675709A2 (en) | 1989-05-29 | 1989-05-29 | Method of measuring rarefied gas pressure |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU894721586A SU1675709A2 (en) | 1989-05-29 | 1989-05-29 | Method of measuring rarefied gas pressure |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SU1394077A Addition SU296689A1 (en) | BELT CHAIN CONVEYOR |
Publications (1)
Publication Number | Publication Date |
---|---|
SU1675709A2 true SU1675709A2 (en) | 1991-09-07 |
Family
ID=21462175
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SU894721586A SU1675709A2 (en) | 1989-05-29 | 1989-05-29 | Method of measuring rarefied gas pressure |
Country Status (1)
Country | Link |
---|---|
SU (1) | SU1675709A2 (en) |
-
1989
- 1989-05-29 SU SU894721586A patent/SU1675709A2/en active
Non-Patent Citations (1)
Title |
---|
Авторское свидетельство СССР № 1394077, кл. G 01 L21/02, 1985. * |
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