SU1675709A2 - Method of measuring rarefied gas pressure - Google Patents

Method of measuring rarefied gas pressure Download PDF

Info

Publication number
SU1675709A2
SU1675709A2 SU894721586A SU4721586A SU1675709A2 SU 1675709 A2 SU1675709 A2 SU 1675709A2 SU 894721586 A SU894721586 A SU 894721586A SU 4721586 A SU4721586 A SU 4721586A SU 1675709 A2 SU1675709 A2 SU 1675709A2
Authority
SU
USSR - Soviet Union
Prior art keywords
vacuum
measuring
gas pressure
rarefied gas
inlet
Prior art date
Application number
SU894721586A
Other languages
Russian (ru)
Inventor
Вадим Павлович Иванов
Original Assignee
Научно-Исследовательский Институт Прикладной Математики И Кибернетки При Горьковском Государственном Университете Им.Н.И.Лобачевского
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Научно-Исследовательский Институт Прикладной Математики И Кибернетки При Горьковском Государственном Университете Им.Н.И.Лобачевского filed Critical Научно-Исследовательский Институт Прикладной Математики И Кибернетки При Горьковском Государственном Университете Им.Н.И.Лобачевского
Priority to SU894721586A priority Critical patent/SU1675709A2/en
Application granted granted Critical
Publication of SU1675709A2 publication Critical patent/SU1675709A2/en

Links

Abstract

Изобретение относитс  к измерительной вакуумной технике. Цель изоберетени  - повышение точности измерени  путем снижени  газовыделени  в вакуумной системе в процессе измерений. Снижени  газовыделени  добиваютс  проведением предварительной вакуумной температурной тренировки входных элементов вакуумной измерительной системы: входного клапана 8 и входной части молекул рного насоса 3, дл  чего перед отбором пробы газа в камеру отбора подключают выход молекул рного насоса 3 к входу форвакуумного насоса 4. 2 ил.This invention relates to vacuum measurement technology. The purpose of the invention is to improve the measurement accuracy by reducing the gas evolution in the vacuum system during the measurement process. The gas emission reduction is achieved by conducting a preliminary vacuum temperature training of the input elements of the vacuum measuring system: the inlet valve 8 and the inlet part of the molecular pump 3;

Description

Фиг. 2FIG. 2

Claims (1)

Формула изобретенияClaim Способ измерения давления разреженного газа по авт.св. № 1294077, отличаю5The method of measuring the pressure of a rarefied gas by auth. No. 1294077, distinguish5 J щ и й с я тем, что, с целью повышения точности измерений, перед отбором пробы газа в предварительно обезгаженную камеру соединяют выход вакуумного молекулярного насоса с входом форвакуумного насоса и дополнительно обезгаживают входной клапан и входную часть молекулярного насоса.In order to increase the accuracy of measurements, before taking a gas sample into a pre-degassed chamber, the outlet of the vacuum molecular pump is connected to the inlet of the fore-vacuum pump and the inlet valve and inlet of the molecular pump are additionally degassed.
SU894721586A 1989-05-29 1989-05-29 Method of measuring rarefied gas pressure SU1675709A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SU894721586A SU1675709A2 (en) 1989-05-29 1989-05-29 Method of measuring rarefied gas pressure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU894721586A SU1675709A2 (en) 1989-05-29 1989-05-29 Method of measuring rarefied gas pressure

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
SU1394077A Addition SU296689A1 (en) BELT CHAIN CONVEYOR

Publications (1)

Publication Number Publication Date
SU1675709A2 true SU1675709A2 (en) 1991-09-07

Family

ID=21462175

Family Applications (1)

Application Number Title Priority Date Filing Date
SU894721586A SU1675709A2 (en) 1989-05-29 1989-05-29 Method of measuring rarefied gas pressure

Country Status (1)

Country Link
SU (1) SU1675709A2 (en)

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Авторское свидетельство СССР № 1394077, кл. G 01 L21/02, 1985. *

Similar Documents

Publication Publication Date Title
DE3767670D1 (en) DEVICE AND METHOD FOR DETECTING LEAKS BY MEANS OF A PURGE GAS.
GB1047204A (en)
DE3875136D1 (en) FAN PART AND METHOD FOR FUNCTIONAL CHECKING THEREOF.
KR19980702019A (en) Test gas leak detector
SU1675709A2 (en) Method of measuring rarefied gas pressure
GB1505527A (en) Smoke density measuring apparatus
SU836537A1 (en) Method of measuring rarefied gas pressure
FR2366553A1 (en) Enclosure sealing testing system - uses measurement of partial pressure of helium in air extracted from evacuated enclosure
JPS57125336A (en) Measurement of engine suction pressure
JPS56101534A (en) Dehumidifier in gas analyzing device
SU561884A1 (en) Method for measuring gas evacuation rate
SU1328701A1 (en) Method of checking air-tightness of closed articles provided with elastic walls and filled with test gas
JPS6440030A (en) Sphygmonamometric method
JPS567431A (en) Method and apparatus for controlling low pressure of vacuum apparatus
SU724882A1 (en) Method of quality control of burner mixer operation
JPS5679249A (en) Ammonia analyzing method
JPS6066127A (en) Testing apparatus of helium leakage
SU726367A1 (en) Hydraulic motor testing plant
SU1616598A1 (en) Device for measuring blood flow parameters
SU361437A1 (en) DEVICE FOR DETERMINING PARTIAL GAS COMPOSITION IN A VACUUM CHAMBER
SU620662A1 (en) Device for running-in of piston compressors of domestic electric refrigerators
SU569887A1 (en) Pressure gauge
SU1177705A1 (en) Apparatus for dynamic calibration of vacuum gauges
SU728835A1 (en) Apparatus for supplying air into blood-pressure measuring system
JPS56101530A (en) Detecting device of gas leakage