SU1514174A1 - LIQUETAL SOURCE OF IONS - Google Patents

LIQUETAL SOURCE OF IONS

Info

Publication number
SU1514174A1
SU1514174A1 SU4210071/25A SU4210071A SU1514174A1 SU 1514174 A1 SU1514174 A1 SU 1514174A1 SU 4210071/25 A SU4210071/25 A SU 4210071/25A SU 4210071 A SU4210071 A SU 4210071A SU 1514174 A1 SU1514174 A1 SU 1514174A1
Authority
SU
USSR - Soviet Union
Prior art keywords
source
liquetal
ions
extractor
diaphragm
Prior art date
Application number
SU4210071/25A
Other languages
Russian (ru)
Inventor
А.Е. Лежнев
Г.Г. Сихарулидзе
Е.М. Сеняткина
Original Assignee
Институт проблем технологии микроэлектроники и особочистых материалов АН СССР
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Институт проблем технологии микроэлектроники и особочистых материалов АН СССР filed Critical Институт проблем технологии микроэлектроники и особочистых материалов АН СССР
Priority to SU4210071/25A priority Critical patent/SU1514174A1/en
Application granted granted Critical
Publication of SU1514174A1 publication Critical patent/SU1514174A1/en

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  • Water Treatment By Electricity Or Magnetism (AREA)

Abstract

Жидкометаллический источник ионов, содержащий острийный эмиттер, экстрактор в виде диафрагмы с отверстием, соосным эмиттеру, соединенные с источником высокого напряжения, отличающийся тем, что, с целью увеличения ресурса источника, диафрагма экстрактора снабжена со стороны эмиттера осесимметричным кольцевым выступом, заканчивающимся острийной кромкой, при этом длина выступа 3 - 10 мм, а диаметр кромки 3 мм.A liquid metal ion source containing a pointed emitter, an extractor in the form of a diaphragm with a hole coaxial to the emitter, connected to a high voltage source, characterized in that, in order to increase the source resource, the extractor diaphragm is equipped with an axisymmetric annular protrusion ending in a sharp edge, This length of the protrusion is 3–10 mm, and the diameter of the edge is 3 mm.

SU4210071/25A 1987-03-17 1987-03-17 LIQUETAL SOURCE OF IONS SU1514174A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SU4210071/25A SU1514174A1 (en) 1987-03-17 1987-03-17 LIQUETAL SOURCE OF IONS

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU4210071/25A SU1514174A1 (en) 1987-03-17 1987-03-17 LIQUETAL SOURCE OF IONS

Publications (1)

Publication Number Publication Date
SU1514174A1 true SU1514174A1 (en) 2000-02-20

Family

ID=60519675

Family Applications (1)

Application Number Title Priority Date Filing Date
SU4210071/25A SU1514174A1 (en) 1987-03-17 1987-03-17 LIQUETAL SOURCE OF IONS

Country Status (1)

Country Link
SU (1) SU1514174A1 (en)

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