SU1275205A1 - Interferometer for measuring linear displacements of object - Google Patents

Abstract

The invention relates to interference interference measurements. The aim of the invention is to increase sensitivity by eliminating parasitic vibrations leading to misalignment. The radiation from the source 1 by the diagonal edge of the beam splitter 2 is divided into two streams, one of which is directed to the reflective coating of the beam splitter 2, and the other to the reflector 4. The stream, reflected from the reflector 4, hits the reflector 3, reflecting from which, again on the reflector 3, etc. This is sold n times until the radiation falls on the cross section of the reflector 4, reflecting from which the radiation returns along the same path and hits the beam splitter 2, spatially combined with the flux reflected from the reflector digging beamer 2. The photodetector 5 senses the average intensity of the interference field, from which the magnitude of the displacement is determined. 1 il. (L

Description

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about ate

The invention relates to interference measurements of displacements, in particular movements during vibrations.

The purpose of the invention is to increase sensitivity by eliminating parasitic vibrations leading to misalignment.

The drawing shows the scheme of the interferometer.

The interferometer contains a radiation source 1, a beam splitter 2, two trihedral corner reflectors 3 and 4, one of which 4 is mounted for movement in a direction perpendicular to the radiation from source 1, both corner reflectors 3 and 4 are mounted in another stream from a beam splitter 2 diametrically opposite one another, on the reflector 4, a section with a reflective coating parallel to the base is made, the photodetector 5 installed in one of the streams from the beam splitter 2, which is made in the form of a cube-prism for one edge of which From the side opposite to the radiation source 1, a reflective coating was applied.

The interferometer works as follows.

The radiation from the source by the diagonal edge of the beam splitter 2 is divided into two streams, one of which is directed to the reflective coating of the beam splitter 2, and the other to the reflector 4.

The flow, reflected from the reflector 4, falls on the reflector 3, the enemy from which, again falls on the reflector 3

etc. This continues 12 times until the radiation hits the cross section of the reflector 4, reflected from which the radiation returns along the same path and hits the beam splitter 2, spatially combined with the flux reflected from the reflective coating of the beam splitter 2.

The photodetector 5 senses the averaged intensity of the interfering field, from which the magnitude of the displacement is determined.

Claims (1)

Invention Formula An interferometer for measuring the linear displacement of an object, containing a radiation source, a beam splitter, dividing the radiation from the source into two streams, two triangular corner reflectors, one of which is mounted to move in a direction perpendicular to the radiation from the source, and a photodetector mounted in one of the streams from the beam splitter, characterized in that, in order to increase the sensitivity, the beam splitter is made in the form of a cube-prism, on one side of which from the side opposite to the source zlucheni, a reflective coating is applied, both corner reflector mounted on a different thread from the beamsplitter diametrically opposite one another and on installed movably reflector side verschiny formed with a reflective coating section parallel to the base.