SU1038971A1

SU1038971A1 - Device for checking and adjustment of micro circuit film resistors

Info

Publication number: SU1038971A1
Application number: SU823395663A
Authority: SU
Inventors: Вячеслав Васильевич Коробов; Виктор Николаевич Петренко; Владимир Александрович Рождественский
Original assignee: Предприятие П/Я А-1209
Priority date: 1982-02-08
Filing date: 1982-02-08
Publication date: 1983-08-30

Description

Изобретение относится к микроэлектронике и может быть использова!но при изготовлении гибридно-пленочных микросхем на этапе подгонки их резисторов. 5The invention relates to microelectronics and can be used in the manufacture of hybrid-film microcircuits at the stage of fitting their resistors. 5

Известно устройство для подгонки сопротивления пленочных резисторов, содержащее рабочий электрод и электролит [1 ].A device for fitting the resistance of film resistors containing a working electrode and an electrolyte [1].

Недостаток известного устройства состоит в необходимости индивидуальной установки игл-электродов на контактные площадки.A disadvantage of the known device is the need for individual installation of needle electrodes on the contact pads.

Наиболее близкой пЪ технической сущности к изобретению является зон- 15 довая головка для установок контроля и измерения схем, содержащая эластичное прозрачное основание с нанесен· , ными на него пленочными измерительны* ми контактами с микронаконечника- 20 МИ [ 2 ].The closest technical essence to the invention is the probe head for monitoring and measuring systems, containing an elastic transparent base with film measuring contacts applied to it with a micro tip of 20 MI [2].

Недостатком указанного устройства является невозможность осуществле* ния подгонки сопротивления резисторов электролитическим способом непо- 25 средственно в процессе контроля.The disadvantage of this device is the impossibility of * fitting the resistance of the resistors by the electrolytic method directly in the control process.

Цель издбретения - расширение функциональных возможностей контактного устройства путем группового выполнения операций подгонки и конт- зо роля, снижения трудозатрат при совме·; щении устройства с микросхемой и трудоемкости изготовления контактного ¹устройства при его тиражировании, а'.·’ также повышение локальности подгонки резисторов. · ' < 'The purpose of the acquisition is to expand the functionality of the contact device by performing group operations of fitting and controlling the role, reducing labor costs when combined ·; connecting the device with the microcircuit and the complexity of manufacturing the contact ¹ device during its replication, and '. ·' also increasing the locality of fitting resistors. ''<'

Поставленная цель достигается тем, что(устройство для контроля и подгонки пленочных резисторов, содержащее эластичное прозрачное основание с -разчещенными на одной его стороне пле- . ночными измерительными контактами с микронаконечниками, снабжено плоским катодом и размещенным между эластич-. ным прозрачным основанием и плоским катодом желеобразным электролитом, причем в эластичном прозрачном осно-This goal is achieved in that (a device for monitoring and fitting film resistors containing an elastic transparent base with taped measuring contacts with micro tips on one side of it is provided with a flat cathode and placed between the elastic transparent base and flat cathode jelly-like electrolyte, moreover, in an elastic transparent base

Claims

CONTROL DEVICE

AND FITTINGS OF FILM RESISTORS OF MICROSHEMES, containing an elastic transparent base with film measuring contacts with micro tips placed on one side of it, characterized in that, in order to expand its functionality, it is equipped with a flat cathode and a jelly placed between the elastic transparent base and the flat cathode '' shaped electrolyte, and in elas ·; transparent transparent base between the film measuring contacts. with micro-tips, grooves are made in which a jelly-like electrolyte is partially placed.

1 1038971>

In between the film measuring contacts with the micro tips, grooves are made in which a jelly-like electrolyte is partially placed.

The drawing shows a contact device.

The device consists of an elastic transparent base 1 with film measuring contacts 2 applied to it with micro tips 3 and grooves 4.

A jelly-like electrolyte 5 with flat protrusions 6, which are placed in the grooves .4, is located between the elastic transparent base 1 and the cathode 7.

The contact device is used as follows.

The elastic transparent base 1, with its grooves 4, is aligned with the contact pads 8 of the film resistors 9 of the microcircuit 10. A gelled electrolyte 5 is installed in the grooves with flat protrusions 6 and pressed by the cathode 7.

When passing current through the circuit, the micro-tip 3 is a contact pad 8 is a film resistor. 9 * jelly-like electrolyte 5 ~ cathode 7, an oxide film forms on the surface of the film resistor 9 and its resistance increases.

An electrical circuit (not shown) may allow fitting both individually and as a group.

The use of a contact device allows to expand its functionality, increase the performance of fitting and control of film resistors of microcircuits by performing operations by the group method, reduce labor costs for its manufacture during replication, and increase the locality of fitting and control.