SG90717A1 - Semiconductor device testing apparatus - Google Patents

Semiconductor device testing apparatus

Info

Publication number
SG90717A1
SG90717A1 SG200000306A SG200000306A SG90717A1 SG 90717 A1 SG90717 A1 SG 90717A1 SG 200000306 A SG200000306 A SG 200000306A SG 200000306 A SG200000306 A SG 200000306A SG 90717 A1 SG90717 A1 SG 90717A1
Authority
SG
Singapore
Prior art keywords
semiconductor device
testing apparatus
device testing
semiconductor
testing
Prior art date
Application number
SG200000306A
Other languages
English (en)
Inventor
Furuta Katsunobu
Goto Toshio
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP8348365A external-priority patent/JPH10185993A/ja
Priority claimed from JP79297A external-priority patent/JPH10194452A/ja
Application filed by Advantest Corp filed Critical Advantest Corp
Publication of SG90717A1 publication Critical patent/SG90717A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
    • G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2644—Adaptations of individual semiconductor devices to facilitate the testing thereof
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
SG200000306A 1996-12-26 1997-12-23 Semiconductor device testing apparatus SG90717A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP8348365A JPH10185993A (ja) 1996-12-26 1996-12-26 Ｉｃ試験装置
JP79297A JPH10194452A (ja) 1997-01-07 1997-01-07 Ｉｃ試験装置

Publications (1)

Publication Number Publication Date
SG90717A1 true SG90717A1 (en) 2002-08-20

Family

ID=26333873

Family Applications (2)

Application Number Title Priority Date Filing Date
SG1997004635A SG71744A1 (en) 1996-12-26 1997-12-23 Semiconductor device testing apparatus
SG200000306A SG90717A1 (en) 1996-12-26 1997-12-23 Semiconductor device testing apparatus

Family Applications Before (1)

Application Number Title Priority Date Filing Date
SG1997004635A SG71744A1 (en) 1996-12-26 1997-12-23 Semiconductor device testing apparatus

Country Status (5)

Country Link
KR (1) KR19980064676A (de)
CN (1) CN1192042A (de)
DE (1) DE19756900A1 (de)
SG (2) SG71744A1 (de)
TW (1) TW355177B (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100273982B1 (ko) * 1998-03-06 2000-12-15 정문술 테스트소켓내의소자로딩및언로딩장치
US7043959B2 (en) * 2001-06-07 2006-05-16 Advantest Corporation Method for calibrating semiconductor test instrument
EP1574865B1 (de) * 2002-12-04 2007-06-06 Advantest Corporation Presselement und vorrichtung für ein elektronisches bauelement
US20070020066A1 (en) * 2005-07-12 2007-01-25 Lkt Automation Sdn Bhd Centering and orientation apparatus
DE102005057508B4 (de) * 2005-12-01 2011-11-17 Multitest Elektronische Systeme Gmbh Dockingvorrichtung zum Kuppeln einer Handhabungsvorrichtung mit einem Testkopf für elektronische Bauelemente
DE102007047596B4 (de) * 2007-10-05 2013-02-07 Multitest Elektronische Systeme Gmbh Handhabungsvorrichtung für elektronische Bauelemente, insbesondere ICs, mit einer Mehrzahl von auf einer Umlaufbahn geführten Umlaufwagen
CN103779262B (zh) * 2014-02-20 2017-02-01 北京七星华创电子股份有限公司 一种控制晶舟升降运动的原点定位方法
CN107607828A (zh) * 2017-07-31 2018-01-19 芜湖顺成电子有限公司 电线插头飘丝检测装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5172049A (en) * 1990-10-15 1992-12-15 Advantest Corporation IC test equipment
US5198752A (en) * 1987-09-02 1993-03-30 Tokyo Electron Limited Electric probing-test machine having a cooling system
US5227717A (en) * 1991-12-03 1993-07-13 Sym-Tek Systems, Inc. Contact assembly for automatic test handler

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5198752A (en) * 1987-09-02 1993-03-30 Tokyo Electron Limited Electric probing-test machine having a cooling system
US5172049A (en) * 1990-10-15 1992-12-15 Advantest Corporation IC test equipment
US5227717A (en) * 1991-12-03 1993-07-13 Sym-Tek Systems, Inc. Contact assembly for automatic test handler

Also Published As

Publication number Publication date
KR19980064676A (ko) 1998-10-07
DE19756900A1 (de) 1998-07-02
TW355177B (en) 1999-04-01
CN1192042A (zh) 1998-09-02
SG71744A1 (en) 2000-04-18

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