SG71744A1 - Semiconductor device testing apparatus - Google Patents

Semiconductor device testing apparatus

Info

Publication number
SG71744A1
SG71744A1 SG1997004635A SG1997004635A SG71744A1 SG 71744 A1 SG71744 A1 SG 71744A1 SG 1997004635 A SG1997004635 A SG 1997004635A SG 1997004635 A SG1997004635 A SG 1997004635A SG 71744 A1 SG71744 A1 SG 71744A1
Authority
SG
Singapore
Prior art keywords
semiconductor device
testing apparatus
device testing
semiconductor
testing
Prior art date
Application number
SG1997004635A
Inventor
Katsunobu Furuta
Toshio Goto
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP8348365A external-priority patent/JPH10185993A/en
Priority claimed from JP79297A external-priority patent/JPH10194452A/en
Application filed by Advantest Corp filed Critical Advantest Corp
Publication of SG71744A1 publication Critical patent/SG71744A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
    • G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2644—Adaptations of individual semiconductor devices to facilitate the testing thereof
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
SG1997004635A 1996-12-26 1997-12-23 Semiconductor device testing apparatus SG71744A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP8348365A JPH10185993A (en) 1996-12-26 1996-12-26 Ic testing device
JP79297A JPH10194452A (en) 1997-01-07 1997-01-07 Ic test equipment

Publications (1)

Publication Number Publication Date
SG71744A1 true SG71744A1 (en) 2000-04-18

Family

ID=26333873

Family Applications (2)

Application Number Title Priority Date Filing Date
SG1997004635A SG71744A1 (en) 1996-12-26 1997-12-23 Semiconductor device testing apparatus
SG200000306A SG90717A1 (en) 1996-12-26 1997-12-23 Semiconductor device testing apparatus

Family Applications After (1)

Application Number Title Priority Date Filing Date
SG200000306A SG90717A1 (en) 1996-12-26 1997-12-23 Semiconductor device testing apparatus

Country Status (5)

Country Link
KR (1) KR19980064676A (en)
CN (1) CN1192042A (en)
DE (1) DE19756900A1 (en)
SG (2) SG71744A1 (en)
TW (1) TW355177B (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100273982B1 (en) * 1998-03-06 2000-12-15 정문술 Device for loading and unloading semiconductor device in test socket
CN1677123A (en) * 2001-06-07 2005-10-05 株式会社艾德温特斯特 Method for calibrating semiconductor test instrument
DE60220553T2 (en) * 2002-12-04 2008-01-31 Advantest Corp. PRESSING ELEMENT AND DEVICE FOR AN ELECTRONIC COMPONENT
CN100435313C (en) * 2005-07-12 2008-11-19 Lkt自动化配备私人有限公司 Centering and orientation apparatus
DE102005057508B4 (en) * 2005-12-01 2011-11-17 Multitest Elektronische Systeme Gmbh Docking device for coupling a handling device with a test head for electronic components
DE102007047596B4 (en) * 2007-10-05 2013-02-07 Multitest Elektronische Systeme Gmbh Handling device for electronic components, in particular ICs, with a plurality of guided in an orbit circulation car
CN103779262B (en) * 2014-02-20 2017-02-01 北京七星华创电子股份有限公司 Origin positioning method for controlling lifting motion of wafer boat
CN107607828A (en) * 2017-07-31 2018-01-19 芜湖顺成电子有限公司 Wire and plug floats a detection means

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5198752A (en) * 1987-09-02 1993-03-30 Tokyo Electron Limited Electric probing-test machine having a cooling system
JP2544015Y2 (en) * 1990-10-15 1997-08-13 株式会社アドバンテスト IC test equipment
US5227717A (en) * 1991-12-03 1993-07-13 Sym-Tek Systems, Inc. Contact assembly for automatic test handler

Also Published As

Publication number Publication date
DE19756900A1 (en) 1998-07-02
TW355177B (en) 1999-04-01
KR19980064676A (en) 1998-10-07
CN1192042A (en) 1998-09-02
SG90717A1 (en) 2002-08-20

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