SG88770A1 - Fully integrated thermal inkjet printhead having thin layer shelf - Google Patents

Fully integrated thermal inkjet printhead having thin layer shelf

Info

Publication number
SG88770A1
SG88770A1 SG200001375A SG200001375A SG88770A1 SG 88770 A1 SG88770 A1 SG 88770A1 SG 200001375 A SG200001375 A SG 200001375A SG 200001375 A SG200001375 A SG 200001375A SG 88770 A1 SG88770 A1 SG 88770A1
Authority
SG
Singapore
Prior art keywords
thin layer
inkjet printhead
fully integrated
thermal inkjet
integrated thermal
Prior art date
Application number
SG200001375A
Other languages
English (en)
Inventor
A Kawamura Naoto
C Davis Colin
L Weber Timothy
E Trueba Kenneth
Paul Harmon John
R Thomas David
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Publication of SG88770A1 publication Critical patent/SG88770A1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14072—Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14032—Structure of the pressure chamber
    • B41J2/1404—Geometrical characteristics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/1408—Structure dealing with thermal variations, e.g. cooling device, thermal coefficients of materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/1433—Structure of nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14387—Front shooter

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Optics & Photonics (AREA)
  • Thermal Sciences (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
SG200001375A 1999-08-27 2000-03-10 Fully integrated thermal inkjet printhead having thin layer shelf SG88770A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/384,817 US6336714B1 (en) 1996-02-07 1999-08-27 Fully integrated thermal inkjet printhead having thin film layer shelf

Publications (1)

Publication Number Publication Date
SG88770A1 true SG88770A1 (en) 2002-05-21

Family

ID=23518882

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200001375A SG88770A1 (en) 1999-08-27 2000-03-10 Fully integrated thermal inkjet printhead having thin layer shelf

Country Status (7)

Country Link
US (1) US6336714B1 (fr)
EP (1) EP1078753B1 (fr)
JP (1) JP2001071503A (fr)
CN (1) CN1221392C (fr)
DE (1) DE60034742T2 (fr)
SG (1) SG88770A1 (fr)
TW (1) TW521040B (fr)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
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US6554404B2 (en) * 1996-02-07 2003-04-29 Hewlett-Packard Development Company, L.P. Conductor routing for a printhead
US6744796B1 (en) * 2000-03-30 2004-06-01 Triquint Technology Holding Co. Passivated optical device and method of forming the same
US6932453B2 (en) 2001-10-31 2005-08-23 Hewlett-Packard Development Company, L.P. Inkjet printhead assembly having very high drop rate generation
US6543879B1 (en) * 2001-10-31 2003-04-08 Hewlett-Packard Company Inkjet printhead assembly having very high nozzle packing density
US6746107B2 (en) * 2001-10-31 2004-06-08 Hewlett-Packard Development Company, L.P. Inkjet printhead having ink feed channels defined by thin-film structure and orifice layer
US6596644B1 (en) * 2002-01-16 2003-07-22 Xerox Corporation Methods for forming features in polymer layers
KR100499132B1 (ko) 2002-10-24 2005-07-04 삼성전자주식회사 잉크젯 프린트헤드 및 그 제조방법
US20040086872A1 (en) * 2002-10-31 2004-05-06 Childers Winthrop D. Microfluidic system for analysis of nucleic acids
US6885083B2 (en) * 2002-10-31 2005-04-26 Hewlett-Packard Development Company, L.P. Drop generator die processing
US7932098B2 (en) * 2002-10-31 2011-04-26 Hewlett-Packard Development Company, L.P. Microfluidic system utilizing thin-film layers to route fluid
US7036913B2 (en) * 2003-05-27 2006-05-02 Samsung Electronics Co., Ltd. Ink-jet printhead
CN100503248C (zh) * 2004-06-02 2009-06-24 佳能株式会社 头基板、记录头、头盒、记录装置以及信息输入输出方法
US7377625B2 (en) * 2004-06-25 2008-05-27 Canon Kabushiki Kaisha Method for producing ink-jet recording head having filter, ink-jet recording head, substrate for recording head, and ink-jet cartridge
JP4667008B2 (ja) * 2004-11-04 2011-04-06 キヤノン株式会社 インクジェット記録ヘッドの製造方法
JP4693496B2 (ja) * 2005-05-24 2011-06-01 キヤノン株式会社 液体吐出ヘッドおよびその製造方法
TWI276548B (en) * 2006-05-19 2007-03-21 Int United Technology Co Ltd Inkjet printhead
US7857422B2 (en) * 2007-01-25 2010-12-28 Eastman Kodak Company Dual feed liquid drop ejector
US20080259134A1 (en) * 2007-04-20 2008-10-23 Hewlett-Packard Development Company Lp Print head laminate
JP2008290291A (ja) * 2007-05-23 2008-12-04 Fuji Xerox Co Ltd 液滴吐出ヘッド及び画像形成装置
WO2009015406A1 (fr) * 2007-07-30 2009-02-05 Silverbrook Research Pty Ltd Tête d'impression à jet d'encre et polarités d'électrode d'actionneur opposées
US8531952B2 (en) 2009-11-30 2013-09-10 The Hong Kong Polytechnic University Method for measurement of network path capacity with minimum delay difference
JP5814654B2 (ja) * 2010-07-27 2015-11-17 キヤノン株式会社 シリコン基板の加工方法及び液体吐出ヘッドの製造方法
WO2013180715A1 (fr) 2012-05-31 2013-12-05 Hewlett-Packard Development Company, L.P. Têtes d'impression avec pistes conductrices à travers des fentes
US10207500B2 (en) 2015-10-15 2019-02-19 Hewlett-Packard Development Company, L.P. Print head interposers
US11746005B2 (en) * 2021-03-04 2023-09-05 Funai Electric Co. Ltd Deep reactive ion etching process for fluid ejection heads

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EP0244214A1 (fr) * 1986-04-28 1987-11-04 Hewlett-Packard Company Tête d'impression à jet d'encre thermique
US5648806A (en) * 1992-04-02 1997-07-15 Hewlett-Packard Company Stable substrate structure for a wide swath nozzle array in a high resolution inkjet printer

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US4894664A (en) 1986-04-28 1990-01-16 Hewlett-Packard Company Monolithic thermal ink jet printhead with integral nozzle and ink feed
DE3717294C2 (de) 1986-06-10 1995-01-26 Seiko Epson Corp Tintenstrahlaufzeichnungskopf
US4789425A (en) 1987-08-06 1988-12-06 Xerox Corporation Thermal ink jet printhead fabricating process
JPH01190458A (ja) 1988-01-25 1989-07-31 Nec Corp インクジェットヘッド
US4866461A (en) 1988-05-17 1989-09-12 Eastman Kodak Company Thermal, drop-on-demand, ink jet print cartridge
US4864329A (en) 1988-09-22 1989-09-05 Xerox Corporation Fluid handling device with filter and fabrication process therefor
US5016024A (en) 1990-01-09 1991-05-14 Hewlett-Packard Company Integral ink jet print head
US5198834A (en) 1991-04-02 1993-03-30 Hewlett-Packard Company Ink jet print head having two cured photoimaged barrier layers
US5638101A (en) 1992-04-02 1997-06-10 Hewlett-Packard Company High density nozzle array for inkjet printhead
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US5489930A (en) 1993-04-30 1996-02-06 Tektronix, Inc. Ink jet head with internal filter
US5322594A (en) 1993-07-20 1994-06-21 Xerox Corporation Manufacture of a one piece full width ink jet printing bar
US5852459A (en) 1994-10-31 1998-12-22 Hewlett-Packard Company Printer using print cartridge with internal pressure regulator
JP3270674B2 (ja) * 1995-01-17 2002-04-02 株式会社半導体エネルギー研究所 半導体集積回路の作製方法
JPH0924612A (ja) * 1995-07-11 1997-01-28 Canon Inc インクジェットヘッド
US6162589A (en) 1998-03-02 2000-12-19 Hewlett-Packard Company Direct imaging polymer fluid jet orifice
US6113221A (en) 1996-02-07 2000-09-05 Hewlett-Packard Company Method and apparatus for ink chamber evacuation
JPH1044440A (ja) * 1996-07-31 1998-02-17 Canon Inc インクジェットヘッドおよびインクジェットプリント装置
JPH1095119A (ja) * 1996-09-25 1998-04-14 Canon Inc 液体吐出ヘッドおよびその製造方法
DK0841167T3 (da) 1996-11-11 2005-01-24 Canon Kk Fremgangsmåde til fremstilling af gennemgående hul og anvendelse af den nævnte fremgangsmåde til fremstilling af et siliciumsubstrat, der har et gennemgående hul, og en anordning, der anvender et sådant substrat, fremgangsmåde til fremstilling.....
US6322201B1 (en) 1997-10-22 2001-11-27 Hewlett-Packard Company Printhead with a fluid channel therethrough
US6109733A (en) * 1997-11-21 2000-08-29 Xerox Corporation Printhead for thermal ink jet devices
US6154234A (en) 1998-01-09 2000-11-28 Hewlett-Packard Company Monolithic ink jet nozzle formed from an oxide and nitride composition

Patent Citations (2)

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Publication number Priority date Publication date Assignee Title
EP0244214A1 (fr) * 1986-04-28 1987-11-04 Hewlett-Packard Company Tête d'impression à jet d'encre thermique
US5648806A (en) * 1992-04-02 1997-07-15 Hewlett-Packard Company Stable substrate structure for a wide swath nozzle array in a high resolution inkjet printer

Also Published As

Publication number Publication date
CN1221392C (zh) 2005-10-05
EP1078753A3 (fr) 2001-06-13
EP1078753B1 (fr) 2007-05-09
TW521040B (en) 2003-02-21
CN1286167A (zh) 2001-03-07
JP2001071503A (ja) 2001-03-21
EP1078753A2 (fr) 2001-02-28
DE60034742T2 (de) 2008-01-31
US6336714B1 (en) 2002-01-08
DE60034742D1 (de) 2007-06-21

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