SG88740A1 - Fluid control device - Google Patents

Fluid control device

Info

Publication number
SG88740A1
SG88740A1 SG9802719A SG1998002719A SG88740A1 SG 88740 A1 SG88740 A1 SG 88740A1 SG 9802719 A SG9802719 A SG 9802719A SG 1998002719 A SG1998002719 A SG 1998002719A SG 88740 A1 SG88740 A1 SG 88740A1
Authority
SG
Singapore
Prior art keywords
control device
fluid control
fluid
control
Prior art date
Application number
SG9802719A
Other languages
English (en)
Inventor
Tadahiro Ohmi
Yukio Mimami
Akihiro Morimoto
Nobukazu Ikeda
Keiji Hirao
Takashi Hirose
Michio Yamaji
Kazuhiro Yoshikawa
Original Assignee
Fujikin Kk
Tadahiro Ohmi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Kk, Tadahiro Ohmi filed Critical Fujikin Kk
Publication of SG88740A1 publication Critical patent/SG88740A1/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/10—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit
    • F16K11/20—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit operated by separate actuating members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87571—Multiple inlet with single outlet
    • Y10T137/87676—With flow control
    • Y10T137/87684—Valve in each inlet

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Valve Housings (AREA)
  • Pipeline Systems (AREA)
SG9802719A 1997-08-05 1998-07-28 Fluid control device SG88740A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21025497A JP4235759B2 (ja) 1997-08-05 1997-08-05 流体制御装置

Publications (1)

Publication Number Publication Date
SG88740A1 true SG88740A1 (en) 2002-05-21

Family

ID=16586346

Family Applications (1)

Application Number Title Priority Date Filing Date
SG9802719A SG88740A1 (en) 1997-08-05 1998-07-28 Fluid control device

Country Status (9)

Country Link
US (2) US6408879B1 (ja)
EP (1) EP0896177B1 (ja)
JP (1) JP4235759B2 (ja)
KR (1) KR19990023326A (ja)
CA (1) CA2244565A1 (ja)
DE (1) DE69814758T2 (ja)
IL (1) IL125437A (ja)
SG (1) SG88740A1 (ja)
TW (1) TW517140B (ja)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1543544A2 (en) * 2002-08-27 2005-06-22 Celerity Group, Inc. Modular substrate gas panel having manifold connections in a common plane
US20080302426A1 (en) * 2007-06-06 2008-12-11 Greg Patrick Mulligan System and method of securing removable components for distribution of fluids
US7784496B2 (en) * 2007-06-11 2010-08-31 Lam Research Corporation Triple valve inlet assembly
US8307854B1 (en) 2009-05-14 2012-11-13 Vistadeltek, Inc. Fluid delivery substrates for building removable standard fluid delivery sticks
SG176152A1 (en) * 2009-06-10 2011-12-29 Vistadeltek Llc Extreme flow rate and/or high temperature fluid delivery substrates
US8505577B2 (en) * 2010-11-30 2013-08-13 The United States Of America As Represented By The Secretary Of The Army Pnumatically actuated bi-propellant valve (PABV) system for a throttling vortex engine
US8950433B2 (en) 2011-05-02 2015-02-10 Advantage Group International Inc. Manifold system for gas and fluid delivery
WO2016114266A1 (ja) * 2015-01-16 2016-07-21 株式会社キッツエスシーティー ブロック弁と原料容器用ブロック弁
US10654216B2 (en) * 2016-03-30 2020-05-19 Canon Kabushiki Kaisha System and methods for nanoimprint lithography
WO2020066732A1 (ja) * 2018-09-25 2020-04-02 株式会社フジキン 濃度測定装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0429411B1 (en) * 1989-11-14 1994-11-02 Cryolab, Inc. Teed valve
EP0751301A2 (en) * 1995-06-30 1997-01-02 Tadahiro Ohmi Fluid control apparatus
EP0806573A2 (en) * 1996-05-10 1997-11-12 Tadahiro Ohmi Fluid control device
EP0816731A2 (en) * 1996-06-25 1998-01-07 Tadahiro Ohmi Manifold valve
WO1998002684A1 (en) * 1996-07-16 1998-01-22 Controls Corporation Of America Gas flow control device for high purity, highly corrosive gas service

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US462966A (en) * 1891-11-10 Automatic governor for air-brakes
US643117A (en) * 1899-05-03 1900-02-13 Vivian Phillips Safety and alarm attachment for tanks.
US1525393A (en) * 1922-09-19 1925-02-03 John A Jernatowski Faucet
US3797524A (en) 1972-06-15 1974-03-19 Reedmer Plastics Inc Fluid metering device
DE2648751C2 (de) * 1976-10-27 1986-04-30 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V., 3400 Göttingen Vorrichtung für die Zuführung flüssiger oder gasförmiger Substanzen zu einem Verarbeitungsgefäß
US4558845A (en) 1982-09-22 1985-12-17 Hunkapiller Michael W Zero dead volume valve
DE3622527C1 (de) 1986-07-04 1987-05-07 Draegerwerk Ag Ventil fuer Gasbehaelter
JPS6362976A (ja) * 1986-08-29 1988-03-19 Daiwa Handotai Sochi Kk 半導体プロセス用一方掃気形バルブ装置
US4741354A (en) 1987-04-06 1988-05-03 Spire Corporation Radial gas manifold
US4738693A (en) 1987-04-27 1988-04-19 Advanced Technology Materials, Inc. Valve block and container for semiconductor source reagent dispensing and/or purification
DE3811041A1 (de) * 1988-03-31 1989-10-19 Merck Patent Gmbh Entnahmeventilkopf fuer behaelter
US5137047A (en) 1990-08-24 1992-08-11 Mark George Delivery of reactive gas from gas pad to process tool
US5476118A (en) 1991-02-22 1995-12-19 Asahi Yukizai Kogyo Co., Ltd. Non-stagnant piping system
US5183072A (en) * 1991-10-21 1993-02-02 Matheson Gas Products, Inc. Automatic switchover valve
US5368062A (en) 1992-01-29 1994-11-29 Kabushiki Kaisha Toshiba Gas supplying system and gas supplying apparatus
EP0619450A1 (en) * 1993-04-09 1994-10-12 The Boc Group, Inc. Zero Dead-Leg Gas Cabinet
JP3387630B2 (ja) * 1994-06-16 2003-03-17 株式会社フジキン ブロック弁

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0429411B1 (en) * 1989-11-14 1994-11-02 Cryolab, Inc. Teed valve
EP0751301A2 (en) * 1995-06-30 1997-01-02 Tadahiro Ohmi Fluid control apparatus
EP0806573A2 (en) * 1996-05-10 1997-11-12 Tadahiro Ohmi Fluid control device
EP0816731A2 (en) * 1996-06-25 1998-01-07 Tadahiro Ohmi Manifold valve
WO1998002684A1 (en) * 1996-07-16 1998-01-22 Controls Corporation Of America Gas flow control device for high purity, highly corrosive gas service

Also Published As

Publication number Publication date
DE69814758T2 (de) 2004-04-22
JPH1151298A (ja) 1999-02-26
TW517140B (en) 2003-01-11
DE69814758D1 (de) 2003-06-26
IL125437A0 (en) 1999-03-12
JP4235759B2 (ja) 2009-03-11
KR19990023326A (ko) 1999-03-25
US6408879B1 (en) 2002-06-25
US20020124894A1 (en) 2002-09-12
EP0896177A1 (en) 1999-02-10
CA2244565A1 (en) 1999-02-05
IL125437A (en) 2000-10-31
EP0896177B1 (en) 2003-05-21

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